Material shuttle and testing machine
By designing light-transmitting channels with gathering holes and extension grooves on the shuttle, the problem that light signals cannot be effectively guided to the detection cavity in the existing technology is solved, and more efficient material warping detection is achieved.
Patent Information
- Application Number
- CN202422973519.X
- Authority / Receiving Office
- CN · China
- Patent Type
- Utility models(China)
- Current Assignee / Owner
- Filing Date
- 2024-12-03
- Publication Date
- 2025-12-26
- Estimated Expiration
- 2034-12-03
AI Technical Summary
The light-transmitting groove in the existing technology cannot effectively guide the light signal to the detection cavity, resulting in insufficient detection performance and inability to effectively detect material warping.
Design a shuttle with a light-transmitting channel including a gathering hole and an extension groove. One end of the gathering hole is opened on the side wall of the shuttle body, and the other end is connected to the extension groove. The cross-sectional width of the extension groove is larger than the cross-sectional width of the gathering hole, which can guide the light signal into the detection cavity and improve the effective light throughput.
The design of the feed shuttle significantly improves the transmission efficiency of optical signals, enhances detection performance, and effectively detects material lifting phenomena.
Smart Images
Figure CN223727654U_ABST
Abstract
Description
TECHNICAL FIELD
[0001] The utility model relates to the technical field of semiconductor testing, especially to a magazine and a testing machine. BACKGROUND
[0002] In the semiconductor testing process, the chip small material needs to be taken and placed on the magazine by the taking and placing material pressure head. Since there is a certain probability that the chip small material falls at a certain angle in the taking and placing material channel of the magazine, the chip small material is warped. In order to detect the chip small material, a light transmission groove is usually opened on the magazine to detect the warping of the chip small material through a light signal. However, the light transmission groove in the prior art is a rectangular groove directly opened downward from the top surface of the magazine. The size of the cross section of the rectangular groove is consistent, and the light signal cannot be guided to the detection cavity in a larger range. SUMMARY
[0003] The utility model aims to provide a magazine which can guide the light signal collected from the outside to the detection cavity to a greater extent and improve the detection performance of the effective light flux. In addition, the utility model provides a testing machine comprising the above magazine.
[0004] To achieve the above-mentioned purpose, the utility model provides the following technical scheme:
[0005] In a first aspect, the utility model provides a magazine. The magazine is formed with a detection cavity for carrying a to-be-detected object. The magazine comprises a magazine body. The magazine body has a light transmission channel. The light transmission channel comprises a collection hole and an extension groove. One end of the collection hole is opened in the side wall of the magazine body, and the other end is communicated with the extension groove. The end of the extension groove away from the collection hole is used to communicate with the detection cavity. The extension groove is recessed in the top surface of the magazine body. The extension groove and the collection hole are cut by a cross section perpendicular to the extension direction of the extension groove. The cross section width of the extension groove is greater than the cross section width of the collection hole.
[0006] Further, the cross section of the collection hole is in the shape of a waist. The length direction of the waist shape is perpendicular to the top surface of the magazine body. The width direction of the waist shape is parallel to the top surface of the magazine body.
[0007] Further, the cross section of the extension groove is in the shape of a rectangle.
[0008] Further, the bottom end of the collection hole away from the top surface of the magazine body is lower than the groove bottom of the extension groove. The top end of the collection hole close to the top surface of the magazine body is higher than the groove bottom of the extension groove.
[0009] Further, the side surface of the magazine body comprises an inclined surface close to the top surface of the magazine body. The inclined surface gradually extends outward along the direction gradually away from the top surface of the magazine body. The collection hole is opened in the inclined surface.
[0010] Further, the material shuttle further comprises a material placing seat mounted on the material shuttle body, the material placing seat comprises a plurality of independently arranged blocks, the plurality of blocks surround to form a detection cavity, the detection cavity comprises a material guiding section and a limiting section in communication with the material guiding section, the material guiding section gradually decreases in caliber along a direction gradually approaching the limiting section, a light guiding groove in communication with the extending groove is arranged on a surface of the material guiding section, and the limiting section is used for limiting the relative position of the product relative to each block.
