Low-vacuum fluidized bed powder loading system suitable for various methods and using method

Abstract

The invention provides a low-vacuum fluidized bed powder loading system suitable for various methods and a using method. The low-vacuum fluidized bed powder loading system comprises a process generation device, a pipeline, a powder fluidization chamber and a power device, and a gas storage device, the process generation device, the powder fluidization chamber and the power device are sequentially communicated through the pipeline; the process generation device is used for generating aerosol, a flow controller is arranged on a pipeline between the process generation device and the gas storage device, the powder fluidization chamber is used for placing powder to be coated / modified, and a valve system is arranged on a pipeline between the powder fluidization chamber and the power device. The power device is matched with the valve system to regulate system pressure and keep system vacuum. By adopting the multi-section type-grading unit, stable operation can be achieved in a wide-range low-vacuum interval, dual precise control over the powder particle size and the loading capacity is achieved, by adopting the modular design, high compatibility is achieved, the maintenance and overhaul requirements are reduced, and the equipment cost and the operation cost are reduced.

Description

TECHNICAL FIELD

[0001] The present application relates to the field of powder material surface coating and modification, specifically, a low-vacuum fluidized bed powder loading system suitable for various methods and a use method. BACKGROUND

[0002] In modern industry, powder loading technology is one of the key steps in preparing high-performance materials, and is widely used in the fields of catalysts, energy storage materials, drug carriers, additive manufacturing powders, etc.

[0003] The existing Chinese patent with publication number CN221797655U discloses a micro-nano powder surface deposition coating material modification device and equipment, which includes a coating material modification device, the coating material modification device includes at least one deposition coating pipeline module, the deposition coating pipeline module includes an inlet end, an outlet end and a pipeline, and the pipeline is provided with a fluidized state coating material or gaseous coating precursor material inlet pipe, the thickness of the micro-nano powder surface deposition coating material modification is determined according to the length of the deposition coating pipeline module and the deposition time.

[0004] Traditional powder loading technology is usually carried out under normal pressure or high vacuum conditions. Although these methods can meet the experimental requirements to some extent, they still have some defects and limitations that are difficult to overcome.

[0005] Firstly, under normal pressure operating environment, the powder is easily disturbed by oxygen and water vapor during the loading process due to the inability to effectively isolate external air. This disturbance is particularly fatal to some environmentally sensitive precursors, which may lead to decomposition or side reactions of the precursors, thereby affecting the purity and performance of the final product. In addition, normal pressure operation may also cause oxidation or hydrolysis of sensitive materials, which limits their application in certain fields.

[0006] Secondly, the traditional fixed bed design is prone to channeling and dead zone phenomena, that is, the powder is not evenly distributed in the bed, with some areas being densely packed and others being relatively sparse. This uneven distribution can lead to inconsistent contact areas of reactants during the loading process, thereby affecting the uniformity of the loading and the consistency of the product.

[0007] In summary, the existing powder loading technology has certain limitations under normal pressure and high vacuum conditions, and it is urgent to develop a new type of powder loading system. This system should have the characteristics of low cost and easy expansion, and be able to operate stably in the "low vacuum-wide pressure" range to meet the preparation requirements of high-performance materials in different application fields. SUMMARY

[0008] Aiming at the defects in the prior art, the present application aims to provide a low-vacuum fluidized bed powder loading system suitable for various methods and a use method.

[0009] The low-vacuum fluidized bed powder loading system suitable for various methods provided by the present application comprises a process generating device, a pipeline, a powder fluidization chamber and a power device, a gas storage device, the process generating device, the powder fluidization chamber and the power device being sequentially communicated through the pipeline. The process generating device is used for generating aerosol, a flow controller is arranged on the pipeline between the process generating device and the gas storage device, the powder fluidization chamber is used for placing powder to be coated / modified, a valve system is arranged on the pipeline between the powder fluidization chamber and the power device, and the power device cooperates with the valve system to regulate and control the system pressure and keep the system vacuum.

