Semiconductor testing machine calibration device

Abstract

The utility model discloses a semiconductor testing machine calibration device which comprises a placing plate, and a calibration table is arranged on the placing plate. A placing groove is designed on the calibration table and used for placing equipment to be calibrated. A connecting plate is connected to the lower portion of the containing plate in a sliding mode, and the front end and the rear end of the connecting plate extend to the outer side of the containing plate so that operation and adjustment can be facilitated. Supporting plates are installed at the front end and the rear end of the upper side of a connecting plate, the upper ends of the supporting plates are each provided with an arch-shaped fixing frame, through the design of the arch-shaped fixing frames and a Z-shaped conduction arm, the stability and accuracy of a test probe in the calibration process can be ensured, and therefore the calibration precision is improved; the stability of the device is improved through the design of the supporting plate and the connecting assembly, and it is ensured that the device cannot move or incline in the calibration process. The use of the hydraulic push rod enables the adjustment of the calibration device to be more convenient and accurate, and an operator can easily adjust the position of the test probe.

Description

TECHNICAL FIELD

[0001] The utility model relates to the technical field of semiconductor testing, and specifically to a semiconductor testing machine calibration device. BACKGROUND

[0002] In the process of semiconductor manufacturing and testing, the semiconductor testing machine calibration device is a key equipment to ensure testing accuracy. Existing calibration devices usually include a platform for placing the device to be calibrated and a mechanical structure for accurately adjusting the position of the test probe. However, these devices have certain limitations in stability, accuracy, and operational convenience.

[0003] Traditional calibration devices may not be flexible enough when adjusting the test probe, resulting in a cumbersome and time-consuming calibration process. In addition, due to the lack of adequate support and fixation mechanisms, the stability of the test probe during the calibration process may be affected, thereby affecting the accuracy of the calibration. In some cases, the movement or tilting of the device may cause deviations in the calibration results.

[0004] To improve calibration accuracy, some devices may employ complex mechanical structures, but these structures often make the operation complicated, increasing the burden on the operators. In addition, for test probes of different sizes and shapes, different calibration devices are needed or complex adjustments to the device are required, which reduces production efficiency. SUMMARY

[0005] The purpose of the utility model is to provide a semiconductor testing machine calibration device to solve the problems raised in the background.

[0006] To achieve the above purpose, the utility model provides the following technical scheme: a semiconductor testing machine calibration device, which comprises a placement plate having a calibration table arranged thereon. A placing groove is designed on the calibration table for placing the device to be calibrated. A connecting plate is connected to the lower side of the placement plate in a sliding manner, and the front and rear ends of the connecting plate extend to the outer side of the placement plate to facilitate operation and adjustment.

[0007] Support plates are installed on the upper side of the connecting plate at the front and rear ends, and each support plate has an arc-shaped fixing bracket at the upper end for fixing and stabilizing the entire device. A connecting assembly is provided at the lateral position of the connecting plate, and the driving end of a hydraulic push rod is mounted on the assembly. The hydraulic push rod is arranged horizontally, and its upper end is connected to a connecting seat plate. Z-shaped conductive arms are hingedly connected to the front and rear ends of the connecting seat plate. The connecting portions between the three connecting arms of the Z-shaped conductive arms are hingedly connected to ensure their flexibility and adaptability. The middle part of the Z-shaped conductive arm is hingedly connected to one side of the end of the arc-shaped fixing bracket to ensure the stability and reliability of the conductive arm. A clamping plate is hingedly connected to the inner end of the Z-shaped conductive arm at the front and rear sides, and a clamping groove is provided at the inner end of the clamping plate for fixing and clamping the device to be calibrated.

[0008] In order to improve the use effect of the placing groove, an anti-skid layer is specially designed in the groove to prevent the equipment from sliding during the test process and ensure the accuracy of the test. The upper side of the connecting plate is also provided with sliding blocks, and the lower end of the placing plate is provided with sliding rails. The number of sliding blocks is 2, and they can smoothly slide along the track of the sliding rails, facilitating the adjustment of the position of the placing plate. In addition, the other side end of the arc-shaped fixing frame is hinged with an auxiliary Z-shaped conducting arm, which is hinged on the auxiliary connecting seat plate to provide additional stability and support.

[0009] In order to further ensure that the equipment on the clamping slope of the clamping groove will not slide, an anti-skid surface is specially designed on the clamping slope of the clamping groove, which can improve the stability and safety of clamping. Through these detailed designs, the whole calibration device can not only provide accurate calibration function, but also ensure the safety and stability of the equipment during operation.

[0010] Compared with the prior art, the beneficial effects of the present application are: through the design of the arc-shaped fixing frame and the Z-shaped conducting arm, the stability and accuracy of the test probe during calibration can be ensured, thereby improving the accuracy of calibration; the design of the supporting plate and the connecting assembly increases the stability of the device, ensuring that the equipment will not move or tilt during calibration.

