Test board card and test system
By designing a test board for signal conversion and trigger detection modules, the functional testing process of the trigger board is simplified, solving the problems of cumbersome and costly setup of existing test environments, and achieving fast and low-cost testing results.
Patent Information
- Application Number
- CN202423301303.5
- Authority / Receiving Office
- CN · China
- Patent Type
- Utility models(China)
- Current Assignee / Owner
- Filing Date
- 2024-12-30
- Publication Date
- 2025-12-30
- Estimated Expiration
- 2034-12-30
AI Technical Summary
Functional testing of existing trigger boards requires setting up a cumbersome and time-consuming test environment, which is also costly.
Design a test board that includes a signal conversion module and a trigger detection module. It uses an optocoupler to achieve signal isolation and conversion, and uses an LED reminder function to replace the spectrometer, control box and motor, and communicates directly with the industrial control computer for testing.
It simplifies the process of setting up the testing environment, reduces testing costs, and enables fast and low-cost functional testing.
Smart Images
Figure CN223742660U_ABST
Abstract
Description
TECHNICAL FIELD
[0001] The utility model relates to electronic circuit technical field especially, and it is a kind of test board card and test system. BACKGROUND
[0002] In semiconductor production or metrology equipment, often need to use spectroscopic ellipsometer;Supporting development triggers board card, and responds to trigger by communication with spectroscopic ellipsometer.In practical application, in order to guarantee the function of trigger board card, usually, first, trigger board card is functionally tested, then trigger board card is installed in semiconductor equipment and is debugged.
[0003] When functionally testing trigger board card, it needs to use spectroscopic ellipsometer, control box, motor and the like to build test environment, for example, as shown in the figure. Figure 1 Industrial computer is communicated with control box and spectroscopic ellipsometer by network switch and completes preliminary configuration, control box sends instruction signal to trigger board card, trigger board card converts the instruction signal into first pulse signal to conversion circuit, conversion circuit converts the first pulse signal into intermediate pulse signal to spectroscopic ellipsometer, spectroscopic ellipsometer sends response signal to conversion circuit in response to the intermediate pulse signal, conversion circuit converts the response signal into second pulse signal to trigger board card, trigger board card generates trigger signal to control box based on the second pulse signal, control box drives motor based on the trigger signal, so, whether trigger board card generates trigger signal normally is judged by observing whether motor works, to complete functional test.
[0004] However, since trigger board card is functionally tested before installation, and test environment is built every time, it is not only cumbersome but also time-consuming;In addition, test environment is built based on spectroscopic ellipsometer, control box, motor and the like, so that test cost is higher.
[0005] It should be noted that the above introduction to technical background is only to facilitate clear and complete description of the technical scheme of the present application, and to facilitate the understanding of those skilled in the art. The above technical scheme cannot be considered as known to those skilled in the art only because it is described in the background section of the present application. UTILITY MODEL CONTENT
[0006] In view of the above-mentioned shortcomings of the prior art, the purpose of the present utility model is to provide a test board card and test system, which solves the problem of existing trigger board card functional test scheme that test environment is built complicatedly, time-consumingly and at high cost.
[0007] To achieve the above-mentioned purpose and other related purposes, the utility model provides a test board card, which comprises:
[0008] The signal conversion module receives the first pulse signal and converts the first pulse signal into a second pulse signal output.
[0009] The trigger detection module receives a trigger signal and sends a reminder when the trigger signal is detected.
[0010] Optionally, the signal conversion module comprises:
[0011] The first isolation conversion unit receives the first pulse signal and converts the first pulse signal into an intermediate pulse signal output.
[0012] The second isolation conversion unit receives the intermediate pulse signal and converts the intermediate pulse signal into the second pulse signal output.
[0013] Optionally, the first isolation conversion unit and the second isolation conversion unit are both implemented by using an optical coupler.
