Ceramic disc feeding and discharging device

Abstract

The utility model discloses a ceramic plate feeding and discharging device which comprises a placing unit and a taking and placing unit, the placing unit comprises a frame, and a plurality of layers of supporting plates are arranged in the frame in the height direction; the taking and placing unit comprises a base mechanism, a lifting mechanism, a rotating mechanism and a discharging mechanism, the lifting mechanism is connected to the base mechanism, the rotating mechanism is installed on the lifting mechanism, the discharging mechanism is connected to the rotating mechanism, the discharging mechanism is provided with a suction cup hand moving along a straight line, and the suction cup hand is used for moving ceramic plates. The function of centralized storage of ceramic plates is achieved through the containing unit, the suction cup hand stretches into the containing unit to suck and lift empty plates, then the lifting mechanism, the rotating mechanism and the discharging mechanism are matched, the suction cup hand is driven to send the empty plates into a station of the next procedure, and full plates are taken back and sent back to the containing unit to be stored. And therefore, the storage and moving operations of the ceramic plates are realized.

Description

TECHNICAL FIELD

[0001] The utility model relates to wafer processing equipment technical field, especially a ceramic disc feeding and discharging device. BACKGROUND

[0002] The wax coating process refers to coating wax on the wafer surface to form a bonding layer, and then the wafer is flipped through the patching process, so that the side with glue can be accurately attached to the ceramic disc. Among them, the ceramic disc as the carrier of the wafer has an important influence on the efficient collection and pick-and-place of the wafer for subsequent processing, so it is necessary to design a device for wafer collection and pick-and-place. SUMMARY

[0003] The embodiment of the application provides a ceramic disc feeding and discharging device to solve the problem of centralized storage and movement of wafers.

[0004] The embodiment of the application provides a ceramic disc feeding and discharging device, which comprises:

[0005] The placing unit comprises a frame, the frame has a plurality of support plates in the height direction, and the support plates are used for positioning and supporting the ceramic disc.

[0006] The pick-and-place unit comprises:

[0007] The base mechanism;

[0008] The lifting mechanism is connected to the base mechanism, and the base mechanism is used to drive the lifting mechanism to move linearly in the transverse direction.

[0009] The rotating mechanism is installed on the lifting mechanism, and the lifting mechanism is used to drive the rotating mechanism to move vertically.

[0010] The discharging mechanism is connected to the rotating mechanism, the rotating mechanism is used to drive the discharging mechanism to rotate, the discharging mechanism has a suction hand moving linearly, and the suction hand is used to move the ceramic disc.

[0011] The above embodiment has the beneficial effects that the placing unit realizes the function of centralized storage of the ceramic disc, the suction hand extends into the placing unit to adsorb and lift the empty disc, and then the lifting mechanism, the rotating mechanism and the discharging mechanism cooperate to send the ceramic disc into the next process station through the suction hand, and the full disc is picked up and sent into the placing unit for storage, thereby realizing the storage and pick-and-place operation of the ceramic disc.

[0012] On the basis of the above embodiment, the embodiment of the application can also be improved as follows:

[0013] In one of the embodiments of the present application, the placing unit further comprises a loading platform and a displacement mechanism, the frames are arranged side by side on the loading platform, and the displacement mechanism is used to drive the movement of the loading platform and to move the frames to the front of the taking and placing unit. The above-mentioned embodiment has the beneficial effect that more ceramic plates can be placed in a concentrated manner by the multiple frames, and the frames are moved to the front of the taking and placing unit in sequence by the displacement mechanism, thereby facilitating the improvement of the taking and placing efficiency of the ceramic plates.

[0014] In one of the embodiments of the present application, the displacement mechanism comprises a first driving device and a first guide device, the first driving device and the first guide device are connected with the loading platform and are used to drive the linear movement of the loading platform in the horizontal direction. The above-mentioned embodiment has the beneficial effect that the linear movement of the frames in the horizontal direction is realized by the cooperation of the first driving device and the first guide device.

[0015] In one of the embodiments of the present application, the base mechanism comprises a base, a second driving device and a second guide device, the second driving device and the second guide device are arranged between the base and the lifting mechanism, and the second driving device and the second guide device are used to drive the linear movement of the lifting mechanism in the horizontal direction. The above-mentioned embodiment has the beneficial effect that the linear movement of the lifting mechanism in the horizontal direction is realized by the cooperation of the second driving device and the second guide device.

