Lissajous optical fiber scanner with double driving parts
By adjusting the shape and size of the piezoelectric actuator of the dual-drive Lissajous fiber optic scanner, the vibration coupling problem of the Lissajous scanner was solved, achieving efficient processing and good scanning results, and improving the processing yield and accuracy.
Patent Information
- Application Number
- CN202423313383.6
- Authority / Receiving Office
- CN · China
- Patent Type
- Utility models(China)
- Current Assignee / Owner
- Filing Date
- 2024-12-30
- Publication Date
- 2025-12-26
- Estimated Expiration
- 2034-12-30
AI Technical Summary
Existing Lissajous scanners are prone to vibration coupling effects when the natural frequencies used in two directions are close, resulting in scanning trajectory distortion and making it difficult to guarantee processing accuracy and yield.
By employing a dual-drive Lissajous fiber optic scanner and adjusting the shape and size parameters of the sheet piezoelectric actuator, the natural frequencies of the combined part in two directions are made to be both close and have a sufficient difference, thus avoiding vibration coupling. Furthermore, the rigidity difference of the support column isolates vibration interference, reducing the processing difficulty and precision requirements.
A uniform and dense scanning grid was achieved, which improved processing efficiency and yield, reduced processing errors, and ensured scanning accuracy.
Smart Images
Figure CN223728061U_ABST
Abstract
Description
[0001] This application is a divisional application of the Chinese patent application with the application number 2024232650125, the name of invention is "a double driving part lissajous fiber scanner", which was filed on December 30, 2024, and the whole content is incorporated into this application by reference. TECHNICAL FIELD
[0002] The present application relates to the technical field of fiber scanner structure, in particular to a double driving part lissajous fiber scanner. BACKGROUND
[0003] The fiber scanner is a display technology that uses a scanning driver to control the swing of the optical fiber while the light emitted by the optical fiber. It is mainly used in the technical fields of fiber scanning display technology, fiber scanning endoscope technology, fiber scanning radar, etc. When the fiber scanner is applied to image display, the color of the pattern illuminated by this technology is sharp and saturated, the contrast is high, the brightness is high, and the structure is very small.
[0004] The fiber scanner uses the principle of mechanical resonance to make the cantilever of the optical fiber achieve a larger scanning range. The scanning mode of the scanning driver can be divided into spiral scanning, grid scanning and lissajous scanning. The miniature piezoelectric scanning device of lissajous scanning generally has two driving parts, which drive the scanning device to vibrate in two directions at the same time. The closer the driving frequencies of the two directions in lissajous scanning, the closer the uniformity (density) of the scanning grid in the two directions, and theoretically the closer the driving frequencies of the two directions, the better. However, the closer the inherent frequencies used in the two directions of the scanner, the more obvious the vibration coupling effect will be, which will worsen the scanning trajectory, cause uncontrollable components in the scanning trajectory and result in distortion of the scanning image, which is difficult to completely eliminate through post-processing. Therefore, the inherent frequencies used in the two directions of the lissajous scanner should have a precise difference range, neither too small to cause coupling effect, nor too large to cause non-uniformity.
[0005] However, the lissajous scanner that processes and manufactures inherent frequencies with a precise difference in the two directions requires extremely high processing precision, and neither the cost of processing equipment nor the yield can be guaranteed. Practical new type content
[0006] The present application provides a double driving part lissajous fiber scanner to reduce the processing difficulty and improve the processing yield.