[0011] The use of hydraulic push rods makes the adjustment of the calibration device more convenient and accurate, and the operator can easily adjust the position of the test probe; the design of the clamping plate and the clamping groove can safely fix the test probe and prevent damage to the probe during calibration.

[0012] The anti-skid layer in the placing groove and the anti-skid surface on the clamping slope of the clamping groove can effectively prevent the test probe from sliding during placement and calibration, ensuring the safety of the calibration process; by setting sliding blocks on the connecting plate and sliding rails at the lower end of the placing plate, the placing plate can be moved flexibly, facilitating the calibration of test probes of different sizes and shapes.

[0013] The design of the auxiliary Z-shaped conducting arm and the auxiliary connecting seat plate provides additional support for calibration, which helps to handle more complex calibration requirements. BRIEF DESCRIPTION OF DRAWINGS

[0014] Figure 1 It is a front view of the present application;

[0015] Figure 2 It is a side view of the present application;

[0016] Figure 3 It is a top view of the present application.

[0017] In the figure: 1, the placement plate; 2, the calibration table; 3, the placement groove; 4, the connecting plate; 5, the support plate; 6, the arc-shaped fixing frame; 7, the connecting assembly; 8, the hydraulic push rod; 9, the connecting seat plate; 10, the Z-shaped transmission arm; 11, the clamping plate; 12, the clamping groove; 13, the auxiliary Z-shaped transmission arm; 14, the auxiliary connecting seat plate. DETAILED DESCRIPTION

[0018] The technical solutions in the embodiments of the utility model will be clearly and completely described below with reference to the drawings in the embodiments of the utility model. Obviously, the described embodiments are only part of the embodiments of the utility model, rather than all the embodiments. Based on the embodiments in the utility model, all other embodiments obtained by those skilled in the art without creative labor fall within the protection scope of the utility model.

[0019] Please refer to Figures 1-2 The utility model provides a kind of technical scheme: a kind of semiconductor testing machine calibration device, it includes a placement plate 1, the placement plate 1 is equipped with a calibration table 2. A placement groove 3 is designed on calibration table 2, for placing the equipment to be calibrated. The lower side of placement plate 1 is connected with a connecting plate 4 by sliding mode, and the front and rear ends of connecting plate 4 are extended to the outside of placement plate 1, to facilitate operation and adjustment.

[0020] The upper side of connecting plate 4 is equipped with support plate 5 at the front and rear ends, and the upper end of each support plate 5 is provided with an arc-shaped fixing frame 6 for fixing and stabilizing the whole device. A connecting assembly 7 is arranged on the lateral position of connecting plate 4, and the driving end of hydraulic push rod 8 is arranged on the assembly. The upper end of hydraulic push rod 8 is connected with a connecting seat plate 9, and the front and rear ends of connecting seat plate 9 are hingedly connected with Z-shaped transmission arms 10. The connecting portions between the three connecting arms of Z-shaped transmission arms 10 are hingedly connected, to ensure their flexibility and adaptability. The middle part of Z-shaped transmission arms 10 is hingedly connected with one side end of arc-shaped fixing frame 6, to ensure the stability and reliability of transmission arms. The inner end of Z-shaped transmission arms 10 on the front and rear sides is hingedly connected with clamping plates 11, and the inner end of clamping plates 11 is provided with clamping grooves 12 for fixing and clamping the equipment to be calibrated.

[0021] In order to improve the use effect of placement groove 3, an anti-skid layer is specially designed in the groove to prevent the equipment from sliding during testing, to ensure the accuracy of testing. The upper side of connecting plate 4 is also provided with sliding blocks, and the lower end of placement plate 1 is provided with sliding rails. The number of sliding blocks is 2, and they can smoothly slide along the track of sliding rails, to facilitate the adjustment of the position of placement plate 1. In addition, the other side end of arc-shaped fixing frame 6 is hingedly connected with an auxiliary Z-shaped transmission arm 13, which is hingedly connected to an auxiliary connecting seat plate 14, to provide additional stability and support.

[0022] To further ensure that the device held by the clamping groove 12 on the inclined surface does not slide, an anti-skid surface is specially designed on the clamping inclined surface of the clamping groove 12, so that the stability and safety of clamping can be improved. Through these meticulous designs, the whole calibration device can not only provide accurate calibration function, but also ensure the safety and stability of the device during operation.

[0023] Working principle: During operation, the placement plate 1 serves as a base platform for bearing the calibration table 2 and related calibration components; the calibration table 2 is located on the placement plate 1 to provide a stable working surface for placing the semiconductor test machine to be calibrated; the placing groove 3 is located on the calibration table to safely place the semiconductor test machine or other calibration tools, and an anti-skid layer is provided in the groove to ensure the stability of the device; the connecting plate 4 is located below the placement plate 1 and can slide to adjust the position or perform maintenance.

