Rotary shape measuring mechanism

Abstract

The utility model relates to a rotary shape measuring mechanism, comprising a work bench, the work bench is provided with a rotation mechanism used for driving a product to rotate and a detection mechanism used for measuring the shape of the product on the rotation mechanism, the detection mechanism comprises a first rotation driving mechanism, a swing arm, an upper sensor and a lower sensor, the first rotation driving mechanism is installed on the workbench, the driving end of the first rotation driving mechanism is connected with the swing arm, the upper end of the swing arm is adjustably connected with the upper sensor, the lower end of the swing arm is adjustably connected with the lower sensor, and the product is located between the upper sensor and the lower sensor. The mechanism not only improves the detection range of the detected object, but also improves the measurement stability and the measurement accuracy.

Description

TECHNICAL FIELD

[0001] The utility model relates to topography measurement technical field, in particular to a kind of rotary topography measurement mechanism. BACKGROUND

[0002] In industrial environment, point sensor is generally used to obtain the overall thickness topography data of object. In actual measurement process, relative motion of product and sensor is needed to complete overall measurement data. The static measurement accuracy of point sensor is at the level of several or tens of nanometers, but mechanical error exists when moving, and the measurement accuracy of point sensor finally only reaches micron level. At the same time, for the detected object with large size, due to the compactness of equipment, the relative motion of product and sensor is realized by double-axis driving, so that the measurement data of sensor drifts more seriously, which cannot meet the high-precision measurement demand of user. UTILITY MODEL CONTENT

[0003] The technical problem to be solved by the utility model is to provide a rotary topography measurement mechanism, which not only improves the detection range of the detected object, but also improves the stability and measurement accuracy of measurement.

[0004] The technical solution adopted by the utility model to solve its technical problem is: a rotary topography measurement mechanism, comprising a workbench, a rotating mechanism for driving product to rotate and a detection mechanism for topography measurement of product on the rotating mechanism are arranged on the workbench.

[0005] The detection mechanism comprises a first rotating driving mechanism, a swing arm, an upper sensor and a lower sensor, the first rotating driving mechanism is installed on the workbench, the driving end of the first rotating driving mechanism is connected with the swing arm, the upper end of the swing arm is adjustably connected with the upper sensor, the lower end of the swing arm is adjustably connected with the lower sensor, and the product is located between the upper sensor and the lower sensor.

[0006] In one embodiment, a first air cylinder is arranged between the lower sensor and the swing arm of the rotary topography measurement mechanism, the driving end of the first air cylinder is connected with the lower sensor, and the first air cylinder is used to drive the lower sensor to move up and down.

[0007] In one of the embodiments, the rotating mechanism of the rotating topography measuring mechanism comprises a rotating assembly for driving the product to rotate, a supporting assembly for supporting the rotating assembly, and a positioning assembly for positioning the product, the rotating assembly comprises a second rotating driving mechanism, a stage assembly for placing the product, a belt, a pulley, and a tensioning mechanism for tensioning the belt, the second rotating driving mechanism is installed on the workbench, the driving end of the second rotating driving mechanism is connected with the pulley, the belt is wound around the stage assembly, the tensioning mechanism, and the pulley, the stage assembly is in sliding fit with the supporting assembly, and the second rotating driving mechanism is used to drive the pulley to drive the belt and the stage assembly to rotate.

[0008] In one of the embodiments, the stage assembly of the rotating topography measuring mechanism is provided with a standard block for cooperating with the detection mechanism.

[0009] In one of the embodiments, the positioning assembly of the rotating topography measuring mechanism comprises a positioning ring and a jacking cylinder, the jacking cylinder is installed on the workbench and is used to support the positioning ring, the positioning ring is located below the stage assembly, and a plurality of positioning columns for positioning the product are arranged on the positioning ring.

