Arsine purification device

Abstract

The utility model discloses an arsine purification device, which relates to the technical field of arsine purification devices, and comprises an arsine gas generation reaction kettle, the top end of one side of the arsine gas generation reaction kettle is communicated with a first gas transmission pipe, and the top end of one side of the first gas transmission pipe is communicated with a filtering absorption box; a mounting base plate is fixedly mounted at the bottom end of the interior of the filtering and absorbing box, and an absorbing box is detachably mounted at the top end of one side of the mounting base plate. Materials are added into an arsine gas generation reaction kettle, generation of arsine gas is achieved, and oxygen, water vapor and carbon dioxide exist in the arsine gas, so that the gas is conveyed into a filtering and absorbing box through a first gas conveying pipe; a plurality of groups of adsorption boxes are mounted in the filtering and absorbing box to absorb and remove other foreign gases, and the adsorbed gases are conveyed into an arsine gas reserved storage box through a second gas conveying pipe to be collected and stored.

Description

Technical Field

[0001] This utility model relates to the technical field of arsine purification equipment, and in particular to an arsine purification equipment. Background Technology

[0002] Arsine is a colorless, highly toxic, and flammable gas with a garlic-like odor at room temperature and atmospheric pressure. It mixes with air to form a flammable mixture. Arsine is a crucial electronic gas, playing a vital role as an "N"-type dopant in epitaxy and ion implantation processes. It is also an important raw material for synthesizing compound semiconductors such as gallium arsenide and gallium arsenide phosphide. However, impurities in arsine mainly include oxygen, water, and carbon dioxide. Current purification methods primarily employ deep adsorption of gallium-indium alloy liquids to remove water and oxygen, yielding electronic-grade arsine. This adsorption method is non-renewable, and the heavy metals are difficult to obtain, resulting in high system costs and limiting its widespread adoption. Furthermore, these heavy metal alloys are themselves toxic, and the deep adsorption process has low efficiency, leading to low purification efficiency in existing arsine purification devices. Additionally, traditional equipment only performs a single impurity treatment, resulting in the mixing of arsine gas with carbon dioxide, affecting the quality of arsine production. Therefore, we have redesigned an arsine purification device. Utility Model Content

[0003] The purpose of this invention is to provide an arsine purification device.

[0004] To solve the above-mentioned technical problems, this utility model provides the following technical solution: an arsine purification device, comprising an arsine gas generating reactor, a first gas transmission pipe connected to the top of one side of the arsine gas generating reactor, a filter absorption box connected to the top of one side of the first gas transmission pipe, an installation chassis fixedly installed at the bottom of the filter absorption box, an adsorption box detachably installed at the top of one side of the installation chassis, a second gas transmission pipe connected to the top of one side of the filter absorption box, an arsine gas pre-storage box connected to the top of one side of the second gas transmission pipe, a gas content monitor fixedly installed on the front side of one side of the arsine gas pre-storage box, a vacuum pump fixedly installed on the back side of one side of the arsine gas pre-storage box, a gas circulation pipe connected to the top of one side of the vacuum pump, a third gas transmission pipe connected to the top of one side of the arsine gas pre-storage box, and an arsine gas storage tank connected to the top of one side of the third gas transmission pipe.

[0005] Preferably, the top end of the gas circulation pipe on the side away from the air pump is connected to the filter absorption box, and there are several adsorption boxes, which are distributed at equal intervals inside the filter absorption box.

[0006] Preferably, a sealing cap is detachably installed on one side of the arsine gas generating reactor, a first control valve is provided on one side of the first gas transmission pipe, a second control valve is provided on one side of the third gas transmission pipe, a monitoring data display is fixedly installed on the front top of the gas content monitor, and a control setting panel is provided on the front bottom of the gas content monitor.

[0007] Preferably, a material receiving pipe is connected to one bottom end of the arsine gas storage tank, and a material receiving control valve is fixedly installed on the top surface of one side of the material receiving pipe.