[0007] In order to achieve the above application purpose, the present application provides a double driving part lissajous fiber scanner, which comprises a cylindrical body and an optical fiber,
[0008] The axis extension direction of the cylindrical body is the front-rear direction, the rear end of the cylindrical body is fixedly connected with the base to be supported by the base,
[0009] The cylindrical body comprises support columns separately arranged at four corners and four side plates connecting any two adjacent support columns, the side plate at the upper side is a sheet-shaped piezoelectric actuating part, the length of the sheet-shaped piezoelectric actuating part in the front-rear direction is longer than the lengths of the other three side plates,
[0010] The rear half of the sheet-shaped piezoelectric actuating part and the four support columns and the other three side plates form a cylindrical coincident part, the front end of the sheet-shaped piezoelectric actuating part vibrates in the vertical direction, and the optical fiber is fixedly arranged at the front end of the sheet-shaped piezoelectric actuating part in a cantilever support manner,
[0011] At least one side of the left and right sides of the cylindrical coincident part is provided with a first piezoelectric sheet, the front end of the cylindrical body is driven to vibrate left and right in the horizontal direction by the expansion and contraction of the first piezoelectric sheet,
[0012] The sheet-shaped piezoelectric actuating part makes the inherent frequency of the combination part composed of the cylindrical body, the first piezoelectric sheet and the optical fiber in the horizontal direction greater than the same order inherent frequency of the combination part in the vertical direction, and makes the combination part in the vertical direction have a difference between a certain order inherent frequency closest to the V order inherent frequency in the horizontal direction and the inherent frequency in the horizontal direction, V being an integer greater than or equal to 1.
[0013] The combination part has a first order inherent frequency, a second order inherent frequency, a third order inherent frequency, …, and an N order inherent frequency in the vertical direction, among which the inherent frequency of a certain order (for example, U order, U being an integer greater than or equal to two) is closest to the V order inherent frequency in the horizontal direction (V is less than U), the closer the driving frequencies in the two directions in the Lissajous scanning are, the closer the uniformity (density) of the scanning grid in the two directions is, and the more the number of points is, theoretically the closer the driving frequencies in the two directions are, but the closer the inherent frequencies used by the combination part in the two directions are, the more obvious the coupling effect will be, therefore the application adjusts the shape structure and / or size parameters of the sheet-shaped piezoelectric actuating part, so that the inherent frequencies of the combination part used in the two directions at the same time meet the requirements of being close enough to ensure good scanning effect and have a uniform and dense scanning grid, and at the same time have a sufficient difference, so that the vibration of the combination part in the two directions will not produce coupling. Therefore, the application adjusts the shape structure and / or size parameters of the sheet-shaped piezoelectric actuating part to make the vibration frequencies of the combination part in the two directions meet the Lissajous scanning working condition requirements, which reduces the requirements of the processing size and precision of the cylindrical body, makes the processing difficulty of the cylindrical body low, the processing error easy to control, and the yield high.
[0014] Meanwhile, the rigidity of the support column is greater than that of the side plate, and its arrangement can isolate the mutual deformation interference of the side plates vibrating in the horizontal direction and the side plates vibrating in the vertical direction, and improve the scanning accuracy.
[0015] The difference satisfies that the vibration of the combination part in the horizontal direction and the vibration of the combination part in the vertical direction do not generate coupling when the combination part performs Lissajous scanning under the driving of the driving signal.
[0016] Generally, the difference ranges from 10 Hz to 12 KHz. Further preferably, the difference ranges from 1 KHz to 10 KHz. The value is selected according to the V-order natural frequency of the scanner cantilever in the horizontal direction, as long as the scanner cantilever has sufficient amplitude when the piezoelectric actuator performs Lissajous scanning under the driving, and the vibration of the scanner cantilever in the horizontal direction and the vibration of the scanner cantilever in the vertical direction do not generate coupling. For those skilled in the art, numerical selection according to the above description is a routine technical means in the art.
[0017] Optionally, any one side of the left and right sides of the cylindrical coincidence part is provided with a first piezoelectric sheet, and the front end of the cylindrical coincidence part is driven to vibrate left and right in the horizontal direction by the expansion and contraction of the first piezoelectric sheet. The number of first piezoelectric sheets can be one, two or more. When the number of first piezoelectric sheets is two or more, each first piezoelectric sheet synchronously and equally expands and contracts.
[0018] Optionally, the left and right sides of the cylindrical coincidence part are both provided with first piezoelectric sheets, the first piezoelectric sheet on the left side synchronously and reversely expands and contracts with the first piezoelectric sheet on the right side, and the front end of the cylindrical coincidence part is driven to vibrate left and right in the horizontal direction. The number of first piezoelectric sheets on the same side can be one, two or more. When the number of first piezoelectric sheets on the same side is two or more, the first piezoelectric sheets on the same side synchronously and equally expand and contract.
