Vertical continuous vacuum coating equipment

Abstract

The utility model belongs to the field of vacuum coating, and particularly relates to vertical continuous vacuum coating equipment, which comprises a plurality of coating bins, coating cavities are arranged in the coating bins, the plurality of coating bins are sequentially connected, the coating cavities in the plurality of coating bins are sequentially communicated, and the coating cavities in the plurality of coating bins are communicated with each other. A valve for controlling the connection or isolation of the coating cavities of the two adjacent coating bins is arranged between the two adjacent coating bins; the goods shelf is used for bearing workpieces and is vertically arranged in the coating cavity; the transmission mechanisms are used for controlling the goods shelves to move in the coating cavities and between the adjacent coating cavities, are arranged in the coating cavities and are in transmission connection with the goods shelves; and the film coating mechanism is used for film coating processing and is arranged in the film coating cavity. According to the utility model, on the basis that the goods shelf is vertically arranged, the film coating bin can utilize the space in the height direction to meet the requirements of containing, film coating and conveying of the goods shelf, and higher production efficiency can be realized in a limited space.

Description

Technical Field

[0001] This utility model belongs to the field of vacuum coating, and specifically relates to a vertical continuous vacuum coating equipment. Background Technology

[0002] Vacuum coating equipment is a device that uses vacuum coating technology to coat workpieces. During processing, it utilizes a series of technologies such as electron beams, molecular beams, ion beams, plasma beams, radio frequency, or magnetron sputtering to evaporate or sputter metals, alloys, or compounds in a vacuum, causing them to condense and deposit on the workpiece surface to form a thin film. With continuous technological innovation, vacuum coating equipment has evolved from single-cavity coating equipment to multi-cavity continuous vacuum coating equipment. This transformation has not only significantly improved production efficiency but also greatly enhanced film quality and achieved breakthroughs in cost control.

[0003] As disclosed in a prior patent (application number CN202110996253.9), the production line structure includes a rack and processing components. At least one processing component has an internal processing space for a processing tube to perform coating processing on the workpiece. At least one isolation valve is also included to isolate or connect different spaces. Multiple processing tubes are arranged sequentially, and isolation valves are positioned between adjacent processing tubes. After adjacent processing tubes are connected by isolation valves, their internal processing spaces are interconnected to form a channel for rack transport. However, in this prior patent, the rack performs vacuum coating within the processing tubes in a lying position and transports the tubes between multiple processing tubes. This results in a relatively long processing tube, especially when multiple sections of processing tubes are assembled, requiring more floor space to accommodate its length, which is a problem in production environments with limited space. Utility Model Content

[0004] To address the aforementioned problems, the present invention aims to provide a vertical continuous vacuum coating equipment that makes more efficient use of space in the vertical direction, thereby achieving higher production efficiency within a limited space.

[0005] To achieve the above objectives, the technical solution of this utility model is as follows.

[0006] A vertical continuous vacuum coating equipment, characterized in that it comprises:

[0007] Multiple coating chambers are provided, each containing a coating cavity. The multiple coating chambers are connected in sequence, and the coating cavities within the multiple coating chambers are connected in sequence. A valve is provided between two adjacent coating chambers to control the connection or isolation of their coating cavities.

[0008] A shelf for supporting workpieces, the shelf being erected inside the coating chamber;

[0009] A transmission mechanism for controlling the movement of the shelf within the coating chamber and between adjacent coating chambers, the transmission mechanism being disposed within the coating chamber and being drive-connected to the shelf;

[0010] A coating mechanism for coating processing, wherein the coating mechanism is disposed within the coating cavity.

[0011] In this vacuum coating equipment, a conveying mechanism controls the movement of the rack within and between coating chambers, allowing the rack to perform sequential and continuous vacuum coating in multiple coating chambers. Since the rack is vertically arranged, the coating chambers can utilize the space in the vertical direction to accommodate, coat, and transport the rack, achieving higher production efficiency within a limited space.

[0012] Furthermore, the transmission mechanism includes:

[0013] A shelf conveying and pushing assembly for pushing the shelf, the shelf conveying and pushing assembly being installed inside the coating cavity;

[0014] A shelf conveying drive assembly is used, the shelf conveying drive assembly is installed on the coating chamber, the shelf conveying drive assembly includes a conveying drive rod for extending into the coating chamber, the conveying drive rod is drivenly connected to the shelf conveying push assembly.

