Non-contact grating positioning measurement platform

Abstract

The utility model relates to the technical field of grating detection devices, in particular to a non-contact grating positioning and measuring platform, which mainly comprises an axial distance measuring probe, a radial distance measuring probe, a multi-dimensional displacement adjusting table, an air floating rotary table and a control system. In the process that the air floating rotary table drives the grating to rotate, the axial distance measuring probe and the radial distance measuring probe periodically measure the distance between the axial distance measuring probe and the grating, and the control system generates an end jump error curve and an eccentric error curve according to measured data and controls the multi-dimensional displacement adjusting table in a closed-loop mode according to the end jump error curve and the eccentric error curve. And adjusting the levelness of the upper surface of the to-be-processed grating and the overlap ratio of the circle center of the to-be-processed grating and the rotation center. According to the utility model, the non-contact measurement in the grating processing process is realized, the problem that the grating is damaged by the traditional contact measurement is avoided, and the device has extremely high application value in the actual processing process.

Description

Technical Field

[0001] This utility model belongs to the technical field of grating detection devices, and in particular relates to a non-contact grating positioning and measurement platform. Background Technology

[0002] An optical encoder is a high-precision angular displacement detection device, mainly composed of an encoder reading head and an optical grating. The grating is a metal ring machined from 304 stainless steel or a flat, plated glass ring. The grating line coding pattern of the metal grating is engraved on the outer cylindrical surface of the grating mirror, while the grating line coding pattern of the glass code disk is engraved on the end face of the grating. As the accuracy reference of the encoder, the grating has high requirements for roundness and center positioning before grating line engraving. Traditional roundness measurement and eccentricity positioning methods often use contact measurement, such as roundness meters, coordinate measuring machines, inductively coupled rangefinders, and lever-type dial indicators. However, the hardness of 304 stainless steel and the reflective coating of the glass code disk is relatively low, and the above-mentioned contact measurement methods will cause irreversible surface damage. This affects the integrity of the product's appearance and also impacts user installation and use.

[0003] Therefore, there is an urgent need for a non-contact grating positioning and measurement solution to avoid scratching the grating with contact measuring tools. Utility Model Content

[0004] In view of this, the present invention aims to provide a non-contact grating positioning and measurement platform, which obtains the end jump error and eccentricity error of the grating through non-contact nanoscale axial ranging probe and radial ranging probe, and adjusts the multi-dimensional displacement adjustment stage carrying the grating accordingly, eliminating the problems of eccentricity and uneven upper surface caused by the placement of the grating, and avoiding the problem of scratching the grating surface by contact measuring tools during the traditional grating adjustment process.

[0005] To achieve the above objectives, the technical solution created by this utility model is implemented as follows:

[0006] This invention provides a non-contact optical grating positioning and measurement platform, including: an axial ranging probe, a radial ranging probe, a multi-dimensional displacement adjustment stage, an air-bearing turntable, and a control system;

[0007] The multi-dimensional displacement adjustment stage is used to support and adjust the grating to be processed, and it is located on the air-bearing turntable; the air-bearing turntable is used to drive the multi-dimensional displacement adjustment stage and the grating to be processed to rotate.

[0008] The axial ranging probe is positioned above the multidimensional displacement adjustment stage, and the ranging direction of the axial ranging probe is vertical. The axial ranging probe is used to periodically measure the vertical distance between itself and the grating to be processed.

[0009] The radial distance measuring probe is arranged in the circumferential direction of the multi-dimensional displacement adjusting table, and the distance measuring direction of the radial distance measuring probe is horizontal.

[0010] The control system is used for recording the vertical distance and the horizontal distance, and generating an end jump error curve and an eccentric error curve, and the multi-dimensional displacement adjusting table is adjusted according to the end jump error curve, so that the horizontal degree of the upper surface of the grating to be processed meets the preset requirement, and the horizontal position of the grating to be processed is adjusted according to the eccentric error curve, so that the coincidence degree of the center of the grating to be processed and the rotation center meets the preset requirement.

[0011] Preferably, the axial distance measuring probe and the radial distance measuring probe are both nanometer non-contact distance measuring probes.

[0012] Preferably, the axial distance measuring probe and the radial distance measuring probe are both fixed by magnetic universal arms.

[0013] Preferably, the control system is data visualization host computer software.

