Metallized zinc-aluminum alloy ultra-high sheet resistance film evaporation device

Abstract

The utility model relates to the technical field of film capacitors, in particular to a metallized zinc-aluminum alloy ultrahigh sheet resistance film evaporation device, which can improve the precision of sheet resistance, reduce the technical difficulty in the production process and improve the overall production efficiency, and comprises a zinc furnace, a crucible is arranged in the zinc furnace, a cover plate is placed on the crucible, and the cover plate is arranged on the zinc furnace. A zinc furnace baffle is arranged at an outlet in the top of the zinc furnace, and the device is characterized in that a partition plate is arranged in the crucible to divide the crucible into independent unit containers, metal zinc is placed in the unit containers at intervals, cover plate flow guide holes are uniformly formed in the cover plate at intervals, and evaporation holes are formed in the zinc furnace baffle in an up-down staggered manner.

Description

TECHNICAL FIELD

[0001] The utility model relates to the technical field of film capacitor, concretely is a kind of metallized zinc-aluminum alloy ultra-high sheet resistance film evaporation device. BACKGROUND

[0002] Metallized zinc-aluminum alloy ultra-high sheet resistance film has ultra-high sheet resistance value, which makes it have unique application advantages in electronic components such as capacitors. Due to the special structure and material properties of the metal coating, the metallized zinc-aluminum ultra-high sheet resistance film has high voltage resistance performance and can withstand higher voltage without breakdown or damage. When the film self-heals in the capacitor, the metal layer at the high sheet resistance will self-heal first, thereby improving the self-healing performance of the capacitor.

[0003] The evaporation process of the metallized zinc-aluminum alloy ultra-high sheet resistance film is particularly delicate and complex in a high vacuum environment. The entire process requires two precise evaporation operations. In the first evaporation stage, the material is uniformly evaporated on the surface of the dielectric layer by an aluminum wire melting evaporator, ensuring good bonding between the dielectric layer and the aluminum layer, and laying a foundation for subsequent steps. Then it enters the second evaporation stage, which is extremely critical. At this step, the material passes through the evaporation opening on the zinc furnace baffle to evaporate a layer of zinc layer on the aluminum film, which is also extremely thin and evenly distributed in the thickening area and active area and covers the aluminum layer. The addition of zinc layer further improves the overall performance of the film, such as conductivity, corrosion resistance and mechanical strength.

[0004] The thickness of the zinc layer of the metallized zinc-aluminum alloy ultra-high sheet resistance film reaches the nanometer level, and the evaporation amount is extremely small. Due to the high temperature of the zinc furnace during evaporation, the pressure in the zinc furnace liner is too large, and the evaporation amount also increases. Due to the long height of the zinc baffle opening, the zinc baffle evaporation port is easily blocked and corroded during the evaporation process, and the evaporation port is also easily deformed under long-term high-temperature roasting, which makes it extremely difficult to control the stability and uniformity of the zinc baffle during the evaporation process. Any small deviation or fluctuation can significantly affect the final film quality. SUMMARY

[0005] To solve the above technical problems, the utility model provides a kind of metallized zinc-aluminum alloy ultra-high sheet resistance film evaporation device, it can improve the precision of sheet resistance, reduce the technical difficulty in production process, improve overall production efficiency.

[0006] The technical scheme is as follows: a kind of evaporating device of metallized zinc-aluminum alloy ultra-high sheet resistance thin film, which comprises zinc furnace, the crucible is arranged in the zinc furnace, the cover plate is placed on the crucible, the zinc furnace baffle is placed at the top outlet of the zinc furnace, characterized in that, the crucible is provided with a partition to separate independent unit container, metal zinc is placed in the unit container, the cover plate is provided with uniformly arranged cover plate flow guide hole, and the zinc furnace baffle is provided with upper and lower staggered evaporation holes.

[0007] Further characterized in that, the cover plate flow guide hole between adjacent cover plates forms a reinforcing rib;

[0008] The front and rear sides of the cover plate are respectively provided with limiting strips, and the left side is provided with a protrusion for conveniently taking the cover plate;

[0009] The evaporation holes are divided into three groups along the length direction, each group including upper and lower staggered first, second, shuttle-shaped, third and fourth strip-shaped through holes.

[0010] After using the utility model, the crucible structure, cover plate structure and zinc furnace baffle structure are optimized, metal zinc is placed in the unit container of the crucible, the evaporation amount is reduced, the zinc vapor can smoothly and uniformly pass through the uniformly arranged cover plate flow guide hole, and finally evaporates through the evaporation hole, the upper and lower staggered evaporation holes can solve the deformation caused by high temperature, ensure the evaporation precision, improve the precision of the sheet resistance of the thin film, reduce the technical difficulty in the production process, and improve the overall production efficiency. BRIEF DESCRIPTION OF DRAWINGS

[0011] Figure 1 It is a whole schematic diagram of zinc evaporation module (omit front and rear baffles, to clearly see the internal structure);

[0012] Figure 2 It is a schematic diagram of crucible;

[0013] Figure 3 It is a schematic diagram of cover plate front;

[0014] Figure 4 It is a schematic diagram of cover plate back;

