Vacuum gauge detection device

Abstract

The utility model discloses a vacuum gauge detection device which comprises a pressure control unit, the pressure control unit is respectively connected with a low vacuum detection unit and a high vacuum detection unit through metal pipelines, the low vacuum detection unit is connected with a pressure stabilizing unit through a metal pipeline, and the pressure stabilizing unit is connected with the high vacuum detection unit through a metal pipeline. The vacuum gauge detection device disclosed by the utility model can be used for simultaneously detecting a low vacuum gauge of 105Pa to 102Pa, a middle vacuum gauge of 102Pa to 10 <-1 > Pa and a high vacuum gauge of 10 <-1 > Pa to 10 <-5 > Pa, so that the detection efficiency is improved.

Description

TECHNICAL FIELD

[0001] The utility model belongs to the equipment detection technical field, more particularly to vacuum gauge detection device. BACKGROUND

[0002] According to GB / T 3163, the vacuum region can be divided into low vacuum (10 5 Pa~10 2 Pa), medium vacuum (10 2 Pa~10 -1 Pa), high vacuum (10 -1 Pa~10 -5 Pa), ultrahigh vacuum (<10 -5 Pa), wherein low, medium and high vacuum (10 5 Pa~10 -5 Pa) can meet the vast majority of vacuum environment requirements in the production and testing process of semiconductor, pharmaceutical, aerospace, new energy, automobile and other industries. To ensure the accuracy of the vacuum degree value of the vacuum environment, it is necessary to ensure the accuracy and reliability of the instrument for measuring the vacuum degree, that is, the value of the vacuum gauge. (10 5 Pa~10 -5 Pa) vacuum gauge mainly includes thermal conductivity vacuum gauge, piezoresistive vacuum gauge, McLeod vacuum gauge, capacitive diaphragm vacuum gauge, ionization vacuum gauge, resistance gauge tube and absolute pressure sensor. Some of these vacuum gauges, that is, the sensor can be directly connected to the test port of the detection device, and the gauge tube can convert the measured vacuum degree into an electrical signal, which is then displayed on the display after processing. Some need to place the entire gauge tube in a sealed cavity, and then the cavity is evacuated, and then the gauge tube wirelessly transmits the measured electrical signal to the control system, which is processed to display the measured pressure. However, the prior art still has the following problems or deficiencies:

[0003] First, due to the significant differences in principle and structure of the detection medium and low vacuum gauge (10 5 Pa ~10 -1 Pa) and the detection high vacuum gauge (10 -1 Pa~10 -5 Pa), and the selected standard is also different, so laboratories usually use two independent devices to detect both. For customers who need on-site detection, they also need to carry the corresponding devices to the scene for detection, but the actual on-site situation is often complex, and many scenes require simultaneous detection of multiple vacuum gauges, which inevitably requires both devices to be taken to the scene. In this way, the entire operation process is extremely complicated, which seriously affects the detection efficiency, so there is an urgent need for a more efficient and convenient solution to solve this problem.

[0004] Second, the existing vacuum gauge detection device is directly connected to the device test port, and part of the vacuum gauge cannot be directly connected to the device test port, and the entire gauge needs to be placed in a sealed cavity for detection. For such a vacuum gauge, the existing device cannot be detected. Practical new type content

[0005] The utility model aims at providing vacuum gauge detection device, can detect 10 5 Pa~10 2 Pa's low vacuum gauge, 10 2 Pa~10 -1 Pa's medium vacuum gauge and 10 -1 Pa~10 -5 Pa's high vacuum gauge, improve the detection efficiency.

[0006] The utility model adopts the technical scheme, vacuum gauge detection device, including pressure control unit, pressure control unit is connected with low vacuum detection unit and high vacuum detection unit through metal pipeline respectively, low vacuum detection unit is connected with pressure stabilizing unit through metal pipeline, and pressure stabilizing unit is connected with high vacuum detection unit through metal pipeline.

[0007] The utility model has the characteristics that:

[0008] Pressure control unit includes mechanical pump, mechanical pump is connected with low vacuum detection unit through metal pipeline, and first pneumatic valve, second pneumatic valve and fifth pneumatic valve are installed in succession on the metal pipeline between mechanical pump and low vacuum detection unit along the direction from mechanical pump to low vacuum detection unit, still include heat conduction vacuum gauge, and heat conduction vacuum gauge is connected to the metal pipeline between second pneumatic valve and fifth pneumatic valve through metal pipeline, fourth pneumatic valve and third pneumatic valve are installed in succession on the metal pipeline connected with heat conduction vacuum gauge along the direction from heat conduction vacuum gauge to fifth pneumatic valve, still include magnetic suspension molecular pump, one end of magnetic suspension molecular pump is connected to the metal pipeline between heat conduction vacuum gauge and fourth pneumatic valve through metal pipeline, the other end of magnetic suspension molecular pump is connected with high vacuum detection unit, and sixth pneumatic valve is installed on the metal pipeline between magnetic suspension molecular pump and high vacuum detection unit, still include turbine molecular pump, one end of turbine molecular pump is connected to the metal pipeline between first pneumatic valve and second pneumatic valve through metal pipeline, and the other end of turbine molecular pump is connected to the metal pipeline between fourth pneumatic valve and third pneumatic valve through metal pipeline.

[0009] The low vacuum detection unit comprises a low vacuum calibration chamber, a mechanical pump connected to the low vacuum calibration chamber through a metal pipeline, a pressure stabilizing unit connected to the low vacuum calibration chamber through a metal pipeline, a third needle valve installed on the metal pipeline between the low vacuum calibration chamber and the pressure stabilizing unit, a gas storage tank connected to the low vacuum calibration chamber through a metal pipeline, a first needle valve and a second capacitance diaphragm vacuum gauge installed on the gas storage tank, a second needle valve installed on the metal pipeline between the low vacuum calibration chamber and the gas storage tank, a low vacuum sealed cavity connected to the low vacuum calibration chamber through a metal pipeline, a first all-metal angle valve installed on the metal pipeline between the low vacuum calibration chamber and the low vacuum sealed cavity, a capacitance diaphragm vacuum gauge group connected to the low vacuum calibration chamber through a metal pipeline, a third all-metal angle valve installed on the metal pipeline between the low vacuum calibration chamber and the capacitance diaphragm vacuum gauge group, a KF low vacuum detection interface connected to the metal pipeline between the low vacuum calibration chamber and the third all-metal angle valve, a fourth all-metal angle valve installed on the metal pipeline connected to the KF low vacuum detection interface, and a first heating belt wrapped around the outer wall of the low vacuum calibration chamber.