[0010] In one of the embodiments, the supporting assembly of the rotating topography measuring mechanism comprises a supporting frame, a fixing ring, and a plurality of supporting columns, the supporting frame and the plurality of supporting columns are installed on the workbench, the top of the supporting frame is in contact with the stage assembly, one end of the top of the plurality of supporting columns is connected with the fixing ring, the other end of the top of the plurality of supporting columns is in contact with the stage assembly, the fixing ring is located on the inner wall of the stage assembly, and the fixing ring is used to fix the stage assembly.

[0011] In one of the embodiments, the stage assembly of the rotating topography measuring mechanism comprises a stage for placing the product, a bearing, and a fastening ring, the stage is installed on the bearing, and the fastening ring is sleeved on the outer wall of the bearing, and the belt is wound around the fastening ring.

[0012] In one of the embodiments, the tensioning mechanism of the rotating topography measuring mechanism comprises a tensioner and a tensioning pulley, the tensioner is installed on the workbench, the tensioner is connected with the tensioning pulley, and the tensioner is used to drive the tensioning pulley to tension the belt.

[0013] In one of the embodiments, the bottom of the rotating mechanism of the rotating topography measuring mechanism is provided with a dustproof plate, and the dustproof plate is provided with a gap for the movement of the lower sensor.

[0014] The application has the following beneficial effects:

[0015] This application provides a rotary topography measurement mechanism. This mechanism uses a first rotary drive mechanism to drive a swing arm, simultaneously rotating an upper sensor and a lower sensor to measure the topography of a product on the rotating mechanism. This achieves a single-axis hollow rotation mode, improving measurement stability and the detection range of both the upper and lower sensors. Verification and comparison show that the actual dynamic measurement accuracy can be improved by 0.03-0.1 μm, more than 10 times higher than the measurement accuracy of a dual-axis drive method. This rotary topography measurement mechanism not only improves the detection range of the object being measured but also enhances measurement stability and accuracy. Attached Figure Description

[0016] Figure 1 This is a schematic diagram from one perspective of the rotary topography measurement mechanism according to an embodiment of this application;

[0017] Figure 2 This is a schematic diagram from another perspective of the rotary topography measurement mechanism according to an embodiment of this application;

[0018] Figure 3 This is a schematic diagram of the detection mechanism of the rotary topography measurement mechanism according to an embodiment of this application;

[0019] Figure 4 This is a schematic diagram of the rotating mechanism of the rotating topography measurement mechanism according to an embodiment of this application;

[0020] in:

[0021] 1. Workbench; 2. Rotation mechanism; 3. Detection mechanism; 31. First rotation drive mechanism; 32. Swing arm; 33. Upper sensor; 34. Lower sensor; 35. First cylinder; 21. Rotation assembly; 22. Support assembly; 23. Positioning assembly; 24. Dustproof plate; 211. Second rotation drive mechanism; 212. Platform assembly; 213. Belt; 214. Pulley; 215. Tensioning mechanism; 231. Positioning ring; 232. Lifting cylinder; 233. Positioning column; 221. Support frame; 222. Fixing ring; 223. Support column; 001. Platform; 002. Bearing; 003. Fastening ring; 004. Tensioner; 005. Tensioning wheel; 006. Standard block; 241. Gap. Detailed Implementation

[0022] To make the above-mentioned objectives, features and advantages of this utility model more apparent and understandable, the specific embodiments of this utility model will be described in detail below with reference to the accompanying drawings.

[0023] like Figure 1 As shown, an embodiment of this application provides a rotary morphology measurement mechanism, including a worktable 1, a rotary mechanism 2 for driving a product to rotate and a detection mechanism 3 for measuring the morphology of the product on the rotary mechanism 2.

[0024] As Figure 3 shown, the detection mechanism 3 comprises a first rotary drive mechanism 31, a swing arm 32, an upper sensor 33 and a lower sensor 34, the first rotary drive mechanism 31 is installed on the workbench 1, the driving end of the first rotary drive mechanism 31 is connected with the swing arm 32, the upper end of the swing arm 32 is adjustably connected with the upper sensor 33, the lower end of the swing arm 32 is adjustably connected with the lower sensor 34, and the product is located between the upper sensor 33 and the lower sensor 34.

