Anti-static mask box structure

Abstract

The utility model discloses an anti-static mask box structure, which relates to the technical field of semiconductor manufacturing and comprises a box body, a box cover is mounted on the front side of the box body in a hinged manner, a hidden handle is arranged on the outer surface of the box cover, a magnetic strip is fixedly embedded in the inner wall of the box body, a rotating component is arranged in the box body, and a limiting component is arranged above the box body. According to the mask taking and placing device, by arranging the rotating assembly, a needed mask can be conveniently and rapidly found, the mask taking and placing efficiency is greatly improved, by arranging the box cover and the limiting assembly, the rotating assembly can be conveniently limited, then the placed mask can be prevented from moving at will, and by means of mutual cooperation of the rotating assembly, the box cover and the limiting assembly, the mask taking and placing efficiency is greatly improved. According to the anti-static mask box, the friction risk generated when the mask is rummaged in the box is avoided, the friction risk generated when the mask is freely moved due to external force can be avoided, then the anti-static effect can be achieved, and the mask is protected against static interference during standing, taking and placing.

Description

TECHNICAL FIELD

[0001] The utility model relates to the technical field of semiconductor manufacturing, specifically is a kind of anti-static mask plate box structure. BACKGROUND

[0002] Optical mask is made of various functional patterns on film, plastic or glass matrix material and accurately positioned, so as to be used for photoresist coating selective exposure structure, mask is widely used, and its precision and quality directly affect the performance and yield of product, mask is easily disturbed by static electricity in transportation and storage process, and problems such as static adsorption dust, charge accumulation damage occur, therefore, anti-static mask plate box as the important tool for protecting mask has important position in related industry.

[0003] Traditional anti-static mask plate box mostly uses simple drawer type or layering type storage structure, in use process, staff need to find the required mask among many masks, not only low efficiency, but also frequent searching action and mask random movement under external force are prone to friction, and further increase the risk of static generation, there is certain deficiency. UTILITY MODEL CONTENT

[0004] The utility model aims at making up for the deficiency of prior art, and provides anti-static mask plate box structure.

[0005] To achieve the above object, the utility model provides the following technical scheme: an anti-static mask plate box structure, including box body, the front side of box body is hingedly installed with box cover, the outer surface of box cover is equipped with hidden handle, the inner wall of box body is fixedly embedded with magnetic attraction strip, the inside of box body is equipped with rotating assembly, the upper portion of box body is equipped with limiting assembly.

[0006] Further, the rotating assembly includes a limiting column rotatably connected to the inner wall of the box body, one end of the limiting column is fixedly connected with a limiting disc, and the outer surface of the limiting disc is rotatably connected with the inner wall of the box body.

[0007] Further, the outer surface of the limiting column is fixedly connected with a plurality of equidistantly arranged bearing discs, the other end of each bearing disc is fixedly connected with a gear, and the outer surface of the gear is fixedly connected with a knob.

[0008] Further, the limiting assembly includes a limiting cylinder fixedly connected to the outer surface of the box cover, and the inside of the limiting cylinder is provided with a movable slot.

[0009] Further, the inner wall of the movable slot is slidably connected with a limiting slide rod, one end of the limiting slide rod away from the limiting cylinder is fixedly connected with a limiting head, and the limiting head is inserted into the inside of the gear.

[0010] Further, the limiting sliding rod is fixedly connected with an elastic member at one end away from the limiting head, and the end of the elastic member away from the limiting sliding rod is fixedly connected with the inner wall of the movable slot.

[0011] Compared with the prior art, the anti-static mask box structure has the following beneficial effects:

[0012] The utility model discloses a rotatory assembly is set up, and the mask needed is found conveniently, and the efficiency of taking and placing the mask is improved greatly, through setting up the lid and the limiting component, can be convenient for to the limiting of rotatory assembly, and then can avoid the mask placed and move at random, through the mutual cooperation between rotatory assembly, lid and limiting component, not only avoid the friction risk when looking for the mask in the box, but also can avoid the friction risk of the mask and move randomly because of external force, and then can play the role of anti-static, protect the mask from static interference when standing and taking and placing.

[0013] The utility model discloses a limiting cylinder, movable slot, limiting sliding rod, limiting head and elastic member are set up, after closing the lid, limiting head inserts the gear tooth under the elastic force of elastic member, realizes the limiting fixed of gear, and then prevents the random movement of the bearing disc and the mask placed on it, provides reliable limiting protection for the mask, avoids the damage of mask because of shaking and collision in the transportation or storage process. ACCURACY OF DRAWINGS

[0014] Fig. 1 It is the schematic diagram of the front view structure of the utility model.

[0015] Fig. 2 It is the schematic diagram of the internal structure of the utility model.