[0010] The high vacuum detection unit comprises a high vacuum calibration chamber, a magnetic suspension molecular pump connected to the high vacuum calibration chamber through a metal pipeline, a pressure stabilizing unit connected to the high vacuum calibration chamber through a metal pipeline, a fourth needle valve installed on the metal pipeline between the high vacuum calibration chamber and the pressure stabilizing unit, a high vacuum sealed cavity connected to the high vacuum calibration chamber through a metal pipeline, a second all-metal angle valve installed on the metal pipeline between the high vacuum calibration chamber and the high vacuum sealed cavity, a standard ionization vacuum gauge connected to the high vacuum calibration chamber through a metal pipeline, a fifth all-metal angle valve installed on the metal pipeline between the high vacuum calibration chamber and the standard ionization vacuum gauge, a CF high vacuum detection interface connected to the metal pipeline between the fifth all-metal angle valve and the high vacuum calibration chamber, a sixth all-metal angle valve installed on the metal pipeline connected to the CF high vacuum detection interface, and a second heating belt wrapped around the outer wall of the high vacuum calibration chamber.

[0011] The pressure stabilizing unit comprises a pressure stabilizing chamber, the pressure stabilizing chamber being connected to the low vacuum calibration chamber through a metal pipeline at one end and being connected to the high vacuum calibration chamber through a metal pipeline at the other end, and a first capacitance diaphragm vacuum gauge installed on the pressure stabilizing chamber.

[0012] The low vacuum sealed cavity is of an all-metal structure, and the low vacuum sealed cavity is sealed through the KF low vacuum detection interface.

[0013] The high vacuum sealed cavity is of an all-metal structure, and the low vacuum sealed cavity is sealed through the CF high vacuum detection interface.

[0014] The capacitance diaphragm vacuum gauge group comprises capacitance diaphragm vacuum gauges with a range of 1.0×10 -1 Pa -1.33×10 1 Pa, 1.33×101 Pa-1.33×10 2 Pa, 1.33×10 2 Pa-1.33×10 3 Pa and 1.33×10 3 Pa-1.33×10 4 Pa, 1.33×10 4 Pa-1.33×10 5 Capacitance diaphragm vacuum gauge of Pa.

[0015] The range of the standard ionization vacuum gauge is 1.0×10 -1 Pa-1.0×10 -5 Pa.

[0016] The range of the first capacitance diaphragm vacuum gauge is 1.33×10 2 Pa-1.33×10 3 Pa, and the range of the second capacitance diaphragm vacuum gauge 34 is 1.33×10 3 Pa-1.33×10 4 Pa.

[0017] The beneficial effects of the utility model are:

[0018] The vacuum gauge detection device provided by the utility model can detect low vacuum gauges (10 5 Pa~10 2 Pa), medium vacuum gauges (10 2 Pa~10 -1 Pa) and high vacuum gauges (10 -1 Pa~10 -5 Pa) simultaneously, contains heat conduction vacuum gauges, piezoresistance vacuum gauges, McLeod vacuum gauges, capacitance diaphragm vacuum gauges, ionization vacuum gauges, resistance gauges, absolute pressure sensors and the like, is especially convenient for on-site detection, greatly improves the detection efficiency, and can realize the detection of vacuum gauges that need to place the entire gauge in a sealed cavity. BRIEF DESCRIPTION OF DRAWINGS

[0019] Figure 1 is a structural schematic view of the vacuum gauge detection device of the utility model.

[0020] In the figure, 1. Mechanical pump, 2. Turbomolecular pump, 3. Magnetic levitation molecular pump, 4. Thermal conduction vacuum gauge, 5. Gas storage tank, 6. Low vacuum calibration chamber, 7. Pressure stabilizing chamber, 8. High vacuum calibration chamber, 9. Low vacuum sealed cavity, 10. High vacuum sealed cavity, 11. First capacitive thin film vacuum gauge, 12. Capacitive thin film vacuum gauge group, 13. 14. KF low vacuum detection interface, 15. Standard ionization vacuum gauge, 16. CF high vacuum detection interface, 17. First pneumatic valve, 18. Second pneumatic valve, 19. Third pneumatic valve, 20. Fourth pneumatic valve, 21. Fifth pneumatic valve, 22. Sixth pneumatic valve, 23. First needle valve, 24. Second needle valve, 25. Fourth needle valve, 26. First all-metal angle valve, 27. Second all-metal angle valve, 28. Third all-metal angle valve, 29. Fourth all-metal angle valve, 30. Fifth all-metal angle valve, 31. Sixth all-metal angle valve, 32. First heating band, 33. Second heating band, 34. Second capacitive thin-film vacuum gauge, 35. Pressure control unit, 36. Low vacuum detection unit, 37. High vacuum detection unit, 38. Voltage stabilizing unit. Detailed Implementation

[0021] The present invention will now be described in detail with reference to the accompanying drawings and specific embodiments.