[0025] Specifically, the product is placed on the carrier assembly 212 of the rotary mechanism 2, so that the product is located between the upper sensor 33 and the lower sensor 34, the second rotary drive mechanism 211 of the rotary mechanism 2 drives the carrier assembly 212 to drive the product to rotate, the first rotary drive mechanism 31 drives the swing arm 32 to drive the upper sensor 33 and the lower sensor 34 to rotate along the detection direction, when reaching the multiple detection positions of the product, the first rotary drive mechanism 31 stops rotating, and the upper sensor 33 and the lower sensor 34 measure the topography of the product. Among them, the upper sensor 33 and the lower sensor 34 can be adjusted in height according to the specifications of the product.

[0026] In the above structure, the first rotary drive mechanism 31 drives the swing arm 32 to drive the upper sensor 33 and the lower sensor 34 to rotate to detect the product in all directions, realizing the single-axis hollow rotation mode, ensuring the stability of the upper sensor 33 and the lower sensor 34 during measurement, and improving the detection range of the detected object. The actual dynamic measurement accuracy can be improved by 0.03-0.1um, which is more than 10 times the measurement accuracy of the double-axis driving mode. The rotary topography measurement mechanism not only improves the detection range of the detected object, but also improves the stability and accuracy of the measurement.

[0027] As Figure 3 shown, in one embodiment, a first air cylinder 35 is arranged between the lower sensor 34 and the swing arm 32 of the rotary topography measurement mechanism, the driving end of the first air cylinder 35 is connected with the lower sensor 34, and the first air cylinder 35 is used to drive the lower sensor 34 to move up and down. The first air cylinder 35 drives the lower sensor 34 to move up and down for height adjustment. This setting can adjust the detection position of the lower sensor 34 according to the specifications of the product, which not only improves the detection accuracy, but also improves the versatility of the equipment.

[0028] As Figure 2 and Figure 4As shown in the figure, in one embodiment, the rotating mechanism 2 of the rotating topography measuring mechanism comprises a rotating assembly 21 for driving the product to rotate, a supporting assembly 22 for supporting the rotating assembly 21, and a positioning assembly 23 for positioning the product, the rotating assembly 21 comprises a second rotating driving mechanism 211, a stage assembly 212 for placing the product, a belt 213, a pulley 214, and a tensioning mechanism 215 for tensioning the belt 213, the second rotating driving mechanism 211 is installed on the workbench 1, the driving end of the second rotating driving mechanism 211 is connected with the pulley 214, the belt 213 is wound around the stage assembly 212, the tensioning mechanism 215, and the pulley 214, the stage assembly 212 is in sliding fit with the supporting assembly 22, and the second rotating driving mechanism 211 is used to drive the pulley 214 to drive the belt 213 and the stage assembly 212 to rotate. The product is placed on the stage assembly 212 of the rotating assembly 21, the positioning column 233 of the positioning assembly 23 extends into the positioning hole of the product to position the product, the supporting assembly 22 supports the stage assembly 212 and is in sliding fit with the stage assembly 212, the second rotating driving mechanism 211 drives the pulley 214 to drive the belt 213 to rotate, and the belt 213 drives the stage assembly 212 and the product to rotate. Among them, the tensioning mechanism 215 ensures the tensioning force of the belt 213 during rotation. This setting facilitates driving the product to rotate, cooperates with the detection mechanism 3, realizes the all-around topography measurement of the product, and improves the measurement accuracy and stability.

[0029] As shown in the figure, Figure 1 In one embodiment, a standard block 006 is arranged on the stage assembly 212 of the rotating topography measuring mechanism for cooperation with the detection mechanism 3. The standard block 006 is installed on one end of the stage 001 of the stage assembly 212 close to the product. The swing arm 32 of the detection mechanism 3 drives the upper sensor 33 and the lower sensor 34 to measure the standard block 006 first, determines the measurement reference through the measurement result of the standard block 006, eliminates the system error, and ensures the reliability of the measurement of the detection mechanism 3.

