Substrate anti-deformation type film pasting jig

By designing a substrate deformation-resistant film-applying fixture, and using square rubber sealing strips and positioning components, the problems of substrate deformation and sealing structure complexity are solved, achieving a low-cost, highly compatible substrate film-applying process.

CN223744999UActive Publication Date: 2025-12-30SUZHOU SILICON MICROELECTRONICS TECH CO LTD
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Patent Information

Application Number
CN202423267139.0
Authority / Receiving Office
CN · China
Patent Type
Utility models(China)
Current Assignee / Owner
Filing Date
2024-12-30
Publication Date
2025-12-30
Estimated Expiration
2034-12-30

AI Technical Summary

Technical Problem

Existing substrate lamination fixtures are prone to substrate deformation during vacuum adsorption, and the sealing structure requires separate molding and rubber casting, resulting in long processing cycles and high costs, and cannot adapt to changes in substrate shape.

Method used

A substrate deformation-resistant film-applying fixture was designed, which uses a square rubber sealing strip and positioning components, combined with a support device, to achieve convenient installation and adapt to various substrate shapes. The support and positioning prevent deformation and improve airtightness.

Benefits of technology

It reduces manufacturing and maintenance costs, improves equipment compatibility and airtightness, simplifies the manufacturing process, and adapts to different substrate shapes.

✦ Generated by Eureka AI based on patent content.

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Abstract

The utility model relates to a substrate anti-deformation type film pasting jig which comprises a mounting base, a placing base body is arranged on the mounting base, positioning spaces are distributed in the placing base body, a sealing mechanism is arranged at the position, located on the edge of the positioning spaces, of the placing base body, and a positioning assembly is arranged at the position, located above the sealing mechanism, of the placing base body. A plurality of supporting devices are distributed in the positioning space, and a plurality of adsorption channels are distributed on the placing base body. Therefore, the square rubber sealing strip is adopted, the installation is convenient and fast, a complicated rubber casting process is not needed, and the manufacturing and maintenance cost is reduced. And by replacing a square rubber sealing strip, the device can adapt to various conventional substrate shapes, adsorption assistance is carried out, and the universality is good. The positioning assembly is adopted to participate in positioning of the sealing mechanism, proper clamping or pressing combination can be achieved, and the air tightness in the using period is improved.
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Description

TECHNICAL FIELD

[0001] The utility model relates to a vacuum adsorption jig, especially to a substrate anti-deformation type film pasting jig. BACKGROUND

[0002] For the preparation and processing of the substrate, there is a planar or semi-enclosed film pasting process. During this period, the substrate is adsorbed and positioned by a vacuum adsorption jig. Therefore, the accurate positioning of the substrate is related to the final precision and quality of the film pasting.

[0003] In order to avoid displacement of the substrate during film pasting, a larger negative pressure suction force is often provided. In this way, the substrate near the adsorption port is subjected to excessive stress, resulting in abnormal deformation and affecting the film pasting effect.

[0004] At the same time, the sealing requirement of the adsorption process for the substrate bonding position is high. At present, the conventional sealing auxiliary method is to send the prepared jig to a rubber factory to distribute rubber structures for sealing at the corresponding positions of the jig by pouring rubber.

[0005] However, this rubber structure needs to be separately opened for pouring rubber. As a result, the processing cycle is long, and the manufacturing cost is high. Moreover, once the substrate model or shape changes, the current jig cannot be adapted, and must be re-manufactured, increasing the cost of substrate processing.

[0006] In view of the above-mentioned defects, the present design person actively researches and innovates to create a substrate anti-deformation type film pasting jig, so that it has more industrial utilization value. CONTENT OF THE UTILITY MODEL

[0007] To solve the above technical problems, the purpose of the utility model is to provide a substrate anti-deformation type film pasting jig.

[0008] The substrate anti-deformation type film pasting jig of the utility model comprises a mounting base, wherein: a placing base is arranged on the mounting base, a positioning space is distributed in the placing base, a sealing mechanism is mounted on the edge of the placing base in the positioning space, a positioning assembly is mounted above the sealing mechanism of the placing base, a plurality of supporting devices are distributed in the positioning space, and a plurality of adsorption channels are distributed on the placing base.

[0009] Further, the substrate anti-deformation type film pasting jig described above, wherein the edge of the placing base in the positioning space is provided with a receiving groove, the sealing mechanism is embedded in the receiving groove, and the upper surface of the sealing mechanism is in contact with the positioning assembly.

[0010] Further, the substrate deformation-resistant film pasting jig, wherein the positioning assembly is a guide pressing plate, the guide pressing plate is connected with the placing base through a screw, and a placing reserved opening is formed in the guide pressing plate.