[0010] Preferably, the process generating device comprises a CVD generating device, an ALD generating device, a Sol-Gel generating device, a plasma polymerization generating device and a photochemical grafting generating device, and the pipeline communicated between the process generating device and the powder fluidization chamber comprises a stainless steel pipeline.

[0011] Preferably, the gas delivered by the gas storage device comprises N2 or Ar, the flow controller adjusts the flow range entering the system to be 0-20 L / min, and the pipeline communicated between the gas storage device and the process generating device comprises a hose pipeline.

[0012] Preferably, the valve system comprises a pressure gauge and a valve, the pressure gauge is arranged between the valve and the powder fluidization chamber, the power device comprises a vacuum pump, the power device cooperates with the valve system to regulate and control the system pressure to be less than 10 Pa, the pipeline communicated between the powder fluidization chamber and the valve comprises a stainless steel pipeline, and the pipeline communicated between the valve and the vacuum pump comprises a KF25 corrugated pipe.

[0013] Preferably, the process generating device, the powder fluidization chamber, the valve and the vacuum pump are all sealed and connected through sealing pads.

[0014] Preferably, the powder fluidization chamber comprises a chamber top cover, a screw flange, a chamber body and a chamber base, the chamber body is arranged on the chamber base, and the chamber top cover is sealed and connected with the chamber body through the screw flange.

[0015] Preferably, the chamber top cover is internally provided with a top cover hollow layer, the chamber top cover is provided at the top with a gas output interface and a gas input interface, and a plurality of porous filter columns are detachably installed at the bottom of the chamber top cover, and the porous filter columns, the top cover hollow layer and the gas output interface are sequentially communicated.

[0016] Preferably, the bottom center of the chamber top cover is provided with a detachable chamber internal gas input pipeline in communication with the gas input interface, and the chamber internal gas input pipeline extends to the chamber bottom of the chamber body.

[0017] Preferably, the chamber body comprises a hollow glass cylinder, the height-diameter ratio of the chamber body is greater than or equal to 2.5, the chamber top cover comprises a stainless steel top cover, and the chamber base comprises a stainless steel base.

[0018] According to the application, a use method of a low-vacuum fluidized bed powder loading system suitable for various methods is provided, comprising the following steps: Step S1, placing the powder to be coated / modified at the chamber bottom of the chamber body, then sealingly installing the chamber top cover, and connecting the pipelines; Step S2, checking the remaining connections to ensure that they are tightly screwed, and ensuring that the flow controller parameter is 0 and the valve system is in a closed state; Step S3, opening the vacuum pump, opening the valve system, and vacuumizing the system until the pressure gauge reaches a preset value, and then closing the valve system; Step S4, after ensuring that the system is in a sealed state, opening the valve system, setting the flow controller value, and allowing the gas to flow into the chamber in the chamber body from the gas storage device through the pipeline, and allowing the gas flow to drive the powder in the chamber to flow; Step S5, starting the process generating device, allowing the aerosol generated by the process generating device to be transported to the chamber through the pipeline and coated on the surface of the powder, and when the loading amount reaches a preset value, closing the process generating device and continuing to blow the gas to blow away the residues in the pipeline; Step S6, after the blowing is completed, setting the flow controller value to 0, closing the valve system, and taking out the coated powder.

[0019] Compared with the prior art, the application has the following beneficial effects: 1. The application adopts a multi-section - grading unit, including a powder fluidization unit, a process generating unit, a transportation unit, and a vacuum control unit, can stably operate in a wide range of low vacuum intervals, realizes double precise control of powder particle size and loading amount, is suitable for nanoscale coating or doping of high-value-added powder such as catalysts, new energy materials, and drug carriers, significantly reduces the equipment cost and operation cost by adopting low-vacuum technology, has high compatibility by adopting modular design, reduces the demand for maintenance and repair, and maximizes the cost-effectiveness as a whole.

