Linear sliding table and detection equipment

Abstract

The utility model relates to the technical field of sliding tables, in particular to a linear sliding table and detection equipment. The linear sliding table comprises a sliding table base, a sliding table plate, a driving assembly, a lead screw, a nut and a modal wheel. The sliding table plate is slidably connected to the sliding table base, the lead screw is rotationally connected to the sliding table base, and the nut is matched with the lead screw and fixedly connected with the sliding table plate. The driving assembly is in transmission connection with the lead screw and used for driving the lead screw to rotate. And the modal wheel is coaxially and fixedly connected with one end of the lead screw. The detection equipment comprises the linear sliding table. The linear sliding table and the detection equipment provided by the utility model are high in precision and stability, strong in overall rigidity, and low in motion noise and interference.

Description

TECHNICAL FIELD

[0001] The utility model relates to the technical field of slide table, specifically, a linear slide table and detection equipment. BACKGROUND

[0002] In high-precision detection equipment, linear slide table is generally used to drive optical lens or inductive probe to move up and down; in various motion forms, by reasonably selecting the size, shape and position tolerance of relative motion mechanism and control structure, the vertical linear slide table can be coupled with the horizontal mechanism, and the topography characteristics and characteristic position information of the sample surface can be obtained through software synthesis.

[0003] However, the existing linear slide table has low precision and poor stability, which is difficult to meet the high-precision motion requirement. UTILITY MODEL CONTENT

[0004] The utility model aims at providing a linear slide table and detection equipment to alleviate the technical problems of poor precision and stability of the linear slide table in the prior art.

[0005] The linear slide table provided by the utility model comprises a slide table seat, a slide table plate, a driving assembly, a lead screw, a nut and a modal wheel.

[0006] The slide table plate is slidingly connected to the slide table seat, the lead screw is rotationally connected to the slide table seat, the nut is matched with the lead screw, and the nut is fixedly connected to the slide table plate; the driving assembly is in transmission connection with the lead screw and is used for driving the lead screw to rotate; and the modal wheel is coaxially fixedly connected to one end of the lead screw.

[0007] Preferably, as an implementable mode, the modal wheel is provided with a threaded hole, one end of the lead screw is provided with a threaded connecting section, the threaded connecting section is matched with the threaded hole, the linear slide table further comprises a fastening screw, the fastening screw is matched with the threaded hole, and the end of the fastening screw is in abutment with the lead screw.

[0008] Preferably, as an implementable mode, the modal wheel is in a cylindrical shape.

[0009] Preferably, as an implementable mode, the driving assembly comprises a driving seat, a rotary driving mechanism, a synchronous belt, a driving pulley and a driven pulley, the driving seat is fixedly connected to the slide table seat, and the rotary driving mechanism is installed on the driving seat; the rotary driving mechanism is connected with the driving pulley and is used for driving the driving pulley to rotate; the driven pulley is coaxially fixedly connected with the lead screw, and the driving pulley and the driven pulley are matched with the synchronous belt.

[0010] Preferably, as an implementable mode, the driving seat and the sliding table seat are arranged side by side in a direction perpendicular to the lead screw, the gap between the driving seat and the sliding table seat is adjustable in width, and a spacer plate is detachably mounted in the gap, the thickness of the spacer plate being consistent with the width of the gap.

[0011] Preferably, as an implementable mode, the rotating driving mechanism comprises a motor, a motor shaft of the motor is coaxially fixedly connected with the driving pulley, and a hand wheel is fixedly connected to a tail portion of the motor shaft.

[0012] Preferably, as an implementable mode, the driven pulley is rotatably connected with the sliding table seat through bearings on both axial sides of the driven pulley.

[0013] Preferably, as an implementable mode, the linear sliding table further comprises a detection assembly and a controller, the detection assembly is used for detecting the position of the sliding table plate, and the detection assembly and the driving assembly are both in communication connection with the controller.

[0014] Preferably, as an implementable mode, the detection assembly comprises a photoelectric sensor and a photoelectric stopper, one of the photoelectric sensor and the photoelectric stopper is fixedly arranged on the sliding table seat, and the other is fixedly arranged on the sliding table plate, the photoelectric stopper can trigger the photoelectric sensor when the sliding table plate moves to a limit position, the photoelectric sensor is in communication connection with the controller, and the controller can control the driving assembly to stop or reverse drive when the sliding table plate moves to the limit position.

[0015] Preferably, as an implementable mode, the central axis of the driving pulley and the central axis of the lead screw are both coincident with the symmetry plane of the sliding table seat.