[0011] Further, the substrate deformation-resistant film pasting jig, wherein the edge of the placing reserved opening is provided with a circular arc chamfer.

[0012] Further, the substrate deformation-resistant film pasting jig, wherein the sealing mechanism is a square rubber sealing strip.

[0013] Further, the substrate deformation-resistant film pasting jig, wherein the upper surface of the square rubber sealing strip is provided with a convex contact structure.

[0014] Further, the substrate deformation-resistant film pasting jig, wherein the supporting device is a supporting column, or the supporting device is a supporting block.

[0015] Further, the substrate deformation-resistant film pasting jig, wherein the positioning space is provided with a displacement slot.

[0016] Further, the substrate deformation-resistant film pasting jig, wherein the side end of the mounting base is provided with a hanging hole.

[0017] Through the above scheme, the substrate deformation-resistant film pasting jig has at least the following advantages:

[0018] 1. The square rubber sealing strip is adopted, and the mounting is convenient, without complicated casting rubber process, so that the manufacturing and maintenance costs are reduced.

[0019] 2. By replacing the square rubber sealing strip, various conventional substrate shapes can be adapted, and adsorption assistance can be performed, and the universality is good.

[0020] 3. The positioning assembly is used to participate in the positioning of the sealing mechanism, so that appropriate clamping or pressing combination can be realized, and the air tightness during use is improved.

[0021] 4. The overall structure is simple, easy to manufacture and use, and can adapt to the current conventional adsorption pipeline layout.

[0022] The above description is only a summary of the technical scheme of the substrate deformation-resistant film pasting jig, in order to more clearly understand the technical means of the substrate deformation-resistant film pasting jig, and the substrate deformation-resistant film pasting jig can be implemented according to the content of the description. The following is a detailed description of the preferred embodiments of the substrate deformation-resistant film pasting jig in combination with the drawings. BRIEF DESCRIPTION OF DRAWINGS

[0023] Figure 1 is a structural schematic view of the substrate deformation-resistant film pasting jig.

[0024] The meanings of the reference signs in the drawings are as follows.

[0025] 1 mounting base 2 placing base

[0026] 3 positioning space 4 sealing mechanism

[0027] 5 positioning assembly 6 supporting device

[0028] 7 yielding slot 8 adsorption channel

[0029] 9 hanging hole DETAILED DESCRIPTION

[0030] The specific embodiments of the utility model will be further described in detail below in combination with the drawings and examples. The following examples are used to illustrate the utility model, but not to limit the scope of the utility model.

[0031] As Figure 1 The substrate anti-deformation type film pasting jig, including mounting base 1, it is different from the fact that: mounting base 1 is provided with placing base 2, placing base 2 is distributed with several adsorption channels 8, and placing base 2 is distributed with positioning space 3, for carrying substrate, after starting vacuum device, it is adsorbed. At the same time, placing base 2 is installed with sealing mechanism 4 at the edge of positioning space 3, avoid the gap of substrate and the edge of positioning space 3, influence vacuum adsorption effect. And, placing base 2 is installed with positioning assembly 5 above sealing mechanism 4, can position sealing mechanism 4, avoid its loosening. During implementation, several supporting devices 6 are distributed in positioning space 3. In this way, the proper lifting of the substrate below can be realized, avoiding the abnormal deformation of the lower part of the substrate, especially the part close to the adsorption channel 8, under excessive negative pressure adsorption, ensuring that the film can be effectively attached to the substrate except the lower part during film pasting, avoiding defects such as film lifting or wrinkling due to deformation.

[0032] In combination with a preferred embodiment of the utility model, placing base 2 is provided with a receiving groove at the edge of positioning space 3, sealing mechanism 4 is embedded in the receiving groove, and the upper surface of sealing mechanism 4 is in contact with positioning assembly 5. In this way, sealing mechanism 4 can be effectively limited, and there is no loosening in contact with the base. At the same time, it also will not loosen from the edge of positioning space 3 when subjected to negative pressure adsorption.

[0033] Further, positioning assembly 5 is a guide pressing plate, the guide pressing plate is screw-connected with placing base 2, and a placing reserved opening is formed in the guide pressing plate. In this way, the guide pressing plate can be effectively buckled above sealing mechanism 4 by using the similar mouth-shaped structure, and is connected with placing base 2, so as to achieve moderate clamping and limiting of sealing mechanism 4. At the same time, the edge of the placing reserved opening is distributed with a circular arc chamfer.