[0020] 2、The low vacuum fluidized bed powder loading system provided by the application can be rapidly switched in the same device through multiple processes, can stably operate in the range from low vacuum to wide pressure, can adapt to multiple different process conditions and operation requirements, can rapidly switch different load processes without large-scale equipment adjustment or replacement, and provides great convenience for experiments and production. BRIEF DESCRIPTION OF DRAWINGS

[0021] Other features, objects, and advantages of the application will become more apparent from the following detailed description of non-limiting embodiments, which is to be read in conjunction with the accompanying drawings: Figure 1 The low vacuum fluidized bed powder loading system provided by the application can be rapidly switched in the same device through multiple processes, can stably operate in the range from low vacuum to wide pressure, can adapt to multiple different process conditions and operation requirements, can rapidly switch different load processes without large-scale equipment adjustment or replacement, and provides great convenience for experiments and production. Figure 2 The low vacuum fluidized bed powder loading system provided by the application can be rapidly switched in the same device through multiple processes, can stably operate in the range from low vacuum to wide pressure, can adapt to multiple different process conditions and operation requirements, can rapidly switch different load processes without large-scale equipment adjustment or replacement, and provides great convenience for experiments and production.

[0022] The low vacuum fluidized bed powder loading system provided by the application can be rapidly switched in the same device through multiple processes, can stably operate in the range from low vacuum to wide pressure, can adapt to multiple different process conditions and operation requirements, can rapidly switch different load processes without large-scale equipment adjustment or replacement, and provides great convenience for experiments and production. DETAILED DESCRIPTION

[0023] The application will be described in detail below with reference to specific embodiments. The following embodiments will help those skilled in the art to further understand the application, but do not limit the application in any form. It should be pointed out that those skilled in the art can make several changes and improvements without departing from the concept of the application. These all belong to the protection scope of the application.

[0024] Example 1 As shown in Figure 1 and 2 The low vacuum fluidized bed powder loading system provided by the application can be rapidly switched in the same device through multiple processes, can stably operate in the range from low vacuum to wide pressure, can adapt to multiple different process conditions and operation requirements, can rapidly switch different load processes without large-scale equipment adjustment or replacement, and provides great convenience for experiments and production.

[0025] The application is composed of a process generating device 1, a pipeline 3 for conveying gas and aerosol, a powder fluidization chamber 4 for fluidizing powder, a valve system for controlling the vacuum pumping speed of the system, and a power device for maintaining the vacuum of the system.

[0026] The pipeline 3 is used for connecting each upper and lower unit module and controlling the gas flow to convey gas and aerosol, and the end of the pipeline 3 is provided with a connecting structure, and the size meets the connection of each unit. The connection of the process generating device 1, the powder fluidization chamber 4, the valve 6 and the vacuum pump 7 with the pipeline 3 is sealed and connected by a sealing gasket, so that the system still maintains a sealed state under low vacuum.

[0027] The process generating device 1 is used for generating aerosol required for coating, and the process generating device 1 includes: CVD generating device, ALD generating device, Sol-Gel generating device, plasma polymerization generating device, photochemical grafting generating device and various process generating devices, which can select a specific process generating device according to the coating requirement, and adopt the same connector, and can switch the appropriate process generating device according to the process requirement. The pipeline 3 communicated between the process generating device 1 and the powder fluidization chamber 4 includes a stainless steel metal pipeline. A 1 / 4 VCR connector is customized on the process generating device 1 and connected with the pipeline 3, and the aerosol generated by the process generating device 1 can be introduced into the system through the VCR connector.