[0014] Optionally, the first isolation conversion unit comprises a first optical coupler, a first MOS tube, a second MOS tube, a first resistor, a second resistor, a third resistor, and a first capacitor, wherein:
[0015] The gate of the first MOS tube receives the first pulse signal, the source of the first MOS tube is connected to a reference ground, and the drain of the first MOS tube is connected to the negative input end of the first optical coupler.
[0016] The positive input end of the first optical coupler is connected to a first supply voltage through the first resistor, the supply end of the first optical coupler is connected to a second supply voltage and connected to the reference ground through the first capacitor, and the output end of the first optical coupler is connected to the gate of the second MOS tube and connected to the second supply voltage through the second resistor.
[0017] The source of the second MOS tube is connected to the reference ground, and the drain of the second MOS tube is connected to a first conversion voltage through the third resistor and outputs the intermediate pulse signal.
[0018] Optionally, the second isolation conversion unit comprises a second optical coupler, a third MOS tube, a fourth MOS tube, a fourth resistor, a fifth resistor, a sixth resistor, and a second capacitor, wherein:
[0019] The gate of the third MOS tube receives the intermediate pulse signal, the source of the third MOS tube is connected to the reference ground, and the drain of the third MOS tube is connected to the negative input end of the second optical coupler.
[0020] The positive input end of the second optical coupler is connected with a first power supply voltage through the fourth resistor, the power supply end of the second optical coupler is connected with a second power supply voltage and connected with a reference ground through the second capacitor, and the output end of the second optical coupler is connected with the gate of the fourth MOS tube and connected with the second power supply voltage through the fifth resistor.
[0021] The source of the fourth MOS tube is connected with the reference ground, and the drain of the fourth MOS tube is connected with a second conversion voltage through the sixth resistor and outputs the second pulse signal.
[0022] Optionally, the trigger detection module emits a reminder in the form of light when detecting the trigger signal.
[0023] Optionally, the trigger detection module comprises a triode, a seventh resistor and a light emitting diode, wherein: the base of the triode receives the trigger signal, the collector of the triode is connected with the cathode of the light emitting diode through the seventh resistor, the emitter of the triode is connected with the reference ground, and the anode of the light emitting diode is connected with a working voltage.
[0024] The utility model also provides a test system, the test system includes:
[0025] The test board card as claimed in any one of the preceding claims;
[0026] The trigger board card receives an instruction signal, converts the instruction signal into the first pulse signal and outputs the first pulse signal, receives the second pulse signal, and generates the trigger signal based on the second pulse signal.
[0027] Optionally, the test system further comprises:
[0028] The industrial computer is connected with the trigger board card through a converter and is used for providing the instruction signal.
[0029] Optionally, the converter is an RS-232 / RS-422 converter.
[0030] As described above, the utility model discloses a test board card and test system, propose a brand-new test scheme based on test board card realization, need not use spectral ellipsometer, control box, motor etc. to build the test environment, can complete the function test of trigger board card, make the building of test environment more simple, save time, and, can also reduce the test cost. BRIEF DESCRIPTION OF DRAWINGS
[0031] Figure 1 The structure schematic view of the test environment built when the function test of the trigger board card is carried out in the prior art is shown.
[0032] Figure 2A structure schematic diagram of the test board card in the embodiment one of the present utility model is shown.
[0033] Figure 3 A structure schematic diagram of the first isolation conversion unit in the embodiment one of the present utility model is shown.
[0034] Figure 4 A structure schematic diagram of the second isolation conversion unit in the embodiment one of the present utility model is shown.
[0035] Figure 5 A structure schematic diagram of the trigger detection module in the embodiment one of the present utility model is shown.
[0036] Figure 6 A structure schematic diagram of the test system in the embodiment two of the present utility model is shown.