[0016] Fig. 3 It is the schematic diagram of the section structure of the utility model.

[0017] Fig. 4 It is the schematic diagram of the rotatory assembly of the utility model.

[0018] Fig. 5 It is the schematic diagram of the enlarged structure of A of the utility model.

[0019] In the drawing: 1, box body;2, lid;3, hidden handle;4, magnetic attraction strip;5, rotatory assembly;501, limiting column;502, limiting round sheet;503, bearing disc;504, gear;505, knob;6, limiting component;601, limiting cylinder;602, movable slot;603, limiting sliding rod;604, limiting head;605, elastic member. DETAILED DESCRIPTION

[0020] The principles and characteristics of the utility model are described below in combination with the drawings, and the examples are only used to explain the utility model and not to limit the scope of the utility model.

[0021] The embodiment provides a kind of anti-static mask box structure, the utility model discloses through setting rotary component 5, it is convenient to quickly find the mask needed, greatly improve the efficiency of taking and placing mask, by setting box cover 2 and limiting component 6, it can be convenient to limit rotary component 5, and then it can avoid the mask placed randomly movement, by rotary component 5, box cover 2 and the friction risk of limiting component 6 between mutual cooperation, not only avoid the friction risk generated when looking for mask in box, also can avoid the friction risk generated by the mask randomly moving due to external force, and then can play the role of anti-static, protect mask from static interference when standing and taking.

[0022] Referring to Figs. 1-5 An anti-static mask box structure, including box body 1, box body 1 usually adopts the engineering plastics material of good anti-static performance, such as polycarbonate, this material not only has excellent anti-static ability, also has higher strength and toughness, can effectively prevent the rupture of box body 1 when being impacted by external force, provides reliable physical protection for mask, box body 1 is cuboid, its front side is hingedly installed with box cover 2 by high-strength plastic hinge, the hinge rotates smoothly and is durable, can ensure that box cover 2 is still closely attached to box body 1 after being opened and closed multiple times.

[0023] The outer surface of box cover 2 is provided with a hidden handle 3, the hidden handle 3 is designed in a concave manner, and is flush with the surface of the box cover 2 when not in use, which does not affect the overall aesthetic appearance and prevents the handle from being damaged due to collision during transportation or storage. The hidden handle 3 is made of soft rubber, which is comfortable to touch and easy for workers to grip, improving the user experience.

[0024] A magnetic strip 4 is fixedly embedded in the inner wall of the box body 1. The magnetic strip 4 is made of high-performance neodymium iron boron magnet material, which has strong and stable magnetism. When the box cover 2 is closed, the box cover 2 is closely attached to the box body 1, enhancing the overall sealing performance and effectively blocking dust, moisture and other pollutants from entering the box. At the same time, it further reduces the air circulation inside and outside the box, reducing the possibility of static electricity.

[0025] The box body 1 is provided with a rotary component 5.

[0026] The rotary component 5 includes a limiting column 501 rotatably connected to the inner wall of the box body 1. The limiting column 501 is in a cylindrical structure and is made of wear-resistant metal material, such as stainless steel. The surface is finely polished to reduce the friction coefficient with the inner wall of the box body 1, ensuring smooth rotation.

[0027] One end of the limiting column 501 is fixedly connected with a limiting disc 502, the limiting disc 502 is disc-shaped, also made of stainless steel, the outer surface thereof is rotationally connected with the inner wall of the box body 1, plays a role of stably supporting the limiting column 501, prevents the limiting column 501 from deviating in the rotating process, and guarantees the stability of the rotating assembly 5.

[0028] The outer surface of the limiting column 501 is fixedly connected with bearing discs 503 arranged at equal distances, the bearing discs 503 are made of anti-static carbon fiber composite material, such material has the characteristics of light weight, high strength and excellent anti-static performance, the bearing discs 503 are flat disc-shaped, the surface thereof is smooth, can provide a stable placing platform for the mask plate, and reduces the overall weight of the rotating assembly 5 while guaranteeing the bearing capacity, and reduces the energy consumption in rotation.

[0029] The other end of the bearing disc 503 is fixedly connected with a gear 504, the gear 504 is made of high-strength alloy steel material, is treated through processes such as quenching and grinding, has high gear face hardness and high precision, guarantees the accuracy and stability of transmission.

[0030] The outer surface of the gear 504 is fixedly connected with a knob 505, the knob 505 is made of engineering plastic, the surface thereof is provided with anti-slip texture, increases the friction force between the hand of the worker and the knob 505 when the worker operates, and facilitates easy rotation of the knob 505 to control the rotation of the rotating assembly 5.

[0031] The upper portion of the box body 1 is provided with a limiting assembly 6.