[0022] The vacuum gauge detection device provided by this utility model, such as Figure 1As shown, comprising pressure control unit 35, pressure control unit 35 is connected with low vacuum detection unit 36 and high vacuum detection unit 37 through metal pipeline respectively, low vacuum detection unit 36 is connected with pressure stabilizing unit 38 through metal pipeline, pressure stabilizing unit 38 is connected with high vacuum detection unit 37 through metal pipeline;Pressure control unit 35 includes mechanical pump 1, mechanical pump 1 is connected with low vacuum detection unit 36 through metal pipeline, first pneumatic valve 16, second pneumatic valve 17 and fifth pneumatic valve 20 are installed on the metal pipeline between mechanical pump 1 and low vacuum detection unit 36 in turn along the direction from mechanical pump 1 to low vacuum detection unit 36, it further includes heat conduction vacuum gauge 4, heat conduction vacuum gauge 4 is connected to the metal pipeline between second pneumatic valve 17 and fifth pneumatic valve 20 through metal pipeline, fourth pneumatic valve 19 and third pneumatic valve 18 are installed on the metal pipeline connected with heat conduction vacuum gauge 4 in turn along the direction from heat conduction vacuum gauge 4 to fifth pneumatic valve 20, it further includes magnetic suspension molecular pump 3, one end of magnetic suspension molecular pump 3 is connected to the metal pipeline between heat conduction vacuum gauge 4 and fourth pneumatic valve 19 through metal pipeline, the other end of magnetic suspension molecular pump 3 is connected with high vacuum detection unit 37, sixth pneumatic valve 21 is installed on the metal pipeline between magnetic suspension molecular pump 3 and high vacuum detection unit 37, it further includes turbine molecular pump 2, one end of turbine molecular pump 2 is connected to the metal pipeline between first pneumatic valve 16 and second pneumatic valve 17 through metal pipeline, the other end of turbine molecular pump 2 is connected to the metal pipeline between fourth pneumatic valve 19 and third pneumatic valve 18 through metal pipeline;Low vacuum detection unit 36 includes low vacuum calibration chamber 6, mechanical pump 1 is connected with low vacuum calibration chamber 6 through metal pipeline, low vacuum calibration chamber 6 is connected with pressure stabilizing unit 38 through metal pipeline, third needle valve 24 is installed on the metal pipeline between low vacuum calibration chamber 6 and pressure stabilizing unit 38, low vacuum calibration chamber 6 is further connected with gas storage tank 5 through metal pipeline, first needle valve 22 and second electric capacity diaphragm vacuum gauge 34 are installed on gas storage tank 5, second needle valve 23 is installed on the metal pipeline between low vacuum calibration chamber 6 and gas storage tank 5, low vacuum calibration chamber 6 is further connected with low vacuum sealed cavity 9 through metal pipeline, first all-metal angle valve 26 is installed on the metal pipeline between low vacuum calibration chamber 6 and low vacuum sealed cavity 9, low vacuum calibration chamber 6 is further connected with electric capacity diaphragm vacuum gauge group 12 through metal pipeline, third all-metal angle valve 28 is installed on the metal pipeline between low vacuum calibration chamber 6 and electric capacity diaphragm vacuum gauge group 12, it further includes KF low vacuum detection interface 13, KF low vacuum detection interface 13 is connected to the metal pipeline between low vacuum calibration chamber 6 and third all-metal angle valve 28 through metal pipeline, fourth all-metal angle valve 29 is installed on the metal pipeline connected with KF low vacuum detection interface 13, the outer wall of low vacuum calibration chamber 6 is coated with first heating belt 32.The high vacuum detection unit 37 comprises a high vacuum calibration chamber 8 connected with the magnetic suspension molecular pump 3 through a metal pipeline, the high vacuum calibration chamber 8 is also connected with the pressure stabilizing unit 38 through a metal pipeline, a fourth needle valve 25 is installed on the metal pipeline between the high vacuum calibration chamber 8 and the pressure stabilizing unit 38, the high vacuum calibration chamber 8 is also connected with a high vacuum sealed cavity 10 through a metal pipeline, a second all-metal angle valve 27 is installed on the metal pipeline between the high vacuum calibration chamber 8 and the high vacuum sealed cavity 10, the high vacuum calibration chamber 8 is also connected with a standard ionization vacuum gauge 14 through a metal pipeline, a fifth all-metal angle valve 30 is installed on the metal pipeline between the high vacuum calibration chamber 8 and the standard ionization vacuum gauge 14, the CF high vacuum detection interface 15 is connected to the metal pipeline between the fifth all-metal angle valve 30 and the high vacuum calibration chamber 8 through a metal pipeline, a sixth all-metal angle valve 31 is installed on the metal pipeline connected with the CF high vacuum detection interface 15, the second heating belt 33 is wrapped on the outer wall of the high vacuum calibration chamber 8, so that the device can reach the required vacuum degree, and the low vacuum calibration chamber 6 and the high vacuum calibration chamber 8 need to be heated to 200 DEG C; the pressure stabilizing unit 38 comprises a pressure stabilizing chamber 7, one end of the pressure stabilizing chamber 7 is connected with the low vacuum calibration chamber 6 through a metal pipeline, the other end of the pressure stabilizing chamber 7 is connected with the high vacuum calibration chamber 8 through a metal pipeline, and the first capacitive diaphragm vacuum gauge 11 is installed on the pressure stabilizing chamber 7; the low vacuum sealed cavity 9 is of an all-metal structure and is sealed through the KF low vacuum detection interface; the high vacuum sealed cavity 10 is of an all-metal structure and is sealed through the CF high vacuum detection interface; the uncertainty of the capacitive diaphragm vacuum gauge group 12 is better than U rel =3% (k=2), the capacitive diaphragm vacuum gauge group 12 comprises capacitive diaphragm vacuum gauges with a range of 1.0x10 -1 Pa-1.33x10 1 Pa, 1.33x10 1 Pa-1.33x10 2 Pa, 1.33x10 2 Pa-1.33x10 3 Pa and 1.33x10 3 Pa-1.33x10 4 Pa, 1.33x10 4 Pa-1.33x10 5 Pa; the range of the standard ionization vacuum gauge 14 is 1.0x10 -1 Pa-1.0x10 -5 Pa, and the uncertainty of the standard ionization vacuum gauge 14 is better than U rel =10% (k=2); the range of the first capacitive diaphragm vacuum gauge 11 is 1.33x10 2 Pa-1.33x10 3Pa, the range of the second capacitance diaphragm vacuum gauge 34 is 1.33*10 3 Pa 4 Pa, the background pressure of the low vacuum calibration chamber 6 needs to be less than 1.0*10 -3 Pa when the temperature recovers to room temperature, the background pressure of the high vacuum calibration chamber 8 needs to be less than 1.0*10 -7 Pa. The low vacuum (10 5 Pa-10 2 Pa) and medium vacuum (10 2 Pa-10 -1 Pa) gauges such as a thermal conductivity vacuum gauge, a piezoresistance vacuum gauge, a McLeod vacuum gauge, a capacitance diaphragm vacuum gauge, a resistance gauge, and an absolute pressure sensor are connected to the KF low vacuum detection interface 13 or are placed in the low vacuum sealed cavity 9 for detection. The high vacuum (10 -1 Pa~10 -5 Pa) gauges such as an ionization vacuum gauge and a cold gauge are connected to the CF high vacuum detection interface 15 or are placed in the high vacuum sealed cavity 10 for detection.