[0028] The gas delivered by the gas storage device includes high-purity N2 or Ar, and other gases that can fluidize the powder in the chamber can be used instead of the gas used in the system. The flow controller 2 adjusts the flow range entering the system to be 0-20 L / min, and the accuracy of the flow controller 2 is 1 decimal place. When the value of the flow controller 2 is 0, no gas flow passes through, and when the flow controller 2 is set to a certain value, the gas will be input into the system from the gas cylinder through the pipeline 3. The pipeline 3 communicated between the gas storage device and the process generating device 1 includes a 6mm hose pipeline, that is, the pipeline 3 between the process generating device 1 and the flow controller 2 and the pipeline 3 between the flow controller 2 and the gas storage device all adopt 6mm hose pipelines, and the hose pipelines are all connected through 6mm quick connectors, and the 6mm quick connectors can be made of stainless steel or plastic material.

[0029] The valve system for controlling the vacuum pumping speed of the system includes a pressure gauge 5 and a valve 6, and the pressure gauge 5 is arranged between the valve 6 and the powder fluidization chamber 4. The vacuum pumping speed of the power device can be controlled, and the real-time pressure of the system can be monitored. The power device includes a vacuum pump 7, which cooperates with the valve system to control the pressure of the system to be 10 -1 -10 6Pa range. The vacuum pump 7 is a dry pump, and other pumps having similar functions can be used instead. The valve 6 before the vacuum pump 7 is a hand valve, and other valves having similar functions can be used instead. The power device cooperates with the valve system to control the system pressure to be less than 10 Pa. The pipeline 3 between the powder fluidization chamber 4 and the valve 6 comprises a stainless steel pipeline, and the pipeline 3 is connected to the corresponding module unit through a VCR interface. The pipeline 3 between the valve 6 and the vacuum pump 7 comprises a KF25 corrugated pipe, and the pipeline 3 is connected through a KF25 flange. The sealing ring at the KF connection is an O-shaped sealing ring made of Teflon material with a corresponding size. A metal sealing gasket is added at the VCR interface of the pipeline structure 3. The gasket is a silver-plated 316 stainless steel O-shaped gasket, generally of 1 / 4 size.

[0030] The valve 6 and the vacuum pump 7 are combined to control the vacuum state of the system. When the powder fluidization chamber 4 is loaded with powder and the pipeline 3 is completely sealed and connected, the vacuum pump 7 and the valve 6 are opened, the pressure in the system is reduced, and the degree of opening of the valve 6 can be controlled to control the pumping capacity of the vacuum pump 7 on the system. When the valve 6 is completely closed, the pumping capacity of the vacuum pump 7 on the system is 0, and when the valve 6 is completely opened, the pumping capacity of the vacuum pump 7 on the system is maximum.

[0031] The powder fluidization chamber 4 for fluidizing powder can be used for powder in the range of hundreds of nanometers to hundreds of microns. The structure has a high aspect ratio, which can make the powder reach an ideal fluidization state. Even if the powder is in a boiling state, the internal structure design can keep the powder only in the chamber and not be sucked into other positions in the system. The powder fluidization chamber 4 comprises a chamber top cover 8, a threaded flange 9, a chamber body 10, and a chamber base 11. The chamber body 10 is arranged on the chamber base 11, and the chamber top cover 8 is sealingly connected to the chamber body 10 through the threaded flange 9. The chamber top cover 8 is internally provided with a top cover hollow layer 14. The chamber top cover 8 is provided at the top with a gas output interface 12 and a gas input interface 13. A plurality of porous filter columns 15 are detachably installed at the bottom of the chamber top cover 8. The porous filter columns 15, the top cover hollow layer 14, and the gas output interface 12 are sequentially connected. A detachable chamber internal gas input pipeline 16 is arranged at the center of the bottom of the chamber top cover 8. The chamber internal gas input pipeline 16 is connected to the gas input interface 13, and the chamber internal gas input pipeline 16 extends to the chamber bottom of the chamber body 10.

