Efficient oxide target cabin cleaning device

Abstract

The utility model relates to an efficient oxide target cabin cleaning device which comprises a dust collection pipeline, and a support is fixedly installed on the dust collection pipeline. A rotating seat is fixedly mounted at one end of the dust collection pipeline, a dust collection groove is formed in the rotating seat, and the dust collection groove communicates with the dust collection pipeline; a cover plate is fixedly mounted on the rotating seat, and the dust collection groove is covered with the cover plate; a rotary brush head is rotationally arranged on the bracket, and a gear ring is fixedly arranged on the rotary brush head; and a driving motor is fixedly arranged on the dust collection pipeline. According to the efficient oxide target cabin cleaning device, the rotating brush head is rotationally arranged on the rotating seat, blocks or powder agglomerated on the inner wall of the spraying cabin are cleaned through the rotating brush head, residual sundries, dust and the like are extracted out of the spraying cabin through the dust suction device and collected, the efficient oxide target cabin cleaning device is simple, convenient and efficient, the labor intensity of operators is remarkably relieved, and the working efficiency is improved. Therefore, the quality and the efficiency of continuous production of the oxide target material are improved.

Description

TECHNICAL FIELD

[0001] The utility model relates to sputter coating maintenance technical field, concretely is a kind of high-efficiency oxide target material cleaning device. BACKGROUND

[0002] In the spraying process of oxide target material, a large amount of excess spraying powder is often generated, which is easy to deposit on the inner wall of the spraying cabin. If not completely removed, they can fall off and adhere to the surface of the subsequent target material, thereby causing the formation of voids, and even becoming the starting point of cracks, ultimately leading to the overall cracking of the target material.

[0003] However, the comprehensive and thorough cleaning work in the spraying cabin is time-consuming and labor-intensive, increasing the labor intensity of the operator.

[0004] Therefore, there is an urgent need for a high-efficiency oxide target material cleaning device that reduces the labor intensity of the operator. SUMMARY

[0005] The utility model aims at overcoming the above-mentioned shortcomings, and provides a high-efficiency oxide target material cleaning device that reduces the labor intensity of the operator.

[0006] The utility model aims at overcoming the above-mentioned shortcomings, and provides a high-efficiency oxide target material cleaning device that reduces the labor intensity of the operator.

[0007] A high-efficiency oxide target material cleaning device, comprising a dust suction pipeline, a support is fixedly installed on the dust suction pipeline; a rotating seat is fixedly installed at one end of the dust suction pipeline, and a dust suction groove is formed in the rotating seat and communicates with the dust suction pipeline; a cover plate is fixedly installed on the rotating seat and covers the dust suction groove; a rotating brush head is rotatably arranged on the support, and a gear ring is fixedly arranged on the rotating brush head; a driving motor is fixedly arranged on the dust suction pipeline, and a driving gear is fixedly installed on the output end of the driving motor and engages with the gear ring; a wind pipe is arranged at the other end of the dust suction pipeline, and the dust suction pipeline is connected with a dust suction device through the wind pipe.

[0008] Preferably, the dust suction groove is arranged at multiple positions on the side of the rotating seat away from the dust suction pipeline, and the multiple dust suction grooves are arranged in a circumferential array around the center line of the rotating seat.

[0009] Preferably, a communication hole is formed in the middle position of the rotating seat, and one end of the dust suction groove close to the center line of the rotating seat communicates with the dust suction pipeline through the communication hole.

[0010] Preferably, the cover plate blocks the communication hole and the one end of the dust suction groove close to the center line of the rotating seat.

[0011] Compared with the prior art, the utility model has the advantages that:

[0012] 1. The utility model relates to an efficient oxide target material cleaning device, which is characterized in that a rotating brush head is arranged on a rotating seat, and a driving motor drives the rotating brush head to rotate through a driving gear and a gear ring, and the rotating brush head is used to clean the agglomerated blocks or powder on the inner wall of the spraying cabin, which is simple, efficient, and can significantly reduce the labor intensity of the operator, thereby improving the quality and efficiency of the continuous production of oxide target materials.

[0013] 2. The utility model relates to an efficient oxide target material cleaning device, which is characterized in that a dust suction groove is arranged on the rotating seat, and the dust suction groove is connected to a dust suction pipeline through a communication hole, and the residual sundries, dust, etc. cleaned by the rotating brush head are sucked into the dust suction pipeline through the dust suction groove, and the dust suction pipeline is connected to a dust suction device, and the residual sundries, dust, etc. are collected by the dust suction device, so that the spraying cabin is thoroughly and efficiently cleaned.

[0014] 3. The utility model relates to an efficient oxide target material cleaning device, which is characterized in that a cover plate is arranged on the rotating seat, and the cover plate blocks the communication hole and the end of the dust suction groove close to the center line of the rotating seat, thereby improving the suction force and making the dust suction port closer to the rotating brush head, so that the residual sundries, dust, etc. can be better collected. BRIEF DESCRIPTION OF DRAWINGS

[0015] Figure 1 It is a perspective structural schematic view of the utility model of an efficient oxide target material cleaning device.

[0016] Figure 2 It is a structural schematic view of the gear ring of the utility model of an efficient oxide target material cleaning device.

[0017] Figure 3 It is a structural schematic view of the rotating brush head of the utility model of an efficient oxide target material cleaning device.

[0018] Figure 4 It is an exploded structural schematic view of the utility model of an efficient oxide target material cleaning device.

[0019] Figure 5 It is a structural schematic view of the rotating seat of the utility model of an efficient oxide target material cleaning device.

