Magnetic confinement detection device

Abstract

The utility model relates to the technical field of semiconductor material processing equipment, and particularly discloses a magnetic confinement detection device. The device comprises a receiving cup, a grounding shielding plate, at least one insulating part, an emission source and two magnets, the receiving cup is provided with a cylindrical accommodating cavity; a first hole penetrates through the grounding shielding plate and is communicated with the accommodating cavity; the insulating part is clamped between the receiving cup and the grounding shielding plate; the two magnets are symmetrically arranged on the two sides of the receiving cup at intervals with respect to the axis of the containing cavity, and the magnetizing directions of the two magnets are the same. The emission source is used for emitting a to-be-measured beam along the axis of the accommodating cavity, so that the to-be-measured beam passes through the first hole and then impacts the cavity bottom of the accommodating cavity. According to the device, the to-be-tested super-atom beam is magnetically constrained, so that the to-be-tested beam is effectively received and tested, the phenomenon that secondary electrons escape from the receiving cup due to collision of the super-atom beam is reduced, the measurement deviation caused by secondary electron escape is reduced, and the accuracy of a test path of the to-be-tested beam is ensured.

Description

Technical Field

[0001] This utility model relates to the field of semiconductor material processing equipment technology, and in particular to a magnetic confinement detection device. Background Technology

[0002] With the development of very large-scale integrated circuits, the requirements for semiconductor surface processing technology have increased, especially in wafer polishing and etching, where higher demands are placed on processing speed, surface damage, roughness, and heat accumulation. Conventional plasma processes, due to their single-atom ion bombardment principle, are difficult to meet these multiple requirements simultaneously. In recent years, superatom beam polishing and etching equipment has been developed and has been applied in fields such as polishing of superhard materials and processing of precision optical devices, achieving good results.

[0003] When gas molecules expand adiabatically, their thermal motion decreases, and van der Waals forces cause the molecules to combine into nanoscale gas clusters. These clusters can be regarded as "atoms" in ionization collisions and electromagnetic fields, but their mass and collision cross-section are much larger than those of a single atom, and they are called superatoms.

[0004] Traditional beam current measurement uses a Faraday cup. After the beam hits the cup wall, the charge is conducted to the ground via a microammeter, and the current shows the charge per unit time of the ionized superatomic beam. However, when measuring superatomic beam current, due to the high mass and large collision cross-section of superatoms, the secondary electron yield is high. When using a traditional Faraday cup, the beam hitting the cup wall generates a large number of secondary electrons, and some of the charge may escape from the opening, leading to measurement deviation. Utility Model Content

[0005] The purpose of this invention is to provide a magnetic confinement detection device to magnetically confine the superatomic beam under test, thereby achieving effective reception and testing of the beam under test, reducing the phenomenon of secondary electrons escaping from the receiving cup due to superatomic beam collisions, reducing measurement deviations caused by secondary electron escape, and ensuring the accuracy of the test path of the beam under test.

[0006] To achieve this objective, the present invention adopts the following technical solution:

[0007] A magnetic confinement testing device is used to test a beam under test. The magnetic confinement testing device includes a receiving cup, a grounding shield, at least one insulating element, a transmitting source, and two magnets. The receiving cup has a cylindrical receiving cavity. The grounding shield has a first hole that communicates with the receiving cavity. The insulating element is sandwiched between the receiving cup and the grounding shield. The two magnets are symmetrically spaced on both sides of the receiving cup about the axis of the receiving cavity, and the magnetization directions of the two magnets are the same. The transmitting source is used to emit the beam under test along the axis of the receiving cavity so that the beam under test passes through the first hole and impacts the bottom of the receiving cavity.

[0008] As an optional technical solution for the magnetic confinement detection device, the axis of the first hole coincides with the axis of the receiving cavity.

[0009] As an optional technical solution for the magnetic confinement detection device, in a plane perpendicular to the axis of the receiving cavity, the projection of the first hole coincides with the projection of the opening of the receiving cavity.

[0010] As an optional technical solution for the magnetic confinement detection device, the magnetic field strength formed by the two magnets is 5.0Oe-2000.0Oe.

[0011] As an optional technical solution for the magnetic confinement detection device, the distance between the magnet and the receiving cup is 0.1mm-30.0mm.