[0014] Preferably, the multi-dimensional displacement adjusting table is an automatic displacement table or a manual displacement table.

[0015] Preferably, the horizontal coordinate of the end jump error curve is the absolute angle of the air floating turntable, and the vertical coordinate of the end jump error curve is the difference between the vertical distance measured by the axial distance measuring probe and the preset vertical standard distance; the horizontal coordinate of the eccentric error curve is the absolute angle of the air floating turntable, and the vertical coordinate of the eccentric error curve is the difference between the horizontal distance measured by the radial distance measuring probe and the preset horizontal standard distance.

[0016] Compared with the prior art, the utility model can achieve the following beneficial effects:

[0017] The utility model discloses a non-contact grating positioning measurement scheme, which is measured by a non-contact high-precision distance measuring probe, avoids physical damage to the grating surface, protects the appearance and precision of the grating, and can correct the end jump error and eccentric error of the grating according to the measurement data, realizes high-precision positioning of the grating, and improves the precision of the subsequent processing process.

[0018] The control system of the utility model is integrated in the host computer software, and through the special host computer software, the digital recording and management of data can be realized, data integration and subsequent process improvement are facilitated, and the host computer software provides an intuitive user interface, including an error curve interface, angle position information, extreme angle position and error size information, etc., which facilitates data analysis and adjustment of the user.

[0019] The measurement platform can further fit the side surface pattern of the grating, calculate the roundness of the grating, and record the intrinsic roundness, the runout value of the grating, and information such as the product ID, the production date, the shift, and the batch, so that the traceability of the product is realized, quality tracking and after-sales service are facilitated, and the measurement platform has been verified by actual tests and has extremely high practical value. BRIEF DESCRIPTION OF DRAWINGS

[0020] The drawings constituting a part of the present application provide a further understanding of the present application, and the illustrative embodiments of the present application and the description thereof are used to explain the present application, and do not constitute an improper limitation on the present application. In the drawings:

[0021] Figure 1 is a structure diagram of a non-contact grating positioning measurement platform according to an embodiment of the present application;

[0022] Figure 2 is an eccentric error curve diagram according to an embodiment of the present application;

[0023] Figure 3 is a definable editing data management interface diagram of the upper computer software according to an embodiment of the present application.

[0024] The reference signs in the drawings include:

[0025] The radial distance measuring probe 1, the axial distance measuring probe 2, the grating to be processed 3, the multi-dimensional displacement adjusting table 4, and the air floating turntable 5. DETAILED DESCRIPTION

[0026] In order to make the purpose, the technical scheme and the advantages of the present application clearer and more understandable, the present application will be further described in detail below with reference to the drawings and specific embodiments. It should be understood that the specific embodiments described herein are only used to explain the present application, and do not constitute a limitation on the present application. Similar elements in different embodiments use associated similar element reference signs. In the following embodiments, many details are described in order to make the present application better understood. However, those skilled in the art can easily recognize that some features can be omitted in different cases, or can be replaced by other elements, materials, or methods. In some cases, some operations related to the present application are not shown or described in the specification in order to avoid the core part of the present application being overwhelmed by too much description, and it is not necessary for those skilled in the art to describe these related operations in detail according to the description in the specification and the general technical knowledge in the art.

[0027] It should be noted that the embodiments in the utility model and the features in the embodiments can be combined with each other to form various implementation manners without conflict. Meanwhile, the steps or actions in the method description can also be sequentially replaced or adjusted in a manner that is obvious to those skilled in the art. Therefore, the various sequences in the description and the drawings are only for the purpose of clearly describing a certain embodiment, and do not mean a necessary sequence, unless a certain sequence is specified to be followed.

[0028] In the description of the utility model, it should be understood that the orientation or positional relationship indicated by the terms "center", "longitudinal", "transverse", "length", "width", "thickness", "upper", "lower", "front", "rear", "left", "right", "vertical", "horizontal", "top", "bottom", "inner", "outer", "clockwise", "counterclockwise" and the like is based on the orientation or positional relationship shown in the drawings, and is only for the purpose of facilitating the description of the utility model and simplifying the description, and does not indicate or imply that the device or element indicated must have a particular orientation, be constructed and operated in a particular orientation, and therefore cannot be understood as a limitation on the utility model. In addition, the terms "first", "second" and the like are only for the purpose of description, and cannot be understood as indicating or implying relative importance or implicitly indicating the number of the technical features indicated. Therefore, the features limited by "first", "second" and the like can explicitly or implicitly include one or more features. In the description of the utility model, unless otherwise specified, the meaning of "multiple" is two or more.