[0030] As shown in the figure, Figure 4As shown in the drawings, in one of the embodiments, the positioning assembly 23 of the rotary topography measuring mechanism comprises a positioning ring 231 and a jacking cylinder 232, the jacking cylinder 232 is installed on the workbench 1, the jacking cylinder 232 is used for supporting the positioning ring 231, the positioning ring 231 is located below the carrier assembly 212, and a plurality of positioning columns 233 for positioning the product are arranged on the positioning ring 231. The driving end of the jacking cylinder 232 is in contact with the bottom of the positioning ring 231. When the product is placed on the carrier assembly, the plurality of positioning columns 233 on the positioning ring 231 extend into the positioning holes of the product, the second rotary driving mechanism 211 drives the carrier assembly to drive the product and the positioning ring 231 to rotate, and the positioning ring 231 is in sliding fit with the driving end of the jacking cylinder 232. This arrangement facilitates the positioning of the product, and the specifications of the positioning ring 231 can also be replaced according to the specifications of the product.

[0031] As shown in the drawings, Figure 2 and Figure 4 As shown in the drawings, in one of the embodiments, the support assembly 22 of the rotary topography measuring mechanism comprises a support frame 221, a fixed ring 222 and a plurality of support columns 223, the support frame 221 and the plurality of support columns 223 are installed on the workbench 1, the top of the support frame 221 is in contact with the carrier assembly 212, one end of the top of the plurality of support columns 223 is connected with the fixed ring 222, the other end of the top of the plurality of support columns 223 is in contact with the carrier assembly 212, the fixed ring 222 is located on the inner wall of the carrier assembly 212, and the fixed ring 222 is used for fixing the carrier assembly 212. The support frame 221 supports one end of the carrier assembly and is in sliding fit, one end of the top of the two support columns 223 is connected with the fixed ring 222, the fixed ring 222 positions the inner wall of the bearing 002 of the carrier assembly, preventing the bearing 002 from deviating when rotating, and the other end of the top of the two support columns 223 supports the bearing 002 and is in sliding fit with the bearing 002. This arrangement improves the stability of the support of the carrier assembly, thereby improving the accuracy of detection.

[0032] As shown in the drawings, Figure 1 and Figure 4 As shown in the drawings, in one of the embodiments, the carrier assembly 212 of the rotary topography measuring mechanism comprises a carrier 001 for placing the product, a bearing 002 and a fastening ring 003, the carrier 001 is installed on the bearing 002, the fastening ring 003 is sleeved on the outer wall of the bearing 002, and the belt 213 is wound on the fastening ring 003.

[0033] As shown in the drawings, Figure 4As shown in the figure, in one of the embodiments, the tensioning mechanism 215 of the rotation type topography measuring mechanism comprises a tensioner 004 and a tensioning wheel 005, the tensioner 004 is installed on the workbench 1, the tensioner 004 is connected with the tensioning wheel 005, and the tensioner 004 is used to drive the tensioning wheel 005 to tension the belt 213. The belt 213 is wound on the pulley 214, the stage assembly 212 and the tensioning wheel 005, when the belt 213 on the tensioning wheel 005 is loose, the tensioner 004 drives the tensioning wheel 005 to tension the belt 213, so as to ensure the tension of the belt 213 and ensure the normal rotation of the product.

[0034] As Figure 2 As shown in the figure, in one of the embodiments, the bottom of the rotation mechanism 2 of the rotation type topography measuring mechanism is provided with a dustproof plate 24, and the dustproof plate 24 is provided with a gap 241 for the movement of the lower sensor 34. The setting can prevent dust from entering the stage assembly 212.

[0035] The above-mentioned embodiments only express several implementation manners of the utility model, the description is more specific and detailed, but it cannot be understood as the limitation of the scope of the utility model patent. It should be pointed out that for ordinary skilled persons in the art, on the premise of not departing from the concept of the utility model, a number of modifications and improvements can be made, which all belong to the protection scope of the utility model. Therefore, the protection scope of the utility model patent should be subject to the appended claims.