[0012] As an optional technical solution for the magnetic confinement detection device, the magnetic confinement detection device further includes a microammeter, which is electrically connected to the receiving cup and is connected to the grounding shield plate. The microammeter is used to measure the current signal inside the receiving cup.

[0013] As an optional technical solution for the magnetic confinement detection device, the magnetic confinement detection device further includes at least one insulating fixing pin, which passes through the grounding shield plate and the insulating component and is detachably connected to the receiving cup.

[0014] As an optional technical solution for the magnetic confinement detection device, the insulating fixing pin is made of ceramic or Teflon.

[0015] As an optional technical solution for the magnetic confinement detection device, the magnet is a permanent magnet or an electromagnet.

[0016] As an optional technical solution for the magnetic confinement detection device, the receiving cup is made of graphite, aluminum, or stainless steel.

[0017] The beneficial effects of this utility model are:

[0018] The cylindrical cavity of this magnetic confinement testing device provides a stable receiving space for the beam under test, allowing it to impact the bottom of the cavity for subsequent testing. The connection between the first aperture and the cavity guides the beam to pass through the aperture and impact the bottom of the cavity, achieving effective reception and testing. Two magnets, symmetrically spaced about the cavity axis and with the same magnetization direction, create a specific magnetic field environment around the receiving cup. This environment alters the trajectory of secondary electrons generated by collisions in the supraatomic beam source, causing them to deflect and collide with the receiving cup wall, preventing them from escaping through the first aperture and improving testing stability and accuracy. A grounding shield prevents external electromagnetic interference from affecting the beam under test and the testing process. Insulation isolates the receiving cup from the grounding shield, preventing current conduction between them and ensuring that the charge on the receiving cup wall can accumulate and be measured independently. This avoids the charge shunting effect of the grounding shield, providing a basis for accurate calculation of the beam parameters and ensuring the accuracy and safety of the testing. Attached Figure Description

[0019] Figure 1 This is a cross-sectional view of the magnetic confinement detection device provided in an embodiment of this utility model.

[0020] In the picture:

[0021] 100. Receiver cup; 200. Magnet; 300. Insulator; 400. Grounding shield; 500. Microammeter; 600. Insulating fixing pin; 900. Beam to be measured. Detailed Implementation

[0022] The technical solution of this utility model will now be clearly and completely described with reference to the accompanying drawings. Obviously, the described embodiments are only some, not all, of the embodiments of this utility model. Based on the embodiments of this utility model, all other embodiments obtained by those skilled in the art without creative effort are within the scope of protection of this utility model.

[0023] In the description of this utility model, it should be noted that the terms "center," "upper," "lower," "left," "right," "vertical," "horizontal," "inner," and "outer," etc., indicate the orientation or positional relationship based on the orientation or positional relationship shown in the accompanying drawings. They are used only for the convenience of describing this utility model and for simplifying the description, and do not indicate or imply that the device or element referred to must have a specific orientation, or be constructed and operated in a specific orientation. Therefore, they should not be construed as limitations on this utility model. Furthermore, the terms "first" and "second" are used for descriptive purposes only and should not be construed as indicating or implying relative importance. The terms "first position" and "second position" refer to two different positions. Moreover, "above," "on top of," and "over" the first feature in relation to the second feature includes the first feature directly above and diagonally above the second feature, or simply indicates that the first feature is at a higher horizontal level than the second feature. "Below," "under," and "below" the first feature in relation to the second feature includes the first feature directly below and diagonally below the second feature, or simply indicates that the first feature is at a lower horizontal level than the second feature.

[0024] In the description of this utility model, it should be noted that, unless otherwise explicitly specified and limited, the terms "installation," "connection," and "joining" should be interpreted broadly. For example, they can refer to a fixed connection, a detachable connection, or an integral connection; they can refer to a mechanical connection or an electrical connection; they can refer to a direct connection or an indirect connection through an intermediate medium; and they can refer to the internal connection of two components. Those skilled in the art can understand the specific meaning of the above terms in this utility model based on the specific circumstances.

[0025] The embodiments of this utility model are described in detail below. Examples of these embodiments are shown in the accompanying drawings, wherein the same or similar reference numerals denote the same or similar elements or elements having the same or similar functions throughout. The embodiments described below with reference to the accompanying drawings are exemplary and are only used to explain this utility model, and should not be construed as limiting this utility model.