[0008] Preferably, the adsorption box has an activated carbon filling chamber inside, a snap-fit ​​base groove is formed on one bottom surface of the adsorption box, a connecting hole is formed on one side surface of the adsorption box, a heating base box is fixedly installed on one bottom side of the arsine gas generating reactor, a heating controller is fixedly installed on one side of the heating base box, a main control panel is fixedly installed on one side of the heating controller, and a stabilizing foot is fixedly installed on the bottom edge of the arsine gas generating reactor.

[0009] Preferably, the connection between the snap-fit ​​base groove and the mounting base is a movable snap-fit, and there are several connecting holes, which penetrate both sides of the adsorption box and are arranged in a matrix on the surface of the adsorption box.

[0010] Compared with related technologies, the arsine purification device provided by this utility model has the following beneficial effects:

[0011] 1. This utility model provides an arsine purification device. By adding materials into the arsine gas generation reactor, arsine gas is generated. The arsine gas contains oxygen, water vapor, and carbon dioxide. It is transmitted to the interior of a filter absorption box through a first gas transmission pipe. Multiple adsorption boxes are installed inside the filter absorption box to absorb and remove other impurities. The adsorbed gas is then transmitted to the interior of an arsine gas storage tank through a second gas transmission pipe for collection and storage. The gas content is monitored by a gas content monitor. If the purity of the detected arsine gas is insufficient, a vacuum pump is turned on, and the gas is reintroduced into the filter absorption box through a gas circulation pipe to achieve the effect of gas circulation treatment. The process continues until the detection data reaches a peak value. Then, the second control valve on the third gas transmission pipe is opened to store the gas in the arsine gas storage tank for easy retrieval and use later.

[0012] 2. This utility model provides an arsine purification device. An adsorption box is installed on a mounting base via a snap-fit ​​base groove at the bottom. The activated carbon-filled chamber stores substances that absorb impurity gases. Gas generated by the arsine gas generation reactor enters the activated carbon-filled chamber through a connecting hole and is then adsorbed. The adsorption box is easy to disassemble and replace, allowing for timely replacement of the adsorbent material inside the activated carbon-filled chamber. The material extraction pipe and material extraction control valve facilitate direct material removal. A heating controller on the heating base box controls the heating level inside the arsine gas generation reactor, accelerating the arsine gas production rate. Attached Figure Description

[0013] Figure 1 This is a three-dimensional structural diagram of the present invention;

[0014] Figure 2 This is a schematic diagram of the rear view of the device of this utility model;

[0015] Figure 3 This is a schematic diagram of the adsorption box structure of this utility model;

[0016] Figure 4 This utility model Figure 2 A magnified structural diagram at point A.

[0017] The diagram is labeled as follows: 1. Arsine gas generation reactor; 2. First gas transmission pipe; 3. Filter absorption box; 4. Mounting chassis; 5. Adsorption box; 6. Second gas transmission pipe; 7. Arsine gas reserved storage box; 8. Gas content monitor; 9. Vacuum pump; 10. Gas circulation pipe; 11. Third gas transmission pipe; 12. Arsine gas storage tank; 13. Sealed movable cover; 14. First control valve; 15. Second control valve; 16. Monitoring data display; 17. Control setting panel; 18. Feed pipe; 19. Feed control valve; 20. Activated carbon filling chamber; 21. Snap-fit ​​chassis groove; 22. Connecting hole; 24. Heating base box; 25. Heating controller; 26. Main control panel; 27. Stabilizing feet. Detailed Implementation

[0018] Example 1:

[0019] Please see Figure 1-4This utility model provides a technical solution: an arsine purification device, comprising an arsine gas generating reactor 1, a first gas transmission pipe 2 connected to the top of one side of the arsine gas generating reactor 1, a filter absorption box 3 connected to the top of one side of the first gas transmission pipe 2, an installation base 4 fixedly installed at the bottom of the filter absorption box 3, an adsorption box 5 detachably installed at the top of one side of the installation base 4, a second gas transmission pipe 6 connected to the top of one side of the filter absorption box 3, and an arsine gas pre-storage box 7 connected to the top of one side of the second gas transmission pipe 6. A gas content monitor 8 is fixedly installed on one side of the storage box 7. A vacuum pump 9 is fixedly installed on the back side of one side of the arsine gas storage box 7. A gas circulation pipe 10 is connected to the top of one side of the vacuum pump 9. A third gas transmission pipe 11 is connected to the top of one side of the arsine gas storage box 7. An arsine gas storage tank 12 is connected to the top of one side of the third gas transmission pipe 11. The top of the side of the gas circulation pipe 10 away from the vacuum pump 9 is connected to the filter absorption box 3. There are several adsorption boxes 5, which are evenly distributed inside the filter absorption box 3.