[0023] The working principle of the vacuum gauge detection device is as follows: when the low vacuum gauge is calibrated, the static comparison method is used for low vacuum gauge calibration, and the detected low vacuum gauge is connected to the KF low vacuum detection interface 13 or is placed in the low vacuum sealed cavity 9; the mechanical pump 1 is started, the first pneumatic valve 16, the second pneumatic valve 17, and the fifth pneumatic valve 20 are sequentially opened, and the fourth all-metal angle valve 29 or the first all-metal angle valve 26 is opened; the third all-metal angle valve 28 is opened after the mechanical pump 1 runs for 10 minutes, the power supply of the capacitance diaphragm vacuum gauge group 12 is turned on, and when the capacitance diaphragm vacuum gauge group 12 displays a pressure less than 10 Pa, the fifth pneumatic valve 20 and the second pneumatic valve 17 are sequentially closed; the turbo molecular pump 2 is started, and after the turbo molecular pump 2 is completely started, the third pneumatic valve 18 and the fifth pneumatic valve 20 are sequentially opened; the first needle valve 22 is adjusted, so that the pressure in the gas storage tank 5 is near 1.0*10 4 Pa; when the indication of the capacitance diaphragm vacuum gauge group 12 is less than 1.0*10 -2Pa, the minimum resolution of the capacitance diaphragm vacuum gauge group 12, the fifth pneumatic valve 20 is closed, the second needle valve 23 is manually adjusted, the gas entering the low vacuum calibration chamber 6 is controlled to the required calibration point, and the standard value of the capacitance diaphragm vacuum gauge group 12 and the value of the low vacuum gauge to be calibrated are recorded in sequence from low to high; after the calibration is completed, the power supply of the low vacuum gauge to be calibrated is turned off, the fourth all-metal angle valve 29 or the first all-metal angle valve 26 is closed, and the low vacuum gauge to be calibrated is removed; the third pneumatic valve 18 is closed, the second pneumatic valve 17 and the fifth pneumatic valve 20 are opened, and when the capacitance diaphragm vacuum gauge group 12 displays a pressure less than 10 Pa, the second pneumatic valve 17 is closed, the third pneumatic valve 18 is opened, and when the capacitance diaphragm vacuum gauge group 12 displays a value less than 1.0 x 10 -2 Pa, the third all-metal angle valve 28 is closed, the power supply of the capacitance diaphragm vacuum gauge group 12 is turned off, the fifth pneumatic valve 20 and the third pneumatic valve 18 are closed, the turbo molecular pump 2 is stopped, and after the turbo molecular pump 2 is completely stopped, the first pneumatic valve 16 is closed and the mechanical pump 1 is stopped; when calibrating the high vacuum gauge, the dynamic comparison method is used for high vacuum gauge calibration, the high vacuum gauge to be detected is connected to the CF high vacuum detection interface 15 or placed in the high vacuum sealed cavity 10; the mechanical pump 1 is started, the valves are opened in sequence, i.e., the first pneumatic valve 16, the fourth pneumatic valve 19, the sixth pneumatic valve 21, the fifth all-metal angle valve 30, and the sixth all-metal angle valve 31 or the second all-metal angle valve 27; when the thermal conductivity vacuum gauge 4 displays a value less than 10 Pa, the turbo molecular pump 2 is started, and after the turbo molecular pump 2 is completely started, the magnetic suspension molecular pump 3 is started; the third needle valve 24 is adjusted so that the vacuum degree in the pressure stabilizing chamber 7 is near 1.0 x 10 3 Pa; when the standard ionization vacuum gauge 14 displays a value less than 1.0 x 10 -6 Pa, the minimum resolution of the standard ionization vacuum gauge 14, the fourth needle valve 25 is dynamically adjusted, the gas slowly enters the high vacuum calibration chamber 8 to the required calibration point under the condition that the first pneumatic valve 16, the fourth pneumatic valve 19, and the sixth pneumatic valve 21 are all opened, and the value of the standard ionization vacuum gauge 14 and the value of the high vacuum gauge to be calibrated are recorded in sequence from low to high; after the calibration is completed, the power supply of the standard ionization vacuum gauge and the power supply of the high vacuum gauge to be calibrated are turned off, the fifth all-metal angle valve 30 and the sixth all-metal angle valve 31 or the second all-metal angle valve 27 are closed after 30 minutes, and the high vacuum gauge to be calibrated is removed; the sixth pneumatic valve 21 is closed, the magnetic suspension molecular pump 3 is stopped, after the magnetic suspension molecular pump 3 is completely stopped, the fourth pneumatic valve 19 is closed, the turbo molecular pump 2 is stopped, after the turbo molecular pump 2 is completely stopped, the first pneumatic valve 16 is closed, and the mechanical pump 1 is stopped.

[0024] Example 1

[0025] The vacuum gauge detection device proposed in this embodiment, like Figure 1As shown, the pressure control unit 35 is connected with the low vacuum detection unit 36 and the high vacuum detection unit 37 through metal pipes, the low vacuum detection unit 36 is connected with the pressure stabilizing unit 38 through a metal pipe, and the pressure stabilizing unit 38 is connected with the high vacuum detection unit 37 through a metal pipe.

[0026] Embodiment 2

[0027] The vacuum gauge detection device provided in the embodiment, as shown in Figure 1 As shown, the pressure control unit 35 is connected with the low vacuum detection unit 36 and the high vacuum detection unit 37 through metal pipes, the low vacuum detection unit 36 is connected with the pressure stabilizing unit 38 through a metal pipe, and the pressure stabilizing unit 38 is connected with the high vacuum detection unit 37 through a metal pipe; the pressure control unit 35 comprises a mechanical pump 1 connected with the low vacuum detection unit 36 through a metal pipe, and a first pneumatic valve 16, a second pneumatic valve 17 and a fifth pneumatic valve 20 are installed on the metal pipe between the mechanical pump 1 and the low vacuum detection unit 36 in sequence from the mechanical pump 1 to the low vacuum detection unit 36; the device further comprises a thermal conductivity vacuum gauge 4 connected to the metal pipe between the second pneumatic valve 17 and the fifth pneumatic valve 20 through a metal pipe, and a fourth pneumatic valve 19 and a third pneumatic valve 18 are installed on the metal pipe connected with the thermal conductivity vacuum gauge 4 in sequence from the thermal conductivity vacuum gauge 4 to the fifth pneumatic valve 20; the device further comprises a magnetic suspension molecular pump 3 connected to the metal pipe between the thermal conductivity vacuum gauge 4 and the fourth pneumatic valve 19 through a metal pipe at one end, and connected with the high vacuum detection unit 37 at the other end, and a sixth pneumatic valve 21 is installed on the metal pipe between the magnetic suspension molecular pump 3 and the high vacuum detection unit 37; the device further comprises a turbomolecular pump 2 connected to the metal pipe between the first pneumatic valve 16 and the second pneumatic valve 17 through a metal pipe at one end, and connected to the metal pipe between the fourth pneumatic valve 19 and the third pneumatic valve 18 through a metal pipe at the other end.