[0037] Element number explanation
[0038] 10 test system
[0039] 100 test board card
[0040] 110 signal conversion module
[0041] 111 first isolation conversion unit
[0042] 111a first optical coupler
[0043] 112 second isolation conversion unit
[0044] 112a second optical coupler
[0045] 120 trigger detection module
[0046] 200 trigger board card
[0047] 300 industrial computer
[0048] 400 converter DETAILED DESCRIPTION
[0049] The embodiments of the present utility model are explained in detail by specific examples, and the person skilled in the art can easily understand other advantages and effects of the present utility model from the content disclosed in the specification. The present utility model can also be implemented or applied by different specific embodiments, and each detail in the specification can be modified or changed based on different viewpoints and applications without departing from the spirit of the present utility model.
[0050] Please refer to Figures 1 to 6It should be understood that the structures, proportions, sizes, etc., illustrated in the accompanying drawings are merely for illustrative purposes to aid those skilled in the art and are not intended to limit the scope of this invention. Therefore, they have no substantial technical significance. Any modifications to the structure, changes in proportions, or adjustments to size, without affecting the effectiveness and purpose of this invention, should still fall within the scope of the disclosed technical content. Furthermore, the terms "upper," "lower," "left," "right," "middle," and "one" used in this specification are merely for clarity and not intended to limit the scope of this invention. Changes or adjustments to their relative relationships, without substantially altering the technical content, should also be considered within the scope of this invention.
[0051] Example 1
[0052] like Figure 2 As shown, this embodiment provides a test board 100, including a signal conversion module 110 and a trigger detection module 120.
[0053] Signal conversion module 110 receives a first pulse signal PULSE1 and converts it into a second pulse signal PULSE2 for output. In one example, signal conversion module 110 includes a first isolation conversion unit 111 and a second isolation conversion unit 112.
[0054] The first isolation conversion unit 111 receives the first pulse signal PULSE1 and converts it into an intermediate pulse signal PULSEm for output. In one embodiment, the first isolation conversion unit 111 is implemented using an optocoupler. Specifically, as shown... Figure 3 As shown, the first isolation conversion unit 111 includes a first optocoupler 111a, a first MOS transistor M1, a second MOS transistor M2, a first resistor R1, a second resistor R2, a third resistor R3, and a first capacitor C1.
[0055] The gate of the first MOS transistor M1 receives a first pulse signal PULSE1, the source of the first MOS transistor M1 is connected to a reference ground, the drain of the first MOS transistor M1 is connected to a negative input end (i.e., a 1D- end) of a first optocoupler 111a, a positive input end (i.e., a 1D+ end) of the first optocoupler 111a is connected to a first supply voltage VDD1 through a first resistor R1, a ground end (i.e., a GND end) of the first optocoupler 111a is connected to the reference ground, a supply end (i.e., a VCC end) of the first optocoupler 111a is connected to a second supply voltage VDD2, the supply end (i.e., the VCC end) of the first optocoupler 111a is also connected to the reference ground through a first capacitor C1, an output end (i.e., a VO1 end) of the first optocoupler 111a is connected to the gate of a second MOS transistor M2, the output end (i.e., the VO1 end) of the first optocoupler 111a is also connected to the second supply voltage VDD2 through a second resistor R2, the source of the second MOS transistor M2 is connected to the reference ground, the drain of the second MOS transistor M2 is connected to a first conversion voltage VCO1 through a third resistor R3, and the drain of the second MOS transistor M2 also serves as an output end of the first isolation conversion unit 111 to output an intermediate pulse signal PULSEm. As an optional solution, the first optocoupler 111a is implemented by using an HCPL2631 chip, wherein the first supply voltage VDD1 has a value of 3.3V, the second supply voltage VDD2 has a value of 5V, the first resistor R1 has a resistance of 510Ω, the second resistor R2 has a resistance of 510Ω, the third resistor R3 has a resistance of 10KΩ, and the first capacitor C1 has a capacitance of 0.1μF.