[0029] In the description of the utility model, it should be noted that, unless otherwise specified and limited, the terms "mounting", "connection", "connection" should be understood broadly, for example, it can be fixedly connected, or it can be detachably connected, or integrally connected; it can be mechanically connected, or it can be electrically connected; it can be directly connected, or it can be indirectly connected through an intermediate medium, or it can be the communication between two elements. For those skilled in the art, the specific meaning of the above terms in the utility model can be understood according to the specific circumstances.

[0030] The utility model will be described in detail below with reference to the drawings and in combination with the embodiments.

[0031] Please refer to Figure 1In an embodiment of the present application, a non-contact grating positioning and measuring platform is provided for high-precision positioning of a grating to be processed, so that the levelness and concentricity of the upper surface of the grating to be processed meet the preset requirements, ensuring the subsequent processing accuracy. It can be understood that the grating to be processed 3 is a grating blank after initial processing, usually in the form of a disc, ring or cylinder, and is made of common encoder grating manufacturing materials such as metal or glass. The grating to be processed 3 itself has high roundness and surface flatness, and the main purpose of the detection process is to ensure that the upper surface of the grating to be processed 3 has high levelness relative to the horizontal plane, and to solve the problem of large end jump of the upper surface of the grating to be processed 3 during rotation caused by the placement angle of the grating to be processed 3 placed on the multi-dimensional displacement adjustment table 4. In addition, concentricity refers to the physical center (i.e. the center of the upper surface) of the grating to be processed 3 coinciding with the rotation center, avoiding the occurrence of scribing errors during processing. In the traditional grating processing and measuring process, devices such as roundness gauges, three-coordinate, inductance distance meters and lever-type micrometers are used to measure the placement error of the grating to be processed 3 on the processing table. Since the contact parts (such as probes and measuring heads) of the measuring equipment directly contact the surface of the grating to be processed 3, they may cause physical damage to the surface of the grating to be processed 3 during rotation. In particular, for the grating to be processed 3 made of 304 stainless steel and glass, the hardness of the reflective coating of these materials is relatively low, and they are more susceptible to damage from contact-type measuring equipment, resulting in surface damage. This damage not only affects the appearance integrity of the grating, but also may affect its accuracy and performance, thereby affecting the processing quality and reliability of the final product. Therefore, these traditional contact-type measuring schemes gradually show their limitations in the field of modern precision processing, especially in the processing of high-precision gratings. Therefore, the embodiment of the present application designs a non-contact type measuring device Figure 1The non-contact grating positioning measurement platform is shown, and a corresponding measurement and correction method is designed, and the platform structure comprises a radial distance measuring probe 1, an axial distance measuring probe 2, a multi-dimensional displacement adjustment table 4, an air floating turntable 5 and a control system, wherein the radial distance measuring probe 1 and the axial distance measuring probe 2 are data measurement devices, since the measurement requirement of a general high-precision grating is micron level, the radial distance measuring probe 1 and the axial distance measuring probe 2 of the utility model all adopt high-precision nanometer non-contact laser distance measuring probes, so that the measurement precision can meet the processing requirement, and are respectively connected and spatially positioned through magnetic suction universal arms. Specifically, the radial distance measuring probe 1 and the axial distance measuring probe 2 are each provided with a corresponding magnetic suction universal arm, the two magnetic suction universal arms are the same in structure and each comprise a mechanical arm with multiple degrees of freedom and a magnetic suction base. And the magnetic suction universal arms are connected to the radial distance measuring probe 1 and the axial distance measuring probe 2 in the same way, and only the connection mode of the radial distance measuring probe 1 is taken as an example for description below, one end of the mechanical arm is connected to the radial distance measuring probe 1, and the other end is connected to the magnetic suction base, and the radial distance measuring probe 1 can be fixed on a processing station through the magnetic suction base. Similarly, the axial distance measuring probe 2 is also fixed on a processing station through a magnetic suction universal arm. After the radial distance measuring probe 1 and the axial distance measuring probe 2 are fixed, the distance measuring direction needs to be adjusted for subsequent error measurement. Under normal circumstances, the distance measuring direction of the radial distance measuring probe 1 can be adjusted to be horizontal by using a theodolite or the like, and the side surface of the grating 3 to be processed placed on the multi-dimensional displacement adjustment table 4 is aligned. The distance measuring direction of the axial distance measuring probe 2 is adjusted to be vertical, and the upper surface of the grating 3 to be processed placed on the multi-dimensional displacement adjustment table 4 is aligned, and the distance measuring point is located as close to the edge position of the upper surface of the grating 3 to be processed as possible, so that the axial distance measuring probe 2 can more sensitively acquire the end face runout of the grating 3 to be processed.