[0011] In the second aspect, the utility model further provides a test machine, including the suction nozzle pressure head and the material shuttle, the suction nozzle pressure head is used for with the material shuttle body and is taken out the product in the detection cavity or loads the product to the detection cavity.
[0012] Further, the first butt joint block is provided with a first circular hole, the second butt joint block is provided with a first waist type hole, and the first circular hole and the first waist type hole are used for inserting the first guide column on the material shuttle body.
[0013] Further, the suction nozzle pressure head has a butt joint strip, the butt joint strip has a second circular hole and a second waist type hole oppositely arranged along a second direction, the second direction is perpendicular to the first direction, and the second circular hole and the second waist type hole are used for inserting the second guide column on the pressure measurement area butt joint plate.
[0014] Further, the suction nozzle pressure head comprises a pressure head and a suction nozzle, the pressure head is provided with a convex part, the suction nozzle is connected with the convex part and forms an air channel with the convex part, and the suction nozzle comprises a tapered part gradually decreasing in outer diameter along a direction gradually away from the convex part.
[0015] The material shuttle and the test machine provided by the utility model can produce the following beneficial effects:
[0016] Compared with the prior art, in the material shuttle provided by the utility model, the light transmission channel on the material shuttle body comprises a folding hole and an extending groove, one end of the folding hole is arranged on the side wall of the material shuttle body, the light signal emitted by the optical fiber emitter can be folded, the other end of the folding hole is in communication with the extending groove, the light signal can be guided to the extending groove and shot to the detection cavity through the extending groove. In the above process, since the folding hole and the extending groove are cut along the section perpendicular to the extending direction of the extending groove, the section width of the extending groove is greater than that of the folding hole, the light signal folded outside can be conducted to the detection cavity to a greater extent, and the detection performance of the effective light flux is improved.
[0017] Compared with the prior art, the test machine provided by the utility model in the second aspect has the material shuttle provided by the utility model in the first aspect, so as to have all the beneficial effects of the material shuttle provided by the utility model in the first aspect. BRIEF DESCRIPTION OF DRAWINGS
[0018] In order to more clearly illustrate the specific embodiments of the present application or the technical solutions in the prior art, the drawings needed to be used in the specific embodiments or the prior art description will be briefly introduced as follows. Obviously, the drawings described in the following are some embodiments of the present application, and other drawings can also be obtained by those skilled in the art without creative labor on the basis of these drawings.
[0019] Figure 1 A three-dimensional structure schematic diagram of a material shuttle provided by the embodiment of the present application is shown in the figure.
[0020] Figure 2 A partial enlarged schematic view of A in the figure. Figure 1
[0021] Figure 3 A partial three-dimensional structure schematic diagram of a material shuttle provided by the embodiment of the present application is shown in the figure.
[0022] Figure 4 A three-dimensional structure schematic diagram of a material discharging seat provided by the embodiment of the present application is shown in the figure.
[0023] Figure 5 A partial three-dimensional structure schematic diagram of a testing machine provided by the embodiment of the present application is shown in the figure.
[0024] Figure 6 A three-dimensional structure schematic diagram of a suction nozzle pressure head provided by the embodiment of the present application is shown in the figure.
[0025] Figure 7 A top view of a suction nozzle pressure head provided by the embodiment of the present application is shown in the figure.
[0026] Figure 8 A B-B sectional view of the figure. Figure 7
[0027] A partial enlarged schematic view of C in the figure. Figure 9 Figure 8
[0028] Figure legend: 1-material shuttle body; 11-converging hole; 12-elongated groove; 13-inclined surface; 14-first guide column; 2-material discharging seat; 21-embedded block; 22-detection cavity; 221-material guiding section; 222-limiting section; 223-light guiding groove; 3-suction nozzle pressure head; 31-first butt joint block; 311-first circular hole; 32-second butt joint block; 321-first waist-shaped hole; 33-butt joint strip; 331-second circular hole; 332-second waist-shaped hole; 34-pressure head; 341-protruding part; 35-suction nozzle; 351-tapered part; 4-adjustment gap. DETAILED DESCRIPTION
[0029] The technical solutions of the present application will be clearly and completely described below with reference to the drawings. Obviously, the described embodiments are some of the embodiments of the present application, but not all the embodiments of the present application. Based on the embodiments of the present application, all other embodiments obtained by those skilled in the art without creative labor fall within the scope of protection of the present application.