[0032] The limiting assembly 6 comprises a limiting cylinder 601 fixedly connected to the outer surface of the box cover 2, the limiting cylinder 601 is cylindrical in structure, is made of light and solid aluminum alloy, guarantees the structural strength and does not increase excessive weight.

[0033] The inside of the limiting cylinder 601 is provided with a movable groove 602, the inner wall of the movable groove 602 is treated through polishing, reduces the friction between the limiting sliding rod 603.

[0034] The inner wall of the movable groove 602 is slidingly connected with a limiting sliding rod 603, the limiting sliding rod 603 is a cylindrical metal rod, is made of stainless steel, the surface thereof is smooth, cooperates accurately with the movable groove 602, and guarantees stability and reliability in the sliding process.

[0035] One end of the limiting sliding rod 603 away from the limiting cylinder 601 is fixedly connected with a limiting head 604, the limiting head 604 is semispherical, is made of metal with high hardness, such as tungsten steel, can tightly cooperate with the teeth of the gear 504, realizes reliable limiting function, the limiting head 604 is inserted with the inside of the gear 504, after the box cover 2 is closed, plays a role of limiting rotation of the gear 504, and further prevents the bearing disc 503 and the mask plate placed thereon from moving at will.

[0036] The elastic member 605 is fixedly connected to the end of the limiting slide rod 603 away from the limiting head 604, is made of high-quality spring steel, is in a spiral shape, has good elasticity and restoring force, and is fixedly connected to the inner wall of the movable groove 602 at the end away from the limiting slide rod 603, thereby providing continuous elastic force for the limiting head 604 when the box cover 2 is closed, enabling the limiting head 604 to be tightly inserted between the teeth of the gear 504 and ensuring the limiting effect.

[0037] Working principle: when the anti-static mask box is used, the box cover 2 is opened by being pulled away from the hidden handle 3, and if the mask is taken out or placed in, the knob 505 is rotated to drive the gear 504 to rotate, thereby enabling the limiting column 501, the bearing disc 503 and the limiting disc 502 to rotate around the inner wall of the box body 1, the bearing disc 503 is rotated to a position convenient for taking out, the mask is taken out through the opening on the front side of the box body 1, and after the taking or placing is completed, the box cover 2 is closed, the magnetic strip 4 enables the box cover 2 to be tightly attached to the box body 1, the limiting head 604 is inserted between the teeth of the gear 504 under the action of the elastic member 605, the limiting of the gear 504 is realized, the bearing disc 503 and the mask placed thereon are prevented from moving at will, the limiting effect of the mask is realized, the sealing and anti-static effects are realized, the mask is prevented from being interfered by static electricity during storage, and problems such as static electricity adsorbing dust, charge accumulation damage and the like are avoided.

[0038] The above only describes the preferred embodiments of the utility model and is not used to limit the utility model, any modification, equivalent replacement, improvement and the like made within the spirit and principle of the utility model should be included in the protection scope of the utility model.

Claims

1. An anti-static mask box structure, comprising a box body (1), characterized in that: The front side of the box body (1) is hingedly installed with a box cover (2), the outer surface of the box cover (2) is provided with a hidden handle (3), the inner wall of the box body (1) is fixedly embedded with a magnetic strip (4), the inside of the box body (1) is provided with a rotating assembly (5), and the upper portion of the box body (1) is provided with a limiting assembly (6).

2. The anti-static mask box structure according to claim 1, wherein: The rotating assembly (5) comprises a limiting column (501) rotatably connected to the inner wall of the box body (1), one end of the limiting column (501) is fixedly connected with a limiting disc (502), and the outer surface of the limiting disc (502) is rotatably connected with the inner wall of the box body (1).

3. The anti-static mask box structure according to claim 2, wherein: The outer surface of the limiting column (501) is fixedly connected with bearing discs (503) arranged at equal distances, the other end of the bearing disc (503) is fixedly connected with a gear (504), and the outer surface of the gear (504) is fixedly connected with a knob (505).

4. The anti-static mask box structure according to claim 1, wherein: The limiting assembly (6) comprises a limiting cylinder (601) fixedly connected to the outer surface of the box cover (2), and the inside of the limiting cylinder (601) is provided with a movable slot (602).

5. The anti-static mask box structure according to claim 4, wherein: The inner wall of the movable slot (602) is slidably connected with a limiting slide rod (603), one end of the limiting slide rod (603) away from the limiting cylinder (601) is fixedly connected with a limiting head (604), and the limiting head (604) is inserted into the inside of the gear (504).

6. The anti-static mask box structure according to claim 5, wherein: One end of the limiting slide rod (603) away from the limiting head (604) is fixedly connected with an elastic member (605), and one end of the elastic member (605) away from the limiting slide rod (603) is fixedly connected with the inner wall of the movable slot (602).

Images