[0026] like Figure 1 As shown, this embodiment provides a magnetic confinement detection device for testing a beam current 900 under test. The magnetic confinement detection device includes a receiving cup 100, a grounding shield plate 400, an insulating component 300, a transmitting source, and two magnets 200. The receiving cup 100 has a cylindrical receiving cavity. The grounding shield plate 400 has a first hole that is connected to the receiving cavity. The insulating component 300 is sandwiched between the receiving cup 100 and the grounding shield plate 400. The two magnets 200 are symmetrically spaced on both sides of the receiving cup 100 about the axis of the receiving cavity, and the magnetization directions of the two magnets 200 are the same. The transmitting source is used to emit the beam current 900 under test along the axis of the receiving cavity so that the beam current 900 under test passes through the first hole and impacts the bottom of the receiving cavity.

[0027] The cylindrical cavity of the magnetic confinement detection device provides a stable receiving space for the beam under test 900, allowing it to impact the bottom of the cavity and facilitating subsequent detection operations. The connection between the first aperture and the cavity guides the beam under test 900 through the aperture to impact the bottom of the cavity, achieving effective reception and testing. Using two magnets 200 symmetrically spaced about the cavity axis and with the same magnetization direction, a specific magnetic field environment can be formed around the receiving cup 100. This magnetic field environment alters the trajectory of secondary electrons generated by collisions in the supraatomic beam source, causing them to deflect and ultimately collide with the wall of the receiving cup 100, where they are detected instead of escaping through the first aperture, thus improving the stability and accuracy of the test. The grounding shield 400 prevents external electromagnetic interference from affecting the beam current 900 under test and the detection process; the insulating component 300 isolates the receiving cup 100 from the grounding shield 400, avoiding current conduction between the two, ensuring that the charge on the wall of the receiving cup 100 can be accumulated and measured independently, avoiding the charge shunting effect of the grounding shield 400, providing a basis for accurately calculating the parameters of the beam current 900 under test, and ensuring the accuracy and safety of the detection.

[0028] In this embodiment, the beam under test 900 is a supraatomic beam. By placing the receiving cup 100 in the magnetic field formed by the symmetrical magnet 200, the trajectory of secondary electrons in the supraatomic beam can be constrained by the Lorentz force. Due to the low mass and small charge of secondary electrons, their trajectory changes significantly under the action of the Lorentz force. This causes secondary electrons that impact the bottom of the cavity to deflect and re-impact the cavity wall, eventually being reabsorbed by the cavity wall. This constraint effectively reduces the interference of escape charge on beam measurement and the deviation of current signal caused by the escape of secondary electrons, thus improving the accuracy of the beam under test 900 measurement.

[0029] In this embodiment, the insulating member 300 is provided with a second hole that extends through it, and the first hole is connected to the receiving cavity through the second hole.

[0030] In one embodiment of this invention, the axis of the first hole coincides with the axis of the receiving cavity; and the axis of the second hole coincides with the axis of the receiving cavity.

[0031] By ensuring that the axes of the first and second holes coincide with the axis of the cavity, the beam under test 900 can pass through the first and second holes without deviation and enter the cavity along the axis of the cavity. This ensures that the magnetic field's confinement effect on secondary electrons is uniformly distributed along the axis, optimizes the path of the beam under test 900, avoids deviation of the beam under test 900 during transmission, reduces the risk of electron escape due to hole position deviation, reduces collisions between the beam under test 900 and the hole walls of the first or second hole, thereby reducing energy loss and beam scattering, improving the accuracy of the beam under test 900 impacting the cavity bottom, and enhancing the precision and reliability of the test results.

[0032] In other embodiments of this example, only the axis of the first hole coincides with the axis of the receiving cavity; or only the axis of the second hole coincides with the axis of the receiving cavity.

[0033] In one embodiment of this invention, in a plane perpendicular to the axis of the receiving cavity, the projection of the first hole coincides with the projection of the opening of the receiving cavity; and the projection of the second hole coincides with the projection of the opening of the receiving cavity.