[0016] In one of the embodiments of the present application, the lifting mechanism comprises a bottom plate, a third driving device and a third guide device, the bottom plate is connected with the base mechanism, the third driving device and the third guide device are arranged between the bottom plate and the rotating mechanism, and the third driving device and the third guide device are used to drive the vertical movement of the rotating mechanism. The above-mentioned embodiment has the beneficial effect that the vertical movement of the lifting assembly is realized by the cooperation of the third driving device and the third guide device.

[0017] In one of the embodiments of the present application, the rotating mechanism comprises a lifting table and a hollow rotating platform, the lifting table is connected with the lifting mechanism, the hollow rotating platform is installed on the lifting table, and the discharging mechanism is installed on the hollow rotating platform. The above-mentioned embodiment has the beneficial effect that the ceramic plates are driven to rotate by the hollow rotating platform and the suction cups.

[0018] In one of the embodiments of the present application: the discharging mechanism further comprises: a first platform, a fourth driving device, a fourth guide device, a second platform, a fifth driving device, a fifth guide device, the first platform is connected to the rotating mechanism, the fourth driving device and the fourth guide device are arranged between the second platform and the first platform, the fourth driving device and the fourth guide device are used for driving the second platform to move linearly in the horizontal direction, the fifth driving device and the fifth guide device are arranged between the suction hand and the second platform, and the fifth driving device and the fifth guide device are used for driving the suction hand to move linearly in the horizontal direction. The beneficial effect of the present application is that the suction hand is realized to enter and discharge materials through the discharging mechanism. BRIEF DESCRIPTION OF DRAWINGS

[0019] In order to more clearly illustrate the specific embodiments of the present application or the technical solutions in the prior art, the drawings required to be used in the specific embodiments or the prior art description will be briefly introduced below. In all the drawings, similar elements or parts are generally identified by similar reference numerals. In the drawings, the elements or parts are not necessarily drawn according to the actual scale.

[0020] Figure 1 It is a structure schematic view of the ceramic disc feeding and discharging device.

[0021] Figure 2 It is a partial structure schematic view of the placing unit.

[0022] Figure 3 It is a structure schematic view of the taking and placing unit.

[0023] Figure 4 It is a partial structure schematic view of the rotating mechanism.

[0024] Figure 5 It is a partial structure schematic view of the discharging mechanism.

[0025] Figure 6 It is a partial structure schematic view of the discharging mechanism.

[0026] Among them, 1 is a placing unit, 101 is a support plate, 102 is a loading platform, 103 is a first driving device, 104 is a first guide device, 105 is a workbench.

[0027] 2 is a taking and placing unit, 201 is a base mechanism, 202 is a lifting mechanism, 203 is a rotating mechanism, 204 is a discharging mechanism, 205 is a suction hand, 206 is a base, 207 is a second driving device, 208 is a second guide device, 209 is a bottom plate, 210 is a third driving device, 211 is a third guide device, 212 is a top plate, 213 is a lifting table, 214 is a hollow rotating platform, 215 is a first platform, 216 is a fourth driving device, 217 is a fourth guide device, 218 is a second platform, 219 is a fifth driving device, and 220 is a fifth guide device. DETAILED DESCRIPTION

[0028] In the present application, unless otherwise explicitly specified and limited, the terms in the present application should be understood in a broad sense, for example, the connection can be fixed connection, or detachable connection or integral, can be directly connected, or indirectly connected through intermediate medium. If it involves power, electronic equipment, it can also be electrically connected or communication signal connection, etc. For ordinary skilled in the art, different terms in the present application can be understood according to the specific meaning, and the scope of the specific meaning should be limited to the function of the present application.

[0029] In the description of the present application, it should be understood that the orientation terms or position relationship description is based on the orientation or position relationship shown in the drawings, or based on the orientation or position relationship in actual use, only for the convenience of describing the content of the present application and simplifying the description, and is not intended to indicate or imply that the device or element must have a specific orientation, structure and operation, therefore it cannot be understood as a limitation of the present application.

[0030] As shown in Figures 1-6 A ceramic disc feeding and discharging device, comprising: a placing unit 1, a taking and placing unit 2, the placing unit 1 comprising a frame, the frame having a plurality of support plates 101 in the height direction, the support plates 101 being used for positioning and supporting ceramic discs; the taking and placing unit 2 comprising: a base mechanism 201, a lifting mechanism 202, a rotating mechanism 203, a discharging mechanism 204, the lifting mechanism 202 being connected to the base mechanism 201, the base mechanism 201 being used for driving the lifting mechanism 202 to move linearly in the transverse direction, the rotating mechanism 203 being installed on the lifting mechanism 202, the lifting mechanism 202 being used for driving the rotating mechanism 203 to move in the vertical direction, the discharging mechanism 204 being connected to the rotating mechanism 203, the rotating mechanism 203 being used for driving the discharging mechanism 204 to rotate, the discharging mechanism 204 having a suction hand 205 moving linearly, the suction hand 205 being used for moving the ceramic disc.