[0056] In actual application, the high level of the first pulse signal PULSE1 is 5V, and the high level of the intermediate pulse signal PULSEm is 3.3V; at this time, the first conversion voltage VCO1 has a value of 3.3V. When the first pulse signal PULSE1 is at a low level, the first MOS transistor M1 is turned off, the voltage at the negative input end (i.e., the 1D- end) of the first optocoupler 111a is pulled up to 5V, at the same time, the voltage at the output end (i.e., the VO1 end) of the first optocoupler 111a is pulled up to 5V, the second MOS transistor M2 is turned on, and the intermediate pulse signal PULSEm is 0V; when the first pulse signal PULSE1 is at a high level, the first MOS transistor M1 is turned on, the voltage at the negative input end (i.e., the 1D- end) of the first optocoupler 111a is pulled down from 5V to about 0.7V, at the same time, the voltage at the output end (i.e., the VO1 end) of the first optocoupler 111a is reduced from 5V to 0V, the second MOS transistor M2 is turned off, and the intermediate pulse signal PULSEm is 3.3V, thus, the first pulse signal PULSE1 of 5V is converted into the intermediate pulse signal PULSEm of 3.3V.
[0057] The second isolation conversion unit 112 receives the intermediate pulse signal PULSEm and converts the intermediate pulse signal PULSEm into a second pulse signal PULSE2. In one embodiment, the second isolation conversion unit 112 is implemented using an optocoupler. Specifically, as shown in FIG. 3, the second isolation conversion unit 112 includes a second optocoupler 112a, a third MOS transistor M3, a fourth MOS transistor M4, a fourth resistor R4, a fifth resistor R5, a sixth resistor R6, and a second capacitor C2. Figure 4
[0058] The gate of the third MOS transistor M3 receives the intermediate pulse signal PULSEm, the source of the third MOS transistor M3 is connected to the reference ground, the drain of the third MOS transistor M3 is connected to the negative input end (i.e., the 1D- end) of the second optocoupler 112a, the positive input end (i.e., the 1D+ end) of the second optocoupler 112a is connected to the first supply voltage VDD1 through the fourth resistor R4, the ground end (i.e., the GND end) of the second optocoupler 112a is connected to the reference ground, the supply end (i.e., the VCC end) of the second optocoupler 112a is connected to the second supply voltage VDD2, the supply end (i.e., the VCC end) of the second optocoupler 112a is also connected to the reference ground through the second capacitor C2, the output end (i.e., the VO1 end) of the second optocoupler 112a is connected to the gate of the fourth MOS transistor M4, the output end (i.e., the VO1 end) of the second optocoupler 112a is also connected to the second supply voltage VDD2 through the fifth resistor R5, the source of the fourth MOS transistor M4 is connected to the reference ground, the drain of the fourth MOS transistor M4 is connected to the second conversion voltage VCO2 through the sixth resistor R6, and the drain of the fourth MOS transistor M4 also serves as the output end of the second isolation conversion unit 112 to output the second pulse signal PULSE2. As an optional solution, the second optocoupler 112a is implemented using an HCPL2631 chip, wherein the value of the first supply voltage VDD1 is 3.3V, the value of the second supply voltage VDD2 is 5V, the resistance value of the fourth resistor R4 is 510Ω, the resistance value of the fifth resistor R5 is 510Ω, the resistance value of the sixth resistor R6 is 10KΩ, and the capacitance value of the second capacitor C1 is 0.1μF.
[0059] In practical applications, the high level of the intermediate pulse signal PULSEm is 3.3V, and the high level of the second pulse signal PULSE2 is 5V; at this time, the value of the second conversion voltage VCO2 is 5V. When the intermediate pulse signal PULSEm is low, the third MOSFET M3 is turned off, pulling the voltage at the negative input terminal (i.e., the 1D- terminal) of the second optocoupler 112a to 5V. At the same time, the voltage at the output terminal (i.e., the VO1 terminal) of the second optocoupler 112a is also pulled up to 5V. The fourth MOSFET M4 is turned on, and the second pulse signal PULSE2 is 0V. When the intermediate pulse signal PULSEm is high, the third MOSFET M3 is turned on, pulling the voltage at the negative input terminal (i.e., the 1D- terminal) of the second optocoupler 112a from 5V to about 0.7V. At the same time, the voltage at the output terminal (i.e., the VO1 terminal) of the second optocoupler 112a decreases from 5V to 0V. The fourth MOSFET M4 is turned off, and the second pulse signal PULSEm is 5V. In this way, the 3.3V intermediate pulse signal PULSEm is converted into a 5V second pulse signal PULSE2 for output.
