High-speed high-precision morphology measuring mechanism

Abstract

The utility model relates to a high-speed high-precision morphology measuring mechanism, which comprises a workbench. The workbench is provided with a carrier assembly used for placing a detected object, a supporting frame, an industrial display screen used for projecting a plurality of lines on the detected object at a time, a camera assembly used for shooting and detecting the detected object and an expanding assembly used for expanding the carrier assembly, and the industrial display screen and the camera assembly are installed on the supporting frame. The camera assembly is located on one side of the industrial display screen. The measuring mechanism not only realizes high-precision and high-speed measurement, but also does not need relative movement, and is high in universality.

Description

TECHNICAL FIELD

[0001] The utility model relates to measurement technical field especially relates to a high -speed high -precision topography measuring mechanism. BACKGROUND

[0002] In the industrial environment, there is a general demand for obtaining the surface topography data of the object. The mainstream way adopted in the prior art is to use line light to project on the surface of the measured object for triangulation, which requires relative motion of the object and the line light. However, under the requirement of high-precision measurement at the micron and sub-micron level, the error of relative motion can easily lead to distortion of the measurement data. In order to eliminate the error, a shock isolation mechanism is needed, so this measurement method is difficult to be widely popularized. SUMMARY

[0003] The technical problem to be solved by the utility model is to provide a high-speed high-precision topography measuring mechanism, which realizes high-precision and high-speed measurement without relative motion and has strong versatility.

[0004] The technical solution adopted by the utility model to solve the technical problem is: a high-speed high-precision topography measuring mechanism, comprising a workbench, a carrier assembly for placing the measured object, a support frame, an industrial display screen for projecting multiple lines on the measured object at one time, a camera assembly for shooting and detecting the measured object, and an expansion assembly for expanding the carrier assembly, the industrial display screen and the camera assembly are installed on the support frame, and the camera assembly is located on one side of the industrial display screen.

[0005] In one embodiment, the carrier assembly of the high-speed high-precision topography measuring mechanism comprises a first driving mechanism and a carrier table for placing the measured object, the first driving mechanism is installed on the workbench, the driving end of the first driving mechanism is connected with the carrier table, the carrier table is in sliding fit with the workbench, and the first driving mechanism is used to drive the carrier table to move horizontally.

[0006] In one embodiment, the workbench of the high-speed high-precision topography measuring mechanism is provided with a baffle for stopping the carrier table and a photoelectric sensor for detecting whether the carrier table is moved into position.

[0007] In one embodiment, the camera assembly of the high-speed high-precision topography measuring mechanism comprises a connecting frame, a detection camera, and a plurality of obliquely arranged mounting plates, the detection camera is detachably installed on the mounting plate, the plurality of mounting plates are spaced apart and installed on the connecting frame, and the connecting frame is connected with the support frame.

[0008] In one embodiment, the extension component of the high-speed, high-precision topography measurement mechanism includes a base, a sliding platform, an extension platform, a second drive mechanism that moves along the X-axis, and a third drive mechanism that moves along the Y-axis. The base is mounted on a worktable, the sliding platform is slidably mounted on the base, the extension platform is slidably mounted on the sliding platform, the second drive mechanism is mounted on the base, and the drive end of the second drive mechanism is connected to the sliding platform. The third drive mechanism is mounted on the sliding platform, and the drive end of the third drive mechanism is connected to the extension platform.

[0009] In one embodiment, the base, sliding platform, and extension platform are provided with a receiving groove for accommodating the detected object, and the worktable is provided with a through hole communicating with the receiving groove.

[0010] The beneficial effects of this application are as follows:

[0011] This application provides a high-speed, high-precision topography measurement mechanism. This mechanism uses an industrial display screen to repeatedly project multiple lines onto the object being measured on a carrier assembly. These lines are displayed scrolling on the industrial display screen at a certain interval, and are reflected off the object. A camera assembly simultaneously detects the positions of the lines and calculates the height and topography information of the object. This measurement mechanism is not only simple in structure and easy to operate, but also achieves high-speed, high-precision measurement without requiring relative movement of the object being measured.

[0012] This high-speed, high-precision topography measurement mechanism also enables the measurement of large-sized objects by using expansion components, thus improving the versatility of the measurement.