[0030] In the description of the present application, it should be pointed out that the orientation or positional relationship indicated by the terms "center", "upper", "lower", "left", "right", "vertical", "horizontal", "inner", "outer" and the like is based on the orientation or positional relationship shown in the drawings, and is only for the convenience of describing the present application and simplifying the description, and therefore cannot be understood as limiting the devices or elements indicated or implied to have a specific orientation, structure and operation, and therefore cannot be understood as limiting the present application. In addition, the terms "first", "second", "third" are only for the purpose of description, and cannot be understood as indicating or implying relative importance.
[0031] In the description of the present application, it should be pointed out that unless otherwise explicitly specified and limited, the terms "mounting", "connecting", "connecting" should be understood broadly, for example, it can be fixedly connected, or it can be detachably connected, or integrally connected; it can be mechanically connected, or it can be electrically connected; it can be directly connected, or it can be indirectly connected through an intermediate medium; it can be the communication inside two elements. For those skilled in the art, the specific meaning of the above terms in the present application can be understood according to the specific circumstances.
[0032] The specific embodiments of the present application will be described in detail below with reference to the drawings. It should be understood that the specific embodiments described herein are only used to illustrate and explain the present application, and are not used to limit the present application.
[0033] The first aspect of the embodiments of the present application is to provide a material shuttle, such as Figure 1 and Figure 2 As shown, the material shuttle is formed with a detection cavity for carrying a to-be-detected body, and the material shuttle comprises a material shuttle body 1, the material shuttle body 1 has a light transmission channel, the light transmission channel comprises a retracting hole 11 and an extension groove 12, one end of the retracting hole 11 is provided on the side wall of the material shuttle body 1, the other end is communicated with the extension groove 12, the end of the extension groove 12 away from the retracting hole 11 is used for being communicated with the detection cavity 22, the extension groove 12 is recessed on the top surface of the material shuttle body 1, and the extension groove 12 is cut off the retracting hole 11 and the extension groove 12 in a cross section perpendicular to the extension direction of the extension groove 12, and the cross section width of the extension groove 12 is greater than the cross section width of the retracting hole 11.
[0034] In combination with Figure 3 The use process of the material shuttle provided by the first aspect of the embodiments of the present application is described in detail:
[0035] The side wall of the magazine body 1 is provided with a collection hole 11, which can collect the optical signals emitted by the optical fiber transmitter and guide them to the extension groove 12. Since the cross-sectional width of the extension groove 12 is greater than that of the collection hole 11, the extension groove 12 can conduct the collected optical signals outside to the detection cavity 22 to a greater extent, thereby improving the detection performance of the effective light flux.
[0036] Specifically, when the detection cavity 22 is configured as multiple, the adjacent detection cavities 22 can also be communicated through the extension groove 12, as shown by the arrows in Figure 3 The optical signals in the previous detection cavity 22 can enter the next detection cavity 22 from the extension groove 12, and the optical signals in the next detection cavity 22 can be transmitted from the extension groove 12 on the other side, enter the optical fiber receiver from the collection hole 11 in communication therewith, and realize detection of the warped product in the detection cavity 22.
[0037] In an optional embodiment, as shown in Figure 2 The cross-sectional width of the extension groove 12 is d1, and the cross-sectional width of the collection hole 11 is d2. d1 is 1-3 mm larger than d2, and specifically can be 1 mm, 1.5 mm, 2 mm, 2.5 mm or 3 mm larger than d2.
[0038] In a preferred embodiment, d1 is 2 mm larger than d2.
[0039] In an optional embodiment, as shown in Figure 2 The collection hole 11 is cut in a cross section perpendicular to the extension direction of the extension groove 12, and the cross section of the collection hole 11 is in the shape of a waist. The length direction of the waist shape is perpendicular to the top surface of the magazine body 1, and the width direction of the waist shape is parallel to the top surface of the magazine body 1.
