Constant-temperature control equipment of single-side quick-dismounting filter

Abstract

The utility model provides constant-temperature control equipment with a single-side filter capable of being quickly disassembled and assembled. The constant-temperature control equipment comprises a shell, a fan, the filter, a mesh flow equalizing module and a control system, a mounting plate is arranged in the shell, the fan is mounted on the mounting plate, the filter and the mesh flow equalizing module are arranged below the fan, the mesh flow equalizing module is mounted on the upstream of the filter, one side face of the shell is an operation face, the control system is mounted on the operation face, the operation face is further provided with a filter taking-out opening, and the control system is electrically connected with the fan. The air outlet uniformity is better, the dust holding is more uniform, and the service life of the filter is prolonged. The ultra-high-cleanliness air outlet is achieved, sealing leakage caused by uneven stress when the filter is manually pressed is completely eradicated, the requirement for replacement convenience in the semiconductor industry is met, other equipment does not need to be moved away or the filter equipment does not need to be lifted down for replacement, safety is improved, and time cost and labor cost are reduced.

Description

TECHNICAL FIELD

[0001] The utility model relates to the field of semiconductor clean constant temperature control, especially relates to a constant temperature control equipment of single -sided quick dismounting filter. BACKGROUND

[0002] Semiconductor clean constant temperature control equipment is a kind of equipment for controlling temperature in semiconductor manufacturing process, mainly for ensuring that the temperature of semiconductor components in manufacturing and application is kept at constant level.However, the existing clean constant temperature control equipment has the following problems:

[0003] 1: the existing semiconductor equipment supporting clean constant temperature control equipment, to ensure that the air is uniform, will select the flow net orifice plate at filter air outlet end, as shown in Figure Figure 1 For the working condition requiring end air super-high cleanliness, the flow net plate at the end may produce dust, so that the cleanliness is not up to standard.

[0004] 2: the existing semiconductor equipment supporting clean constant temperature control equipment, filter inlet air speed is influenced by fan, there can be four wind speed, middle wind speed is relatively small, leading to filter dust capacity uneven, four dust capacity is more, middle dust capacity is less, influence filter life.

[0005] 3: the existing semiconductor equipment supporting clean constant temperature control equipment, all are installed on the upper end of semiconductor equipment, distance ground is higher (usually greater than 2 meters), and clean constant temperature control equipment is surrounded by semiconductor equipment on three sides, only leaves operation end one side.Conventional filter replacement needs to remove the surrounding semiconductor equipment, or hoists clean constant temperature control equipment at top down, after replacing filter, reinstallation and debugging are carried out, destroy the cooperation balance between original equipment, it is troublesome and time-consuming, and high position operation is not safe.

[0006] 4: the existing semiconductor equipment supporting clean constant temperature control equipment, filter compression block, by manual adjustment compression nut, there can be uneven locking stress, and filter compression surface sealing has hidden danger. SUMMARY

[0007] In view of the above problems, the utility model provides a constant temperature control equipment of single -sided quick dismounting filter.

[0008] To achieve the above object, the utility model adopts the following technical scheme:

[0009] A kind of constant temperature control equipment of single -sided quick dismounting filter, including shell, fan, filter and net orifice flow module;

[0010] The shell is provided with an air inlet and an air outlet, and is provided with a mounting plate inside, wherein the fan is mounted on the mounting plate, and the filter and the mesh uniform flow module are respectively arranged in the shell; the filter and the mesh uniform flow module are arranged below the fan, the mesh uniform flow module is arranged upstream of the filter, and the air outlet is arranged downstream of the filter.

[0011] Further, a control system is further included, one side of the shell is an operation surface, the control system is mounted on the operation surface, the operation surface is further provided with a filter taking outlet, and a door plate is mounted on the filter taking outlet; the control system is electrically connected with the fan.

[0012] Further, the shell is provided with a frame, and the frame is a hexahedral frame.

[0013] Further, a linear driving module is further provided, the linear driving module is mounted on the frame, the output end of the linear driving module is fixed to the upper surface of the mesh uniform flow module, the linear driving module is electrically connected with the control system, the linear driving module drives the mesh uniform flow module to move up and down, and in a use state, the mesh uniform flow module is pressed against the upper surface of the filter.

[0014] Further, the linear driving module has four, and is respectively fixed to four corners of the mesh uniform flow module, and the four linear driving modules are synchronously operated.

[0015] Further, the mesh uniform flow module is a uniform flow plate, and the uniform flow plate is provided with ventilation holes.