[0034] In combination with actual implementation, the sealing mechanism 4 is a square rubber sealing strip, which can be distributed according to the shape of the positioning space 3. Meanwhile, in order to meet the needs of some special sealing contact, the upper surface of the square rubber sealing strip extends a convex contact structure. In this way, after the substrate is placed, the square rubber sealing strip can completely fit the adsorption range below the substrate, and air leakage will not occur. If the shape of the substrate changes, only the same matching square rubber sealing strip needs to be replaced, which greatly reduces the use cost and improves the compatibility of the entire device. If the shape changes too much, the corresponding placing base 2 can be reconfigured.

[0035] Further, the support device 6 is a support column or a support block. In order to meet the flexible contact and not scratch the surface of the substrate in the local position of the support substrate, the support device 6 is made of a high polymer material, and the material has a suitable softness.

[0036] Meanwhile, in order to achieve a more fitted bottom storage and avoid the side edge from being raised to affect the air tightness during adsorption, the utility model is distributed with a give-way slot 7 in the positioning space 3.

[0037] Further, a hanging hole 9 can be provided at the side end of the mounting base 1. In this way, when the adsorption pipeline is laid out, various pipeline positioning supports can be installed through the hanging hole 9. The installation of the adsorption pipeline is a known technology in the art, and will not be repeated here.

[0038] The working principle of the utility model is as follows:

[0039] The substrate is placed in the positioning space 3, and the lower end protruding part is stored in the give-way slot 7. Then, the placing frame amount of the substrate is slightly adjusted, so that the edge is fitted by the sealing mechanism 4.

[0040] Next, the vacuum device is started to meet the adsorption positioning of the substrate of the utility model. Then, the corresponding film bonding processing can be carried out.

[0041] Through the above description and in combination with the drawings, it can be seen that after the utility model is adopted, the following advantages are obtained:

[0042] 1. The square rubber sealing strip is used, which is convenient to install and does not need complicated rubber casting process, thereby reducing the manufacturing and maintenance cost.

[0043] 2. By replacing the square rubber sealing strip, various conventional substrate shapes can be adapted for adsorption assistance, and the versatility is good.

[0044] 3. The positioning assembly is used to participate in the positioning of the sealing mechanism, which can realize appropriate clamping or pressing combination, and improve the air tightness during use.

[0045] 4. The whole structure is simple, easy to manufacture and use, and can be adapted to the current conventional adsorption pipe layout.

[0046] In addition, the indicated direction or position relationship described in the utility model is based on the direction or position relationship shown in the drawings, and is only for the convenience of describing the utility model and simplifying the description, and is not indicative or suggestive of the device or structure indicated must have a specific direction, or be operated in a specific direction, and therefore cannot be understood as a limitation on the utility model.

[0047] The above is only the preferred embodiment of the utility model, and is not used to limit the utility model, and it should be pointed out that, for ordinary skilled persons in the technical field, without departing from the technical principles of the utility model, a number of improvements and modifications can be made, and these improvements and modifications should be regarded as the protection scope of the utility model.

Claims

1. A substrate deformation-resistant film pasting jig comprising a mounting base, characterized in that: The mounting base is provided with a placing base body, the placing base body is provided with a positioning space, a sealing mechanism is mounted on the edge of the positioning space, a positioning assembly is mounted above the sealing mechanism, a plurality of supporting devices are distributed in the positioning space, and a plurality of adsorption channels are distributed on the placing base body.

2. The substrate deformation-resistant film pasting jig according to claim 1, wherein: The edge of the placing base body is provided with a receiving groove, the sealing mechanism is embedded in the receiving groove, and the upper surface of the sealing mechanism is in contact with the positioning assembly.

3. The substrate deformation-resistant film pasting jig according to claim 1, wherein: The positioning assembly is a guide pressing plate, the guide pressing plate is screw-connected with the placing base body, and the guide pressing plate is provided with a placing reserved opening.

4. The substrate deformation-resistant film pasting jig according to claim 3, wherein: The edge of the placing reserved opening is provided with a circular arc chamfer.

5. The substrate deformation-resistant film pasting jig according to claim 1, wherein: The sealing mechanism is a square rubber sealing strip.

6. The substrate deformation-resistant film pasting jig according to claim 5, wherein: The upper surface of the square rubber sealing strip extends a convex contact structure.

7. The substrate deformation-resistant film pasting jig according to claim 1, wherein: The supporting device is a supporting column or a supporting block.

8. The substrate deformation-resistant film pasting jig according to claim 1, wherein: The positioning space is provided with a giving slot.

9. The substrate deformation-resistant film pasting jig according to claim 1, wherein: The side end of the mounting base is provided with a hanging hole.