Chemical liquid refined filtration equipment

Abstract

The utility model provides chemical liquid refined filtration equipment, and relates to the technical field of chemical equipment. Three groups of brackets are fixed on the bottom plate, a filtering tank is mounted at the upper ends of the three groups of brackets, the filtering tank is made of a stainless steel material, a left end head and a right end head are respectively fixed at the left end and the right end of the filtering tank, a thread is arranged on the left end head, and an end cover is screwed on the left end head through the thread; according to the utility model, chemical liquid sequentially flows through the filter cartridge and the fiber filter layer, and the filter cartridge can effectively intercept large-particle impurities, so that the primary purification of the liquid is realized; the fiber filtering layer can further filter out small particles and part of colloidal substances, and the purity of the chemical liquid is remarkably improved; the dust sensor can accurately monitor the concentration of dust in the tank in real time, when the concentration reaches a preset value, the flushing pipe is started to flush the interior of the tank, accumulated impurities are removed in time, and the filtering effect is guaranteed; and the filter membrane can deeply filter the flushing water to ensure that the recycled flushing water reaches the cleaning standard.

Description

Technical Field

[0001] This utility model relates to the field of chemical equipment technology, and in particular to a chemical liquid fine filtration device. Background Technology

[0002] With the continuous development of the chemical industry, the purity and quality standards for chemical products are becoming increasingly stringent. The production of many high-end chemical products, such as electronic-grade chemicals and pharmaceutical intermediates, requires extremely high purity of the raw material liquids. Even minute amounts of impurities can affect the performance, purity, and stability of the product, leading to substandard quality and failure to meet market demands. For example, ultrapure chemical reagents used in semiconductor manufacturing, if containing impurity particles, may cause serious problems such as short circuits during chip manufacturing, affecting chip yield and performance. Traditional chemical liquid filtration equipment often struggles to meet such stringent requirements in terms of filtration precision, resulting in significant fluctuations in product quality and limiting the development of chemical companies in the high-end product sector. Therefore, a chemical liquid fine filtration device needs to be designed.

[0003] Traditional equipment often relies on a single filter component, which makes it difficult to effectively distinguish and filter impurities of different particle sizes in chemical liquids. Furthermore, the equipment cannot be cleaned in a timely manner, and the long-term accumulation of impurities affects the filtration effect, or even clogs the equipment, leading to equipment failure in severe cases. Utility Model Content

[0004] This disclosure relates to a chemical liquid fine filtration device to solve the technical problems mentioned in the background art.

[0005] In a first aspect, this disclosure provides a chemical liquid fine filtration device, specifically comprising: a base plate;

[0006] Three sets of brackets are fixed on the base plate, and a filter tank is installed on the upper end of the three sets of brackets. The filter tank is made of stainless steel. The left end and right end are fixed on the left and right ends of the filter tank, respectively. The left end is threaded and an end cap is screwed onto the threaded end. The right end is connected to a No. 1 liquid outlet pipe. The filter tank contains a filter cylinder and a fiber filter layer. The fiber filter layer is located on the right side of the filter cylinder. The upper end of the filter tank is equipped with a liquid inlet pipe, and a flushing pipe and a dust sensor are installed on the filter tank. The flushing pipe is connected to an external flushing liquid supply device. The lower end of the filter tank is connected to a solenoid valve.

[0007] In at least some embodiments,

[0008] Two sets of brackets near the left side of the base plate are each fixed with a mounting base. A can is installed on the mounting base. Both sets of mounting bases are equipped with U-shaped locking screws. The can is locked between the U-shaped locking screws and the mounting base.

[0009] In at least some embodiments,

[0010] The lower end of the first tank is connected with the lower end of the electromagnetic valve, and the right end of the first tank is provided with a variable-diameter hole, and a filter membrane is installed in the variable-diameter hole.

[0011] In at least some embodiments,

[0012] The lower end of the first tank is connected with the lower end of the electromagnetic valve, and the right end of the first tank is provided with a variable-diameter hole, and a filter membrane is installed in the variable-diameter hole.

[0013] In at least some embodiments,

[0014] The right side of the first tank is provided with the second tank, the left end of the second tank is connected with the right end of the first tank, a base is installed on the bottom plate through bolts, a sliding seat is slidably installed on the base, and the second tank is locked on the sliding seat through a U-shaped locking screw.

[0015] In at least some embodiments,

[0016] The lower end of the second tank is connected with the second liquid outlet pipe, and a control valve is installed on the second liquid outlet pipe.

[0017] In at least some embodiments,

[0018] The front end of the sliding seat is provided with four groups of side plates through bolts, the four groups of side plates are provided with threaded holes, a lead screw is installed on the base through a bearing, the lead screw is threadedly connected with the threaded holes of the four groups of side plates, and a motor is installed on the base through bolts, and the output shaft of the motor is connected with the left end of the lead screw.