[0024] The support plate 5 is located at the front and rear ends of the connecting plate 4 to provide additional support and ensure the stability of the connecting plate 4; the arc-shaped fixing frame 6 is located at the upper end of the support plate 5 to fix and support the Z-shaped transmission arm 10; the connecting component 7 is located laterally on the connecting plate 4 and includes the driving end of the hydraulic push rod 8 to provide power; the hydraulic push rod 8 is transversely arranged and connected through the connecting seat plate 9 to provide power for linear motion.

[0025] The Z-shaped transmission arm 10 is hinged between the connecting seat plate 9 and the arc-shaped fixing frame 6 to convert the linear motion of the hydraulic push rod 8 into a specific direction of thrust; the clamping plate 11 is hinged at the inner end of the Z-shaped transmission arm 10 to clamp the semiconductor test machine or other components to be calibrated; the clamping groove 12 is located at the inner end of the clamping plate 11 to accurately position and fix the device to be calibrated.

[0026] The design of the sliding block and the sliding rail allows the connecting plate 4 to smoothly slide forward and backward under the placement plate 1 to facilitate position adjustment; the auxiliary Z-shaped transmission arm 13 and the auxiliary connecting seat plate 14 provide additional support and transmission paths to adapt to different calibration requirements; the anti-skid surface on the clamping inclined surface of the clamping groove 12 ensures the stability and safety of clamping.

[0027] Overall, the device provides power through the hydraulic push rod 8, and realizes accurate mechanical motion through the combination of the Z-shaped transmission arm 10 and the clamping plate 11 to clamp and position the semiconductor test machine for calibration.

[0028] In the description of the application, unless otherwise clearly specified and limited, the terms "mounting", "connection", "connecting", "fixing" should be understood broadly, for example, can be fixed connection, can also be detachable connection, or integral; can be mechanical connection, can also be electrical connection; can be directly connected, can also be indirectly connected through an intermediate medium, can be the internal communication of two elements or the interaction relationship of two elements. For those skilled in the art, the specific meaning of the above terms in the application can be understood according to the specific circumstances.

[0029] The standard parts used in the application can be purchased from the market, and the special-shaped parts can be ordered according to the description and the drawings. The specific connection mode of each part adopts the conventional means such as bolt, rivet and welding in the prior art. The machinery, parts and equipment adopt the conventional type in the prior art, and the circuit connection adopts the conventional connection mode in the prior art, which will not be described in detail here.

[0030] Although the embodiments of the application have been shown and described, those skilled in the art can understand that various changes, modifications, replacements and variations can be made to these embodiments without departing from the principles and spirits of the application, and the scope of the application is defined by the appended claims and their equivalents.

Claims

1. A semiconductor tester calibration apparatus, characterized by: Including the placement plate (1), be equipped with the calibration platform (2) on the placement plate (1), be equipped with the placement groove (3) on the calibration platform (2), the lower side of the placement plate (1) is equipped with the connecting plate (4) slidingly, the front and rear ends of the connecting plate (4) both extend over the outside of the placement plate (1); Both ends of the connecting plate (4) are equipped with the support plate (5) on the upside, the upper end of the support plate (5) is equipped with the arc-shaped fixing frame (6), the lateral side of the connecting plate (4) is equipped with the connecting assembly (7), the connecting assembly (7) is equipped with the driving end of the hydraulic push rod (8) on it; The hydraulic push rod (8) is arranged horizontally, and the upper end thereof is equipped with the connecting seat plate (9), both ends of the connecting seat plate (9) on the upside are hingedly connected with the Z-shaped conducting arm (10), the connecting portions between the three connecting arms of the Z-shaped conducting arm (10) are hingedly connected, and the middle part of the Z-shaped conducting arm (10) is hingedly connected with one side end of the arc-shaped fixing frame (6), the inner ends of the Z-shaped conducting arms (10) on the front and rear sides are hingedly connected with the clamping plates (11), and the inner ends of the clamping plates (11) are equipped with the clamping grooves (12).

2. A semiconductor test machine calibration apparatus as claimed in claim 1, wherein: The placement groove (3) is equipped with an antiskid layer in the groove.

3. A semiconductor test machine calibration apparatus as claimed in claim 1, wherein: The upper side of the connecting plate (4) is equipped with the sliding block, the lower end of the placement plate (1) is equipped with the sliding rail, the number of the sliding blocks is two, and the sliding blocks are slidingly arranged on the tracks of the sliding rail.

4. The semiconductor test machine calibration apparatus of claim 1, wherein: The other side end of the arc-shaped fixing frame (6) is hingedly connected with the auxiliary Z-shaped conducting arm (13), and the auxiliary Z-shaped conducting arm (13) is hingedly arranged on the auxiliary connecting seat plate (14).

5. The semiconductor test machine calibration apparatus of claim 1, wherein: The clamping inclined surface of the clamping groove (12) is equipped with an antiskid surface.

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