[0016] Preferably, as an implementable mode, the sliding table plate is provided with a probe, and the center of gravity of the linear sliding table is located in the middle of the lead screw.

[0017] The detection equipment provided by the utility model comprises the linear sliding table.

[0018] Compared with the prior art, the utility model has the beneficial effects that:

[0019] In operation, the controllable driving assembly can drive the screw rod to rotate, and the screw rod can drive the nut to drive the sliding table plate to move along the sliding seat, so that the sliding table plate can drive the device (such as a lens or a probe) mounted thereon to move synchronously, power conversion is realized by using a screw rod and nut cooperation structure, high-precision linear motion effect can be obtained, and the linear slide table is small in size and can be applied to occasions with small structural space. In addition, the mode wheel is coaxially fixed to one end of the screw rod, low-frequency modes transmitted from the sliding seat can be reduced, high-frequency modes generated by the motor can be reduced, and slight swinging generated by the cantilever structure of the screw rod can be reduced, so that the motion accuracy and stability of the sliding table plate can be improved, slight fluctuations in motion and jitter in a stationary state can be greatly reduced, and the overall stiffness of the linear slide table can be improved, motion noise and interference can be reduced, and a passive damping function is achieved. The mode wheel can be designed by finite element simulation and optimization.

[0020] Therefore, the linear slide table provided by the utility model has high accuracy and stability, high overall stiffness, and less motion noise and interference.

[0021] The detection equipment provided by the utility model comprises the linear slide table, and has all the advantages of the linear slide table, which will not be described herein. BRIEF DESCRIPTION OF DRAWINGS

[0022] In order to more clearly illustrate the technical scheme in the embodiments of the utility model or the prior art, the drawings needed to be used in the embodiments or the prior art description will be briefly introduced as follows. Obviously, the drawings in the following description are only embodiments of the utility model, and other drawings can be obtained by the drawings provided by the person skilled in the art without creative labor.

[0023] Figure 1 The structural schematic view of the linear slide table provided by the utility model embodiment is shown in the figure.

[0024] Figure 2 The structural schematic view of the linear slide table provided by the utility model embodiment is shown in the figure.

[0025] Figure 3 The sectional view structural schematic view of part of the structure of the linear slide table provided by the utility model embodiment is shown in the figure.

[0026] Figure 4 The structural schematic view of the linear slide table provided by the utility model embodiment is shown in the figure.

[0027] EXPLANATION OF REFERENCE NUMERALS:

[0028] 100- sliding seat;

[0029] 200- sliding table plate; 210- sliding block;

[0030] 310 - drive seat; 320 - synchronous belt; 330 - driving pulley; 340 - driven pulley; 350 - motor; 360 - hand wheel; 370 - bearing;

[0031] 410 - lead screw; 420 - nut; 430 - photoelectric sensor;

[0032] 500 - modal wheel;

[0033] 600 - fastening screw;

[0034] 700 - backing plate;

[0035] 800 - slide rail;

[0036] 900 - fixed plate. DETAILED DESCRIPTION

[0037] The technical solutions of the utility model will be described clearly and completely in combination with the drawings. Obviously, the described embodiments are some of the embodiments of the utility model, not all the embodiments. Based on the embodiments in the utility model, all the other embodiments obtained by the ordinary skilled in the art without creative labor belong to the protection scope of the utility model.

[0038] The utility model will be described further in detail by specific example and in combination with the drawings.

[0039] Referring to Figures 1-4 The embodiment provides a linear slide table, which comprises a slide table seat 100, a slide table plate 200, a driving assembly, a lead screw 410, a nut 420 and a modal wheel 500; the slide table plate 200 is slidably connected to the slide table seat 100, the lead screw 410 is rotatably connected to the slide table seat 100, the nut 420 is matched with the lead screw 410, and the nut 420 is fixedly connected with the slide table plate 200; the driving assembly is drivingly connected with the lead screw 410 and is used for driving the lead screw 410 to rotate; and the modal wheel 500 is coaxially fixedly connected with one end of the lead screw 410.