[0031] Specifically, as shown in Figure 1 , 2 The placing unit 1 further comprises: a loading platform 102, a displacement mechanism, a plurality of frames are arranged side by side on the loading platform 102, and the displacement mechanism is used for driving the loading platform 102 to move and moving the frames to the front of the taking and placing unit 2. More ceramic discs can be placed by the plurality of frames, and the frames are moved to the front of the taking and placing unit 2 in turn by the displacement mechanism, so as to improve the taking and placing efficiency of the ceramic discs.

[0032] Specifically, as shown in Figure 2As shown, the displacement mechanism comprises: a first driving device 103, a first guide device 104, the first driving device 103 and the first guide device 104 are connected with the loading platform 102 and are used to drive the loading platform 102 to move linearly in the horizontal direction. Through the cooperation of the first driving device 103 and the first guide device 104, the function of the frame moving linearly in the horizontal direction is realized.

[0033] Specifically, as shown in Figure 1 , 2 The placing unit 1 further comprises: a workbench 105, the displacement mechanism is installed on the workbench 105, and the frame is connected to the displacement mechanism; the first driving device 103 comprises: a first motor, a first lead screw, and a first nut, the first motor is installed on the workbench 105, the first lead screw is rotatably installed on the workbench 105, the first nut is in threaded connection with the first lead screw, and the first nut is installed on the bottom surface of the loading platform 102; the first guide device 104 comprises: a first guide rail and a first sliding block, the first guide rail is installed on the workbench 105, the first sliding block is installed on the loading platform 102, and the first sliding block is slidingly arranged on the first guide rail; the support plate 101 is a left-right symmetrical structure, and the surface of the support plate 101 is provided with a positioning column, the support plates 101 at the same layer have four positioning columns, and the positioning columns are used for positioning the outer periphery of the ceramic disc.

[0034] Specifically, as shown in Figure 3 The base mechanism 201 comprises: a base 206, a second driving device 207, and a second guide device 208, the second driving device 207 and the second guide device 208 are arranged between the base 206 and the lifting mechanism 202, and the second driving device 207 and the second guide device 208 are used to drive the lifting mechanism 202 to move linearly in the horizontal direction. Through the cooperation of the second driving device 207 and the second guide device 208, the function of the lifting mechanism 202 moving linearly in the horizontal direction is realized.

[0035] Specifically, as shown in Figure 3 The second driving device 207 comprises: a second motor, a second lead screw, and a second nut, the second motor is installed on the base 206, the second lead screw is rotatably arranged on the base 206 and connected with the output shaft of the second motor, the second nut is in threaded connection with the second lead screw, and the second nut is further connected with the lifting mechanism 202; the second guide device 208 comprises: a second guide rail and a second sliding block, the second guide rail is connected to the base 206, and the second sliding block is connected to the lifting mechanism 202 and slidingly arranged on the second guide rail.

[0036] Specifically, as shown in Figure 3As shown in the figure, the lifting mechanism 202 comprises a base plate 209, a third driving device 210, and a third guide device 211. The base plate 209 is connected to the base mechanism 201. The third driving device 210 and the third guide device 211 are arranged between the base plate 209 and the rotating mechanism 203. The third driving device 210 and the third guide device 211 are used to drive the rotating mechanism 203 to move vertically. Through the cooperation of the third driving device 210 and the third guide device 211, the function of the rotating mechanism 203 moving in the height direction is realized.

[0037] Specifically, as shown in the figure, Figure 3 The base plate 209 is connected to the second sliding block and the second nut. The lifting mechanism 202 further comprises a top plate 212. The third guide device 211 comprises a guide rod and a guide sleeve. The lower end of the guide rod is connected to the base plate 209, and the upper end is connected to the top plate 212. The guide sleeve is connected to the rotating mechanism 203 and is slidably sleeved on the guide column. The guide sleeve adopts a linear bearing. The third driving device 210 comprises a third motor, a third synchronous pulley, a third synchronous belt, a third lead screw, and a third nut. The third motor is connected to the base plate 209. The lower end of the third lead screw is connected to the base plate 209, and the upper end is connected to the top plate 212. The output shaft of the third motor is provided with the third synchronous pulley. The third synchronous belt is wound around the third synchronous pulley. The third nut is connected to the rotating mechanism 203 and is threadedly connected with the third lead screw.