[0032] In practical applications, the chamber body 10, the chamber base 11 and the threaded flange 9 have been welded in advance, the gas output interface 12 and the gas input interface 13 are welded above the openable chamber top cover 8, the detachable chamber internal gas input pipeline 16 is centrally arranged below the chamber top cover 8, the length of the chamber internal gas input pipeline 16 is slightly shorter than the chamber height and is in communication with the gas input interface 13, the detachable porous filter column 15 is threadedly connected below the chamber top cover 8, the porous filter column 15 is mainly used for gas output and preventing the powder 17 in the chamber from overflowing. The chamber top cover 8 is internally designed with a top cover hollow layer 14, the hollow structure is used for transmitting the gas from the porous filter column 15 to the gas output interface 12, the powder 17 that needs to be coated / modified is placed in the gas output interface 12, the metal sealing ring is placed on the stainless steel threaded flange 9, the assembled chamber top cover 8 is placed above the threaded flange 9 and is aligned with the hole position, the stainless steel screw is used for fixing and tightening the sealing, the gas input and output VCR interfaces above the chamber top cover 8 are connected with the corresponding pipelines 3 of the system, gaskets are added at the interfaces and are tightly attached, and the air tightness of the equipment is ensured. The mixed connection of the cavity is achieved by using mechanical connection and cementation connection to ensure the sealing property of the sealed cavity during use.

[0033] The chamber body 10 is made of tempered glass material, which can withstand the pressure caused by the pressure difference between the inside and outside of the chamber and is convenient for observing the powder fluidization state in the chamber. The chamber body 10 is a hollow glass cylinder with a high diameter ratio (≥2.5), no upper and lower surfaces, a wall thickness of 4 mm and an outer diameter of 7 cm. The chamber body 10 is connected with a special circular ring threaded flange 9 with an inner diameter of 7 cm, an outer diameter of 9 cm and a thickness of 1 cm, and the top of the chamber body 10 is flush with the upper surface of the threaded flange 9. The chamber base 11 is a solid stainless steel cylinder with a thickness of 1 cm and a diameter of 9 cm, and the cavity is connected with the lower base center in overlap. The chamber top cover 8 is a stainless steel threaded flange sheet with a diameter of 9 cm and a thickness of 1 cm, the inside of the top cover flange sheet contains a top cover hollow layer 14 with a thickness of 3 mm and a diameter of 6 cm, the lower surface is provided with four internal thread interfaces for installing the special porous filter column 15, the lower surface center is provided with one hole for connecting the chamber internal gas input pipeline 16, the length of the gas input pipeline 16 is slightly shorter than the chamber height, the top is provided with two holes and is welded with 1 / 4 VCR external thread joints, the two joints are connected with the gas input and output pipelines respectively, the inner wall of the chamber body 10, the upper surface of the chamber base 11 and the lower surface of the chamber top cover 8 are all specially treated so that the powder is not easy to adhere to the inner wall. The metal sealing ring at the threaded flange 9 is an O-shaped sealing ring made of oxygen-free copper material, and the thickness of the sealing ring is 2 mm. The model of the stainless steel screw and nut combination at the chamber top cover 8 and the threaded flange 9 is No. 13.

[0034] The low-vacuum fluidized bed powder loading system of the present application, which is suitable for various processes, in use, will need to place the powder 17 to be coated in the powder fluidization chamber 4, connect the unit pipelines 3, start the vacuum pump 7, open the valve 6, let the system be in a stable low-vacuum state (<10 Pa), set the flow controller 2 parameters and introduce inert gas into the system, adjust the flow to make the powder 17 in a critical fluidization state, when the pressure gauge 5 value is observed to be stable, start the process generating device 1, and through the gas and pipeline 3, bring the generated aerosol into the powder fluidization chamber 4 to coat / modify the powder 17.

[0035] The present application includes a powder fluidization unit, a process generating unit, a transport unit, and a vacuum control unit, which can be stably operated in a low-vacuum range of 10 -1 -10 6 Pa, realizes double precise control of powder particle size and loading amount, and is suitable for nanoscale coating or doping of high-value-added powders such as catalysts, new energy materials, and drug carriers.