[0015] Furthermore, the device also includes a guiding mechanism for guiding the shelf, the guiding mechanism being disposed on the upper side of the coating chamber, and the upper end of the shelf being movably connected to the guiding mechanism;

[0016] Alternatively, the device may also include a guiding mechanism for guiding the shelf, the guiding mechanism being disposed on the lower side of the coating chamber, and the lower end of the shelf being movably connected to the guiding mechanism;

[0017] Alternatively, the device may also include a guide mechanism for guiding the shelf, with the guide mechanism provided on both the upper and lower sides of the coating cavity, and the upper and lower ends of the shelf being movably connected to the guide mechanism;

[0018] Furthermore, the guiding mechanism includes a first guide frame and a second guide frame. The first guide frame is provided with a first guide groove, and the second guide frame is provided with a second guide groove. The first guide frame and the second guide frame are arranged in parallel, and the first guide groove and the second guide groove are combined to form a guiding channel for guiding the shelf.

[0019] Furthermore, the device also includes multiple positioning mechanisms for locking the shelf position, with each positioning mechanism disposed within a multiple coating chamber.

[0020] Furthermore, the positioning mechanism includes:

[0021] A positioning element for positioning the shelf, the positioning element extending into the coating cavity and corresponding to the position of the shelf;

[0022] A positioning drive component is disposed on the coating chamber and is drivenly connected to the positioning element.

[0023] Furthermore, the equipment also includes multiple rotary drive mechanisms for driving the rack located in the coating chamber to rotate the workpiece, with the multiple rotary drive mechanisms respectively arranged in multiple coating chambers.

[0024] Furthermore, the rotary drive mechanism includes:

[0025] A drive component used to extend into the coating chamber to drive the rack and rotate the workpiece;

[0026] A lifting drive assembly is used to be installed on a coating warehouse to drive the drive component to detach from or connect to the shelf, wherein the lifting drive assembly is driven to connect with the drive component.

[0027] A rotary drive assembly for mounting on a coating chamber to drive a drive component to rotate, the rotary drive assembly being driven to drive the drive component.

[0028] Furthermore, the driving component includes a rotating sleeve and a lifting rod. One end of the lifting rod is formed with a driving end for driving the shelf to rotate. The rotating sleeve is sleeved on the outside of the lifting rod. The lifting driving assembly is driven to the other end of the lifting rod to drive the lifting rod to rise and fall on the rotating sleeve.

[0029] The rotary drive assembly is driven by the rotary sleeve, and drives the rotary sleeve to rotate the lifting rod.

[0030] Furthermore, the device also includes multiple signal transmission mechanisms for acquiring shelf location information, with each signal transmission mechanism being disposed within a multiple coating chamber.

[0031] Furthermore, the signal transmission mechanism includes:

[0032] A transfer rod, one end of which is formed with a first transfer end for extending into the coating cavity;

[0033] A trigger element is used to correspond to the shelf position inside the coating cavity, the trigger element being disposed on the first transmission end;

[0034] Limit switch;

[0035] The first insulating sleeve is used to fix the limit switch on the coating chamber. The first insulating sleeve is rotatably sleeved on the transmission rod, and the other end of the transmission rod passes through the first insulating sleeve to form a second transmission end for triggering the limit switch. The second transmission end corresponds to the position of the limit switch.

[0036] The beneficial effect of this utility model is that, in this vacuum coating equipment, the movement of the rack within and between the coating chambers is controlled by a transmission mechanism, so that the rack can be vacuum coated sequentially and continuously in multiple coating chambers; and since the rack is vertically arranged, the coating chamber can utilize the space in the height direction to accommodate, coat and transport the rack, thereby achieving higher production efficiency in a limited space. Attached Figure Description

[0037] Figure 1 This is a schematic diagram of the structure of this utility model.

[0038] Figure 2 This is a structural schematic diagram of the hidden shelf of this utility model.

[0039] Figure 3 This is a schematic diagram of the transmission mechanism, guiding mechanism, and coating chamber of this utility model.

[0040] Figure 4 This is a structural schematic diagram of the transmission mechanism and the guiding mechanism of this utility model.

[0041] Figure 5 This is a schematic diagram of the transmission mechanism of this utility model.

[0042] Figure 6 This is a structural schematic diagram of the pusher component of this utility model.

[0043] Figure 7 This is a schematic diagram of the positioning mechanism of this utility model.

[0044] Figure 8 This is a schematic diagram of the rotary drive mechanism of this utility model.

[0045] Figure 9 This is a cross-sectional view of the rotary drive mechanism of this utility model.

[0046] Figure 10 This is a cross-sectional view of the signal transmission mechanism of this utility model.