[0034] In a plane perpendicular to the axis of the receiving cavity, the projections of the first and / or second apertures coincide with the projection of the opening of the receiving cavity, ensuring that the initial path of the beam under test 900 is aligned with the axis of symmetry of the magnetic field. This allows the beam under test 900 to enter the receiving cavity to the maximum extent when passing through the aperture, minimizing the loss of the beam under test 900 during the entry process, reducing the probability of edge electron escape, improving the receiving efficiency of the beam under test 900, enhancing the detection effect of the magnetic confinement detection device on the beam under test 900, and improving detection sensitivity and efficiency.

[0035] In other embodiments of this example, only the projection of the first hole coincides with the projection of the opening of the receiving cavity; or only the projection of the second hole coincides with the projection of the opening of the receiving cavity.

[0036] In this embodiment, the magnetic field strength formed by the two magnets 200 is 5.0 Oe-2000.0 Oe.

[0037] This magnetic field strength range can balance the constraints and measurement requirements, ensuring stable transmission of the beam 900 under test and causing the secondary electron trajectory to deflect and collide with the cup wall again. It can effectively constrain the beam 900 under test and prevent it from diverging, while avoiding excessive deflection of the beam 900 due to an excessively strong magnetic field, which would change the original characteristics of the beam. This ensures that the beam 900 under test is tested in a suitable magnetic field environment, thus ensuring the reliability of the test results.

[0038] For example, the distance between the magnet 200 and the receiving cup 100 is 0.1mm-30.0mm.

[0039] The distance between the magnet 200 and the receiving cup 100 is 0.1mm-30.0mm. This distance range ensures that the magnetic field generated by the magnet 200 forms a reasonable distribution around the receiving cup 100, ensuring the coverage efficiency of the magnetic field on the secondary electrons in the receiving cup 100. This allows the secondary electrons to be efficiently confined in the near-field region, enabling the magnetic field to effectively act on the beam under test 900 in the receiving cup 100 and provide good confinement for the beam under test 900. At the same time, it avoids uneven magnetic field distribution or insufficient magnetic field strength due to excessively close or far distances, thus avoiding unnecessary interference or damage caused by the magnet 200 and the receiving cup 100 being too close. This improves the stability of confining the beam under test 900.

[0040] For example, the magnetic confinement detection device further includes a microammeter 500, which is electrically connected to the receiving cup 100 and shares a common ground with the grounding shield 400. The microammeter 500 is used to measure the current signal within the receiving cup 100. Specifically, the microammeter 500 has a measurement range of 0-2000.0 μA and an accuracy class of 0.5.

[0041] The microammeter 500 is electrically connected to the receiving cup 100 and shares a common ground with the grounding shield 400, which can eliminate measurement errors caused by magnetic field interference and measure the current signal inside the receiving cup 100 in real time. By analyzing the current signal, relevant parameters of the beam under test 900 can be obtained, such as the intensity of the beam under test 900, providing data support for the testing and research of the beam under test 900.

[0042] The receiving cup 100 is directly electrically connected to the microammeter 500, and the receiving cup 100 is isolated from the grounding shield plate 400 through the insulating component 300. This causes the microammeter 500 to capture only the net charge signal after the secondary electron collision in the receiving cup 100, thus shielding external electromagnetic interference and improving the accuracy of current measurement.

[0043] In this embodiment, the magnetic confinement detection device further includes at least one insulating fixing pin 600, which passes through the grounding shield plate 400 and the insulating member 300 and is detachably connected to the receiving cup 100.

[0044] The insulating fixing pin 600 passes through the grounding shield plate 400 and the insulating component 300 and is detachably connected to the receiving cup 100, which further ensures the insulation reliability between the receiving cup 100 and the grounding shield plate 400. This allows the various components of the magnetic confinement detection device to be firmly connected together, while also facilitating disassembly and installation. This makes it easier to maintain and repair the magnetic confinement detection device, improving its maintainability and practicality, and ensuring that insulation performance is maintained during maintenance.

[0045] Furthermore, the insulating fixing pin 600 is made of ceramic or Teflon.