[0036] The present application significantly reduces equipment costs and operating costs by using low-vacuum technology. Low-vacuum pumps and related accessories are more economical than high-vacuum systems, and at the same time, due to the simplification of system design, the need for maintenance and repair is reduced, further reducing long-term operating costs. In addition, the high compatibility and modular design of the system reduce the dependence on a variety of specialized equipment, thereby maximizing cost efficiency as a whole.

[0037] The present application realizes the rapid switching of various processes such as aerosol, ALD, Sol-Gel, mechanical fusion, plasma polymerization, and photochemical grafting in the same device through a multi-section-staged unit. The present application can be stably operated in a range from low vacuum to wide pressure, which means that it can adapt to various different process conditions and operation requirements. This flexibility enables the system to quickly switch different loading processes such as CVD, ALD, Sol-Gel, and various powder loading technologies without the need for large-scale equipment adjustment or replacement. This provides great convenience for experiments and production, and also provides more possibilities for process optimization and product development.

[0038] The present application effectively reduces channeling and dead zone phenomena by optimizing the design of the fluidized bed, improving the uniform distribution of the powder in the bed. This uniformity is crucial for ensuring product quality, as it ensures that each powder particle can be uniformly subjected to loading treatment, thereby improving the consistency and reliability of the product.

[0039] The application can simultaneously and accurately control the load amount, which is crucial for improving material performance and meeting the needs of specific applications. This means that the properties of the powder can be adjusted according to the needs of different applications, such as the activity of catalysts, the release rate of drug carriers, etc., thereby customizing high-performance materials for specific applications.

[0040] Embodiment 2 Based on Embodiment 1, a method for using a low-vacuum fluidized bed powder loading system suitable for various methods according to the application is provided, which includes the following steps: Step S1, place the powder 17 to be coated / modified at the bottom of the chamber body 10, then seal the chamber top cover 8, and connect the pipeline 3; Step S2, check the remaining connections to ensure they are tightened, and ensure that the flow controller 2 is set to 0 and the valve system is closed; Step S3, turn on the vacuum pump 7, open the valve system, and perform vacuum pumping on the system until the pressure gauge 5 reaches the preset value, then close the valve system; Step S4, after ensuring that the system is in a sealed state, open the valve system, set the value of the flow controller 2, and allow the gas to flow from the gas storage device into the chamber of the chamber body 10 through the pipeline 3, and the gas flow drives the powder 17 in the chamber to flow; Step S5, start the process generating device 1, and the aerosol generated by the process generating device 1 is transported to the chamber through the pipeline 3 to coat the surface of the powder 17, and when the load amount reaches the preset value, the process generating device 1 is turned off, and the gas continues to blow away the remaining substances in the pipeline 3; Step S6, after the blowing is completed, set the value of the flow controller 2 to 0, close the valve system, and take out the coated powder 17.