Claims

1. A rotational topography measuring mechanism, characterized by, The application relates to a product appearance measurement device, which comprises a workbench (1), a rotating mechanism (2) for driving products to rotate and a detection mechanism (3) for measuring the appearance of the products on the rotating mechanism (2). The detection mechanism (3) comprises a first rotating driving mechanism (31), a swing arm (32), an upper sensor (33) and a lower sensor (34), the first rotating driving mechanism (31) is installed on the workbench (1), the driving end of the first rotating driving mechanism (31) is connected with the swing arm (32), the upper end of the swing arm (32) is adjustably connected with the upper sensor (33), the lower end of the swing arm (32) is adjustably connected with the lower sensor (34), and the products are located between the upper sensor (33) and the lower sensor (34).

2. The rotational topography measurement mechanism of claim 1, wherein, A first air cylinder (35) is arranged between the lower sensor (34) and the swing arm (32), the driving end of the first air cylinder (35) is connected with the lower sensor (34), and the first air cylinder (35) is used for driving the lower sensor (34) to move up and down.

3. The rotational topography measurement mechanism of claim 1, wherein, The rotating mechanism (2) comprises a rotating assembly (21) for driving the products to rotate, a supporting assembly (22) for supporting the rotating assembly (21) and a positioning assembly (23) for positioning the products, the rotating assembly (21) comprises a second rotating driving mechanism (211), a carrier assembly (212) for placing the products, a belt (213), a pulley (214) and a tensioning mechanism (215) for tensioning the belt (213), the second rotating driving mechanism (211) is installed on the workbench (1), the driving end of the second rotating driving mechanism (211) is connected with the pulley (214), the belt (213) is arranged around the carrier assembly (212), the tensioning mechanism (215) and the pulley (214), the carrier assembly (212) is in sliding fit with the supporting assembly (22), and the second rotating driving mechanism (211) is used for driving the pulley (214) to drive the belt (213) and the carrier assembly (212) to rotate.

4. The rotational topography measurement mechanism of claim 3, wherein, The carrier assembly (212) is provided with a standard block (006) for cooperating with the detection mechanism (3).

5. The rotational topography measurement mechanism of claim 3, wherein, The positioning assembly (23) comprises a positioning ring (231) and a jacking air cylinder (232), the jacking air cylinder (232) is installed on the workbench (1) and is used for supporting the positioning ring (231), the positioning ring (231) is located below the carrier assembly (212), and the positioning ring (231) is provided with a plurality of positioning columns (233) for positioning the products.

6. The rotational topography measurement mechanism of claim 3, wherein, The support assembly (22) comprises a support frame (221), a fixing ring (222) and a plurality of support columns (223), the support frame (221) and the plurality of support columns (223) are installed on the workbench (1), the top of the support frame (221) is in contact with the stage assembly (212), one end of the top of the plurality of support columns (223) is connected with the fixing ring (222), the other end of the top of the plurality of support columns (223) is in contact with the stage assembly (212), the fixing ring (222) is located on the inner wall of the stage assembly (212), and the fixing ring (222) is used for fixing the stage assembly (212).

7. The rotational topography measurement mechanism of claim 3, wherein, The stage assembly (212) comprises a stage (001) for placing products, a bearing (002) and a fastening ring (003), the stage (001) is installed on the bearing (002), and the fastening ring (003) is sleeved on the outer wall of the bearing (002), and the belt (213) is wound on the fastening ring (003).

8. The rotational topography measurement mechanism of claim 3, wherein, The tensioning mechanism (215) comprises a tensioner (004) and a tensioning wheel (005), the tensioner (004) is installed on the workbench (1), the tensioner (004) is connected with the tensioning wheel (005), and the tensioner (004) is used for driving the tensioning wheel (005) to tension the belt (213).

9. The rotational topography metrology mechanism of claim 1, wherein, The bottom of the rotating mechanism (2) is provided with a dustproof plate (24), and the dustproof plate (24) is provided with a gap (241) for moving the lower sensor (34).

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