[0047] Figure 11 This is a structural schematic diagram of the shelf of this utility model.

[0048] Figure 12 This is a cross-sectional view of the shelf of this utility model.

[0049] Icon labels:

[0050] 1. Coating chamber; 11. Coating cavity; 12. Valve; 13. Valve cylinder;

[0051] 2. Transmission mechanism; 21. Shelf conveyor push assembly; 211. Lead screw; 212. Second bevel gear; 213. Pushing component; 2131. Pushing body; 2132. Pushing part; 2133. Rotating part; 2134. Second return torsion spring; 2135. First return part; 2136. Second return part; 214. Pushing guide; 2141. First guide bearing; 22. Shelf conveyor drive assembly; 221. Conveyor drive rod; 222. Conveyor drive motor; 223. First bevel gear; 23. Blocking component; 24. Second insulating sleeve; 25. Third insulating sleeve;

[0052] 3. Coating mechanism; 31. Vacuum tube; 32. Heating tube; 33. Target tube assembly; 331. Target tube; 332. Target tube drive assembly; 34. Process gas tube;

[0053] 4. Guiding mechanism; 41. First guide frame; 411. First guide groove; 42. Second guide frame; 421. Second guide groove;

[0054] 5. Positioning mechanism; 51. Positioning component; 52. Positioning drive assembly; 521. Positioning cylinder; 53. Fourth insulating sleeve;

[0055] 6. Rotary drive mechanism; 61. Drive component; 611. Rotating sleeve; 6111. Sliding groove; 6112. Second gear; 6113. Fifth insulating sleeve; 612. Lifting rod; 6121. Drive end; 6122. Sliding protrusion; 6123. Sixth insulating sleeve; 62. Lifting drive assembly; 621. Lifting cylinder; 622. Rotary bearing; 63. Rotary drive assembly; 631. Rotary motor; 632. First gear;

[0056] 7. Signal transmission mechanism; 71. Transmission rod; 711. First transmission end; 712. Second transmission end; 713. First reset torsion spring; 72. Trigger element; 721. Trigger tooth; 722. Arc-shaped trigger surface; 73. Limit switch; 74. First insulating sleeve; 741. Reset part; 75. Switch control element;

[0057] 8. Shelf; 81. Upper support; 811. Drive position; 812. Positioning part; 813. Shelf positioning slot; 82. Lower support; 83. Connecting rod; 84. Loading assembly; 841. Loading tray; 842. Unloading tray; 843. Loading rod; 844. Rotating rod; 8441. Rotation drive end; 8442. Drive protrusion; 8443. Rotation positioning slot; 845. Sun gear; 846. Planetary gear; 847. Limiting rod; 848. Transmission sleeve rod; 85. Shelf guide assembly; 851. Second guide bearing. Detailed Implementation

[0058] To make the objectives, technical solutions, and advantages of this utility model clearer, the present utility model will be further described in detail below with reference to the accompanying drawings and embodiments. It should be understood that the specific embodiments described herein are merely illustrative of the present utility model and are not intended to limit the present utility model.

[0059] See Figure 1-12 This embodiment provides a vertical continuous vacuum coating equipment, including:

[0060] Multiple coating chambers 1, each coating chamber 1 is provided with a coating cavity 11, the multiple coating chambers 1 are connected in sequence, the coating cavities 11 in the multiple coating chambers 1 are connected in sequence, and a valve 12 is provided between two adjacent coating chambers 1 to control the connection or isolation of the coating cavities 11 between them.

[0061] A shelf 8 for supporting workpieces is vertically arranged inside the coating chamber 11;

[0062] A transmission mechanism 2 is used to control the movement of the shelf 8 within the coating chamber 11 and between adjacent coating chambers 11. The transmission mechanism 2 is disposed within the coating chamber 11 and is connected to the shelf 8 in a transmission manner.

[0063] A coating mechanism 3 for coating processing is disposed within the coating cavity 11.

[0064] It should be noted that, in Figure 1 , Figure 2 The coating chamber 1 shown in the figure is a part of the coating chamber 1, which can be understood as the left or right half of the structure.

[0065] In this vacuum coating equipment, the conveying mechanism 2 controls the movement of the rack 8 within and between coating chambers 11, allowing the rack 8 to perform sequential and continuous vacuum coating within multiple coating chambers 1. It should be noted that the height of a factory building is generally sufficient, even abundant, for coating equipment. The limiting factor is the length of the factory building. For continuous coating equipment, there are combinations of as few as seven or eight coating chambers 1, and as many as a dozen or even dozens of coating chambers 1, which is generally unacceptable for small and medium-sized factories. Therefore, in this application, by vertically arranging the rack 8, the coating chambers 1 can utilize the vertical space to accommodate, coat, and transport the rack 8, achieving higher production efficiency within a limited space.