[0028] Embodiment 3

[0029] The vacuum gauge detection device provided in the embodiment, as shown in Figure 1As shown, the pressure control unit 35 is connected with the low vacuum detection unit 36 and the high vacuum detection unit 37 through metal pipes respectively, the low vacuum detection unit 36 is connected with the pressure stabilizing unit 38 through a metal pipe, and the pressure stabilizing unit 38 is connected with the high vacuum detection unit 37 through a metal pipe; the pressure control unit 35 comprises the mechanical pump 1, the mechanical pump 1 is connected with the low vacuum detection unit 36 through a metal pipe, and the metal pipe between the mechanical pump 1 and the low vacuum detection unit 36 is sequentially provided with the first pneumatic valve 16, the second pneumatic valve 17 and the fifth pneumatic valve 20 along the direction from the mechanical pump 1 to the low vacuum detection unit 36; the pressure control unit 35 further comprises the thermal conductivity vacuum gauge 4, the thermal conductivity vacuum gauge 4 is connected to the metal pipe between the second pneumatic valve 17 and the fifth pneumatic valve 20 through a metal pipe, and the metal pipe connected with the thermal conductivity vacuum gauge 4 is sequentially provided with the fourth pneumatic valve 19 and the third pneumatic valve 18 along the direction from the thermal conductivity vacuum gauge 4 to the fifth pneumatic valve 20; the pressure control unit 35 further comprises the magnetic suspension molecular pump 3, one end of the magnetic suspension molecular pump 3 is connected to the metal pipe between the thermal conductivity vacuum gauge 4 and the fourth pneumatic valve 19 through a metal pipe, the other end of the magnetic suspension molecular pump 3 is connected with the high vacuum detection unit 37, and the metal pipe between the magnetic suspension molecular pump 3 and the high vacuum detection unit 37 is provided with the sixth pneumatic valve 21; the pressure control unit 35 further comprises the turbomolecular pump 2, one end of the turbomolecular pump 2 is connected to the metal pipe between the first pneumatic valve 16 and the second pneumatic valve 17 through a metal pipe, and the other end of the turbomolecular pump 2 is connected to the metal pipe between the fourth pneumatic valve 19 and the third pneumatic valve 18 through a metal pipe; the low vacuum detection unit 36 comprises the low vacuum calibration chamber 6, the mechanical pump 1 is connected with the low vacuum calibration chamber 6 through a metal pipe, the low vacuum calibration chamber 6 is connected with the pressure stabilizing unit 38 through a metal pipe, and the metal pipe between the low vacuum calibration chamber 6 and the pressure stabilizing unit 38 is provided with the third needle valve 24; the low vacuum calibration chamber 6 is further connected with the gas storage tank 5 through a metal pipe, the gas storage tank 5 is provided with the first needle valve 22 and the second capacitance diaphragm vacuum gauge 34, the metal pipe between the low vacuum calibration chamber 6 and the gas storage tank 5 is provided with the second needle valve 23, and the low vacuum calibration chamber 6 is further connected with the low vacuum sealed cavity 9 through a metal pipe, the metal pipe between the low vacuum calibration chamber 6 and the low vacuum sealed cavity 9 is provided with the first all-metal angle valve 26, and the low vacuum calibration chamber 6 is further connected with the capacitance diaphragm vacuum gauge group 12 through a metal pipe, the metal pipe between the low vacuum calibration chamber 6 and the capacitance diaphragm vacuum gauge group 12 is provided with the third all-metal angle valve 28; the pressure control unit 35 further comprises the KF low vacuum detection interface 13, the KF low vacuum detection interface 13 is connected to the metal pipe between the low vacuum calibration chamber 6 and the third all-metal angle valve 28 through a metal pipe, the metal pipe connected with the KF low vacuum detection interface 13 is provided with the fourth all-metal angle valve 29, and the outer wall of the low vacuum calibration chamber 6 is coated with the first heating belt 32.

[0030] Embodiment 4

[0031] The vacuum gauge detection device provided in the embodiment has the advantages that Figure 1As shown, comprising pressure control unit 35, pressure control unit 35 is connected with low vacuum detection unit 36 and high vacuum detection unit 37 through metal pipeline respectively, low vacuum detection unit 36 is connected with pressure stabilizing unit 38 through metal pipeline, pressure stabilizing unit 38 is connected with high vacuum detection unit 37 through metal pipeline;Pressure control unit 35 includes mechanical pump 1, mechanical pump 1 is connected with low vacuum detection unit 36 through metal pipeline, first pneumatic valve 16, second pneumatic valve 17 and fifth pneumatic valve 20 are installed on the metal pipeline between mechanical pump 1 and low vacuum detection unit 36 in turn along the direction from mechanical pump 1 to low vacuum detection unit 36, it further includes heat conduction vacuum gauge 4, heat conduction vacuum gauge 4 is connected to the metal pipeline between second pneumatic valve 17 and fifth pneumatic valve 20 through metal pipeline, fourth pneumatic valve 19 and third pneumatic valve 18 are installed on the metal pipeline connected with heat conduction vacuum gauge 4 in turn along the direction from heat conduction vacuum gauge 4 to fifth pneumatic valve 20, it further includes magnetic suspension molecular pump 3, one end of magnetic suspension molecular pump 3 is connected to the metal pipeline between heat conduction vacuum gauge 4 and fourth pneumatic valve 19 through metal pipeline, the other end of magnetic suspension molecular pump 3 is connected with high vacuum detection unit 37, sixth pneumatic valve 21 is installed on the metal pipeline between magnetic suspension molecular pump 3 and high vacuum detection unit 37, it further includes turbine molecular pump 2, one end of turbine molecular pump 2 is connected to the metal pipeline between first pneumatic valve 16 and second pneumatic valve 17 through metal pipeline, the other end of turbine molecular pump 2 is connected to the metal pipeline between fourth pneumatic valve 19 and third pneumatic valve 18 through metal pipeline;Low vacuum detection unit 36 includes low vacuum calibration chamber 6, mechanical pump 1 is connected with low vacuum calibration chamber 6 through metal pipeline, low vacuum calibration chamber 6 is connected with pressure stabilizing unit 38 through metal pipeline, third needle valve 24 is installed on the metal pipeline between low vacuum calibration chamber 6 and pressure stabilizing unit 38, low vacuum calibration chamber 6 is further connected with gas storage tank 5 through metal pipeline, first needle valve 22 and second electric capacity diaphragm vacuum gauge 34 are installed on gas storage tank 5, second needle valve 23 is installed on the metal pipeline between low vacuum calibration chamber 6 and gas storage tank 5, low vacuum calibration chamber 6 is further connected with low vacuum sealed cavity 9 through metal pipeline, first all-metal angle valve 26 is installed on the metal pipeline between low vacuum calibration chamber 6 and low vacuum sealed cavity 9, low vacuum calibration chamber 6 is further connected with electric capacity diaphragm vacuum gauge group 12 through metal pipeline, third all-metal angle valve 28 is installed on the metal pipeline between low vacuum calibration chamber 6 and electric capacity diaphragm vacuum gauge group 12, it further includes KF low vacuum detection interface 13, KF low vacuum detection interface 13 is connected to the metal pipeline between low vacuum calibration chamber 6 and third all-metal angle valve 28 through metal pipeline, fourth all-metal angle valve 29 is installed on the metal pipeline connected with KF low vacuum detection interface 13, the outer wall of low vacuum calibration chamber 6 is coated with first heating belt 32.The high vacuum detection unit 37 comprises a high vacuum calibration chamber 8 connected with the magnetic levitation molecular pump 3 through a metal pipeline, and connected with the pressure stabilizing unit 38 through a metal pipeline, wherein a fourth needle valve 25 is installed on the metal pipeline between the high vacuum calibration chamber 8 and the pressure stabilizing unit 38, the high vacuum calibration chamber 8 is further connected with a high vacuum sealed cavity 10 through a metal pipeline, a second all-metal angle valve 27 is installed on the metal pipeline between the high vacuum calibration chamber 8 and the high vacuum sealed cavity 10, the high vacuum calibration chamber 8 is further connected with a standard ionization vacuum gauge 14 through a metal pipeline, a fifth all-metal angle valve 30 is installed on the metal pipeline between the high vacuum calibration chamber 8 and the standard ionization vacuum gauge 14, and the high vacuum detection device further comprises a CF high vacuum detection interface 15 connected to the metal pipeline between the fifth all-metal angle valve 30 and the high vacuum calibration chamber 8 through a metal pipeline, wherein a sixth all-metal angle valve 31 is installed on the metal pipeline connected with the CF high vacuum detection interface 15, and the outer wall of the high vacuum calibration chamber 8 is coated with a second heating belt 33.