[0013] This high-speed, high-precision topography measurement mechanism employs a 50nm-level industrial display screen, achieving a repeatability accuracy of 200nm in height measurement. This accuracy is unattainable by measurement equipment costing hundreds of thousands of dollars. The industrial display screen can project multiple lines simultaneously based on the warp and morphology of the object being measured, achieving a speed several times faster than existing technologies that process multiple lines or single lines at once. In practical applications, the industrial display screen utilizes 20 projected lines, achieving a 15-fold speed improvement. Attached Figure Description

[0014] Figure 1 This is a schematic diagram from one perspective of the high-speed, high-precision topography measurement mechanism according to an embodiment of this application;

[0015] Figure 2 This is a schematic diagram from another perspective of the high-speed, high-precision topography measurement mechanism according to an embodiment of this application;

[0016] in:

[0017] 1. Workbench; 2. Carrier assembly; 3. Support frame; 4. Industrial display screen; 5. Camera assembly; 6. Extension assembly; 21. First drive mechanism; 22. Carrier platform; 23. Baffle; 24. Photoelectric sensor; 51. Connecting frame; 52. Detection camera; 53. Mounting plate; 61. Base; 62. Sliding platform; 63. Extension platform; 64. Second drive mechanism; 65. Third drive mechanism; 66. Receiving slot. Detailed Implementation

[0018] To make the above-mentioned objectives, features and advantages of this utility model more apparent and understandable, the specific embodiments of this utility model will be described in detail below with reference to the accompanying drawings.

[0019] like Figure 1 As shown, an embodiment of this application provides a high-speed, high-precision topography measurement mechanism, including a worktable 1. The worktable 1 is provided with a carrier assembly 2 for placing the object to be measured, a support frame 3, an industrial display screen 4 for projecting multiple lines onto the object to be measured at one time, a camera assembly 5 for photographing and detecting the object to be measured, and an extension assembly 6 for extending the carrier assembly 2. The industrial display screen 4 and the camera assembly 5 are mounted on the support frame 3, and the camera assembly 5 is located on one side of the industrial display screen 4.

[0020] Specifically, the first drive mechanism 21 of the carrier assembly 2 drives the carrier platform 22 to move horizontally to the loading station. After the object to be measured is placed on the carrier platform 22, the first drive mechanism 21 drives the carrier platform 22 to move the object to be measured to below the industrial display screen 4. The industrial display screen 4 repeatedly projects 20 to 30 lines onto the object to be measured, with a certain spacing between adjacent lines, scrolling on the industrial display screen 4. The lines corresponding to the object to be measured are reflected in the scrolling display screen. The camera assembly 5 simultaneously detects the position of multiple lines and calculates the height and shape information of the object to be measured. If the size of the object to be measured is large, the extension assembly 6 cooperates with the carrier assembly 2 to position and support the object to be measured, improving the versatility of the measuring mechanism. The industrial display screen 4 can be manufactured using a 50nm-level process.

[0021] In the aforementioned structure, by using a 50nm-level industrial display screen 4 to project 20-30 lines onto the object being measured, a repeatability accuracy of 200nm can be achieved in height measurement, along with a 15-fold increase in measurement speed. Furthermore, the use of an expansion component 6 enables the measurement of objects of various sizes, improving the versatility of the measurement. This measuring mechanism is not only simple in structure and easy to operate, but also achieves high-speed, high-precision measurement without requiring relative movement of the object being measured.

[0022] like Figure 1As shown in the drawings, in one embodiment, the carrier assembly 2 of the high-speed high-precision topography measuring mechanism comprises a first driving mechanism 21 and a carrier table 22 for placing the measured object, the first driving mechanism 21 is installed on the workbench 1, the driving end of the first driving mechanism 21 is connected with the carrier table 22, the carrier table 22 is in sliding fit with the workbench 1, and the first driving mechanism 21 is used for driving the carrier table 22 to move horizontally. The first driving mechanism 21 drives the carrier table 22 to move horizontally along the workbench 1 to the feeding station to feed the measured object, and then the first driving mechanism 21 drives the carrier table 22 to move the measured object to the position directly below the industrial display screen 4. This setting not only positions and supports the measured object, but also facilitates horizontal movement of the measured object.

[0023] As shown in the drawings, Figure 1 As shown in the drawings, in one embodiment, the workbench 1 of the high-speed high-precision topography measuring mechanism is provided with a baffle 23 for stopping the carrier table 22 and a photoelectric sensor 24 for detecting whether the carrier table 22 moves to the position. When the first driving mechanism 21 drives the carrier table 22 to move to the position directly below the industrial display screen 4, the baffle 23 stops the carrier table 22, and the photoelectric sensor 24 detects that the carrier table 22 moves to the position and sends a projection signal to the industrial display screen 4. The baffle 23 is provided to limit the position of the carrier table 22 and prevent the carrier table 22 from moving too far. The photoelectric sensor 24 is provided to send a measurement start signal in time and improve the measurement efficiency.

[0024] As shown in the drawings, Figure 2 As shown in the drawings, in one embodiment, the camera assembly 5 of the high-speed high-precision topography measuring mechanism comprises a connecting frame 51, a detection camera 52 and a plurality of obliquely arranged mounting plates 53, the detection camera 52 is detachably installed on the mounting plate 53, the plurality of mounting plates 53 are spaced apart and installed on the connecting frame 51, and the connecting frame 51 is connected with the support frame 3. According to different specifications of the material, the detection camera 52 can be installed on the corresponding mounting plate 53, the detection camera 52 detects the reflected line on the measured object, and the height and topography information of the measured object are calculated. This setting facilitates detection of the measured object.