[0066] Specifically, valve 12 is driven and connected to valve cylinder 13. Valve cylinder 13 controls valve 12 to move between two coating chambers 11, so as to control the connection or isolation of the two adjacent coating chambers 11.

[0067] See Figure 1 , 10 In this embodiment, the device further includes multiple signal transmission mechanisms 7 for acquiring the position information of the shelf 8, and the multiple signal transmission mechanisms 7 are respectively disposed in multiple coating cavities 11. When the shelf 8 is transported between coating cavities 11, the corresponding signal transmission mechanism 7 triggered by the shelf 8 determines the specific coating cavity 11 that the shelf 8 enters. Then, the transmission mechanism 2 in the coating cavity 11 can be used to control the transport of the shelf 8 in the coating cavity 11, and to control the transport of the shelf 8 between the coating cavity 11 and the next coating cavity 11.

[0068] In this embodiment, the signal transmission mechanism 7 includes:

[0069] A transfer rod 71, one end of which is formed with a first transfer end 711 for extending into the coating cavity 11;

[0070] A trigger 72 is used to correspond to the position of the shelf 8 inside the coating cavity 11, and the trigger 72 is disposed on the first transmission end 711;

[0071] Limit switch 73;

[0072] A first insulating sleeve 74 is fixed to the coating chamber 1. A limit switch 73 is fixedly mounted on the first insulating sleeve 74. The first insulating sleeve 74 is rotatably fitted onto the transfer rod 71, and the other end of the transfer rod 71 passes through the first insulating sleeve 74 to form a second transfer end 712 for triggering the limit switch 73. The second transfer end 712 corresponds to the position of the limit switch 73. When the shelf 8 is conveyed to enter the next coating chamber 11, the trigger 72 is pushed, which drives the transfer rod 71 to rotate. The second transfer end 712 at the other end of the transfer rod 71 then triggers the limit switch 73, thereby obtaining the position information of the shelf 8 when it is transferred between coating chambers 11, so as to ensure more accurate conveying of the shelf 8. Furthermore, based on the setting of the first insulating sleeve 74, current can be effectively prevented from being transmitted to the limit switch 73, ensuring the reliability of the limit switch 73.

[0073] In this embodiment, the signal transmission mechanism 7 further includes a switch control component 75 for triggering the limit switch 73. One end of the switch control component 75 is fixedly sleeved on the second transmission end 712, and the other end of the switch control component 75 corresponds to the position of the limit switch 73.

[0074] In this embodiment, a first reset torsion spring 713 is sleeved on the second transmission end 712, and a reset part 741 is provided on the first insulating sleeve 74. One end of the first reset torsion spring 713 abuts against or connects with the reset part 741.

[0075] In this embodiment, the trigger 72 includes a rotating part 2133 and a trigger tooth 721 corresponding to the position of the shelf 8 inside the coating cavity 11. The trigger tooth 721 is fixedly disposed on the rotating part 2133, and the rotating part 2133 is fixedly sleeved on the first transmission end 711.

[0076] In this embodiment, one side of the trigger tooth 721 is provided with an arc-shaped trigger surface 722 corresponding to the position of the shelf 8 inside the coating cavity 11.

[0077] See Figure 3 , 4 The device also includes a guide mechanism 4 for guiding the shelf 8. The guide mechanism 4 is located on the upper side of the coating chamber 11. The upper end of the shelf 8 is movably connected to the guide mechanism 4. Based on the setting of the guide mechanism 4, the shelf 8 can be more stable during the transmission process.

[0078] In this embodiment, the guiding mechanism 4 includes a first guide frame 41 and a second guide frame 42. The first guide frame 41 is provided with a first guide groove 411, and the second guide frame 42 is provided with a second guide groove 421. The first guide frame 41 and the second guide frame 42 are arranged in parallel, and the first guide groove 411 and the second guide groove 421 are combined to form a guide channel for guiding the shelf 8. The shelf can be guided through the guide channel formed by the combination of the first guide groove 411 and the second guide groove 421.

[0079] See Figure 1-6 In this embodiment, the transmission mechanism 2 includes:

[0080] A shelf conveying and pushing assembly 21 for pushing the shelf 8 is installed inside the coating cavity 11;

[0081] A shelf conveying drive assembly 22 is used, which is installed on the coating chamber 1. The shelf conveying drive assembly 22 includes a conveying drive rod 221 for extending into the coating chamber 11. The conveying drive rod 221 is drivenly connected to the shelf conveying push assembly 21.

