Auxiliary mounting tool for polishing head of 12-inch silicon wafer fine polishing machine

Abstract

The utility model discloses an auxiliary mounting tool for a polishing head of a 12-inch silicon wafer fine polishing machine. The polishing head auxiliary installation tool body is formed by assembling a semi-ring grab handle on the upper portion and a plurality of hole inserting columns on the lower portion. The semi-ring grab handle is arc-shaped, and the circle center of the arc and the circle where the threaded hole of the polishing head outer ring is located are concentric circles. The semi-ring grab handle is provided with a threaded installation hole, and one end of the hole insertion column is provided with an external thread matched with the threaded installation hole. The auxiliary installation tool for the polishing head of the 12-inch silicon wafer fine polishing machine has the advantages of being simple in structure and convenient to operate, mechanical collision damage to a horizontal adjusting mechanism of the polishing head can be effectively avoided when the polishing head is installed, the installation time of the polishing head is shortened, and the maintenance efficiency is improved.

Description

Technical Field

[0001] This utility model relates to an auxiliary installation fixture for the polishing head of a 12-inch silicon wafer precision polishing machine, belonging to the field of 12-inch wafer production and processing technology. Background Technology

[0002] During use, 12-inch silicon wafer polishing machines may experience problems such as aging and air leakage of the drive ring inside the polishing head, and aging and breakage of the polishing head spindle telescopic sleeve. When replacing these parts, the first step is to remove the polishing head for repair and replacement. After the damaged parts are replaced, the polishing head needs to be reinstalled. Due to its own structure, the polishing head is currently quite time-consuming and laborious to install without any auxiliary tools.

[0003] The polishing head is mounted on the polishing head connecting plate. The polishing head needs to be positioned concentrically with the connecting plate. The connecting plate has a polishing head leveling mechanism, and the locking mechanism's latch needs to be aligned with the slot at the center of the polishing head. The current method involves pushing the polishing head under the connecting plate and moving it by hand for alignment. However, this method is problematic because the polishing head is heavy, making vertical alignment between the polishing head and the connecting plate, and between the slot at the center of the polishing head and the locking mechanism's latch, difficult and time-consuming. Furthermore, the locking mechanism's latch is prone to misalignment with the slot at the center of the polishing head, easily causing mechanical damage during installation. Therefore, this method has significant drawbacks. Summary of the Invention

[0004] To address the inconvenience of replacing and installing polishing heads on current precision polishing machines, the purpose of this utility model is to provide an auxiliary installation fixture for polishing heads on 12-inch silicon wafer precision polishing machines. This fixture facilitates rapid installation of the polishing heads, eliminates safety hazards caused to the leveling mechanism of the polishing heads during installation, improves maintenance efficiency, ensures production, and prevents equipment damage.

[0005] To achieve the above objectives, the present invention adopts the following technical solution:

[0006] A polishing head auxiliary installation fixture for a 12-inch silicon wafer fine polishing machine, the main body of which is assembled from an upper semi-ring handle and a lower multi-hole insert post;

[0007] The semi-circular handle is arc-shaped, and the center of the arc is concentric with the circle containing the threaded hole on the outer ring of the polishing head.

[0008] The semi-ring handle is provided with a threaded mounting hole, and one end of the insertion post is provided with an external thread that matches the threaded mounting hole.

[0009] Furthermore, the central angle formed by the arc between two adjacent threaded mounting holes in the semi-ring handle is one-twelfth of the circle containing the threaded hole of the outer ring of the polishing head.

[0010] Furthermore, the number of threaded mounting holes is 5.

[0011] Furthermore, the edges around the semi-circular handle are chamfered.

[0012] Furthermore, the other end of the insertion post has a rounded corner structure.

[0013] Furthermore, the portion of the insertion post other than its external thread is covered with Teflon tape.

[0014] The advantages of this utility model are:

[0015] The auxiliary installation fixture for the polishing head of the 12-inch silicon wafer fine polishing machine of this utility model has the characteristics of simple structure and convenient operation. It can effectively avoid mechanical collision damage to the polishing head leveling mechanism during polishing head installation, shorten the installation time of the polishing head, and improve maintenance efficiency. Attached Figure Description

[0016] Figure 1 A schematic diagram of the overall structure of the auxiliary mounting fixture for the polishing head of a 12-inch silicon wafer precision polishing machine.

[0017] Figure 2 A schematic diagram of the semi-ring handle in the auxiliary installation fixture for the polishing head of a 12-inch silicon wafer precision polishing machine.

[0018] Figure 3 A schematic diagram of the central hole insertion post of the auxiliary installation tooling for the polishing head of a 12-inch silicon wafer precision polishing machine. Detailed Implementation

[0019] The present invention will be further described below with reference to the accompanying drawings and specific embodiments, but this does not imply any limitation on the scope of protection of the present invention.