[0032] The multi-dimensional displacement adjustment table 4 is a support and position adjustment platform for the grating 3 to be processed, and can realize multi-dimensional movement and adjustment of the pitch angle. In the measurement platform of the utility model, the multi-dimensional displacement adjustment table 4 can adopt an automatic displacement table or a manual displacement table, and the difference between the two lies in the subsequent correction process. The main measurement target in the measurement process is the position precision of the grating 3 to be processed placed on the multi-dimensional displacement adjustment table 4, that is, the levelness of the upper surface of the grating 3 to be processed relative to the horizontal plane, and the eccentricity (or concentricity) of the physical center of the grating 3 to be processed relative to the rotation center. According to the measured levelness and eccentricity data, the position of the grating 3 to be processed is corrected to ensure that it can meet the processing requirement. When the position precision adjustment is completed, the flatness and roundness data of the grating 3 to be processed can be measured again.

[0033] The grating to be processed 3 is placed on the multi-dimensional displacement adjustment table 4, the multi-dimensional displacement adjustment table 4 is installed in the rotation center area of the air floating rotary table 5, and the air floating rotary table 5 is a high-precision rotary platform working on the basis of the gas static pressure support principle. The air floating rotary table 5 realizes frictionless and high-precision rotary motion by using gas film pressure support rotation, and can stably rotate the grating to be processed 3 and the multi-dimensional displacement adjustment table 4, so as to facilitate subsequent omnidirectional measurement.

[0034] The control system is used for whole machine control and data processing, is composed of special host computer software, is in electrical communication with the radial distance measuring probe 1, the axial distance measuring probe 2, the multi-dimensional displacement adjustment table 4 and the air floating rotary table 5 through a communication interface, and forms a closed loop. In the measurement process, the air floating rotary table 5 drives the grating to be processed 3 and the multi-dimensional displacement adjustment table 4 to rotate at a constant speed, and the control system controls the radial distance measuring probe 1 and the axial distance measuring probe 2 to emit light and measure distance. In the rotating process of the air floating rotary table 5, the host computer software sends a fixed frequency pulse signal, according to the sampling density set by the host computer software, the radial distance measuring probe 1 and the axial distance measuring probe 2 record the current relative distance of the grating to be processed 3 once after receiving a fixed number of pulse signals, that is, the horizontal distance and the vertical distance, and record the absolute angle of the air floating rotary table 5 at the same time. After the air floating rotary table 5 rotates one round, the complete eccentric error curve and the end jump error curve can be obtained according to the horizontal distance and the vertical distance collected.

[0035] The horizontal coordinate of the eccentric error curve is the absolute angle of the air floating rotary table 5, and the vertical coordinate of the eccentric error curve is the difference between the horizontal distance measured by the radial distance measuring probe 1 and the preset horizontal standard distance. The horizontal coordinate of the end jump error curve is the absolute angle of the air floating rotary table 5, and the vertical coordinate of the end jump error curve is the difference between the vertical distance measured by the axial distance measuring probe 2 and the preset vertical standard distance.

[0036] The eccentric error curve and the end jump error curve are both approximately sinusoidal curves. It can be understood that, when the processing error of the grating to be processed 3 itself, that is, the surface flatness, is not considered, the eccentric error curve and the end jump error curve should theoretically be sinusoidal curves or error-free straight lines. According to the eccentric error curve and the end jump error curve collected, the multi-dimensional displacement adjustment table 4 can be controlled to correct the grating to be processed 3 at different angles, so that the horizontal degree of the upper surface of the grating to be processed 3 meets the preset requirements, and the coincidence degree of the center of the grating to be processed 3 and the rotation center meets the preset requirements. Finally, the adjustment result is checked, and the eccentricity and the end jump are corrected.