[0082] The shelf conveying drive assembly 22 located outside the coating chamber 1 drives the shelf conveying push assembly 21 located inside the coating chamber 11, thereby driving the shelf conveying push assembly 21 to push the shelf 8, thereby controlling the shelf 8 to move within the coating chamber 11 and between coating chambers 11.

[0083] In this embodiment, the transmission mechanism 2 further includes a shielding member 23 for shielding the shelf conveying and pushing assembly 21. The shielding member 23 is fixed to the guide mechanism 4, and the shelf conveying and pushing assembly 21 is located between the shielding member 23 and the guide mechanism 4. The shielding member 23 effectively shields and protects the shelf conveying and pushing assembly 21.

[0084] In this embodiment, a second insulating sleeve 24 for isolating the surface current of the coating chamber 1 is movably sleeved on the conveying drive rod 221.

[0085] In this embodiment, a third insulating sleeve 25 is also movably sleeved on the conveying drive rod 221 to prevent current from being conducted along the conveying drive rod 221.

[0086] In this embodiment, the shelf conveying drive assembly 22 further includes a conveying drive motor 222, which is drivenly connected to the conveying drive rod 221.

[0087] In this embodiment, a first bevel gear 223 is sleeved on the conveying drive rod 221; the shelf conveying and pushing assembly 21 includes a lead screw 211, a second bevel gear 212, and a pushing member 213 for pushing the shelf 8. The second bevel gear 212 is fixedly sleeved on the lead screw 211, and the first bevel gear 223 meshes with the second bevel gear 212. The pushing member 213 is movably sleeved on the thread of the lead screw 211. Specifically, a third insulating sleeve 25 is fixedly sleeved on the conveying drive rod 221, and the first bevel gear 223 is fixedly sleeved at the end of the third insulating sleeve 25.

[0088] In this embodiment, a push guide 214 is rotatably provided on the upper end of the pusher 213.

[0089] In this embodiment, the push guide 214 includes a first guide bearing 2141 that is rotatably and movably disposed on the upper end of the push member 213.

[0090] In this embodiment, the pushing member 213 includes a pushing body 2131, a pushing part 2132, a rotating part 2133, and a second reset torsion spring 2134. The rotating part 2133 is fixedly disposed at the lower end of the pushing body 2131, and the pushing part 2132 is rotatably sleeved on the rotating part 2133. The lower end of the pushing body 2131 is also provided with a first rebound part 2135, and the pushing part 2132 is provided with a second rebound part 2136. The second reset torsion spring 2134 is sleeved on the rotating part 2133, and the two ends of the second reset torsion spring 2134 are respectively connected to or abut against the first rebound part 2135 and the second rebound part 2136.

[0091] See Figure 1 , 7 In this embodiment, the device also includes a plurality of positioning mechanisms 5 for locking the position of the shelf 8, and the plurality of positioning mechanisms 5 are respectively disposed in a plurality of coating cavities 11.

[0092] In this embodiment, the positioning mechanism 5 includes:

[0093] Positioning element 51 is used to position the shelf 8. The positioning element 51 extends into the coating cavity 11 and corresponds to the position of the shelf 8.

[0094] A positioning drive component 52 is disposed on the coating chamber 1 and is drivenly connected to the positioning element 51.

[0095] Based on the above-mentioned positioning mechanism 5, when the shelf 8 moves to the coating position of the coating cavity 11, the positioning drive component 52 drives the positioning component 51 to move, so as to position the shelf 8 and ensure that the shelf 8 is always stably located in the correct coating position during coating, thereby improving the stability of the coating process.

[0096] In this embodiment, a fourth insulating sleeve 53 for isolating the surface current of the coating chamber 1 is movably sleeved on the positioning member 51.

[0097] In this embodiment, the positioning drive assembly 52 includes a positioning cylinder 521, which is drivenly connected to the positioning component 51.

[0098] See Figure 1 , 8 9. In this embodiment, the device also includes a plurality of rotary drive mechanisms 6 for driving the shelf 8 positioned 811 in the coating cavity 11 to rotate the workpiece. The plurality of rotary drive mechanisms 6 are respectively disposed in the plurality of coating cavities 11.