[0040] When high-temperature or low-temperature tests are performed, the collection hole 11 will deform to a certain extent under the influence of temperature. The above embodiment can make the collection hole 11 have a larger size in a direction perpendicular to the top surface of the magazine body 1, which can accommodate the difference caused by high-temperature or low-temperature deformation, and ensure that the optical signals can enter the detection cavity 22 in the above direction and detect the warped product in the detection cavity 22.
[0041] In an optional embodiment, the extension groove 12 extends in a straight line, and the extension groove 12 is cut in a cross section perpendicular to the extension direction of the extension groove 12. The cross section of the extension groove 12 is in the shape of a rectangle, which is more convenient for processing the extension groove 12, and the optical signals in the extension groove 12 can quickly enter the detection cavity 22.
[0042] In an optional embodiment, as shown in Figure 3As shown, the bottom end of the collection hole 11 away from the top surface of the magazine body 1 is lower than the groove bottom of the extension groove 12, and the top end of the collection hole 11 close to the top surface of the magazine body 1 is higher than the groove bottom of the extension groove 12. Since the thickness of the product is not consistent, in the case that the suction nozzle pressure head 3 takes and places the product at a uniform height, the thicker the product, the deeper the depth of the groove bottom of the extension groove 12 needs to be. The above setting can ensure that the bottom end of the collection hole 11 has a certain amount of excess, and when deepening the depth of the groove bottom of the extension groove 12, the groove bottom of the extension groove 12 will not be lower than the groove bottom of the collection hole 11, ensuring that the groove bottom of the extension groove 12 has sufficient light signal passing through to detect the product that is buckled.
[0043] In optional embodiments, as shown in Figure 3 The side surface of the magazine body 1 includes a slope 13 arranged close to the top surface of the magazine body 1, the slope 13 gradually extends outward in a direction gradually away from the top surface of the magazine body 1, and the collection hole 11 is arranged on the slope 13.
[0044] The above embodiment can make the opening of the collection hole 11 for receiving light signals larger, which is conducive to the entry of light signals into the collection hole 11.
[0045] In optional embodiments, as shown in Figure 3 and Figure 4 The magazine further includes a product placing seat 2 mounted on the magazine body 1, the product placing seat 2 includes a plurality of independently arranged embedding blocks 21, and the plurality of embedding blocks 21 surround to form a detection cavity 22, the detection cavity 22 includes a guide section 221 and a limiting section 222 in communication with the guide section 221, the guide section 221 gradually decreases in caliber in a direction gradually close to the limiting section 222, and the limiting section 222 is used to limit the relative position of the product relative to each embedding block 21.
[0046] In the above embodiment, the detection cavity 22 is formed by surrounding the plurality of embedding blocks 21, and only the surfaces forming the guide section 221 and the limiting section 222 need to be machined on each embedding block 21 during processing, which has a small single machining surface and a large operation space, can effectively reduce the processing difficulty, and is easy to ensure the taking and placing precision.
[0047] It should be noted that the above product can be but is not limited to a chip.
[0048] In optional embodiments, as shown in Figure 4 The two adjacent embedding blocks 21 can be arranged with a spacing therebetween.
[0049] The above setting can form an adjustment gap 4 between the two adjacent embedding blocks 21, which provides an adjustment space for the installation position of each embedding block 21, further reduces the requirement for the machining precision of the embedding blocks 21, is easy to ensure the taking and placing precision, and in addition, the above adjustment gap 4 can prevent the mutual extrusion between the embedding blocks 21 due to the swelling and deformation of the embedding blocks 21 during high-temperature detection, and ensure the effective and stable use of the product placing seat.