[0040] In operation, the driving assembly can be controlled to drive the screw rod 410 to rotate, and the rotation of the screw rod 410 can drive the nut 420 to move the sliding table plate 200 along the sliding table base 100, so that the sliding table plate 200 can drive the device (such as a lens or a probe) mounted thereon to move synchronously. The screw-nut cooperation structure is adopted to realize power conversion, and high-precision linear motion effect can be obtained, and the volume is small, which can be suitable for occasions with small structural space. In addition, the modal wheel 500 is coaxially fixed to one end of the screw rod 410, which can reduce the low-frequency modal transmitted from the sliding table base 100, reduce the high-frequency modal generated by the motor 350, and reduce the slight swing generated by the cantilever structure of the screw rod 410, so as to improve the motion accuracy and stability of the sliding table plate 200, greatly reduce the slight fluctuation in motion and the jitter in the stationary state, and further improve the overall stiffness of the linear sliding table, and also reduce the motion noise and interference, which plays a passive damping function. The modal wheel 500 can be designed by finite element simulation and optimization.

[0041] Therefore, the linear sliding table provided by the embodiment has high accuracy and stability, high overall stiffness, and less motion noise and interference.

[0042] A threaded hole can be formed in the modal wheel 500, and a threaded connecting section is arranged at one end of the screw rod 410. The threaded connecting section is screwed into the threaded hole of the modal wheel 500, so that the threaded connecting section and the threaded hole are threadedly connected, and the modal wheel 500 and the screw rod 410 are fixedly connected. On this basis, a fastening screw 600 is screwed into the other end of the threaded hole, and the end of the fastening screw 600 abuts against the screw rod 410. In this way, the connection gap between the modal wheel 500 and the threaded connecting section of the screw rod 410 can be eliminated, and the connection reliability of the modal wheel 500 and the screw rod 410 can be improved.

[0043] Preferably, the modal wheel 500 is in a cylindrical structure, which is simple in structure and has good rotation stability.

[0044] Preferably, the screw rod 410 is a ball screw, which is beneficial to reduce friction and improve smoothness.

[0045] In the specific structure of the driving assembly, the driving seat 310, the rotary driving mechanism, the synchronous belt 320, the driving pulley 330 and the driven pulley 340 can be arranged, the driving seat 310 is fixedly connected to the slide base 100, and the rotary driving mechanism is installed on the driving seat 310. The rotary driving mechanism is connected with the driving pulley 330, so that the driving pulley 330 is driven to rotate by the rotary driving mechanism; the driven pulley 340 is coaxially fixedly connected with the lead screw 410, and the driving pulley 330 and the driven pulley 340 are matched with the synchronous belt 320. Thus, under the action of the synchronous belt 320, the driven pulley 340 can synchronously rotate with the driving pulley 330, the rotation of the driven pulley 340 can drive the lead screw 410 to synchronously rotate, so that the driving of the lead screw 410 is realized. It should be noted that the synchronous belt 320 has a certain flexibility, the synchronous belt 320 is selected for motion and power transmission, the structure is simple, the transmission is stable, the noise is small, and the synchronous belt 320 has the ability of buffering and absorbing vibration, so that the influence of high-frequency vibration of the rotary driving mechanism on precision can be reduced, and the motion precision of the linear slide can be ensured.

[0046] Preferably, the driving seat 310 and the slide base 100 are arranged side by side in a direction perpendicular to the lead screw 410, which is beneficial to compress the structure volume, increase the stability and rigidity of the whole mechanism, reduce the vibration generated by motion, and improve the motion precision. On this basis, the gap between the driving seat 310 and the slide base 100 is arranged to be adjustable in width, so that the tension of the synchronous belt 320 can be adjusted to meet the tension requirement. On this basis, a gasket 700 (which can be one gasket or multiple gaskets) with a thickness consistent with the gap width is selected, the gasket 700 is inserted into the gap between the driving seat 310 and the slide base 100, and the driving seat 310 and the slide base 100 are used to press and fix the gasket 700 in the gap, so that the tension of the synchronous belt 320 after adjustment can be kept unchanged for a long time, and the stability of the structure can be ensured. When it is necessary to adjust the tension of the synchronous belt 320, the gasket 700 can be removed, the gap between the driving seat 310 and the slide base 100 is adjusted, and then the gasket 700 with a corresponding thickness is inserted. The gasket 700 can be fixed in the gap between the driving seat 310 and the slide base 100 only by pressing force, or other fixing structures can be added.

[0047] Specifically, the driving seat 310 and the slide base 100 can be fixedly connected through a threaded connecting piece. By screwing the threaded connecting piece, the gap between the driving seat 310 and the slide base 100 can be adjusted.

[0048] Preferably, referring to Figure 4 The gasket 700 can be slotted to facilitate avoiding the screws connecting the driving seat 310 and the slide base 100 when being inserted and pulled out, so that the screws do not need to be disassembled, and the operation is more convenient.