[0099] In this embodiment, the rotary drive mechanism 6 includes:

[0100] A drive unit 61 that extends into the coating chamber 11 to drive the shelf 8 and rotate the workpiece;

[0101] A lifting drive assembly 62 is used to be installed on the coating chamber 1 to drive the drive component 61 to disengage from or connect with the shelf 8, wherein the lifting drive assembly 62 is driven to connect with the drive component 61.

[0102] A rotary drive assembly 63 is used to be installed on the coating chamber 1 to drive the drive component 61 to rotate, and the rotary drive assembly 63 is drivenly connected to the drive component 61.

[0103] When the shelf 8 moves into the coating chamber 11, after being positioned by the positioning mechanism 5, the lifting drive assembly 62 controls the drive component 61 to move to be connected with the shelf 8. Then, the rotation drive assembly 63 controls the drive component 61 to rotate, thereby rotating with the workpiece on the shelf 8 to ensure the coating effect of the workpiece during the continuous coating process.

[0104] In this embodiment, the driving component 61 includes a rotating sleeve 611 and a lifting rod 612. One end of the lifting rod 612 is formed with a driving end 6121 for driving the shelf 8 to rotate. The rotating sleeve 611 is sleeved on the outside of the lifting rod 612. The lifting drive assembly 62 is driven to the other end of the lifting rod 612 through a rotating bearing 622 to drive the lifting rod 612 to rise and fall on the rotating sleeve 611.

[0105] The rotary drive assembly 63 is driven to the rotary sleeve 611, and drives the rotary sleeve 611 to rotate the lifting rod 612. The lifting drive assembly 62 drives the lifting rod 612 to rise and fall on the rotary sleeve 611, thereby controlling the lifting rod 612 to disengage from or connect to the shelf 8; when the lifting rod 612 is connected to the shelf 8, the rotary drive assembly 63 drives the rotary sleeve 611 to rotate, thereby driving the lifting rod 612 to rotate through the rotary sleeve 611.

[0106] In this embodiment, the inner side of the rotating sleeve 611 is provided with a sliding groove 6111 along the axial direction, and the outer side of the lifting rod 612 is provided with a sliding protrusion 6122. The sliding protrusion 6122 is slidably disposed within the sliding groove 6111. Through the cooperation of the sliding groove 6111 and the sliding protrusion 6122, the rotating sleeve 611 and the lifting rod 612 can achieve relative movement between them only in the axial direction. Specifically, the sliding groove 6111 is provided on both sides of the inner side of the rotating sleeve 611, and the sliding protrusion 6122 is provided on both sides of the lifting rod 612.

[0107] In this embodiment, the rotary drive assembly 63 includes a rotary motor 631 and a first gear 632, with the rotary motor 631 and the first gear 632 being drivenly connected. A second gear 6112 is fitted onto the outer side of the rotary sleeve 611, and the first gear 632 meshes with the second gear 6112. The rotary motor 631 drives the first gear 632 to rotate, and the rotation of the first gear 632 drives the second gear 6112, which in turn drives the rotary sleeve 611 to rotate.

[0108] In this embodiment, the lifting drive assembly 62 includes a lifting cylinder 621, which is drivenly connected to the other end of the lifting rod 612. Specifically, a rotary bearing 622 is fixed to the other end of the lifting cylinder 621 and is sleeved on the other end of the lifting rod 612, so that while the lifting cylinder 621 drives the lifting rod 612, the lifting rod 612 can also rotate relative to it.

[0109] In this embodiment, a fifth insulating sleeve 6113 is provided on the outer side of the rotating sleeve 611 to isolate the surface current of the coating chamber 1; the coating chamber 1 is connected to the fifth insulating sleeve 6113.

[0110] In this embodiment, a sixth insulating sleeve 6123 is provided at one end of the lifting rod 612 to prevent current from being conducted through the lifting rod 612, and the driving end 6121 is located at the end of the sixth insulating sleeve 6123.

[0111] In this embodiment, the coating mechanism 3 includes a vacuum tube 31, a heating tube 32, a target tube assembly 33, and a process gas tube 34. The heating tube 32, the target tube assembly 33, and the process gas tube 34 are all disposed in the coating cavity 11, and the vacuum tube 31 is connected to the coating cavity 11.

[0112] In this embodiment, the target tube assembly 33 includes a target tube 331 and a target tube drive assembly 332 for driving the target tube 331 to rotate. The target tube drive assembly 332 is fixed on the coating chamber 1 and is drivenly connected to the target tube 331. Specifically, the target tube drive assembly 332 is composed of a motor, gears, and other structures, and can drive the target tube 331 to rotate.