[0032] Embodiment 5

[0033] The vacuum gauge detection device provided in the embodiment, like Figure 1As shown, comprising pressure control unit 35, pressure control unit 35 is connected with low vacuum detection unit 36 and high vacuum detection unit 37 through metal pipeline respectively, low vacuum detection unit 36 is connected with pressure stabilizing unit 38 through metal pipeline, pressure stabilizing unit 38 is connected with high vacuum detection unit 37 through metal pipeline;Pressure control unit 35 includes mechanical pump 1, mechanical pump 1 is connected with low vacuum detection unit 36 through metal pipeline, first pneumatic valve 16, second pneumatic valve 17 and fifth pneumatic valve 20 are installed on the metal pipeline between mechanical pump 1 and low vacuum detection unit 36 in turn along the direction from mechanical pump 1 to low vacuum detection unit 36, it further includes heat conduction vacuum gauge 4, heat conduction vacuum gauge 4 is connected to the metal pipeline between second pneumatic valve 17 and fifth pneumatic valve 20 through metal pipeline, fourth pneumatic valve 19 and third pneumatic valve 18 are installed on the metal pipeline connected with heat conduction vacuum gauge 4 in turn along the direction from heat conduction vacuum gauge 4 to fifth pneumatic valve 20, it further includes magnetic suspension molecular pump 3, one end of magnetic suspension molecular pump 3 is connected to the metal pipeline between heat conduction vacuum gauge 4 and fourth pneumatic valve 19 through metal pipeline, the other end of magnetic suspension molecular pump 3 is connected with high vacuum detection unit 37, sixth pneumatic valve 21 is installed on the metal pipeline between magnetic suspension molecular pump 3 and high vacuum detection unit 37, it further includes turbine molecular pump 2, one end of turbine molecular pump 2 is connected to the metal pipeline between first pneumatic valve 16 and second pneumatic valve 17 through metal pipeline, the other end of turbine molecular pump 2 is connected to the metal pipeline between fourth pneumatic valve 19 and third pneumatic valve 18 through metal pipeline;Low vacuum detection unit 36 includes low vacuum calibration chamber 6, mechanical pump 1 is connected with low vacuum calibration chamber 6 through metal pipeline, low vacuum calibration chamber 6 is connected with pressure stabilizing unit 38 through metal pipeline, third needle valve 24 is installed on the metal pipeline between low vacuum calibration chamber 6 and pressure stabilizing unit 38, low vacuum calibration chamber 6 is further connected with gas storage tank 5 through metal pipeline, first needle valve 22 and second electric capacity diaphragm vacuum gauge 34 are installed on gas storage tank 5, second needle valve 23 is installed on the metal pipeline between low vacuum calibration chamber 6 and gas storage tank 5, low vacuum calibration chamber 6 is further connected with low vacuum sealed cavity 9 through metal pipeline, first all-metal angle valve 26 is installed on the metal pipeline between low vacuum calibration chamber 6 and low vacuum sealed cavity 9, low vacuum calibration chamber 6 is further connected with electric capacity diaphragm vacuum gauge group 12 through metal pipeline, third all-metal angle valve 28 is installed on the metal pipeline between low vacuum calibration chamber 6 and electric capacity diaphragm vacuum gauge group 12, it further includes KF low vacuum detection interface 13, KF low vacuum detection interface 13 is connected to the metal pipeline between low vacuum calibration chamber 6 and third all-metal angle valve 28 through metal pipeline, fourth all-metal angle valve 29 is installed on the metal pipeline connected with KF low vacuum detection interface 13, the outer wall of low vacuum calibration chamber 6 is coated with first heating belt 32.The high vacuum detection unit 37 comprises a high vacuum calibration chamber 8 connected with the magnetic suspension molecular pump 3 through a metal pipeline, and the high vacuum calibration chamber 8 is also connected with a pressure stabilizing unit 38 through a metal pipeline, and a fourth needle valve 25 is installed on the metal pipeline between the high vacuum calibration chamber 8 and the pressure stabilizing unit 38, and the high vacuum calibration chamber 8 is also connected with a high vacuum sealed cavity 10 through a metal pipeline, and a second all-metal angle valve 27 is installed on the metal pipeline between the high vacuum calibration chamber 8 and the high vacuum sealed cavity 10, and the high vacuum calibration chamber 8 is also connected with a standard ionization vacuum gauge 14 through a metal pipeline, and a fifth all-metal angle valve 30 is installed on the metal pipeline between the high vacuum calibration chamber 8 and the standard ionization vacuum gauge 14, and the high vacuum detection device further comprises a CF high vacuum detection interface 15 connected to the metal pipeline between the fifth all-metal angle valve 30 and the high vacuum calibration chamber 8 through a metal pipeline, and a sixth all-metal angle valve 31 is installed on the metal pipeline connected with the CF high vacuum detection interface 15, and the outer wall of the high vacuum calibration chamber 8 is coated with a second heating belt 33; and the pressure stabilizing unit 38 comprises a pressure stabilizing chamber 7 connected with the low vacuum calibration chamber 6 through a metal pipeline at one end, and connected with the high vacuum calibration chamber 8 through a metal pipeline at the other end, and a first capacitive diaphragm vacuum gauge 11 is installed on the pressure stabilizing chamber 7.