[0020] In the implementation plan, materials are added to the interior of the arsine gas generating reactor 1 to generate arsine gas. The arsine gas contains oxygen, water vapor, and carbon dioxide. It is then transported to the interior of the filter absorption box 3 through the first gas transmission pipe 2. Multiple adsorption boxes 5 are installed inside the filter absorption box 3 to absorb and remove other impurities. The adsorbed gas is then transported to the interior of the arsine gas reserved storage box 7 through the second gas transmission pipe 6 for collection and storage. The gas content is monitored by the gas content monitor 8. If the purity of the detected arsine gas is insufficient, the gas pump 9 is turned on, and the gas is reintroduced into the filter absorption box 3 through the gas circulation pipe 10 to achieve the effect of circulating the gas. The gas is circulated until the detection data reaches the peak value. Then, the second control valve 15 on the third gas transmission pipe 11 is opened to store the gas in the arsine gas storage tank 12 for easy retrieval and use later.

[0021] Example 2:

[0022] Please see Figure 1-4This utility model provides a technical solution: an arsine purification device, comprising an arsine gas generating reactor 1 with a detachably mounted sealing cap 13 on one side top; a first control valve 14 on one side top of a first gas transmission pipe 2; a second control valve 15 on one side top of a third gas transmission pipe 11; a monitoring data display 16 fixedly mounted on the front top of a gas content monitor 8; a control setting panel 17 on the front bottom of the gas content monitor 8; a feeding pipe 18 connected to one side bottom of an arsine gas storage tank 12; a feeding control valve 19 fixedly mounted on one side top surface of the feeding pipe 18; and an activated carbon filling chamber inside an adsorption box 5. The adsorption tank 5 has a snap-fit ​​base groove 21 on one side of its bottom surface and a connecting hole 22 on one side surface. The arsine gas generating reactor 1 has a heating base box 24 fixedly installed on one side of its bottom surface. A heating controller 25 is fixedly installed on one side of the heating base box 24. A main control panel 26 is fixedly installed on one side of the heating controller 25. A stabilizing foot column 27 is fixedly installed on the bottom edge of the arsine gas generating reactor 1. The snap-fit ​​base groove 21 and the mounting base 4 are connected by a movable snap-fit. There are several connecting holes 22, which penetrate both sides of the adsorption tank 5 and are arranged in a matrix on the surface of the adsorption tank 5.

[0023] In the implementation scheme, the adsorption box 5 is installed on the mounting chassis 4 via the snap-fit ​​chassis groove 21 at the bottom. The activated carbon filling chamber 20 stores the substance that absorbs impurity gases. The gas generated by the arsine gas generating reactor 1 enters the interior of the activated carbon filling chamber 20 through the connecting hole 22 and is then adsorbed. The adsorption box 5 is easy to disassemble and replace, allowing for timely replacement of the adsorbent material inside the activated carbon filling chamber 20. The material extraction pipe 18 and the material extraction control valve 19 facilitate the direct extraction of materials. The heating controller 25 on the heating base box 24 controls the heating level inside the arsine gas generating reactor 1, accelerating the production rate of arsine gas.

[0024] Working principle:

[0025] By adding materials into the arsine gas generating reactor 1, arsine gas is generated. The arsine gas contains oxygen, water vapor, and carbon dioxide. It is then transported to the filter absorption box 3 through the first gas transmission pipe 2. Multiple adsorption boxes 5 are installed inside the filter absorption box 3 to absorb and remove other impurities. The adsorbed gas is then transported to the arsine gas storage tank 7 through the second gas transmission pipe 6 for collection and storage. The gas content is monitored by the gas content monitor 8. If the purity of the detected arsine gas is insufficient, the gas pump 9 is turned on, and the gas is reintroduced into the filter absorption box 3 through the gas circulation pipe 10 to achieve the effect of circulating the gas. This continues until the detection data reaches the peak value. Then, the second control valve 15 on the third gas transmission pipe 11 is opened to store the gas in the arsine gas storage tank 12 for easy retrieval and use later.