[0015] Figure 5 It is a schematic diagram of zinc furnace baffle front;

[0016] Figure 6 It is Figure 5 The dashed box is an enlarged schematic diagram;

[0017] Figure 7 It is a schematic diagram of zinc furnace baffle back. DETAILED DESCRIPTION

[0018] See Figures 1 to 7As shown, a kind of metallized zinc-aluminum alloy super-high sheet resistance thin film evaporation device, it includes zinc furnace 1, be provided with crucible 2 in zinc furnace 1, cover plate 3 is placed on crucible 2, zinc furnace 1 top outlet is placed with zinc furnace baffle 4, be provided with the partition plate in crucible 2 and separate independent unit container, five independent unit containers in this embodiment, can be set, first unit container, second unit container, third unit container, fourth unit container, fifth unit container, metal zinc is placed in first unit container, third unit container, fifth unit container, avoid after heating in zinc furnace 1 the rapid formation of hot high pressure in furnace tube causes metal zinc gaseous particle flow rate too large to cause zinc furnace baffle 4 opening blockage to cause metal coating uneven thickness sheet resistance error is larger;Cover plate 3 is uniformly arranged with cover plate flow guide hole 5 that is spaced apart, cover plate 3 uses 3mm thickness 316 stainless steel material, some high temperature resistance performance, corrosion resistance characteristics its expansion coefficient is small, crucible control cover plate flow guide hole opening size is 900 × 2mm, adjacent cover plate flow guide hole forms multiple reinforcing ribs with 2mm width, effectively prevent evaporation hole deformation during evaporation, so that metal zinc is evenly evaporated to zinc furnace baffle 4, zinc furnace baffle 4 is provided with evaporation hole 6 that is arranged in upper and lower staggered manner, zinc furnace baffle 4 uses 4mm thickness 316 stainless steel material, some high temperature resistance performance, corrosion resistance characteristics its expansion coefficient is small, the size precision deviation of evaporation hole 6 is small, the dimensional stability and structural safety of crucible when high temperature operation are ensured, staggered opening process is used on zinc furnace baffle 4, solve the deformation caused by high temperature, to avoid the appearance of white strip in overlapping part, after calculation, the staggered size is 0.8mm to reach the evaporation scale size;Evaporation hole 6 is divided into three groups along the length direction, and each group includes upper and lower staggered first strip-shaped through hole, second strip-shaped through hole, shuttle-shaped hole, third strip-shaped through hole and fourth strip-shaped through hole.

[0019] In addition, the front and rear sides of the cover plate 3 are respectively provided with limiting strips 7, and the left side is provided with a protrusion 8 for conveniently taking the cover plate 3.

[0020] The working principle is as follows: metal zinc is placed in the first unit container, the third unit container and the fifth unit container of the crucible 2, and then the cover plate 3 is placed above the crucible 2 to make the evaporated zinc metal uniformly distributed on each evaporation hole 6 of the zinc furnace baffle 4, and then pushed into the zinc furnace 1 for heating. The zinc furnace baffle 4 is installed in the evaporation tank of the zinc furnace 1 and sealed with a furnace pipe plug. The front and rear openings of the zinc furnace are also blocked. The zinc furnace 1 starts heating, and the first, third and fifth unit containers in the crucible 2 melt. After the zinc furnace is heated, the amount of gaseous particles of metal zinc decreases and the density decreases under the hot high pressure in the furnace tube. The gaseous particles are gathered through the flow guide holes 5 of the cover plate 3 and uniformly guided out onto the zinc furnace baffle 4. The size of each group of evaporation holes 6 is controlled to make the gaseous particles have consistent density, release rate and direction to deposit on the surface of the thin film substrate.

[0021] The application can greatly improve the accuracy of the square resistance, can significantly optimize the product performance, and greatly reduce the physical wear and accidental damage to the mold, effectively prolong the service life of the mold. It can also greatly reduce the downtime caused by defects and ensure the stable operation of the production line. Not only effectively reduces the technical implementation difficulty in the production process, but also further reduces the defective rate in the evaporation production, thereby significantly improves the overall production efficiency.

Claims

1. A kind of metalized zinc-aluminum alloy ultra-high square resistance thin film evaporation device, it includes zinc furnace, the crucible is arranged in the zinc furnace, the cover plate is placed on the crucible, the zinc furnace is placed with zinc furnace baffle at the top outlet, it is characterized in that, The cover plate is provided with cover plate flow guide holes arranged uniformly and spaced apart.

2. The apparatus for depositing a metalized zinc-aluminum alloy ultra-high sheet resistance thin film according to claim 1, wherein Reinforcing ribs are formed between adjacent cover plate flow guide holes.

3. The apparatus for depositing a metalized zinc-aluminum alloy ultra-high sheet resistance thin film according to claim 1, wherein The cover plate is provided with a limiting strip on each of the front and rear sides and a protrusion on the left side for facilitating the taking and placing of the cover plate.

4. The apparatus for depositing a metalized zinc-aluminum alloy ultra-high sheet resistance thin film according to claim 1, wherein, The evaporation holes are divided into three groups along the length direction, and each group includes first, second, shuttle-shaped, third and fourth strip-shaped through holes arranged alternately.

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