[0016] Further, the air outlet is located on the lower surface of the shell, the lower end of the frame is further provided with a filter mounting frame, the side of the filter mounting frame, which faces upwards, is provided with a sealing strip, and the filter is tightly and sealingly mounted on the filter mounting frame.

[0017] Further, the frame further includes a horizontal support rod, the mounting plate is horizontally arranged at the middle part of the frame, the mounting plate divides the frame into an upper chamber and a lower chamber, the mounting plate is provided with a through hole, the fan is arranged above the mounting plate, the air outlet end of the fan is connected with the through hole, and the air inlet is located above the mounting plate.

[0018] Further, the door plate is detachably mounted at the filter taking outlet; the filter taking outlet is a strip-shaped opening, the length direction of the filter taking outlet is an x direction, the height direction of the filter taking outlet is a y direction, the length of the filter in the x direction is less than the length of the filter taking outlet, and the height of the filter in the y direction is less than the height of the filter taking outlet.

[0019] Further, the linear drive module is a linear motor.

[0020] Compared with the prior art, the filter uniform flow module is placed on the upper end of the filter, which ensures better air outlet uniformity of the filter, and allows the filter to be placed at the end, and the uniform flow device with dust production risk is placed at the front end of the filter, thereby ensuring the cleanliness of the filter air outlet.

[0021] 2. The fan blown air passes through the mesh uniform flow module first, so that the air uniformly enters the filter, improves the original situation that the wind speed is large around the filter and small in the middle, ensures uniform dust capacity of the filter, and improves the service life of the filter.

[0022] 3. The filter outlet is arranged on one side of the operation surface, the linear drive module is installed on the frame, the linear drive module drives the mesh uniform flow module to move upward, releases the compression of the mesh uniform flow module on the filter, the filter is taken out from the filter outlet at the operation surface end, a new filter is placed into the equipment from the filter outlet, and the linear drive module drives the mesh uniform flow module to move downward and compress the filter, so that quick assembly and disassembly are realized.

[0023] 4. The linear drive module is electrically driven and arranged at four corners of the mesh uniform flow module, synchronous operation is controlled, manual compression of the filter is avoided, stress is not uniform, and sealing leakage is avoided. The motor control can make the plane force uniformly downward, ensure uniform compression force, make the mesh uniform flow plate uniformly compress the filter, and ensure the sealing property of the filter. BRIEF DESCRIPTION OF DRAWINGS

[0024] Figure 1 It is a schematic view of the arrangement structure of the filter and the mesh uniform flow module of the clean constant temperature control equipment in the prior art.

[0025] Figure 2 It is a schematic view of the arrangement structure of the filter and the mesh uniform flow module of the constant temperature control equipment of the single-face quick assembly and disassembly filter.

[0026] Figure 3 It is a schematic view of the structure of the constant temperature control equipment of the single-face quick assembly and disassembly filter.

[0027] Figure 4 It is a schematic view of the arrangement structure of the filter and the mesh uniform flow module of the constant temperature control equipment of the single-face quick assembly and disassembly filter. DETAILED DESCRIPTION

[0028] In order to further understand the purpose, structure, characteristics and functions of the utility model, the embodiments are described in detail as follows.

[0029] Please refer to Figure 2 , Figure 3 and Figure 4 , one embodiment of the utility model discloses a single -sided quick -wearing filter's thermostatic control equipment, including frame 1, casing 2, heat exchange module, fan 3, filter 4, mesh hole even flow module 5 and control system 6;

[0030] The casing 2 is fixed on the outside of the frame 1, the casing 2 is equipped with air inlet 21 and air outlet 22, the frame 1 is equipped with mounting plate 11, the fan 3 is installed on the mounting plate 11, the filter 4 and the mesh hole even flow module 5 are installed in the frame 1 respectively;The filter 4 and the mesh hole even flow module 5 are arranged below the fan 3, the mesh hole even flow module 5 is installed on the upstream of the filter 4, and the air outlet 22 is arranged on the downstream of the filter 4;Mesh hole even flow module 5 is placed on the upstream of filter 4, while ensuring the uniformity of the air outlet of filter 4, ensure the cleanliness of the air outlet of filter 4. At the same time, the wind blown by the fan 3 passes through the mesh hole even flow module 5, so that the wind is evenly entered into the filter 4, and the dust capacity of the filter 4 is ensured to be uniform, and the service life of the filter 4 is improved.