[0026] The adsorption box 5 is installed on the mounting base 4 via the snap-fit ​​base groove 21 at the bottom. The activated carbon filling chamber 20 stores the substance that absorbs impurity gases. The gas generated by the arsine gas generating reactor 1 enters the interior of the activated carbon filling chamber 20 through the connecting hole 22 and is then adsorbed. The adsorption box 5 is easy to disassemble and replace, allowing for timely replacement of the adsorbent material inside the activated carbon filling chamber 20. The material extraction pipe 18 and the material extraction control valve 19 facilitate the direct extraction of materials. The heating controller 25 on the heating base box 24 controls the heating level inside the arsine gas generating reactor 1, accelerating the production rate of arsine gas.

Claims

1. An apparatus for purifying arsine, comprising an arsine gas generating reaction kettle (1), a first gas transmission pipe (2) being communicated with a side top end of the arsine gas generating reaction kettle (1), characterized in that: The side top end of the first gas transmission pipe (2) is communicated with a filtering absorption box (3), the inside bottom end of the filtering absorption box (3) is fixedly installed with a mounting bottom disc (4), the side top end of the mounting bottom disc (4) is detachably installed with an adsorption box (5), the side top end of the filtering absorption box (3) is communicated with a second gas transmission pipe (6), the side top end of the second gas transmission pipe (6) is communicated with an arsine gas reserved storage box (7), the side front surface of the arsine gas reserved storage box (7) is fixedly installed with a gas content monitor (8), the side back surface of the arsine gas reserved storage box (7) is fixedly installed with a gas suction pump (9), the side top end of the gas suction pump (9) is communicated with a gas circulation pipe (10), the side top end of the arsine gas reserved storage box (7) is communicated with a third gas transmission pipe (11), and the side top end of the third gas transmission pipe (11) is communicated with an arsine gas storage tank (12).

2. An arsine purification apparatus according to claim 1, wherein The side top end of the gas circulation pipe (10) away from the gas suction pump (9) is communicated with the filtering absorption box (3), and the adsorption box (5) is in plurality, and the plurality of adsorption boxes (5) are distributed at equal intervals in the inside of the filtering absorption box (3).

3. An arsine purification apparatus according to claim 1, wherein The side top end of the arsine gas generation reaction kettle (1) is detachably installed with a sealing movable cover (13), the side top end of the first gas transmission pipe (2) is provided with a first control valve (14), the side top end of the third gas transmission pipe (11) is provided with a second control valve (15), the front end of the gas content monitor (8) is fixedly installed with a monitoring data display (16), and the bottom end of the front surface of the gas content monitor (8) is provided with a control setting disc (17).

4. An arsine purification apparatus according to claim 1, wherein The side bottom end of the arsine gas storage tank (12) is communicated with a material taking pipe (18), and the side top end surface of the material taking pipe (18) is fixedly installed with a material taking control valve (19).

5. An arsine purification apparatus as claimed in claim 1, wherein The inside of the adsorption box (5) is provided with an activated carbon filling cabin (20), the side bottom end surface of the adsorption box (5) is provided with a buckle bottom disc groove (21), the side surface of the adsorption box (5) is provided with a communication hole (22), the side bottom end of the arsine gas generation reaction kettle (1) is fixedly installed with a heating base box (24), the side of the heating base box (24) is fixedly installed with a heating controller (25), the side of the heating controller (25) is fixedly installed with a main control disc (26), and the bottom end edge of the arsine gas generation reaction kettle (1) is fixedly installed with a stabilizing foot column (27).

6. An arsine purification apparatus according to claim 5, wherein The connection relationship between the buckle bottom disc groove (21) and the mounting bottom disc (4) is movable clamping, the number of the communication holes (22) is plurality, the plurality of communication holes (22) penetrate through the two side surfaces of the adsorption box (5), and the communication holes (22) are arranged in matrix on the surface of the adsorption box (5).

Images