Wafer box opener with detection function

Abstract

The utility model discloses a wafer box opener with a detection function. The wafer box opener comprises a back plate and a base, the bottom of the back plate is connected with the base; a support frame for supporting and fixing the wafer box is arranged at the upper part of the back plate; an opening is formed in a position, opposite to the wafer box, of the upper part of the back plate; a lifting mechanism is arranged on the rear back plate; the movable end of the lifting mechanism is connected with a sealed cabin; the upper part of the sealed cabin is connected with a wafer box shield, and the lower part of the sealed cabin is provided with an air supply mechanism; the wafer box and the supporting frame are located in the sealed cabin, and the sealed cabin is driven by the lifting mechanism to move up and down relative to the wafer box. An opening is formed in the side, facing the back plate, of the sealed cabin. According to the wafer box opener with the detection function, the sealed cabin of the box opener is driven to be lifted by the lifting mechanism, and the condition of wafers in the wafer box is detected by the camera and the sensor in the box opening process.

Description

TECHNICAL FIELD

[0001] The utility model belongs to wafer processing technical field especially, it relates to a wafer box unboxer with detection function. BACKGROUND

[0002] The wafer box is a transfer container used for placing and conveying wafers in semiconductor production, and its main function is to temporarily store and transfer wafers in the processing of semiconductor devices and integrated circuits, so as to reduce the risk of wafer pollution in the transportation process.

[0003] Chinese patent ZL202220916274.5 relates to a cabinet type wafer box unboxing equipment, which can conveniently separate the wafer shield, wafer box and wafer box base in the wafer box assembly, facilitate the discharge treatment of wafers in the wafer box, and can realize lifting operation through the lifting frame, which is simple to operate, convenient to use, can reduce labor consumption and has high efficiency; the wafer shield can be conveniently pressed through the pressing mechanism.

[0004] The above unboxing equipment still has the significance of further development, and the structure of the unboxing device can be designed to have the unboxing function and the function of detecting the wafers in the wafer box. UTILITY MODEL CONTENTS

[0005] The utility model aims at providing a wafer box unboxing device with detection function, the sealed cabin of the unboxing device is driven to lift by the lifting mechanism, and the wafer condition in the wafer box is detected by the camera and sensor during the unboxing process.

[0006] In order to achieve the above purpose, the technical scheme of the utility model is to design a wafer box unboxing device with detection function, which comprises a back plate and a base; the bottom of the back plate is connected with the base; a support frame for supporting and fixing the wafer box is arranged on the upper part of the back plate; an opening is arranged on the upper part of the back plate at the opposite position of the wafer box; a lifting mechanism is arranged on the back plate; the moving end of the lifting mechanism is connected with a sealed cabin; a wafer box shield is connected with the upper part of the sealed cabin, and a blowing mechanism is arranged on the lower part of the sealed cabin; the wafer box and the support frame are located in the sealed cabin, and the sealed cabin is driven to move up and down relative to the wafer box by the lifting mechanism; an opening is arranged on the side of the sealed cabin facing the back plate.

[0007] Further, the box shell and the upper frame are further included; the box shell, the upper frame, the back plate and the base constitute a box, and the central area of the upper frame is used for the lifting of the sealed cabin; the control system for controlling the lifting mechanism is further arranged in the box.

[0008] Further, a camera is arranged on the upper part of the sealed cabin at the side of the lower edge of the wafer box shield.

[0009] Further, the upper part of the sealed cabin is provided with a sensor for sensing the movement of the sealed cabin relative to the wafer box on both sides of the lower edge of the wafer box cover.

[0010] Further, the upper part of the sealed cabin is provided with a clamping structure for clamping and fixing the sealed cabin and the wafer box cover on both sides of the lower edge of the wafer box cover.

[0011] Further, the clamping structure comprises a rotary air cylinder and a buckle; the cylinder rod of the rotary air cylinder is connected with the buckle.

[0012] Further, the opening side wall of the back plate is provided with a cavity; the upper part of the sealed cabin is provided with a baffle capable of moving in the opening of the back plate and the cavity.

[0013] Further, the air supply mechanism comprises a fan and a filter screen.

[0014] The advantages and beneficial effects of the utility model lie in that the utility model discloses a wafer box opening device with a detection function, the sealed cabin of the opening device is driven to lift by the lifting mechanism, and the wafer in the wafer box is detected by the camera and the sensor during the wafer opening process. BRIEF DESCRIPTION OF DRAWINGS

[0015] Figure 1 It is a structural schematic view of the utility model.

[0016] Figure 2 It is a first schematic view of the sealed cabin.

[0017] Figure 3 It is a second schematic view of the sealed cabin.

[0018] Figure 4 It is a first schematic view of the lifting mechanism.

[0019] Figure 5 It is a second schematic view of the lifting mechanism.

[0020] Figure 6 It is a schematic view of the sealed cabin and the lifting mechanism.

[0021] Among them, the box shell 1, the upper frame 2, the back plate 3, the baffle 4, the wafer box cover 5, the sealed cabin 6, the air supply mechanism 7, the camera 8, the rotary air cylinder 9, the buckle 10, the sensor 11, the frame 12, the base 13, the slide rail 14, the sliding block 15, the support frame 16, the wafer box A. DETAILED DESCRIPTION

[0022] The specific embodiments of the utility model are further described below in combination with the drawings and examples. The following examples are only used to more clearly illustrate the technical scheme of the utility model, and cannot be used to limit the protection scope of the utility model. Embodiments

[0023] A wafer box opening device with detection function, including box shell 1, upper frame 2, back plate 3, baffle 4, wafer box shield 5, sealed cabin 6, air supply mechanism 7, camera 8, rotary cylinder 9, fastener 10, sensor 11, frame 12, base 13, slide rail 14, sliding seat 15, support frame 16.