[0031] One side of the casing 2 is the operation face 23, the control system 6 is installed on the operation face 23, the operation face 23 is also equipped with filter outlet 24, and the filter outlet 24 is installed with a door plate;When replacing, directly take out on the operation face, satisfy the convenience of replacement in the semiconductor industry, do not need to move other equipment again, or hoist down the filter equipment to replace. The operation face 23 is also equipped with inlet 25 and outlet 26, the heat exchange module is arranged between the fan 3 and the air inlet 21, the front end of the heat exchange module is communicated with the air inlet 21, the rear end of the heat exchange module faces the fan 3, the heat exchange module has heat exchange coil pipes in it, the heat exchange coil pipes include inlet end and outlet end, the inlet end is connected with the inlet 25, the outlet end is connected with the outlet 26, and an exhaust port 27 is also arranged for discharging the condensed water generated by the heat exchange module. Ensure that the air enters first through the heat exchange module for heat exchange, improve the temperature of the air, realize the constant temperature control of the air, convey through the fan, flow through the mesh hole even flow module 5, make the wind evenly enter the filter 4, and discharge after dust removal and filtration through the filter 4, ensure that the air outlet is constant temperature and clean, satisfy the demand of semiconductor preparation. The inlet and the outlet are on the operation face, avoid being hindered when the inlet and the outlet are communicated with the heat exchange gas or liquid, and the use is more convenient.

[0032] The control system 6 is electrically connected with the fan 3 and the heat exchange module. The control system is convenient for controlling the wind speed and the temperature, and is beneficial to use.

[0033] There is also a linear drive module 7 installed on the frame 1, the output end of the linear drive module 7 fixes the upper surface of the mesh uniform flow module 5, the linear drive module 7 is electrically connected with the control system 6, the linear drive module 7 drives the mesh uniform flow module 5 to move up and down, in use, the mesh uniform flow module 5 is pressed down to press the upper surface of the filter 4. Ensure that the mesh uniform flow module 5 can not only play the role of uniform flow, but also play the role of fixing the filter 4, ensure the good sealing of the filter 4, the electric pressing force of the linear drive module 7 is uniform, so that the mesh uniform flow module uniformly presses the filter, and the sealing of the filter is ensured. When the filter 4 needs to be removed, control the linear drive module 7 to move upwards, release the pressing of the mesh uniform flow module 5 on the filter, take out the filter from the filter taking outlet 24, and then put a new filter 4 into the equipment from the filter taking outlet 24. This quick filter disassembly and assembly method meets the time urgency and safety of operation in the semiconductor industry.

[0034] The linear drive module 7 has four, respectively fixed at the four corners of the mesh uniform flow module 5, and the four linear drive modules 7 are synchronously operated. Ensure that the linear drive module 7 is uniformly stressed when pressing and releasing, without manual adjustment, to avoid the risk of sealing of the filter 4 towards the lower pressing surface.

[0035] The mesh uniform flow module 5 is a uniform flow plate, and the uniform flow plate 5 is full of ventilation holes 51. Ensure that the wind blown by the fan 3 is evenly dispersed through the ventilation holes 51, so that the wind is evenly distributed into the filter 4, ensuring that the filter 4 is evenly dusted, improving the service life of the filter, and making the air outlet of the filter 4 more uniform.

[0036] The air outlet 22 is located on the lower surface of the housing 2, and the lower end of the frame 1 also has a filter mounting frame 12, the side of the filter mounting frame 12 facing upwards is provided with a sealing strip, and the filter 4 is tightly sealed and mounted on the filter mounting frame 12. Ensure that the filter 4 and the frame 1 are tightly sealed, and avoid leakage caused by poor sealing.

[0037] The frame 1 also includes a horizontal support rod 13 to ensure the strength of the frame 1 and avoid deformation of the frame 1, ensuring a long service life. The mounting plate 11 is horizontally arranged in the middle of the frame 1, and the mounting plate 11 divides the frame 1 into an upper chamber and a lower chamber, Figure 3The installation plate 11 is not drawn in full in order to show the structure below, and the actual installation plate 11 should cover the whole layer; the upper chamber is a fan air suction layer, and the lower chamber is a fan air blowing layer. The installation plate 11 is provided with a through hole 111, the fan 3 is arranged above the installation plate 11, the air outlet end of the fan 3 is connected with the through hole 111, and the air inlet 21 is located above the installation plate 11. The air inlet 21 can ensure that air can be conveyed to the lower chamber through the fan 3, uniformly distributed through the mesh flow uniformizing module 5 arranged in the lower chamber, filtered through the filter 4, discharged as clean air, and the fan 3 can work normally. The internal fixed installation plate 11 can ensure the strength of the frame 1 and the shell 2 and avoid deformation.

[0038] The frame 1 is a hexahedral frame. The frame 1 has high stability, each surface can effectively bear external force, good support and anti-deformation capacity are provided, the durability is high, the internal space is effectively protected, the filter 4, the fan 3 and other components arranged inside are prevented from being damaged, and the structure is beautiful.