[0034] Example 6

[0035] The vacuum gauge detection device provided in the embodiment has the advantages that Figure 1As shown, comprising pressure control unit 35, pressure control unit 35 is connected with low vacuum detection unit 36 and high vacuum detection unit 37 through metal pipeline respectively, low vacuum detection unit 36 is connected with pressure stabilizing unit 38 through metal pipeline, pressure stabilizing unit 38 is connected with high vacuum detection unit 37 through metal pipeline;Pressure control unit 35 includes mechanical pump 1, mechanical pump 1 is connected with low vacuum detection unit 36 through metal pipeline, first pneumatic valve 16, second pneumatic valve 17 and fifth pneumatic valve 20 are installed on the metal pipeline between mechanical pump 1 and low vacuum detection unit 36 in turn along the direction from mechanical pump 1 to low vacuum detection unit 36, it further includes heat conduction vacuum gauge 4, heat conduction vacuum gauge 4 is connected to the metal pipeline between second pneumatic valve 17 and fifth pneumatic valve 20 through metal pipeline, fourth pneumatic valve 19 and third pneumatic valve 18 are installed on the metal pipeline connected with heat conduction vacuum gauge 4 in turn along the direction from heat conduction vacuum gauge 4 to fifth pneumatic valve 20, it further includes magnetic suspension molecular pump 3, one end of magnetic suspension molecular pump 3 is connected to the metal pipeline between heat conduction vacuum gauge 4 and fourth pneumatic valve 19 through metal pipeline, the other end of magnetic suspension molecular pump 3 is connected with high vacuum detection unit 37, sixth pneumatic valve 21 is installed on the metal pipeline between magnetic suspension molecular pump 3 and high vacuum detection unit 37, it further includes turbine molecular pump 2, one end of turbine molecular pump 2 is connected to the metal pipeline between first pneumatic valve 16 and second pneumatic valve 17 through metal pipeline, the other end of turbine molecular pump 2 is connected to the metal pipeline between fourth pneumatic valve 19 and third pneumatic valve 18 through metal pipeline;Low vacuum detection unit 36 includes low vacuum calibration chamber 6, mechanical pump 1 is connected with low vacuum calibration chamber 6 through metal pipeline, low vacuum calibration chamber 6 is connected with pressure stabilizing unit 38 through metal pipeline, third needle valve 24 is installed on the metal pipeline between low vacuum calibration chamber 6 and pressure stabilizing unit 38, low vacuum calibration chamber 6 is further connected with gas storage tank 5 through metal pipeline, first needle valve 22 and second electric capacity diaphragm vacuum gauge 34 are installed on gas storage tank 5, second needle valve 23 is installed on the metal pipeline between low vacuum calibration chamber 6 and gas storage tank 5, low vacuum calibration chamber 6 is further connected with low vacuum sealed cavity 9 through metal pipeline, first all-metal angle valve 26 is installed on the metal pipeline between low vacuum calibration chamber 6 and low vacuum sealed cavity 9, low vacuum calibration chamber 6 is further connected with electric capacity diaphragm vacuum gauge group 12 through metal pipeline, third all-metal angle valve 28 is installed on the metal pipeline between low vacuum calibration chamber 6 and electric capacity diaphragm vacuum gauge group 12, it further includes KF low vacuum detection interface 13, KF low vacuum detection interface 13 is connected to the metal pipeline between low vacuum calibration chamber 6 and third all-metal angle valve 28 through metal pipeline, fourth all-metal angle valve 29 is installed on the metal pipeline connected with KF low vacuum detection interface 13, the outer wall of low vacuum calibration chamber 6 is coated with first heating belt 32.The high vacuum detection unit 37 includes a high vacuum calibration chamber 8, which is connected to a magnetic levitation molecular pump 3 via a metal pipe. The high vacuum calibration chamber 8 is also connected to a voltage stabilizing unit 38 via a metal pipe. A fourth needle valve 25 is installed on the metal pipe between the high vacuum calibration chamber 8 and the voltage stabilizing unit 38. The high vacuum calibration chamber 8 is also connected to a high vacuum sealing cavity 10 via a metal pipe. A second all-metal angle valve 27 is installed on the metal pipe between the high vacuum calibration chamber 8 and the high vacuum sealing cavity 10. The high vacuum calibration chamber 8 is also connected to a standard ionization vacuum gauge 14 via a metal pipe. A fifth all-metal angle valve 30 is installed on the metal pipe between the high vacuum calibration chamber 8 and the standard ionization vacuum gauge 14. The unit also includes a CF high vacuum detection interface 15, which is connected to a magnetic levitation molecular pump 3 via a metal pipe. A metal pipe is connected between the fifth all-metal angle valve 30 and the high vacuum calibration chamber 8. A sixth all-metal angle valve 31 is installed on the metal pipe connected to the CF high vacuum detection interface 15. The outer wall of the high vacuum calibration chamber 8 is covered with a second heating band 33. The voltage stabilizing unit 38 includes a voltage stabilizing chamber 7. One end of the voltage stabilizing chamber 7 is connected to the low vacuum calibration chamber 6 through a metal pipe, and the other end of the voltage stabilizing chamber 7 is connected to the high vacuum calibration chamber 8 through a metal pipe. A first capacitive thin-film vacuum gauge 11 is installed on the voltage stabilizing chamber 7. The low vacuum sealing chamber 9 is an all-metal structure and is sealed through the KF low vacuum detection interface. The high vacuum sealing chamber 10 is an all-metal structure and is sealed through the CF high vacuum detection interface. The capacitive thin-film vacuum gauge group 12 includes a range of 1.0 × 10. -1 Pa -1.33×10 1 Pa, 1.33 × 10 1 Pa -1.33×10 2 Pa, 1.33 × 10 2 Pa -1.33×10 3 Pa and 1.33×10 3 Pa -1.33×10 4 Pa, 1.33 × 10 4 Pa -1.33×10 5 A capacitive thin-film vacuum gauge with a range of 1.0 × 10 Pa; the standard ionization vacuum gauge 14 has a measuring range of 1.0 × 10 Pa. -1 Pa-1.0×10 -5 Pa; the measuring range of the first capacitive thin-film vacuum gauge 11 is 1.33 × 10 Pa. 2 Pa -1.33×10 3 Pa, the measuring range of the second capacitive thin-film vacuum gauge 34 is 1.33 × 10 Pa. 3 Pa -1.33×10 4 Pa.

Claims

1. A vacuum gauge detection device, characterized by, The pressure control unit (35) is connected with a low vacuum detection unit (36) and a high vacuum detection unit (37) through metal pipes respectively, the low vacuum detection unit (36) is connected with a pressure stabilizing unit (38) through a metal pipe, and the pressure stabilizing unit (38) is connected with the high vacuum detection unit (37) through a metal pipe.