[0038] Specifically, as shown in the figure, Figure 3 , 4 The rotating mechanism 203 comprises a lifting platform 213 and a hollow rotating platform 214. The lifting platform 213 is connected to the lifting mechanism 202. The guide sleeve and the third nut are both mounted on the lifting platform 213. The hollow rotating platform 214 is mounted on the lifting platform 213. The discharge mechanism 204 is mounted on the hollow rotating platform 214. The hollow rotating platform 214 drives the suction hand 205 to drive the ceramic disc to rotate.

[0039] Specifically, as shown in the figure, Figure 5 , 6 The discharge mechanism 204 further comprises a first platform 215, a fourth driving device 216, a fourth guide device 217, a second platform 218, a fifth driving device 219, and a fifth guide device 220. The first platform 215 is connected to the rotating mechanism 203. The fourth driving device 216 and the fourth guide device 217 are arranged between the second platform 218 and the first platform 215. The fourth driving device 216 and the fourth guide device 217 are used to drive the second platform 218 to move linearly in the horizontal direction. The fifth driving device 219 and the fifth guide device 220 are arranged between the suction hand 205 and the second platform 218. The fifth driving device 219 and the fifth guide device 220 are used to drive the suction hand 205 to move linearly in the horizontal direction. Through the discharge mechanism 204, the action of the suction hand 205 feeding and discharging is realized.

[0040] Specifically, as shown in Figure 5 The fourth driving device 216 includes a fourth motor, a fourth synchronous pulley, a fourth synchronous belt, and a fourth moving block. The fourth motor is installed on the first platform 215. The output shaft of the fourth motor is installed with the fourth synchronous pulley on the first platform 215. The fourth synchronous belt is wound around the fourth synchronous pulley. The fourth moving block includes an upper block body and a lower block body. The upper block body and the lower block body are respectively located on the upper and lower sides of the fourth synchronous belt and are connected by bolts, so that the fourth synchronous belt is clamped in the fourth moving block. The fourth moving block is connected with the second platform 218. The fourth guide device 217 includes a fourth guide rail and a fourth sliding block. The fourth guide rail is connected to the first platform 215. The fourth sliding block is connected to the second platform 218. The fourth sliding block is slidingly arranged on the fourth guide rail.

[0041] Specifically, as shown in Figure 6 The fifth driving device 219 includes a linkage block, a fifth synchronous pulley, a fifth synchronous belt, and a fifth moving block. The fifth synchronous pulley has two and is rotatably installed on the side surface of the second platform 218. The fifth synchronous belt is wound around the fifth synchronous pulley. The linkage block is fixedly connected with the lower side of the fifth synchronous belt and the first platform 215. The fifth moving block is fixedly connected with the upper side of the fifth synchronous belt and the second platform 218. The fifth guide device 220 includes a fifth guide rail and a fifth sliding block. The fifth guide rail is connected to the suction hand 205. The fifth sliding block is connected to the second platform 218. The fifth sliding block is slidingly arranged on the fifth guide rail.

[0042] Specifically, as shown in Figure 6 The suction hand 205 includes a plate body and four suction cups. The plate body is installed with the fifth guide rail on both sides. The fifth sliding block is connected to the second platform 218. The fifth guide rail is slidingly inserted into the fifth sliding block. The suction cups are connected to the surface of the plate body. The suction cups are connected with the negative pressure pipeline. When the suction cups are attached to the bottom surface of the ceramic disc, the negative pressure pipeline generates negative pressure to remove the gas in the suction cups, thereby stably positioning the ceramic disc on the suction hand 205.