[0037] Based on the above platform structure, the utility model embodiment further provides a method for non-contact grating positioning measurement by using the same, and adjusts the grating position according to the measurement result, and specifically includes the following steps:

[0038] The air-bearing turntable 5 is controlled to rotate at a constant speed. Simultaneously, the radial ranging probe 1 and the axial ranging probe 2 are controlled to emit light for ranging at a preset frequency. The acquired vertical and horizontal distance data are fed back to the host computer software, which calculates the output jump error curve and eccentricity error curve based on the measured data. Figure 2 As shown, this is the eccentricity error curve obtained during the actual test. The horizontal axis represents the absolute angle of the air-bearing turntable 5, in degrees; the vertical axis represents the difference between the horizontal distance measured by the radial ranging probe 1 and the preset horizontal standard distance, in micrometers. Similarly, the horizontal axis of the end jump error curve represents the absolute angle of the air-bearing turntable 5, in degrees; the vertical axis represents the difference between the vertical distance measured by the axial ranging probe 2 and the preset vertical standard distance, in micrometers.

[0039] After obtaining the end jump error curve and the eccentricity error curve, the levelness of the upper surface of the grating 3 to be processed, as well as the coincidence of the center of the grating 4 with the rotation center, are corrected by adjusting the pitch angle and position of the multi-dimensional displacement adjustment stage 4. Specifically, when the multi-dimensional displacement adjustment stage 4 is an automatic displacement stage, the tilt angle of the multi-dimensional displacement adjustment stage 4 can be automatically adjusted according to the end jump error curve to achieve the preset levelness of the upper surface. It can be understood that if the multi-dimensional displacement adjustment stage 4 has automatic adjustment capability, the control system can control the multi-dimensional displacement adjustment stage 4 to adjust the pitch angle at the angle position of the largest end jump error, i.e., the highest peak or the lowest trough of the curve, by adjusting the maximum error amount at once, and the levelness can be automatically corrected in one operation. Similarly, according to the eccentricity error curve, the control system can control the multi-dimensional displacement adjustment stage 4 to move horizontally at the angle position of the largest eccentricity error, and the amount of movement is the maximum eccentricity error, which can also complete the automatic correction of concentricity in one operation.

[0040] When the multidimensional displacement adjustment stage 4 is a manual displacement stage, it requires manual calibration by technicians. Since manual calibration cannot achieve accurate adjustment in a single step, multiple iterative adjustments are necessary to ensure that the radial ranging probe 1 and the axial ranging probe 2 converge, i.e., both change to a straight line approaching y=0. The manual adjustment process is as follows:

[0041] First, the ratio of the ordinates of two adjacent peaks on the end jump error curve is selected as the adjustment value to adjust the pitch angle of the multidimensional displacement adjustment platform 4. The two selected peaks preferably include the one with the largest ordinate.

[0042] After the first adjustment, the end-jump error curve is remeasured, and then adjusted again based on the ratio of the ordinates of two adjacent peaks on the new end-jump error curve. This process is repeated until the end-jump error curve converges and the levelness of the upper surface of the grating 3 meets the preset requirements.

[0043] The correction process of the eccentricity error is basically the same as the correction process of the end jump error, specifically, the ratio of the ordinate of two adjacent peaks on the eccentricity error curve is selected as the adjustment value, the horizontal position of the multi-dimensional displacement adjustment table 4 is manually changed, and then the horizontal position of the to-be-processed grating 3 is adjusted; similarly, then the eccentricity error curve is re-measured, and the horizontal position of the multi-dimensional displacement adjustment table 4 is adjusted according to the ratio of the ordinate of two adjacent peaks on the new eccentricity error curve, and then the horizontal position of the to-be-processed grating 3 is adjusted. This process also needs to be repeated until the eccentricity error curve converges and the coincidence degree of the center of the to-be-processed grating 3 and the rotation center reaches the preset requirement.

[0044] At this point, the position error measurement and correction of the to-be-processed grating 3 are completed. The to-be-processed grating 3 can be measured again by the radial distance measuring probe 1 and the axial distance measuring probe 2 to obtain the end jump error curve and the eccentricity error curve after error correction, and the small range of irregular fluctuations on the end jump error curve can be considered as the machining error on the upper surface of the to-be-processed grating 3, and the data can be recorded. The small range of irregular fluctuations on the eccentricity error curve can be considered as the machining error on the side surface of the to-be-processed grating 3. The horizontal cross-sectional shape of the to-be-processed grating 3 can be fitted by the eccentricity error curve, and the roundness of the to-be-processed grating can be calculated. Similarly, the data can also be recorded.