[0113] See Figure 11 , 12 In this embodiment, shelf 8 includes:

[0114] The upper support 81 is provided with a drive position 811 for the shelf conveying and pushing assembly 21 to move within the coating cavity 11.

[0115] Lower bracket 82;

[0116] Connecting rod 83, with its two ends fixed to upper bracket 81 and lower bracket 82 respectively;

[0117] The support assembly 84 includes an upper loading plate 841, an lower loading plate 842, and multiple support rods 843 for supporting workpieces. Both ends of the multiple support rods 843 are connected to the upper loading plate 841 and the lower loading plate 842, respectively. The upper loading plate 841 and the lower loading plate 842 are connected to the upper support 81 and the lower support 82, respectively.

[0118] Specifically, this shelving is a multi-pole framed shelving in this embodiment. For framed shelving, in other implementations, there is also a single-pole framed shelving, that is, without load-bearing components, it is directly connected to the upper and lower supports by a single load-bearing pole; in another implementation, there is also a frameless shelving, that is, the lower support and connecting pole are eliminated. This type of frameless shelving also includes single-pole and multi-pole (load-bearing components) types. The lower end of the connecting pole of the single pole or the lower end of the multi-pole (load-bearing components) can cooperate with the lifting and positioning structure on the lower side of the coating cavity 11, so that when the shelving is in the coating position, the lifting and positioning structure on the lower side of the coating cavity 11 positions the lower end of the connecting pole or the lower end of the multi-pole (load-bearing components).

[0119] During the coating process, the shelf conveying and pushing component 21 in the coating chamber 11 can drive the shelf 8 to vertically convey the coating between the coating chambers 11 via the drive position 811 of the upper support 81, thereby meeting the continuous moving coating requirements of the continuous furnace with multiple coating chambers 11. Based on the setting of the support component 84 including multiple support rods 843 between the upper support 81 and the lower support 82, more workpieces can be carried for coating by the multiple support rods 843, and the coating efficiency of the workpieces is higher. Furthermore, based on the setting of the connecting rods 83, the stability of the shelf 8 can also be effectively improved, making the shelf 8 more reliable.

[0120] In this embodiment, there are two connecting rods 83. One end of each connecting rod 83 is fixed to both ends of the lower bracket 82, and the other end of each connecting rod 83 is fixed to the upper bracket 81. The bearing assembly 84 is located between the two connecting rods 83.

[0121] In this embodiment, the bearing assembly 84 further includes a rotating rod 844. One end of the rotating rod 844 is connected to the feeding tray 841, and the other end of the rotating rod 844 is rotatably connected to the upper support 81. The other end of the rotating rod 844 extends through the upper side of the upper support 81 to form a rotating drive end 8441.

[0122] In this embodiment, the supporting component 84 further includes a sun gear 845 and a plurality of planetary gears 846. The sun gear 845 and the plurality of planetary gears 846 are rotatably disposed within the loading tray 841. The plurality of planetary gears 846 are arranged around the sun gear 845 to mesh with the sun gear 845. One end of the plurality of supporting rods 843 extends into the loading tray 841 to be connected to the plurality of planetary gears 846 respectively. The unloading tray 842 is also provided with a limiting rod 847 to restrict the rotation of the sun gear 845. One end of the limiting rod 847 passes through the unloading tray 842 to be connected to the lower support 82, and the other end of the limiting rod 847 extends into the loading tray 841 to be connected to the sun gear 845.

[0123] In this embodiment, the bearing assembly 84 further includes a transmission sleeve 848, the two ends of which are connected to the upper feed plate 841 and the lower feed plate 842 respectively, and the transmission sleeve 848 is rotatably sleeved on the outside of the limiting rod 847.

[0124] In this embodiment, the upper side of the upper support 81 is also provided with a positioning part 812 for positioning the shelf 8.

[0125] In this embodiment, the positioning part 812 is provided with a shelf positioning groove 813.

[0126] In this embodiment, the transmission sleeve 848 and the upper bracket 81 are rotatably connected by bearings.

[0127] In this embodiment, the rotary drive end 8441 is provided with two or more drive protrusions 8442.

[0128] In this embodiment, the rotary drive end 8441 is also provided with a rotary positioning groove 8443, and two or more drive protrusions 8442 are respectively located on both sides of the rotary positioning groove 8443.

[0129] In this embodiment, the drive position 811 is a drive slot located on the left or right side of the upper bracket 81.

[0130] In this embodiment, the number of drive slots is two or more.

[0131] In this embodiment, the upper support 81 or the lower support 82 is provided with a shelf guide assembly 85 for guiding the movement of the shelf 8.