[0039] The door plate is detachably connected to the filter taking outlet 24 through bolts; the filter taking outlet 24 is a strip-shaped opening, the length direction of the filter taking outlet 24 is the x direction, the height direction of the filter taking outlet 24 is the y direction, the length of the filter 4 in the x direction is less than the length of the filter taking outlet 24, and the height of the filter 4 in the y direction is less than the height of the filter taking outlet 24. The filter 4 can be conveniently taken out through the filter taking outlet 24, the filter 4 can be conveniently maintained and replaced through the detachable door plate, and the time cost and labor cost of maintenance and replacement are reduced.

[0040] The linear driving module 7 is a linear motor. The linear motor can provide very precise linear motion, ensure control of the linear motor motion, drive the mesh flow uniformizing module 5 to move downward to press the filter 4, and prevent sealing leakage caused by uneven force of manually pressing the filter 4. The linear motor control can make the plane uniformly stressed downward to ensure the sealing property of the filter 4. The linear motor directly drives the load through electromagnetic force, reduces the wear and maintenance demand of mechanical components, and has small size and is easy to use.

[0041] The utility model has been described by the above related embodiments, however, the above embodiments are only examples for implementing the utility model. It must be pointed out that the disclosed embodiments do not limit the scope of the utility model. On the contrary, changes and decorations made without departing from the spirit and scope of the utility model are all within the patent protection scope of the utility model.

Claims

1. A thermostatic control device for a single-sided quick-disassembly filter, characterized by: The shell, the fan, the filter and the mesh flow equalization module are included. The shell is provided with an air inlet and an air outlet, and is provided with a mounting plate inside, the fan is mounted on the mounting plate, and the filter and the mesh flow equalization module are respectively mounted in the shell; the filter and the mesh flow equalization module are arranged below the fan, the mesh flow equalization module is installed upstream of the filter, and the air outlet is arranged downstream of the filter.

2. The thermostatic control device for a single-sided quick-mount filter according to claim 1, wherein A control system is further included, one side of the shell is an operation surface, the control system is installed on the operation surface, the operation surface is further provided with a filter outlet, and a door plate is installed on the filter outlet; the control system is electrically connected with the fan.

3. The thermostatic control device for a single-sided quick-mount filter according to claim 2, wherein The shell is provided with a frame, and the frame is a hexahedral frame.

4. The thermostatic control apparatus for a single-sided quick-mounting and demounting filter according to claim 3, characterized in that: A linear drive module is further provided, the linear drive module is installed on the frame, the output end of the linear drive module is fixed to the upper surface of the mesh flow equalization module, the linear drive module is electrically connected with the control system, the linear drive module drives the mesh flow equalization module to move up and down, and in the use state, the mesh flow equalization module is pressed downward on the upper surface of the filter.

5. The thermostatic control apparatus for a single-sided quick-mounting and demounting filter according to claim 4, characterized in that: The linear drive module has four, which are respectively fixed at four corners of the mesh flow equalization module, and the four linear drive modules are synchronously operated.

6. The thermostatic control apparatus for a single-sided quick-mounting and demounting filter according to claim 1, characterized in that: The mesh flow equalization module is a flow equalization plate, and the flow equalization plate is full of ventilation holes.

7. The thermostatic control apparatus for a single-sided quick-mounting and demounting filter according to claim 3, characterized in that: The air outlet is located on the lower surface of the shell, the lower end of the frame is further provided with a filter mounting frame, the side of the filter mounting frame facing upward is provided with a sealing strip, and the filter is tightly and sealingly mounted on the filter mounting frame.

8. The thermostatic control apparatus for a single-sided quick-mounting and demounting filter according to claim 3, characterized in that: The frame further includes a horizontal support rod, the mounting plate is horizontally arranged in the middle of the frame, the mounting plate divides the frame into an upper chamber and a lower chamber, the mounting plate is provided with a through hole, the fan is arranged above the mounting plate, the air outlet end of the fan is connected with the through hole, and the air inlet is located above the mounting plate.

9. The thermostatic control apparatus for a single-sided quick-mounting and demounting filter according to claim 2, characterized in that: The door plate is detachably installed at the filter outlet; the filter outlet is a strip-shaped opening, the length direction of the filter outlet is an x direction, the height direction of the filter outlet is a y direction, the length of the filter in the x direction is less than the length of the filter outlet, and the height of the filter in the y direction is less than the height of the filter outlet.

10. The thermostatic control apparatus for a single-sided quick-mounting and demounting filter according to claim 4, characterized in that: The linear drive module is a linear motor.

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