[0041] The application can realize a powder particle size-load amount double-controllable fluidized bed device and method under low vacuum conditions, which is especially suitable for catalysts, drug microspheres, energy storage materials, additive manufacturing powders, and other high-value-added powders that require nanoscale coating or doping. More specifically, the method for using a low-vacuum fluidized bed powder loading system suitable for various methods according to the application includes the following steps: 1. Place the powder 17 to be coated in the powder fluidization chamber 4 (the loose bulk height of the powder 17 in the chamber is ≥1 cm), place an oxygen-free copper sealing ring on the chamber top screw flange 9, place the chamber top cover 8 on the oxygen-free copper sealing ring and align the hole position, fasten with 13mm bolts and nuts (tighten until the pressure in the chamber is <1 torr without air leakage), connect the VCR interface above the chamber top cover 8 for gas input and output with the corresponding pipeline interface of the system, and add silver-plated gaskets to assist in sealing the connection; 2, after the installation of the powder fluidization chamber 4, check whether the connection of other parts of the system is tightened, at the same time, ensure that the parameter of the flow controller 2 is 0, and the hand valve in front of the vacuum pump 7 is in the closed state; 3, open the vacuum pump 7, turn the hand valve to make it in the fully open state, vacuumize the system, observe the value of the pressure gauge 5, when it is <1 torr, turn the hand valve to make it in the fully closed state, observe whether the value of the pressure gauge 5 increases, if it increases, tighten the connection of the system again, until the value of the pressure gauge 5 is stable; 4, after ensuring that the system is in a sealed state, open the hand valve, set the value of the flow controller 2, the gas flow (mostly high-purity N2) flows into the chamber through the gas inlet pipe 16 in the system pipe 3, because the gas inlet pipe 16 penetrates into the bottom layer of the powder 17, the input gas flow diffuses upward from all around, driving the powder 17 in the chamber to flow, the flow rate is changed to adjust the fluidization state of the powder 17, and the fluidization state of the powder 17 in the chamber is observed, when the powder 17 is in a flowing but non-bubbling state, the flow value at this time is optimal; 5, after determining the gas flow, start the process generating device 1, the generated aerosol will be transported to the powder fluidization chamber 4 through the pipe 3 along the gas flow and coated on the surface of the powder 17; when the load reaches the required value, the aerosol generating device is turned off, and the gas is continuously introduced for a period of time to purge the residues in the system pipe 3; 6, after the purging is completed, first set the value of the flow controller 2 to 0, tighten the hand valve to make it in the fully closed state, then loosen the gas input VCR interface of the chamber top cover 8, observe that the value of the pressure gauge 5 approaches to the atmospheric pressure, then loosen the gas output VCR interface of the chamber top cover 8, and then take down the chamber and take out the coated powder 17.

[0042] In the description of the present application, it should be understood that the orientation or positional relationship indicated by the terms "upper", "lower", "front", "rear", "left", "right", "vertical", "horizontal", "top", "bottom", "inner", "outer" and the like is based on the orientation or positional relationship shown in the drawings, and is only for the convenience of describing the present application and simplifying the description, and therefore cannot be understood as indicating or implying that the devices or elements referred to must have a particular orientation, be constructed and operated in a particular orientation, and therefore cannot be understood as limiting the present application.

[0043] The specific embodiments of the present application are described above. It should be understood that the present application is not limited to the above specific embodiments, and those skilled in the art can make various changes or modifications within the scope of the claims, which does not affect the essential content of the present application. The embodiments of the present application and the features in the embodiments can be arbitrarily combined with each other without conflict.

Claims

1. A low vacuum fluidized bed powder loading system suitable for use in a variety of processes, characterized in that, It comprises: a process generating device (1), a pipeline (3), a powder fluidization chamber (4), and a power device, a gas storage device, a process generating device (1), a powder fluidization chamber (4), and a power device are sequentially communicated through a pipeline (3); The process generating device (1) is used to generate aerosol, a flow controller (2) is arranged on the pipeline (3) between the process generating device (1) and the gas storage device, the powder fluidization chamber (4) is used to place the powder (17) to be coated / modified, a valve system is arranged on the pipeline (3) between the powder fluidization chamber (4) and the power device, and the power device cooperates with the valve system to regulate and control the system pressure and keep the system vacuum.

2. The low vacuum fluidized bed powder loading system suitable for multiple processes of claim 1, wherein, The process generating device (1) comprises: a CVD generating device, an ALD generating device, a Sol-Gel generating device, a plasma polymerization generating device, and a photochemical grafting generating device, and the pipeline (3) communicated between the process generating device (1) and the powder fluidization chamber (4) comprises a stainless steel pipeline.

3. The low vacuum fluidized bed powder loading system suitable for multiple processes of claim 1, wherein, The gas delivered by the gas storage device comprises N2 or Ar, the flow controller (2) adjusts the flow range entering the system to be 0-20 L / min, and the pipeline (3) communicated between the gas storage device and the process generating device (1) comprises a hose pipeline.