[0019] Further preferably, when the left and right sides of the cylindrical coincidence part are both provided with first piezoelectric sheets, the first piezoelectric sheets on the left and right sides of the cylindrical coincidence part are symmetrically arranged to drive the cylindrical coincidence part to accurately vibrate left and right in the horizontal direction without generating a vertical displacement component.
[0020] Optionally, the sheet-shaped piezoelectric actuator is a single piezoelectric sheet actuator or a double piezoelectric sheet actuator.
[0021] One or more technical solutions in the present application have at least the following technical effects or advantages:
[0022] The piezoelectric actuating part of the Lissajous scanner does not need to have a specific difference in the inherent frequency in two driving directions, and coupling of vibration in the two driving directions can be avoided, and the processing difficulty and the requirement of processing precision are reduced. The adjustment of the shape structure and / or size parameter of the sheet-shaped piezoelectric actuating part 103 is used to make the vibration frequency of the combined part in two directions meet the Lissajous scanning working condition requirement, the processing size and precision requirement of the barrel-shaped body are reduced, the processing difficulty of the barrel-shaped body is low, the processing error is easy to control, the yield is high, and the processing efficiency and yield are significantly improved. BRIEF DESCRIPTION OF DRAWINGS
[0023] Figure 1 It is a structural schematic view of the utility model;
[0024] Figure 2 It is a front view structural schematic view of the barrel-shaped body. DETAILED DESCRIPTION
[0025] The technical solutions in the embodiments of the application will be clearly and completely described in combination with the drawings in the embodiments of the application. Obviously, the described embodiments are only part of the embodiments of the application, rather than all the embodiments. Based on the embodiments in the application, all other embodiments obtained by those skilled in the art without creative labor fall within the protection scope of the application.
[0026] Embodiment:
[0027] In combination with FIGS. 1 to 3, Figure 1 、 Figure 2 A double-driving Lissajous optical fiber scanner is shown, which comprises a barrel-shaped body and an optical fiber 104,
[0028] The barrel-shaped body is fixedly connected with the base 200 at the rear end, and is supported by the base 200, with the axial extension direction of the barrel-shaped body as the front-rear direction,
[0029] The barrel-shaped body comprises four support columns 105 arranged at four corners and four side plates 106 connecting any two adjacent support columns 105, the side plate 106 at the upper side is a sheet-shaped piezoelectric actuating part 103, and the length of the sheet-shaped piezoelectric actuating part 103 in the front-rear direction is longer than that of the other three side plates 106,
[0030] The rear half of the sheet-shaped piezoelectric actuating part 103 is surrounded by the four support columns 105 and the other three side plates 106 to form a barrel-shaped coincident part, the front end of the sheet-shaped piezoelectric actuating part 103 vibrates in the vertical direction, and the optical fiber 104 is fixedly arranged at the front end of the sheet-shaped piezoelectric actuating part 103 in a cantilever support manner,
[0031] At least one side of the left and right sides of the barrel-shaped coincident part is provided with a first piezoelectric sheet 101, and the front end of the barrel-shaped body is driven to vibrate left and right in the horizontal direction by the expansion and contraction of the first piezoelectric sheet 101,
[0032] The sheet-shaped piezoelectric actuating part 103 makes the natural frequency of the combined part composed of the barrel-shaped body, the first piezoelectric sheet 101 and the optical fiber 104 in the horizontal direction greater than the same order natural frequency of the combined part in the vertical direction, and makes the combined part in the vertical direction have a difference between a certain order natural frequency closest to the V order natural frequency in the horizontal direction and the natural frequency in the horizontal direction, V being an integer greater than or equal to 1.