[0020] like Figure 1 As shown, the auxiliary mounting fixture for the polishing head of the 12-inch silicon wafer precision polishing machine proposed in this utility model consists of two parts: an upper semi-ring handle 1 and a lower hole insertion post 2. The semi-ring handle 1 and the hole insertion post 2 are two separate parts that need to be assembled together as a whole. Their independent structural design also facilitates replacement after damage during use. The semi-ring handle 1 and the hole insertion post 2 are made of stainless steel, and their excellent properties meet practical needs, making them convenient and durable. Figure 2As shown, the semi-ring handle 1 is arc-shaped, with the center of its arc concentric with the circle containing the threaded hole on the outer ring of the polishing head. The semi-ring handle 1 has threaded mounting holes 11, which are evenly distributed according to the position of the threaded hole on the outer ring of the polishing head. The central angle formed by the arcs of two adjacent threaded mounting holes 11 is one-twelfth of the circle containing the threaded hole on the outer ring of the polishing head. The edges of the semi-ring handle 1 are chamfered 12. Figure 3 As shown, one end of the insertion post 2 has an external thread 21, and the other end has a rounded corner structure 22. The function of the rounded corner structure 22 is to prevent mechanical impacts during use from causing scratches on the surface of the polishing head. The part of the insertion post 2 other than the external thread 21 is covered with Teflon tape to reduce installation friction and prevent scratches on the threaded hole of the polishing head. Figure 2 , 3 As shown, the end of the insertion post 2 with external thread 21 is installed in the threaded mounting hole 11 of the semi-ring handle 1. This design facilitates replacement of the insertion post 2 after it is bent or damaged during use.

[0021] In practical applications, the operation process of the auxiliary mounting fixture for the polishing head of the 12-inch silicon wafer fine polishing machine of this utility model is as follows:

[0022] Assemble the semi-ring handle 1 and the pin 2 into a single unit. Place the polishing head to be installed under the polishing head connecting plate. Rotate the polishing head with both hands to adjust and align the center position of the polishing head slot with the approximate position of the polishing head horizontal adjustment mechanism chuck. Hold the semi-ring handle 1 of the fixture and insert the five pins 2 of the fixture through the polishing head mounting bolt through holes on the outer ring of the corresponding arc-shaped polishing head connecting plate. Then, align the five pins 2 of the fixture with the threaded holes on the outer ring of the polishing head and insert them. This will align the upper and lower holes of the polishing head with the connecting plate, and align the center position of the polishing head slot with the horizontal adjustment mechanism chuck. Then, lower the polishing head connecting plate until it contacts the polishing head. Finally, remove the fixture to smoothly install the polishing head.

[0023] This utility model's auxiliary installation fixture for the polishing head of a 12-inch silicon wafer precision polishing machine has a simple structure and is easy to operate, greatly shortening the installation time of the polishing head. At the same time, it ensures accurate alignment between the slot at the center of the polishing head and the clamp of the polishing head leveling mechanism, preventing damage to the polishing head leveling mechanism caused by the clamp hitting the edge of the slot at the center of the polishing head due to inaccurate alignment during the descent of the polishing head connecting plate. It improves maintenance efficiency while ensuring operational safety, and its practical effect is obvious, demonstrating high practical value.

Claims

1. A 12-inch silicon wafer fine-polishing machine polishing head auxiliary installation tool, characterized in that, The polishing head auxiliary mounting tool body is assembled by a semicircular handle on the upper side and a plurality of hole inserting columns on the lower side; The semicircular handle is in an arc shape, and the center of the arc is concentric with a circle where the threaded holes of the outer ring of the polishing head are located. The semicircular handle is provided with threaded mounting holes, and one end of each hole inserting column is provided with an external thread matched with the threaded mounting holes.

2. The polishing head auxiliary mounting tool for 12-inch silicon wafer precision polishing machine according to claim 1, wherein, The center angle of the arc between any two adjacent threaded mounting holes of the semicircular handle is one twelfth of the circle where the threaded holes of the outer ring of the polishing head are located.

3. The 12-inch silicon wafer precision polishing machine polishing head auxiliary mounting tool of claim 1 or 2, wherein, The number of the threaded mounting holes is five.

4. The polishing head auxiliary mounting tool for 12-inch silicon wafer precision polishing machine according to claim 1, characterized in that, The edge of the semicircular handle is in a chamfered structure.

5. The polishing head auxiliary mounting tool for 12-inch silicon wafer precision polishing machine according to claim 1 or 4, characterized in that, The other end of the hole inserting column is in a rounded structure.

6. The polishing head auxiliary mounting tool for 12-inch silicon wafer precision polishing machine according to claim 1 or 4, characterized in that, The part of the hole inserting column other than the external thread is attached with a Teflon tape.

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