[0024] The box shell 1 is connected to the base 13 at the lower part, the lower part of the base 13 is provided with a pulley, the rear side of the box shell 1 is connected to the back plate 3, and the upper part of the box shell 1 is provided with the upper frame 2; the central part of the upper frame 2 is the lifting area of the sealed cabin 6, the back plate 3 is provided with the support frame 16 for placing the wafer box A, and the support frame is located in the lifting area in the central part of the upper frame 2;

[0025] The box shell 1 is provided with a lifting mechanism for driving the sealed cabin 6 to move in the vertical direction; the lifting mechanism comprises the slide rail 14, the sliding seat 15 and a power mechanism for driving the sliding seat 15 to slide along the slide rail 14;

[0026] The rear side of the sealed cabin 6 is provided with an opening, and the bottom of the sealed cabin 6 is connected to the air supply mechanism 7; the air supply mechanism 7 comprises a fan and a filter screen;

[0027] The upper part of the sealed cabin 6 is connected to the wafer box shield 5 (transparent shield); the sealed cabin 6 is connected to the sliding seat 15.

[0028] The upper part of the sealed cabin 6 at the lower edge of the wafer box shield 5 is provided with the sensor 11 and the clamping structure for fixing the sealed cabin 6 and the wafer box shield 5, and the upper part of the sealed cabin 6 at the rear side of the lower edge of the wafer box shield 5 is provided with the camera 8.

[0029] The clamping structure comprises the rotary cylinder 9 and the fastener 10; the cylinder rod of the rotary cylinder 9 is connected to the fastener 10, and the fastener 10 is driven by the rotary cylinder 9 to tightly fasten the lower edge of the wafer box shield 5 and the upper part of the sealed cabin 6.

[0030] The frame 12 is arranged on the upper edge of the upper part of the sealed cabin 6 for covering and hiding the rotary cylinder 9, the fastener 10, the sensor 11 and the camera 8.

[0031] The upper part of the sealed cabin 6 is provided with the baffle 4 behind the wafer box shield 5.

[0032] The back plate 3 is provided with an opening at the rear side of the wafer box shield 5, and the side wall of the opening of the back plate 3 is provided with a chamber for enabling the baffle 4 to enter and exit.

[0033] Method for use:

[0034] 1) Place the wafer box A containing the wafer on the support frame 16, cover the wafer box shield 5 to the upper part of the wafer box A and connect with the sealed cabin 6;

[0035] 2) The lifting mechanism drives the sealed cabin 6 to move up step by step, and the camera 8 detects the wafer in the wafer box A once every step (the inspection content: the presence or absence of the wafer, the number of pieces, the inclined piece, the wrong piece, the overlapping piece and other conditions);

[0036] 3) In the process of driving the sealed cabin 6 to move up by the lifting mechanism, the baffle 4 originally covering the opening of the back plate 3 is gradually stored into the cavity of the back plate 3, finally, the opening of the sealed cabin 6 and the opening of the back plate 3 coincide, the wafer box A is exposed, that is, the opening of the wafer box A is realized.

[0037] The above is only the preferred embodiment of the present application, it should be pointed out that for the ordinary skilled in the art, without departing from the technical principles of the present application, can make a number of improvements and refinements, these improvements and refinements should also be considered as the protection scope of the present application.

Claims

1. A wafer cassette opener with a detection function, characterized by: The utility model provides a wafer box sealing device, including back plate and base, the bottom of back plate is connected with base, the upper portion of back plate is equipped with support frame for supporting and fixing wafer box, the upper portion of back plate is equipped with opening in the opposite position of wafer box, back plate is equipped with lifting mechanism, the moving end of lifting mechanism is connected with sealed cabin, the upper portion of sealed cabin is connected with wafer box shield, and the lower portion of sealed cabin is equipped with air supply mechanism, wafer box and support frame are located in sealed cabin, and sealed cabin is driven by lifting mechanism and moves up and down relative to wafer box, the side of sealed cabin towards back plate is equipped with opening.

2. The wafer box unloader with a detection function according to claim 1, characterized in that: The utility model also includes box shell and upper frame, the box shell, upper frame, back plate and base constitute box, and the central area of upper frame is used for the area of sealed cabin lifting, the box is equipped with control system for controlling lifting mechanism.

3. The wafer box unloader with a detection function according to claim 1, characterized in that: The upper portion of sealed cabin is equipped with camera in the side of wafer box shield lower edge.

4. The wafer box unloader with a detection function according to claim 1, characterized in that: The upper portion of sealed cabin is equipped with sensor for sensing the movement of sealed cabin relative to wafer box in both sides of wafer box shield lower edge.

5. The wafer box unloader with a detection function according to claim 1, characterized in that: The upper portion of sealed cabin is equipped with clamping structure for clamping and fixing sealed cabin and wafer box shield in both sides of wafer box shield lower edge.

6. The wafer box unloader with a detection function according to claim 5, characterized in that: The clamping structure includes rotary air cylinder and fastener, and the cylinder rod of rotary air cylinder is connected with fastener.

7. The wafer box unloader with a detection function according to claim 1, characterized in that: The inner side of opening side wall of back plate is equipped with chamber, and the upper portion of sealed cabin is equipped with baffle that can move in the opening of back plate and chamber.

8. The wafer box unloader with a detection function according to claim 1, characterized in that: The air supply mechanism includes fan and filter screen.

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