[0132] In this embodiment, the shelf guide assembly 85 includes a plurality of second guide bearings 851, which are rotatably mounted on the upper side of the upper bracket 81.

[0133] The above are merely preferred embodiments of the present utility model and are not intended to limit the present utility model. Any modifications, equivalent substitutions, and improvements made within the spirit and principles of the present utility model should be included within the protection scope of the present utility model.

Claims

1. A vertical continuous vacuum coating apparatus, characterized by, The device comprises: a plurality of coating chambers, each of which is provided with a coating cavity, the plurality of coating chambers are connected in sequence, the coating cavities in the plurality of coating chambers are connected in sequence, and a valve is arranged between two adjacent coating chambers to control the connection or isolation of the coating cavities; a rack for carrying workpieces, which is vertically arranged in the coating cavity; a transmission mechanism for controlling the movement of the rack in the coating cavity and between adjacent coating cavities, which is arranged in the coating cavity and is in transmission connection with the rack; a coating mechanism for coating processing, which is arranged in the coating cavity.

2. The vertical continuous vacuum coating apparatus according to claim 1, wherein The transmission mechanism comprises: a rack conveying and pushing assembly for pushing the rack, which is installed in the coating cavity; a rack conveying and driving assembly, which is installed on the coating chamber and comprises a conveying and driving rod for extending into the coating cavity, the conveying and driving rod being in driving connection with the rack conveying and pushing assembly.

3. The vertical continuous vacuum coating apparatus according to claim 1, wherein The device further comprises a guide mechanism for guiding the rack, which is arranged on the upper side of the coating cavity, and the upper end of the rack is in movable connection with the guide mechanism. Alternatively, the device further comprises a guide mechanism for guiding the rack, which is arranged on the lower side of the coating cavity, and the lower end of the rack is in movable connection with the guide mechanism. Alternatively, the device further comprises a guide mechanism for guiding the rack, which is arranged on both the upper and lower sides of the coating cavity, and the upper and lower ends of the rack are in movable connection with the guide mechanism.

4. The vertical continuous vacuum coating apparatus according to claim 1, wherein The device further comprises a plurality of positioning mechanisms for locking the position of the rack, which are respectively arranged in the plurality of coating cavities.

5. A vertical continuous vacuum coating apparatus according to claim 4, wherein The positioning mechanism comprises: a positioning member for positioning the rack, which extends into the coating cavity and corresponds to the position of the rack; a positioning driving assembly, which is arranged on the coating chamber and is in driving connection with the positioning member.

6. The vertical continuous vacuum coating apparatus according to claim 1, wherein The device further comprises a plurality of rotation driving mechanisms for driving the rack in the coating cavity to rotate the workpiece, which are respectively arranged in the plurality of coating cavities.

7. A vertical continuous vacuum coating apparatus according to claim 6, wherein The rotation driving mechanism comprises: a driving member for extending into the coating cavity to drive the rack to rotate the workpiece; a lifting driving assembly, which is installed on the coating chamber to drive the driving member to disengage or connect with the rack, and is in driving connection with the driving member; a rotation driving assembly, which is installed on the coating chamber to drive the driving member to rotate, and is in driving connection with the driving member.

8. A vertical continuous vacuum coating apparatus according to claim 7, wherein The driving member comprises a rotation sleeve and a lifting rod, one end of the lifting rod is formed with a driving end for driving the rack to rotate, the rotation sleeve is sleeved outside the lifting rod, and the lifting driving assembly is in driving connection with the other end of the lifting rod to drive the lifting rod to lift on the rotation sleeve. The rotation driving assembly is in driving connection with the rotation sleeve to drive the rotation sleeve to rotate the lifting rod.

9. The vertical continuous vacuum coating apparatus according to claim 1, wherein The device further comprises a plurality of signal transmission mechanisms for obtaining the position information of the rack, which are respectively arranged in the plurality of coating cavities.

10. The vertical continuous vacuum coating apparatus according to claim 9, wherein The signal transmission mechanism comprises: A transmission rod, one end of which is formed with a first transmission end for extending into the coating cavity; A trigger corresponding to the shelf position in the coating cavity, which is arranged on the first transmission end; A travel switch; A first insulating sleeve for being fixed on the coating bin, the travel switch is fixedly arranged on the first insulating sleeve, the first insulating sleeve is rotatably sleeved on the transmission rod, and the other end of the transmission rod passes through the first insulating sleeve and is formed with a second transmission end for triggering the travel switch, the second transmission end corresponds to the position of the travel switch.

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