[0025] As shown in the drawings, Figure 1As shown in the drawings, in one of the embodiments, the extension assembly 6 of the high-speed high-precision topography measuring mechanism comprises a base 61, a sliding platform 62, an extension platform 63, a second driving mechanism 64 moving along the X-axis direction and a third driving mechanism 65 moving along the Y-axis direction, the base 61 is installed on the workbench 1, the sliding platform 62 is slidingly installed on the base 61, the extension platform 63 is slidingly installed on the sliding platform 62, the second driving mechanism 64 is installed on the base 61, the driving end of the second driving mechanism 64 is connected with the sliding platform 62, the third driving mechanism 65 is installed on the sliding platform 62, and the driving end of the third driving mechanism 65 is connected with the extension platform 63. The third driving mechanism 65 drives the extension platform 63 to move horizontally close to the carrier table 22 of the carrier assembly 2, and then the second driving mechanism 64 drives the sliding platform 62 to drive the extension platform 63 and the carrier table 22 to move synchronously along the X-axis direction to move the measured object horizontally. The above-mentioned arrangement cooperates with the carrier assembly 2 to measure the large-size measured object, thereby improving the universality of the measurement.

[0026] As Figure 1 shown, in one of the embodiments, the base 61, the sliding platform 62 and the extension platform 63 of the high-speed high-precision topography measuring mechanism are provided with accommodating grooves 66 for accommodating the detected objects, and the workbench 1 is provided with through holes communicating with the accommodating grooves 66. After the material is measured, it can be moved to the accommodating grooves 66, and the code scanning gun at the bottom of the through hole performs the code scanning operation on the measured material. After the code scanning operation is completed, the material is discharged. The above-mentioned arrangement facilitates the discharging and code scanning operation of the measured material.

[0027] The above-mentioned embodiments only express several embodiments of the present application, and the description is more specific and detailed, but it cannot be understood as the limitation of the scope of the present application. It should be pointed out that for ordinary skilled in the art, without departing from the concept of the present application, a number of modifications and improvements can be made, which all belong to the protection scope of the present application. Therefore, the protection scope of the present application should be subject to the appended claims.

Claims

1. A high-speed high-precision topography measuring mechanism characterized by comprising: The utility model provides a kind of industrial display screen and camera assembly for the detection of measured object, including workbench (1), workbench (1) is provided with the carrier assembly (2) for placing measured object, support frame (3), for the disposable projection of measured object multiple lines of industrial display screen (4), for the detection of measured object is photographed camera assembly (5) and for the extension of carrier assembly (2) extension assembly (6), the industrial display screen (4) and camera assembly (5) are installed on support frame (3), camera assembly (5) is located in the side of industrial display screen (4).

2. The high-speed high-precision topography measurement mechanism according to claim 1, wherein, The carrier assembly (2) includes a first drive mechanism (21) and a carrier table (22) for placing the measured object, the first drive mechanism (21) is installed on the workbench (1), the driving end of the first drive mechanism (21) is connected with the carrier table (22), the carrier table (22) is in sliding fit with the workbench (1), and the first drive mechanism (21) is used to drive the carrier table (22) to move horizontally.

3. The high speed high precision topography measurement mechanism according to claim 2, wherein, The workbench (1) is provided with a baffle (23) for stopping the carrier table (22) and a photoelectric sensor (24) for detecting whether the carrier table (22) is moved into position.

4. The high speed high precision topography measurement mechanism of claim 1, wherein, The camera assembly (5) includes a connecting frame (51), a detection camera (52), and a plurality of installation plates (53) arranged obliquely, the detection camera (52) is detachably installed on the installation plate (53), the plurality of installation plates (53) are installed on the connecting frame (51) at intervals, and the connecting frame (51) is connected with the support frame (3).

5. The high speed high precision topography measurement mechanism of claim 1, wherein, The extension assembly (6) includes a base (61), a sliding platform (62), an extension platform (63), a second drive mechanism (64) moving along the X-axis direction, and a third drive mechanism (65) moving along the Y-axis direction, the base (61) is installed on the workbench (1), the sliding platform (62) is slidingly installed on the base (61), the extension platform (63) is slidingly installed on the sliding platform (62), the second drive mechanism (64) is installed on the base (61), the driving end of the second drive mechanism (64) is connected with the sliding platform (62), the third drive mechanism (65) is installed on the sliding platform (62), and the driving end of the third drive mechanism (65) is connected with the extension platform (63).

6. The high speed high precision topography measurement mechanism according to claim 5, wherein, The base (61), the sliding platform (62), and the extension platform (63) are provided with containing grooves (66) for containing the detected object, and the workbench (1) is provided with through holes communicating with the containing grooves (66).

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