[0060] The trigger detection module 120 receives a trigger signal TRIG and issues an alert when it detects the TRIG. In one example, the trigger detection module 120 issues an alert by emitting light when it detects the TRIG; of course, issuing an alert by emitting sound or other forms is also feasible, and this has no substantial impact on the implementation of the solution in this embodiment. In one implementation, such as Figure 5 As shown, the trigger detection module 120 includes a transistor Q, a seventh resistor R7, and a light-emitting diode D. The base of transistor Q receives the trigger signal TRIG. The collector of transistor Q is connected to the cathode of light-emitting diode D via the seventh resistor R7. The emitter of transistor Q is connected to reference ground, and the anode of light-emitting diode D is connected to the operating voltage VCC. The value of operating voltage VCC is 5V, and the resistance of the seventh resistor R7 is 1KΩ. When the trigger signal TRIG is high, transistor Q conducts, and light-emitting diode D illuminates. When the trigger signal TRIG is low, transistor Q does not conduct, and light-emitting diode D does not illuminate. By observing whether light-emitting diode D is on or off, it can be determined whether there is a trigger signal TRIG output.
[0061] Example 2
[0062] like Figure 6 As shown, this embodiment provides a test system 10, including a test board 100 and a trigger board 200, and further includes an industrial control computer 300 and a converter 400.
[0063] The test board card 100 receives the first pulse signal PULSE1 and converts the first pulse signal PULSE1 into the second pulse signal PULSE2 output, and receives the trigger signal TRIG and emits a reminder when the trigger signal TRIG is detected. Wherein, the test board card 100 is implemented by the structure described in embodiment one, and the related content can be seen in the above, which will not be repeated here.
[0064] The trigger board card 200 receives the instruction signal and converts the instruction signal into the first pulse signal PULSE1 output, and receives the second pulse signal PULSE2 and generates the trigger signal TRIG based on the second pulse signal PULSE output. It should be noted that the trigger board card 200 is implemented by any known structure, which is not limited.
[0065] The industrial computer 300 is connected with the trigger board card 200 through the converter 400, which is used to provide the instruction signal to the trigger board card 200. In an embodiment, the converter 400 is an RS-232 / RS-422 converter; the signal type emitted by the industrial computer 300 is RS232 single-ended signal, and the signal type that the trigger board card 200 can receive is RS422 differential signal, and through the design of the converter 400, the direct communication between the industrial computer 300 and the trigger board card 200 can be realized.
[0066] When the trigger board card 200 is functionally tested by the test system 10 described above: the industrial computer 300 directly emits the instruction signal to the trigger board card 200 through the converter 400, the trigger board card 200 converts the instruction signal into the first pulse signal PULSE1 to the test board card 100, the test board card 100 converts the first pulse signal PULSE1 into the intermediate pulse signal PULSEm, and then converts the intermediate pulse signal PULSEm into the second pulse signal PULSE2 to return to the trigger board card 200, the trigger board card 200 generates the trigger signal TRIG based on the second pulse signal PULSE2, and the light-emitting diode D emits light when the test board card 100 detects the trigger signal TRIG. In this way, whether the trigger signal is normally generated by the trigger board card can be determined by observing the light-emitting diode, so as to complete the function test of the trigger board card. In the test scheme of the embodiment, through the design of the test board card 100, the signal conversion module 110 is used to replace the spectroscopic ellipsometer, the trigger detection module 120 is used to replace the control box and the motor, and the industrial computer 300 is directly communicated with the trigger board card 200 without using the network switch, so that the test environment is more simple, time-saving, and the test cost is also reduced.