[0046] Both materials possess excellent insulation properties, further enhancing the electrical isolation effect of the insulating fixing pin 600 and reducing the possibility of leakage. Simultaneously, both materials exhibit certain high-temperature resistance, capable of withstanding the heat generated by the beam under test 900 without chemically reacting with it. This ensures the long-term stable operation of the magnetic confinement testing device and guarantees the stability and accuracy of the beam under test 900 testing under extreme environments.

[0047] For example, magnet 200 is a permanent magnet or an electromagnet.

[0048] Magnet 200 can be either a permanent magnet or an electromagnet, and the appropriate type of magnet can be selected according to actual needs and usage scenarios. Permanent magnets have the advantages of simple structure and no need for external power supply; electromagnets, on the other hand, can flexibly control the magnetic field strength by adjusting the current, meeting the requirements of different beam currents under test 900, and increasing the controllability and flexibility of the magnetic confinement detection device.

[0049] In this embodiment, the receiving cup 100 is made of graphite, aluminum, or stainless steel.

[0050] Graphite possesses excellent electrical conductivity and high-temperature resistance, enabling it to withstand the high temperatures generated by beam impacts. Its conductivity also aids in collecting charge information generated by these beam impacts. Aluminum is lightweight, facilitating installation and relocation of the device, and also offers some electrical conductivity and corrosion resistance. Stainless steel, with its high strength and corrosion resistance, ensures the structural stability and reliability of the receiver cup 100 during long-term use, making it suitable for complex and harsh working environments. The selection of various materials allows for optimization of the receiver cup 100's performance based on different detection requirements and beam characteristics, thereby enhancing the applicability of the magnetic confinement detection device.

[0051] Obviously, the above embodiments of this utility model are merely examples for clearly illustrating the present utility model, and are not intended to limit the implementation of the present utility model. Those skilled in the art can make other variations or modifications based on the above description. It is neither necessary nor possible to exhaustively list all possible implementations here. Any modifications, equivalent substitutions, and improvements made within the spirit and principles of this utility model should be included within the protection scope of the claims of this utility model.

Claims

1. A magnetic confinement detection device for testing a beam under test (900), characterized in that, The magnetic confinement detection device comprises: a receiving cup (100) having a cylindrical accommodating cavity; a grounding shield plate (400) having a first hole therethrough, the first hole being in communication with the accommodating cavity; at least one insulating member (300) clamped between the receiving cup (100) and the grounding shield plate (400); two magnets (200) symmetrically arranged on both sides of the receiving cup (100) with respect to the axis of the accommodating cavity, and the two magnets (200) having the same magnetization direction; a transmitting source for transmitting the to-be-tested beam (900) along the axis of the accommodating cavity so that the to-be-tested beam (900) impacts on the cavity bottom of the accommodating cavity after passing through the first hole.

2. The magnetic confinement detection apparatus of claim 1, wherein, The axis of the first hole coincides with the axis of the accommodating cavity.

3. The magnetic confinement detection apparatus of claim 2, wherein, In a plane perpendicular to the axis of the accommodating cavity, the projection of the first hole coincides with the projection of the opening of the accommodating cavity.

4. The magnetic confinement detection apparatus of claim 1, wherein, The magnetic field strength formed by the two magnets (200) is 5.0 Oe-2000.0 Oe.

5. The magnetic confinement detection apparatus of claim 1, wherein, The distance between the magnet (200) and the receiving cup (100) is 0.1 mm-30.0 mm.

6. The magnetic confinement detection apparatus of claim 1, wherein, The magnetic confinement detection device further comprises a microammeter (500), the microammeter (500) being electrically connected with the receiving cup (100) and being connected with the grounding shield plate (400) in common ground, and the microammeter (500) being used for measuring the current signal in the receiving cup (100).

7. The magnetic confinement detection apparatus of claim 1, wherein, The magnetic confinement detection device further comprises at least one insulating fixing pin (600), the insulating fixing pin (600) penetrating through the grounding shield plate (400) and the insulating member (300) and being detachably connected with the receiving cup (100).

8. The magnetic confinement detection device of claim 7, wherein, The material of the insulating fixing pin (600) is ceramic or Teflon.

9. The magnetic confinement detection apparatus of claim 1, wherein, The magnet (200) is a permanent magnet or an electromagnet.

10. The magnetic confinement detection device of any of claims 1-9, wherein, The material of the receiving cup (100) is graphite, aluminum or stainless steel.

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