[0050] In the translation machine test, the product is carried to the detection cavity 22, and there is a certain probability that the product falls into the detection cavity 22 at a certain angle. In order to detect this part of the product, in the optional embodiment, as shown in the figure, the surface of the material guide section 221 is provided with a light guide groove 223 in communication with the extension groove 12, and the light guide groove 223 is close to the groove bottom of the limiting section 222 for bearing the corner of the offset product. Figure 4
[0051] In use, if the product normally falls into the limiting section 222 under the guidance of the material guide section 221, since the bottom of the product can be accommodated in the limiting section 222, the height of the product in the detection cavity 22 is relatively low, at this time, the bottom surface of the product is lower than the groove bottom of the light guide groove 223, and the top surface of the product is higher than the groove bottom of the light guide groove 223. If the product falls into the material guide section 221 and is rotated, the position of the product is offset, and the corner of the product will stop falling under the obstruction of the groove bottom of the light guide groove 223, at this time, the bottom surface of the product is clamped in the detection cavity 22 under the support of the groove bottom of the light guide groove 223, and the height of the product is relatively high, the groove bottom of the light guide groove 223 plays a role in lifting the height of the product, and more light signals are blocked by the product, so that the light flux of the light signal in the light guide groove 223 changes, thereby distinguishing the product with poor positioning.
[0052] Specifically, the groove bottom of the light guide groove 223 is flush with the groove bottom of the extension groove 12.
[0053] The second aspect of the embodiment of the utility model provides a test machine, as shown in the figure, the second aspect of the embodiment of the utility model provides a test machine comprising a suction nozzle pressure head 3 and the above-mentioned shuttle, the suction nozzle pressure head 3 is used to butt joint with the shuttle body 1 and take out the product in the detection cavity 22 or load the product to the detection cavity 22. Figure 5
[0054] In use, the suction nozzle pressure head 3 can suck the product, and after butt joint with the shuttle body 1, the product is placed in the detection cavity 22, after detection, the suction nozzle pressure head 3 sucks out the product in the detection cavity 22 and drives the product to move to the next station.
[0055] The test machine provided by the second aspect of the utility model has the shuttle provided by the first aspect of the utility model, thereby having all the beneficial effects of the shuttle provided by the first aspect of the utility model.
[0056] In the optional embodiment, as shown in the figure, the suction nozzle pressure head 3 comprises a first butt joint block 31 and a second butt joint block 32 relatively arranged along a first direction, the first direction can be regarded as X direction parallel to the horizontal plane, the first butt joint block 31 is provided with a first circular hole 311, and the second butt joint block 32 is provided with a first waist-shaped hole 321. Figure 6
[0057] In order to ensure that the suction nozzle 35 in the suction nozzle head 3 can be initially aligned with the detection cavity 22 when the suction nozzle head 3 is docked with the shuttle body 1, a plurality of first guide posts 14 are arranged on the shuttle body 1, which can be inserted into the first circular hole 311 and the first waist hole 321 one by one, and play a guiding role in docking the suction nozzle head 3. The cross section of the first guide post 14 can be circular. Since the second docking block 32 is provided with the first waist hole 321, the above-mentioned first waist hole 321 can compensate for the position processing error to a certain extent, avoid the first docking block 31 and the second docking block 32 from being rubbed with the corresponding first guide post 14 during docking, and affect the service life of the first docking block 31 and the second docking block 32 and the test precision of the testing machine.
[0058] In an optional embodiment, the suction nozzle head 3 has a docking strip 33, which has a second circular hole 331 and a second waist hole 332 arranged opposite in a second direction, the second direction being perpendicular to the first direction, and the second direction being parallel to the Y direction of the horizontal plane. The second circular hole 331 and the second waist hole 332 are used to insert the second guide post on the pressure testing area docking plate.
[0059] The design concept of the above-mentioned second circular hole 331 and the second waist hole 332 is similar to that of the first circular hole 311 and the first waist hole 321, which can guide the docking of the suction nozzle head 3 and the pressure testing area docking plate, and ensure the service life of the docking strip 33 and the test precision of the testing machine.
[0060] In an optional embodiment, as shown in Figure 7 and Figure 8 , the suction nozzle head 3 includes a head 34 and a suction nozzle 35, the head 34 is provided with a protruding part 341, and the suction nozzle 35 is connected with the protruding part 341 and forms an air passage with the protruding part 341.
[0061] The arrangement of the above-mentioned protruding part 341 can reduce the size of the part of the suction nozzle head 3 extending to the shuttle body 1, and reduce the heat transfer between the suction nozzle head 3 and the shuttle body 1.