[0020] Among them: dust suction pipeline 1, support 2, rotating seat 3, communication hole 301, dust suction groove 4, cover plate 5, rotating brush head 6, gear ring 7, driving motor 8, driving gear 9, air pipe 10, dust suction device 11. DETAILED DESCRIPTION

[0021] Referring to Figures 1 to 5The utility model relates to a kind of high-efficiency oxide target material cleaning device, including dust suction pipeline 1, dust suction pipeline 1 is fixedly installed with support 2, for supporting dust suction pipeline 1, and can better support the movement in the spraying cabin as a whole;One end of dust suction pipeline 1 is fixedly installed with rotating seat 3, and the middle position of rotating seat 3 is provided with communication hole 301, dust suction groove 4 is arranged on rotating seat 3, dust suction groove 4 is long strip, and one end of dust suction groove 4 close to the center line of rotating seat 3 is communicated with dust suction pipeline 1 by communication hole 301, residual sundries, dust etc. can enter dust suction pipeline 1 by communication hole 301, and then spray cabin is extracted.

[0022] In order to improve the dust collection effect, the dust suction groove 4 is provided with multiple places on the side of the rotating seat 3 away from the dust suction pipeline 1, and the multiple dust suction grooves 4 are arranged in a circular array around the center line of the rotating seat 3, thereby increasing the distribution range of the dust suction groove 4.

[0023] The cover plate 5 is fixedly installed on the rotating seat 3, and the cover plate 5 covers the dust suction groove 4, and the cover plate 5 blocks the communication hole 301 and one end of the dust suction groove 4 close to the center line of the rotating seat 3. After the cover plate blocks the communication hole 301 and one end of the dust suction groove 4 close to the center line of the rotating seat 3, the opening size of the dust suction groove 4 is reduced, the suction force is improved, and the residual sundries, dust etc. are sucked in through one end of the dust suction groove 4 away from the center line of the rotating seat 3. This end is closer to the rotating brush head 6, and the residual sundries, dust etc. can be better collected.

[0024] The rotating brush head 6 is rotatably arranged on the support 2, and the gear ring 7 is fixedly arranged on the rotating brush head 6. The driving motor 8 is fixedly arranged on the dust suction pipeline 1, and the driving gear 9 is fixedly installed on the output end of the driving motor 8. The driving gear 9 is engaged with the gear ring 7. The driving motor 8 drives the rotating brush head 6 to rotate through the driving gear 9 and the gear ring 7. The rotating brush head 6 is used to clean the agglomerated blocks or powders on the inner wall of the spraying cabin. It is simple, efficient and significantly reduces the labor intensity of the operator, thereby improving the quality and efficiency of the continuous production of the oxide target material.

[0025] The other end of the dust suction pipeline 1 is provided with the air pipe 10, and the dust suction pipeline 1 is connected with the dust suction device 11 through the air pipe 10. The residual sundries, dust etc. are extracted from the spraying cabin and collected through the dust suction device 11, so as to ensure that the spraying cabin is thoroughly and efficiently cleaned.

[0026] The working principle of the high-efficiency oxide target material cleaning device is as follows: the device is arranged in a spraying cabin, a support 2 is kept on a track support of the spraying cabin, a dust suction pipeline 1 is connected with a dust suction device 11 through a wind pipe 10, the dust suction device 11 is opened and the device is moved, residual easy-to-clean dust in the spraying cabin is sucked, a driving motor 8 is opened, the rotating brush head 6 is driven to rotate through a driving gear 9 and a gear ring 7, the agglomerated powder or sundry pieces on the inner wall of the spraying cabin are cleaned by the rotating brush head 6, and when the device is operated, the rotating speed of the rotating brush head 6 or the pressure difference of the dust suction device 11 can be adjusted according to the cleaning degree of the inner wall until the cleaning is completed.

[0027] In addition: It should be noted that the above specific embodiments are only an optimization scheme of the patent, and any changes or improvements made by those skilled in the art according to the above concept are within the protection scope of the patent.

Claims

1. A high efficiency oxide target blanking device, characterized by: The utility model provides a dust collection device, including dust collection pipeline (1), the dust collection pipeline (1) is fixedly installed with support (2), one end of dust collection pipeline (1) is fixedly installed with rotary seat (3), and rotary seat (3) is seted up with dust collection groove (4), and dust collection groove (4) is linked together with dust collection pipeline (1), rotary seat (3) is fixedly installed with cover plate (5), and cover plate (5) covers dust collection groove (4), rotary brush head (6) is rotationally arranged on support (2), and rotary brush head (6) is fixedly provided with gear ring (7), dust collection pipeline (1) is fixedly provided with drive motor (8), and the output of drive motor (8) is fixedly installed with drive gear (9), and drive gear (9) is engaged with gear ring (7), the other end of dust collection pipeline (1) is provided with air pipe (10), and dust collection pipeline (1) is connected with dust collection device (11) through air pipe (10).

2. The efficient oxide target blanking device according to claim 1, characterized in that: Dust collection groove (4) is provided with multiple on the side of rotary seat (3) away from dust collection pipeline (1), and multiple dust collection grooves (4) are arranged around the center line of rotary seat (3) circumferentially.

3. The efficient oxide target blanking device according to claim 2, characterized in that: The middle position of rotary seat (3) is provided with a communication hole (301), and one end of dust collection groove (4) close to the center line of rotary seat (3) is communicated with dust collection pipeline (1) through the communication hole (301).

4. The high-efficiency oxide target material cleaning device according to claim 3, characterized in that: The cover plate (5) blocks the communication hole (301) and the end of the dust collection groove (4) close to the center line of the rotary seat (3).

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