[0067] In summary, the utility model discloses a test board card and test system, propose a kind of brand-new test scheme based on test board card implementation, without using spectral ellipsometer, control box, motor etc. to build test environment, can complete the function test to trigger board card, so that the building of test environment is simpler, time-saving, and, can also reduce test cost.
[0068] The above embodiments only exemplarily illustrate the principles and effects of the utility model, and are not used to limit the utility model. Any person skilled in the art can modify or change the above embodiments without departing from the spirit and scope of the utility model. Therefore, all equivalent modifications or changes completed by those skilled in the art without departing from the spirit and technical concept disclosed by the utility model should be covered by the claims of the utility model.
Claims
1. A test board card, characterized by, The test board card comprises: a signal conversion module, which receives a first pulse signal and converts the first pulse signal into a second pulse signal output; a trigger detection module, which receives a trigger signal and sends a reminder when the trigger signal is detected.
2. The test board card of claim 1, wherein, The signal conversion module comprises: a first isolation conversion unit, which receives the first pulse signal and converts the first pulse signal into an intermediate pulse signal output; a second isolation conversion unit, which receives the intermediate pulse signal and converts the intermediate pulse signal into the second pulse signal output.
3. The test board card of claim 2, wherein, The first isolation conversion unit and the second isolation conversion unit are both implemented by using an optical coupler.
4. The test board card of claim 3, wherein, The first isolation conversion unit comprises a first optical coupler, a first MOS tube, a second MOS tube, a first resistor, a second resistor, a third resistor, and a first capacitor, wherein: a gate of the first MOS tube receives the first pulse signal, a source of the first MOS tube is connected to a reference ground, and a drain of the first MOS tube is connected to a negative input end of the first optical coupler; a positive input end of the first optical coupler is connected to a first supply voltage through the first resistor, a supply end of the first optical coupler is connected to a second supply voltage and connected to the reference ground through the first capacitor, and an output end of the first optical coupler is connected to a gate of the second MOS tube and connected to the second supply voltage through the second resistor; a source of the second MOS tube is connected to the reference ground, and a drain of the second MOS tube is connected to a first conversion voltage through the third resistor and outputs the intermediate pulse signal.
5. The test board card of claim 3, wherein, The second isolation conversion unit comprises a second optical coupler, a third MOS tube, a fourth MOS tube, a fourth resistor, a fifth resistor, a sixth resistor, and a second capacitor, wherein: a gate of the third MOS tube receives the intermediate pulse signal, a source of the third MOS tube is connected to the reference ground, and a drain of the third MOS tube is connected to a negative input end of the second optical coupler; a positive input end of the second optical coupler is connected to the first supply voltage through the fourth resistor, a supply end of the second optical coupler is connected to the second supply voltage and connected to the reference ground through the second capacitor, and an output end of the second optical coupler is connected to a gate of the fourth MOS tube and connected to the second supply voltage through the fifth resistor; a source of the fourth MOS tube is connected to the reference ground, and a drain of the fourth MOS tube is connected to a second conversion voltage through the sixth resistor and outputs the second pulse signal.
6. The test board card according to any one of claims 1 to 5, characterized in that The trigger detection module sends a reminder in the form of light emission when the trigger signal is detected.
7. The test board card of claim 6, wherein, The trigger detection module comprises a triode, a seventh resistor, and a light-emitting diode, wherein: a base of the triode receives the trigger signal, a collector of the triode is connected to a cathode of the light-emitting diode through the seventh resistor, an emitter of the triode is connected to the reference ground, and an anode of the light-emitting diode is connected to a working voltage.
8. A test system, characterized by The test system comprises: the test board card according to any one of claims 1 to 7; and a test system. The trigger card receives the instruction signal and converts the instruction signal into the first pulse signal output, and receives the second pulse signal and generates the trigger signal based on the second pulse signal.
9. The test system of claim 8, wherein, The test system further comprises: An industrial computer connected to the trigger card through a converter, configured to provide the instruction signal.
10. The test system of claim 9, wherein, The converter is an RS-232 / RS-422 converter.