[0033] The combined part has a first order natural frequency, a second order natural frequency, a third order natural frequency,..., and an N order natural frequency in the vertical direction, and there is a certain order (for example, U order, U being an integer greater than or equal to two) of the natural frequency closest to the V order natural frequency of the combined part in the horizontal direction (V is less than U). The closer the driving frequencies in the two directions in the Lissajous scanning are, the closer the uniformity (density) of the scanning grid in the two directions is, and the more the number of points is. In theory, the closer the driving frequencies in the two directions are, the better. However, the closer the natural frequencies used by the combined part in the two directions are, the more obvious the coupling effect will be. Therefore, the application adjusts the shape structure and / or size parameters of the sheet-shaped piezoelectric actuating part 103, so that the natural frequencies of the combined part used in the two directions can be close enough to ensure good scanning effect and have a uniform and dense scanning grid, and at the same time have a sufficient difference to prevent the vibration of the combined part in the two directions from being coupled. Therefore, the application adjusts the shape structure and / or size parameters of the sheet-shaped piezoelectric actuating part 103 to make the vibration frequencies of the combined part in the two directions meet the Lissajous scanning working condition requirements, reduces the processing size and precision requirements of the barrel-shaped body, makes the barrel-shaped body have low processing difficulty, the processing error is easy to control, and the yield is high.
[0034] At the same time, the rigidity of the support column 105 is greater than that of the side plate 106, and the setting can isolate the mutual deformation interference of the side plate 106 vibrating in the horizontal direction and the side plate 106 vibrating in the vertical direction, and improve the scanning accuracy.
[0035] In the embodiment, the V order is the first order, and the U order is the second order. Of course, this is only the parameter selection of the embodiment, and in other embodiments similar to the structure type of the embodiment, V can also be selected as an integer greater than 1, and U is selected as an integer greater than V.
[0036] The difference satisfies that when the combined part is driven by the driving signal to make Lissajous scanning, the vibration of the combined part in the horizontal direction and the vibration in the vertical direction will not be coupled.
[0037] Generally, the difference is in the range of 10 Hz to 12 KHz. Further preferably, the difference is in the range of 1 KHz to 10 KHz. The difference is selected according to the V-order natural frequency of the scanner cantilever in the horizontal direction, as long as the scanner cantilever has sufficient amplitude when the piezoelectric actuator is driven to perform Lissajous scanning, and the vibration of the scanner cantilever in the horizontal direction and in the vertical direction does not couple. For those skilled in the art, numerical selection according to the above description is a routine technical means in the art.
[0038] Optionally, any one side of the left and right sides of the cylindrical coincident part is provided with a first piezoelectric sheet 101, and the front end of the cylindrical coincident part is driven to vibrate left and right in the horizontal direction by the expansion and contraction of the first piezoelectric sheet 101. The number of first piezoelectric sheets 101 can be one, two or more. When the number of first piezoelectric sheets 101 is two or more, each first piezoelectric sheet 101 expands and contracts synchronously and equally.
[0039] Optionally, the left and right sides of the cylindrical coincident part are both provided with first piezoelectric sheets 101, and the first piezoelectric sheet 101 on the left side and the first piezoelectric sheet 101 on the right side expand and contract synchronously and equally in reverse, driving the front end of the cylindrical coincident part to vibrate left and right in the horizontal direction. The number of first piezoelectric sheets 101 on the same side can be one, two or more. When the number of first piezoelectric sheets 101 on the same side is two or more, the first piezoelectric sheets 101 on the same side expand and contract synchronously and equally.
[0040] Preferably, the surface of the cylindrical coincident part provided with the first piezoelectric sheet 101 is a plane, so as to facilitate the arrangement of the piezoelectric sheet. Further optionally, the surface of the cylindrical coincident part provided with the first piezoelectric sheet 101 can be the inner surface of the cylindrical coincident part, or the outer surface of the cylindrical coincident part.
[0041] Further preferably, when the left and right sides of the cylindrical coincident part are both provided with first piezoelectric sheets 101, the first piezoelectric sheets 101 on the left and right sides of the cylindrical coincident part are symmetrically arranged to drive the cylindrical coincident part to vibrate accurately left and right in the horizontal direction, without generating a displacement component in the vertical direction.
[0042] Optionally, the sheet-shaped piezoelectric actuator is a single piezoelectric sheet actuator or a double piezoelectric sheet actuator.