2. The vacuum gauge detection apparatus according to claim 1, characterized by The pressure control unit (35) comprises a mechanical pump (1) connected with the low vacuum detection unit (36) through a metal pipe, a first pneumatic valve (16), a second pneumatic valve (17) and a fifth pneumatic valve (20) are sequentially installed on the metal pipe between the mechanical pump (1) and the low vacuum detection unit (36) in the direction from the mechanical pump (1) to the low vacuum detection unit (36), a heat conduction vacuum gauge (4) is connected to the metal pipe between the second pneumatic valve (17) and the fifth pneumatic valve (20) through a metal pipe, a fourth pneumatic valve (19) and a third pneumatic valve (18) are sequentially installed on the metal pipe connected with the heat conduction vacuum gauge (4) in the direction from the heat conduction vacuum gauge (4) to the fifth pneumatic valve (20), a magnetic suspension molecular pump (3) is connected to the metal pipe between the heat conduction vacuum gauge (4) and the fourth pneumatic valve (19) through a metal pipe at one end, the magnetic suspension molecular pump (3) is connected with the high vacuum detection unit (37) at the other end, a sixth pneumatic valve (21) is installed on the metal pipe between the magnetic suspension molecular pump (3) and the high vacuum detection unit (37), a turbine molecular pump (2) is connected to the metal pipe between the first pneumatic valve (16) and the second pneumatic valve (17) through a metal pipe at one end, and the turbine molecular pump (2) is connected to the metal pipe between the fourth pneumatic valve (19) and the third pneumatic valve (18) through a metal pipe at the other end.

3. The vacuum gauge detection apparatus according to claim 2, characterized by The low vacuum detection unit (36) comprises a low vacuum calibration chamber (6), the mechanical pump (1) is connected with the low vacuum calibration chamber (6) through a metal pipeline, the low vacuum calibration chamber (6) is connected with the pressure stabilizing unit (38) through a metal pipeline, a third needle valve (24) is installed on the metal pipeline between the low vacuum calibration chamber (6) and the pressure stabilizing unit (38), the low vacuum calibration chamber (6) is further connected with a gas storage tank (5) through a metal pipeline, a first needle valve (22) and a second capacitive diaphragm vacuum gauge (34) are installed on the gas storage tank (5), a second needle valve (23) is installed on the metal pipeline between the low vacuum calibration chamber (6) and the gas storage tank (5), the low vacuum calibration chamber (6) is further connected with a low vacuum sealed cavity (9) through a metal pipeline, a first all-metal angle valve (26) is installed on the metal pipeline between the low vacuum calibration chamber (6) and the low vacuum sealed cavity (9), the low vacuum calibration chamber (6) is further connected with a capacitive diaphragm vacuum gauge group (12) through a metal pipeline, a third all-metal angle valve (28) is installed on the metal pipeline between the low vacuum calibration chamber (6) and the capacitive diaphragm vacuum gauge group (12), and a KF low vacuum detection interface (13) is further connected to the metal pipeline between the low vacuum calibration chamber (6) and the third all-metal angle valve (28) through a metal pipeline, a fourth all-metal angle valve (29) is installed on the metal pipeline connected with the KF low vacuum detection interface (13), and the outer wall of the low vacuum calibration chamber (6) is coated with a first heating belt (32).

4. The vacuum gauge detection apparatus according to claim 3, characterized by The high vacuum detection unit (37) comprises a high vacuum calibration chamber (8), the high vacuum calibration chamber (8) is connected with the magnetic suspension molecular pump (3) through a metal pipeline, the high vacuum calibration chamber (8) is further connected with the pressure stabilizing unit (38) through a metal pipeline, a fourth needle valve (25) is installed on the metal pipeline between the high vacuum calibration chamber (8) and the pressure stabilizing unit (38), the high vacuum calibration chamber (8) is further connected with a high vacuum sealed cavity (10) through a metal pipeline, a second all-metal angle valve (27) is installed on the metal pipeline between the high vacuum calibration chamber (8) and the high vacuum sealed cavity (10), the high vacuum calibration chamber (8) is further connected with a standard ionization vacuum gauge (14) through a metal pipeline, a fifth all-metal angle valve (30) is installed on the metal pipeline between the high vacuum calibration chamber (8) and the standard ionization vacuum gauge (14), a CF high vacuum detection interface (15) is further connected to the metal pipeline between the fifth all-metal angle valve (30) and the high vacuum calibration chamber (8) through a metal pipeline, a sixth all-metal angle valve (31) is installed on the metal pipeline connected with the CF high vacuum detection interface (15), and the outer wall of the high vacuum calibration chamber (8) is coated with a second heating belt (33).

5. The vacuum gauge detection apparatus according to claim 4, characterized by The voltage stabilizing unit (38) comprises a voltage stabilizing chamber (7) connected with the low vacuum calibration chamber (6) through a metal pipeline at one end and connected with the high vacuum calibration chamber (8) through a metal pipeline at the other end, and a first capacitive diaphragm vacuum gauge (11) is installed on the voltage stabilizing chamber (7).

6. The vacuum gauge detection apparatus according to claim 4, characterized by The low vacuum sealed cavity (9) is a full-metal structure and is sealed through a KF low vacuum detection interface.

7. The vacuum gauge detection apparatus according to claim 4, characterized by The high vacuum sealed cavity (10) is a full-metal structure and is sealed through a CF high vacuum detection interface.

8. The vacuum gauge detection apparatus according to claim 4, characterized by The capacitance diaphragm vacuum gauge group (12) includes capacitance diaphragm vacuum gauges with a range of 1.0 x 10 -1 Pa - 1.33 x 10 1 Pa, 1.33 x 10 1 Pa - 1.33 x 10 2 Pa, 1.33 x 10 2 Pa - 1.33 x 10 3 Pa, 1.33 x 10 3 Pa - 1.33 x 10 4 Pa, 1.33 x 10 4 Pa - 1.33 x 10 5 Pa.

9. The vacuum gauge detection apparatus according to claim 4, characterized by The standard ionization vacuum gauge (14) has a range of 1.0 x 10 -1 Pa - 1.0 x 10 -5 Pa.

10. The vacuum gauge detection apparatus according to claim 5, characterized by The first capacitance diaphragm vacuum gauge (11) has a range of 1.33 x 10 2 Pa - 1.33 x 10 3 Pa. The second capacitance diaphragm vacuum gauge (34) has a range of 1.33 x 10 3 Pa - 1.33 x 10 4 Pa.

Images