[0062] Specifically, as shown in Figure 9 , the suction nozzle 35 includes a tapered part 351 with a gradually decreasing outer diameter in a direction gradually away from the protruding part 341, which can adapt to the shape of the material guiding section 221, and meet the test function while having the function of picking and placing small chips.
[0063] In addition, as shown in Figure 9 , the diameter of the air passage in the suction nozzle 35 near the end of the suction nozzle 35 is small, which can make the suction port of the suction nozzle 35 produce greater negative pressure and have better adsorption effect on the product.
[0064] Finally, it should be noted that: the above embodiments are used to illustrate the technical solutions of the present application, but not limited to them; although the present application has been described in detail with reference to the foregoing embodiments, those skilled in the art should understand that: it can still modify the technical solutions recorded in the foregoing embodiments, or make equivalent replacement to part or all of the technical features; and these modifications or replacements do not make the essence of the corresponding technical solutions deviate from the scope of the technical solutions of the embodiments of the present application.
Claims
1. A magazine having a test cavity (22) formed therein for receiving a test object, characterized by, The hopper body (1) has a light transmission channel, which includes a converging hole (11) and an extension groove (12), one end of the converging hole (11) is opened in the side wall of the hopper body (1), the other end is communicated with the extension groove (12), the end of the extension groove (12) away from the converging hole (11) is used for communicating with the detection cavity (22), the extension groove (12) is recessed in the top surface of the hopper body (1), and the converging hole (11) and the extension groove (12) are cut by a section perpendicular to the extension direction of the extension groove (12), the cross-sectional width of the extension groove (12) is greater than that of the converging hole (11).
2. The magazine of claim 1, wherein, The cross section of the converging hole (11) is in the shape of a waist, the length direction of the waist shape is perpendicular to the top surface of the hopper body (1), and the width direction of the waist shape is parallel to the top surface of the hopper body (1).
3. The magazine of claim 1, wherein, The cross section of the extension groove (12) is in the shape of a rectangle.
4. The magazine of claim 1, wherein, The bottom end of the converging hole (11) away from the top surface of the hopper body (1) is lower than the groove bottom of the extension groove (12), and the top end of the converging hole (11) close to the top surface of the hopper body (1) is higher than the groove bottom of the extension groove (12).
5. The magazine of claim 1 wherein, The side surface of the hopper body (1) includes a slope (13) arranged close to the top surface of the hopper body (1), the slope (13) gradually extends outward along the direction gradually away from the top surface of the hopper body (1), and the converging hole (11) is opened in the slope (13).
6. Magazine according to any one of claims 1 to 5, characterized in that A feeding seat (2) is further mounted on the hopper body (1), the feeding seat (2) includes a plurality of independently arranged blocks (21), a plurality of the blocks (21) surround to form the detection cavity (22), the detection cavity (22) includes a guide section (221) and a limiting section (222) communicated with the guide section (221), the guide section (221) gradually decreases in caliber along the direction gradually close to the limiting section (222), the surface of the guide section (221) is provided with a light guide groove (223) communicated with the extension groove (12), and the limiting section (222) is used for limiting the relative position of the product relative to each block (21).
7. A testing machine characterized by, The suction nozzle pressure head (3) is used for docking with the hopper body (1) to take out the product in the detection cavity (22) or load the product into the detection cavity (22).
8. The testing machine of claim 7, wherein, The suction nozzle pressure head (3) includes a first docking block (31) and a second docking block (32) oppositely arranged along a first direction, the first docking block (31) is provided with a first circular hole (311), the second docking block (32) is provided with a first waist-shaped hole (321), and the first circular hole (311) and the first waist-shaped hole (321) are used for inserting the first guide column (14) on the hopper body (1).
9. The testing machine of claim 8, wherein, The nozzle pressure head (3) has a butt joint strip (33) with a second round hole (331) and a second waist hole (332) oppositely arranged along a second direction perpendicular to the first direction, and the second round hole (331) and the second waist hole (332) are used for inserting the second guide column on the pressure measurement area butt joint plate.
10. The testing machine of claim 7, wherein, The nozzle pressure head (3) includes a pressure head (34) provided with a protruding part (341) and a nozzle (35) connected with the protruding part (341) and forming an air passage with the protruding part (341).