[0049] The rotating driving mechanism can include a motor 350, a motor shaft of the motor 350 is fixed coaxially with the driving pulley 330, so that the motor 350 can drive the driving pulley 330 to rotate. A hand wheel 360 can be fixed at the tail of the motor 350. During debugging, the hand wheel 360 can be rotated to realize manual adjustment, detect whether the signal is present or not, and detect the on-off and the rough movement displacement amount. Compared with the tail of the motor shaft, the hand wheel 360 has a larger volume and is more smooth, so it is not easy to entangle other structures and is not easy to scratch people or other objects. In addition, the presence of the hand wheel 360 can also increase the counterweight and improve the modal of the motor 350.

[0050] Preferably, the shaft of the driven pulley 340 is rotatably connected to the slide base 100 through bearings 370 on both sides of the shaft, which can reduce the rotation resistance of the driven pulley 340, improve the sliding smoothness of the slide plate 200, and reduce noise. Specifically, the bearing 370 above the driven pulley 340 is installed on the slide base 100 through a fixed plate 900. A cylindrical groove is formed in the slide base 100 below the driven pulley 340, and the bearing 370 below the driven pulley 340 is installed in the cylindrical groove.

[0051] In the embodiment, a detection assembly and a controller can also be provided. The detection assembly is used to detect the position of the slide plate 200. The detection assembly and the driving assembly are both connected to the controller. After the host computer sends a position signal for movement, the controller can transmit the movement amount information to the driving assembly according to the current position of the slide plate 200 detected by the detection assembly. The driving assembly can drive the slide plate 200 to move a corresponding displacement, so that the slide plate 200 reaches the target position. The host computer calculates the movement direction and displacement of the slide plate 200.

[0052] The rotating driving mechanism also includes a driver. The controller can be connected to the motor 350 through the driver. The controller can transmit the movement amount information to the driver according to the current position of the slide plate 200 detected by the detection assembly. The driver drives the motor 350 to rotate an angular displacement by sending a specific number and frequency of pulses to the motor 350. The detection assembly measures the movement amount and feeds it back to the controller, so that the motor 350 rotates a specified angular displacement. Specifically, the detection assembly can include an encoder provided with the motor 350. The encoder can measure the angular displacement of the motor 350 and feed it back to the controller.

[0053] The detection assembly can further include a photoelectric sensor 430 and a photoelectric block, one of which is fixed to the slide base 100 and the other of which is fixed to the slide plate 200, so that the photoelectric block and the photoelectric sensor 430 move relatively with the movement of the slide plate 200, and the photoelectric block can trigger the photoelectric sensor 430 when the slide plate 200 moves to the limit position; the photoelectric sensor 430 is in communication connection with the controller, and when the photoelectric sensor 430 is triggered, the controller can control the driving assembly to stop or reverse driving, which can play a soft limit effect and improve safety. Wherein, the slide plate 200 can be fixed with a sliding block 210, and the sliding block 210 is fixed with a nut 420, and at this time, the photoelectric block or the photoelectric sensor 430 can be fixed to the sliding block 210.

[0054] As an implementable manner, two sets of detection assemblies can be provided, and the photoelectric sensors 430 in the two sets of detection assemblies can be triggered respectively when the slide plate 200 moves to the limit position at both ends, so that the slide plate 200 can be prevented from exceeding the movable range.

[0055] As another implementable manner, one photoelectric block and two photoelectric sensors 430 can be provided, and the two photoelectric sensors 430 can be triggered by the same photoelectric block when the slide plate 200 moves to the limit position at both ends.

[0056] In addition, the center axis of the driving pulley 330 and the center axis of the lead screw 410 can be arranged to coincide with the symmetry plane of the slide base 100, so that the structural stability can be improved. In fact, the slide plate 200 moves vertically, and under this working condition, the center axis of the driving pulley 330, the center axis of the lead screw 410 and the symmetry plane of the slide base 100 are in the same horizontal plane.

[0057] A mounting hole can be reserved on the slide plate 200 to fix a probe on the slide plate 200 through the mounting hole, so that the slide plate 200 can drive the probe to move. The probe can be an optical lens or an inductive probe.

[0058] After the probe is installed on the slide plate 200, the center of gravity of the entire linear slide is located at the middle part of the lead screw 410, which is beneficial to improve the motion accuracy.

[0059] The two sides of the slide plate 200 can be respectively slidably connected with the slide base 100 through two sets of slide rail assemblies, and each set of slide rail assemblies can include two slidably connected slide rails 800, one of which is fixed to the slide plate 200 and the other of which is fixed to the slide base 100.