[0043] The ceramic disc feeding and discharging device in work, empty ceramic disc is placed on the support plate 101, a frame is driven by the displacement mechanism to move to the front of the taking and placing unit 2, the height position of the suction hand 205 is controlled by the lifting mechanism 202, the suction hand 205 is controlled to move into the front of an empty ceramic disc by the discharging mechanism 204 and the suction hand 205 is contacted with the ceramic disc, the empty disc is adsorbed on the suction hand 205 by the suction disc negative pressure, the ceramic disc is lifted to the above of the positioning column by the lifting mechanism 202, the suction hand 205 is controlled to retract to the above of the hollow rotating platform 214 by the discharging mechanism 204, the hollow rotating platform 214 drives the empty disc to rotate, the base mechanism 201 drives the empty disc to displace, the suction hand 205 is controlled to rotate and align the work station of the next process by the rotating mechanism 203, and the suction hand 205 is controlled to move to the work station by the feeding mechanism, and the empty disc is received by the equipment of the next process; when the ceramic disc is full of the wafer coated with wax, the ceramic disc is in the full disc state, the full disc is adsorbed and lifted by the suction hand 205 and is recycled, and then is sent to the above of the support plate 101 without ceramic disc in the frame, the ceramic disc is controlled to descend to contact with the support plate 101 by the lifting mechanism 202, the suction disc is separated from the ceramic disc, the suction hand 205 is lowered and retracted to the taking and placing unit 2, so that the taking and placing work of the ceramic disc is completed.

[0044] The above is only the embodiment of the present application, and the specific structure and characteristics of the scheme and the like are not described in detail, the ordinary technical personnel in the art knows all the ordinary technical knowledge in the technical field of the present application before the application date or the priority date, can know all the prior art in the field and has the ability to apply the conventional experimental means before the date, the ordinary technical personnel in the art can improve and implement the scheme under the inspiration of the present application, some typical known structures or known methods should not be the obstacle for the ordinary technical personnel to implement the present application. It should be pointed out that, for the technical personnel in the art, without departing from the structure of the present application, a number of deformations and improvements can be made, which should also be considered as the protection scope of the present application, which will not affect the effect and practicality of the present application.

Claims

1. A ceramic disc in-out feed device, characterized by, The application relates to a ceramic plate placing device. The placing unit comprises a frame, a plurality of layers of support plates are arranged in the frame along a height direction, and the support plates are used for positioning and supporting ceramic plates. The taking and placing unit comprises: A base mechanism; A lifting mechanism connected to the base mechanism, the base mechanism being used for driving the lifting mechanism to move linearly in a horizontal direction; A rotating mechanism mounted on the lifting mechanism, the lifting mechanism being used for driving the rotating mechanism to move vertically; A discharging mechanism connected to the rotating mechanism, the rotating mechanism being used for driving the discharging mechanism to rotate, and the discharging mechanism having a suction hand moving linearly and being used for moving ceramic plates.

2. The ceramic disc in-out feed device according to claim 1, characterized in that, The placing unit further comprises a loading platform, a plurality of frames are arranged on the loading platform in parallel, and a displacement mechanism is used for driving the loading platform to move and enabling the frames to move to the front of the taking and placing unit.

3. The ceramic disc in-out feed device according to claim 2, characterized in that, The displacement mechanism comprises first driving devices and first guide devices, the first driving devices and the first guide devices being connected to the loading platform and being used for driving the loading platform to move linearly in a horizontal direction.

4. The ceramic disc in-out feed device according to claim 1, wherein, The base mechanism comprises a base, second driving devices and second guide devices, the second driving devices and the second guide devices being arranged between the base and the lifting mechanism, and the second driving devices and the second guide devices being used for driving the lifting mechanism to move linearly in a horizontal direction.

5. The ceramic disc in-out feed apparatus according to claim 1, wherein, The lifting mechanism comprises a bottom plate, third driving devices and third guide devices, the bottom plate being connected to the base mechanism, the third driving devices and the third guide devices being arranged between the bottom plate and the rotating mechanism, and the third driving devices and the third guide devices being used for driving the rotating mechanism to move vertically.

6. The ceramic disc in-out feed apparatus according to claim 1, wherein The rotating mechanism comprises a lifting table and a hollow rotating platform, the lifting table being connected to the lifting mechanism, the hollow rotating platform being mounted on the lifting table, and the discharging mechanism being mounted on the hollow rotating platform.

7. The ceramic disc handling apparatus of claim 1, wherein, The discharging mechanism further comprises a first platform, fourth driving devices and fourth guide devices, a second platform, fifth driving devices and fifth guide devices, the first platform being connected to the rotating mechanism, the fourth driving devices and the fourth guide devices being arranged between the second platform and the first platform, the fourth driving devices and the fourth guide devices being used for driving the second platform to move linearly in a horizontal direction, and the fifth driving devices and the fifth guide devices being arranged between the suction hand and the second platform, the fifth driving devices and the fifth guide devices being used for driving the suction hand to move linearly in a horizontal direction.

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