[0045] In the embodiment of the utility model, the measured end jump error curve and eccentricity error curve can be saved in the database of the upper computer software, and the single result can be defined and reserved, such as Figure 3 As shown in the figure, it is the definable and editable data management interface of the upper computer software. Finally, the jump error curve and the eccentricity error curve measured after the position error correction reflect the machining error on the upper surface of the processed grating 3, the fitting graph, the roundness data, etc., which can be used as the outgoing information of each product and the user's large model database, and can be used as the basis for subsequent mechanical finishing, realize the data of machining process and quality management, and also facilitate the later maintenance.

[0046] In short, the above only describes the preferred embodiment of the present application, and is not used to limit the protection scope of the present application. Any modification, equivalent replacement, improvement, etc. made within the spirit and principle of the present application shall be included in the protection scope of the present application.

[0047] The systems, apparatuses, modules, or units illustrated in the above one or more embodiments, specifically can be implemented by a computer chip or entity, or by a product with certain functions. A typical implementation device is a computer. Specifically, the computer can be, for example, a personal computer, a laptop computer, a cellular phone, a camera phone, a smartphone, a personal digital assistant, a media player, a navigation device, an email device, a game console, a tablet computer, a wearable device, or a combination of any of these devices.

[0048] It should also be noted that the terms "comprising", "containing", or any other variant thereof are intended to cover a non-exclusive inclusion, such that a process, method, article, or apparatus that comprises a list of elements does not include only those elements in the list, but can also include other elements not expressly listed or inherent to such process, method, article, or apparatus. Without further limitation, an element defined by the statement "comprising a" does not exclude the presence of additional identical elements in the process, method, article, or apparatus that includes the element.

[0049] Each of the embodiments in the specification is described in a progressive manner, and the same or similar parts between the embodiments can be referred to each other. Each embodiment focuses on the difference from other embodiments. In particular, for the system embodiments, since they are basically similar to the method embodiments, the description is relatively simple, and the relevant parts can be referred to the part of the method embodiments.

[0050] The above describes specific embodiments of the specification. Other embodiments are within the scope of the appended claims. In some cases, the actions or steps recited in the claims can be performed in an order different than the order in the embodiments and still achieve the desired result. In addition, the processes depicted in the figures do not necessarily require the particular order shown or sequential order to achieve the desired results. In certain implementations, multitasking and parallel processing can be advantageous or possible.

Claims

1. A non-contact grating positioning and measurement platform, characterized in that, include: Axial ranging probe, radial ranging probe, multi-dimensional displacement adjustment platform, air-bearing turntable and control system; The multidimensional displacement adjustment stage is used to support and adjust the grating to be processed, and it is mounted on the air-bearing turntable; the air-bearing turntable is used to drive the multidimensional displacement adjustment stage and the grating to be processed to rotate. The axial ranging probe is positioned above the multidimensional displacement adjustment platform, and the ranging direction of the axial ranging probe is vertical. The axial ranging probe is used to periodically measure its vertical distance from the grating to be processed. The radial ranging probe is located around the circumference of the multidimensional displacement adjustment stage, and the ranging direction of the radial ranging probe is horizontal. The radial ranging probe is used to periodically measure the horizontal distance between itself and the grating to be processed. The control system is used to record vertical and horizontal distances and generate end jump error curves and eccentricity error curves.

2. The non-contact grating positioning and measurement platform as described in claim 1, characterized in that, Both the axial ranging probe and the radial ranging probe are nanoscale non-contact ranging probes.

3. The non-contact grating positioning and measurement platform as described in claim 1, characterized in that, Both the axial ranging probe and the radial ranging probe are fixed using magnetic universal arms.

4. The non-contact grating positioning and measurement platform as described in claim 1, characterized in that, The control system is a data visualization host computer software.

5. The non-contact grating positioning and measurement platform as described in claim 1, characterized in that, The multidimensional displacement adjustment stage can be an automatic displacement stage or a manual displacement stage.

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