[0060] The embodiment also provides a detection device including the linear slide.

[0061] The detection equipment provided by the embodiment has all advantages of the linear sliding table, is high in precision and smoothness, is high in overall rigidity, and is low in motion noise and interference.

[0062] In the description of the utility model, it is to be explained that the position or location relation indicated by the terms "upper", "lower", "horizontal" and the like is the position or location relation based on the position or location relation shown in the drawings, and is only for the convenience of describing the utility model and simplifying the description, and does not indicate or imply that the device or element indicated must have a specific position, be constructed and operated in a specific position, and therefore cannot be understood as a limitation on the utility model.

[0063] In the description of the utility model, it is to be explained that, unless otherwise explicitly specified and limited, the terms "mounting", "connection" should be understood broadly, for example, can be fixed connection, or detachable connection, or integrally connected, can be mechanical connection, or electrical connection, can be directly connected, or indirectly connected through an intermediate medium, can be the communication inside two elements. For ordinary skilled in the art, the specific meaning of the above terms in the utility model can be understood according to the specific circumstances.

[0064] Finally, it should be pointed out that: the above embodiments are only used to illustrate the technical scheme of the utility model, and not to limit it; although the utility model has been described in detail with reference to the foregoing embodiments, those skilled in the art should understand that: it can still modify the technical scheme recorded in the foregoing embodiments, or make equivalent replacement to part or all of the technical features; and these modifications or replacements do not make the essence of the corresponding technical scheme deviate from the scope of the technical scheme of the embodiments of the utility model.

Claims

1. A linear slide, characterized by, The linear slide further comprises a slide base, a slide plate, a driving assembly, a lead screw, a nut and a modal wheel. The slide plate is slidingly connected to the slide base, the lead screw is rotatably connected to the slide base, the nut is matched with the lead screw, and the nut is fixedly connected to the slide plate; the driving assembly is drivingly connected to the lead screw for driving the lead screw to rotate; and the modal wheel is coaxially fixedly connected to one end of the lead screw.

2. The linear slide of claim 1, wherein, The modal wheel is provided with a threaded hole, one end of the lead screw is provided with a threaded connecting section matched with the threaded hole; and the linear slide further comprises a fastening screw matched with the threaded hole and abutting against the lead screw at an end thereof.

3. The linear slide of claim 1, wherein, The modal wheel is in a cylindrical shape.

4. The linear slide of claim 1, wherein, The driving assembly comprises a driving seat, a rotary driving mechanism, a synchronous belt, a driving pulley and a driven pulley; the driving seat is fixedly connected to the slide base, and the rotary driving mechanism is mounted to the driving seat; the rotary driving mechanism is connected to the driving pulley for driving the driving pulley to rotate; the driven pulley is coaxially fixedly connected to the lead screw, and the driving pulley and the driven pulley are matched with the synchronous belt.

5. The linear slide of claim 4, wherein, The driving seat and the slide base are arranged side by side and spaced apart in a direction perpendicular to the lead screw, the width of a gap between the driving seat and the slide base is adjustable, and a spacer plate is detachably installed in the gap, the thickness of the spacer plate being consistent with the width of the gap.

6. The linear slide of claim 4, wherein, The rotary driving mechanism comprises a motor, a motor shaft of the motor is coaxially fixedly connected to the driving pulley, and a tail of the motor shaft is fixedly connected with a hand wheel. The axial two sides of the driven pulley are respectively rotatably matched with the slide base through bearings.

7. The linear slide of claim 1, wherein, The linear slide further comprises a detection assembly and a controller; the detection assembly is used for detecting the position of the slide plate; and the detection assembly and the driving assembly are both communicatively connected to the controller.

8. The linear slide of claim 7, wherein, The detection assembly comprises a photoelectric sensor and a photoelectric stopper; one of the photoelectric sensor and the photoelectric stopper is fixedly arranged on the slide base, and the other is fixedly arranged on the slide plate; when the slide plate moves to a limit position, the photoelectric stopper can trigger the photoelectric sensor; the photoelectric sensor is communicatively connected to the controller; and the controller can control the driving assembly to stop or reversely drive when the slide plate moves to the limit position.

9. The linear slide of any of claims 4-6, wherein, The central axis of the driving pulley and the central axis of the lead screw are both coincident with the symmetry plane of the slide base. The slide plate is provided with a detector, and the gravity center of the linear slide is located in the middle of the lead screw.

10. A detection device, characterized by The linear slide comprises the linear slide according to any one of claims 1-9.

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