4. The low vacuum fluidized bed powder loading system suitable for multiple processes of claim 1, wherein, The valve system comprises: a pressure gauge (5) and a valve (6), the pressure gauge (5) is arranged between the valve (6) and the powder fluidization chamber (4), the power device comprises a vacuum pump (7), the power device cooperates with the valve system to regulate and control the system pressure to be less than 10 Pa, the pipeline (3) communicated between the powder fluidization chamber (4) and the valve (6) comprises a stainless steel pipeline, and the pipeline (3) communicated between the valve (6) and the vacuum pump (7) comprises a KF25 corrugated pipe.

5. The low vacuum fluidized bed powder loading system suitable for multiple processes of claim 1, wherein, The connection between the process generating device (1), the powder fluidization chamber (4), the valve (6), and the vacuum pump (7) and the pipeline (3) is sealed and connected through a sealing gasket.

6. The low vacuum fluidized bed powder loading system suitable for multiple processes of claim 1, wherein, The powder fluidization chamber (4) comprises: a chamber top cover (8), a screw flange (9), a chamber body (10), and a chamber base (11), the chamber body (10) is arranged on the chamber base (11), and the chamber top cover (8) is sealed and connected with the chamber body (10) through the screw flange (9).

7. The low vacuum fluidized bed powder loading system suitable for multiple processes of claim 6, wherein, The chamber top cover (8) is internally provided with a top cover hollow layer (14), and the chamber top cover (8) is provided with a gas output interface (12) and a gas input interface (13) at the top, and a plurality of porous filter columns (15) are detachably installed at the bottom of the chamber top cover (8), and the porous filter columns (15), the top cover hollow layer (14), and the gas output interface (12) are sequentially communicated.

8. The low vacuum fluidized bed powder loading system suitable for multiple processes of claim 7, wherein, A detachable chamber internal gas input pipeline (16) is arranged at the center of the bottom of the chamber top cover (8), the chamber internal gas input pipeline (16) is communicated with the gas input interface (13), and the chamber internal gas input pipeline (16) extends to the chamber bottom of the chamber body (10).

9. The low vacuum fluidized bed powder loading system suitable for multiple processes of claim 6, wherein, The chamber body (10) comprises a hollow glass cylinder, the height-diameter ratio of the chamber body (10) is greater than or equal to 2.5, the chamber top cover (8) comprises a stainless steel top cover, and the chamber base (11) comprises a stainless steel base.

10. A method of using a low vacuum fluidized bed powder loading system suitable for a variety of processes as claimed in any one of claims 1 to 9, characterized in that, The method comprises the following steps: S1, placing the powder (17) to be coated / modified at the bottom of the chamber of the chamber body (10), then sealingly installing the chamber top cover (8), and connecting the pipeline (3); S2, checking the remaining connections to ensure that they are tightly screwed, and ensuring that the parameters of the flow controller (2) are 0 and the valve system is in a closed state; S3, opening the vacuum pump (7), opening the valve system, and performing vacuumization on the system until the pressure gauge (5) reaches a preset value, and then closing the valve system; S4, after ensuring that the system is in a sealed state, opening the valve system, setting the value of the flow controller (2), and causing the gas to flow into the chamber of the chamber body (10) from the gas storage device through the pipeline (3), so that the gas flow drives the powder (17) in the chamber to flow; S5, starting the process generating device (1), causing the aerosol generated by the process generating device (1) to be transported to the chamber through the pipeline (3) and coated on the surface of the powder (17), and when the load reaches a preset value, closing the process generating device (1) and continuing to blow the gas to blow away the residues in the pipeline (3); S6, after the blowing is completed, setting the value of the flow controller (2) to 0, closing the valve system, and taking out the coated powder (17).

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