[0043] It should be noted that the foregoing examples have been provided merely for the purpose of explanation and are in no way to be construed as limiting of the present application. While the application has been described with reference to preferred embodiments and illustrative examples, the words which have been used herein are words of description, and thus are used in a descriptive sense and not restrictive. In this respect, after the present technology has been described, those skilled in the art will readily understand that other features and / or modifications can be made without departing from the scope of the application. Accordingly, the claims appended hereto should be construed in view of the full scope within the accepted meaning and principles of patent law. Any reference signs in the claims should not be construed as limiting the claims. The word "comprising" or "including" does not exclude the presence of elements or steps other than those listed in a claim. The word "a" or "an" preceding an element does not exclude the presence of a plurality of such elements. The word "first", "second" etc. do not imply any order or sequence, but are used for naming purposes only. The word "another" means at least a second or a third, and the like.
[0044] All features disclosed in this specification, unless expressly stated to the contrary, are intended to be within the scope of the present application.
[0045] Any feature described in this specification, unless expressly stated to be otherwise, can be replaced by alternative features serving the same, equivalent or a similar purpose. That is, unless expressly stated to be otherwise, every feature disclosed is one example only of a generic series of equivalent or similar features.
Claims
1. A dual drive Lissajous fiber scanner, characterized in that, The cylinder body and the optical fiber, The rear end of the cylinder body is fixedly connected with the base, so as to be supported by the base, The cylinder body comprises four support columns arranged at four corners and four side plates connecting any two adjacent support columns, the upper side plate is a sheet-shaped piezoelectric actuating part, and the length of the sheet-shaped piezoelectric actuating part in the front-rear direction is longer than that of the other three side plates, The rear half of the sheet-shaped piezoelectric actuating part is surrounded by the four support columns and the other three side plates to form a cylinder coinciding part, the front end of the sheet-shaped piezoelectric actuating part vibrates in the vertical direction, and the optical fiber is fixedly arranged at the front end of the sheet-shaped piezoelectric actuating part in a cantilever support manner, At least one side of the left and right sides of the cylinder coinciding part is provided with a first piezoelectric sheet, and the front end of the cylinder body is driven to vibrate left and right in the horizontal direction by the expansion and contraction of the first piezoelectric sheet, The sheet-shaped piezoelectric actuating part makes the inherent frequency of the combination of the cylinder body, the first piezoelectric sheet and the optical fiber in the horizontal direction greater than the same order inherent frequency of the combination in the vertical direction, and makes the combination in the vertical direction have a difference between a certain order inherent frequency closest to the V order inherent frequency in the horizontal direction and the inherent frequency in the horizontal direction, V being an integer greater than or equal to 1.
2. A dual drive Lissajous fiber scanner as claimed in claim 1, characterized in that The difference makes the vibration of the combination in two directions not coupled.
3. A dual drive Lissajous fiber scanner as claimed in claim 1 or 2, characterized in that The difference ranges from 10 Hz to 12 KHz.
4. A dual drive Lissajous fiber scanner as claimed in claim 3, characterized in that The difference ranges from 1 KHz to 10 KHz.
5. A dual drive Lissajous fiber scanner as claimed in claim 1 or 2, characterized in that, The rigidity of the support column is greater than that of the side plate.
6. A dual drive Lissajous fiber scanner as claimed in claim 1 or 2, characterized in that Any one side of the left and right sides of the cylinder coinciding part is provided with a first piezoelectric sheet, and the front end of the cylinder coinciding part is driven to vibrate left and right in the horizontal direction by the expansion and contraction of the first piezoelectric sheet.
7. A dual drive Lissajous fiber scanner as claimed in claim 1 or 2, characterized in that Both sides of the cylinder coinciding part are provided with first piezoelectric sheets, the first piezoelectric sheet on the left side and the first piezoelectric sheet on the right side synchronously and reversely expand and contract in equal length, and drive the front end of the cylinder coinciding part to vibrate left and right in the horizontal direction.
8. A dual drive Lissajous fiber scanner as claimed in claim 1 or 2, characterized in that, The sheet-shaped piezoelectric actuating part is a single piezoelectric sheet actuator or a double piezoelectric sheet actuator.
9. A dual drive Lissajous fiber scanner as claimed in claim 7, characterized in that, The first piezoelectric sheets on the left and right sides of the cylinder coinciding part are symmetrically arranged.