[0019] The utility model provides a kind of chemical liquid fine filter equipment, with following beneficial effects:

[0020] In the utility model, chemical liquid sequentially flows through filter cartridge and fiber filter layer, filter cartridge can effectively intercept larger particle impurities, realize the preliminary purification of liquid;Fiber filter layer can further filter out smaller particles and part of colloidal substance, significantly improve the purity of chemical liquid, fully meet the stringent requirements of chemical production on liquid quality, filter tank is equipped with flushing pipe and dust sensor, dust sensor can real-time accurate monitoring dust concentration in tank, when concentration reaches preset value, open flushing pipe to flush in tank, timely remove accumulated impurities, ensure filtration effect.

[0021] In addition, in the utility model, the second tank is cooperated with the lead screw on the sliding seat and the base, and can be flexibly adjusted under the driving of the motor, this design can accurately adjust the position of the second tank according to actual demand, facilitate docking or separating with the first tank, facilitate replacing the filter membrane, the filter membrane can deeply filter the washing water, ensure that the washing water for recycling meets the cleaning standard, open the control valve on the blowdown pipe, can easily discharge the accumulated impurities and precipitates in the tank, avoid the influence of impurities on subsequent filtration process, ensure normal operation of equipment. BRIEF DESCRIPTION OF DRAWINGS

[0022] In order to make the technical scheme of the embodiments of the present application clearer, the drawings of the embodiments will be briefly introduced as follows.

[0023] The drawings described in the following description only relate to some embodiments of the present application, and are not a limitation of the present application.

[0024] In the drawings:

[0025] Figure 1 A schematic diagram showing the overall structure of the present application is shown;

[0026] Figure 2 A structural schematic diagram of the inside of the filter tank of the present application is shown;

[0027] Figure 3 A structural schematic diagram of the support part of the present application is shown;

[0028] Figure 4 A structural schematic diagram of the No. 1 tank of the present application is shown;

[0029] Figure 5 A structural schematic diagram of the base part of the present application is shown.

[0030] List of reference signs

[0031] 1, base plate; 11, support; 111, fixed seat; 112, U-shaped locking screw; 12, No. 1 tank; 121, blowdown pipe; 13, electromagnetic valve; 14, base; 141, sliding seat; 142, side plate; 143, screw rod; 144, motor; 145, No. 2 tank; 1451, filter membrane; 146, No. 2 liquid outlet pipe;

[0032] 2, filter tank; 21, left end head; 211, end cover; 22, right end head; 221, No. 1 liquid outlet pipe; 23, filter cartridge; 24, fiber filter layer; 25, liquid inlet pipe; 26, flushing pipe; 27, dust sensor. DETAILED DESCRIPTION

[0033] In order to make the technical scheme of the embodiments of the present application clearer, the drawings of the embodiments will be briefly introduced as follows.

[0034] Please refer to Figures 1 to 5 Embodiment one:

[0035] The utility model provides a kind of chemical liquid fine filter equipment, comprising: bottom plate 1;

[0036] Three groups of supports 11 are fixed on bottom plate 1, the upper end of three groups of supports 11 is equipped with filter tank 2, filter tank 2 selects stainless steel material, the left and right ends of filter tank 2 are fixed with left end head 21 and right end head 22 respectively, thread is provided on left end head 21, end cover 211 is screwed on left end head 21, one outlet pipe 221 is connected to right end head 22, filter cartridge 23 and fiber filter layer 24 are installed in the inside of filter tank 2, fiber filter layer 24 is located at the right side of filter cartridge 23, inlet pipe 25 is provided at the upper end of filter tank 2, and washing pipe 26 and dust sensor 27 are installed on filter tank 2, washing pipe 26 is connected with external washing liquid supply equipment, solenoid valve 13 is connected to the lower end of filter tank 2.

[0037] In the embodiment of the present disclosure,

[0038] The two groups of supports 11 close to the left side of bottom plate 1 are both fixed with fixed seat 111, fixed seat 111 is installed with one tank 12, U-shaped locking screw 112 is installed on the two groups of fixed seat 111, one tank 12 is locked between U-shaped locking screw 112 and fixed seat 111, one tank 12 is connected with the lower end of solenoid valve 13, and the right end of one tank 12 is provided with variable-diameter hole, filter membrane 1451 is installed in variable-diameter hole, blowdown pipe 121 is connected to the lower end of one tank 12, control valve is installed on blowdown pipe 121, and its function is: when filter tank 2 is washed, cleaning liquid containing impurities flows into one tank 12 under the control of solenoid valve 13, filter membrane 1451 installed in the variable-diameter hole of the right end of one tank 12 plays a filtering role, which can intercept larger particles of impurities in cleaning liquid, such as solid residues, dust lumps, etc. falling off in filter tank 2, to prevent these large-particle impurities from causing pipeline blockage in subsequent treatment process, and to ensure that one tank 12 can continuously and efficiently filter cleaning liquid by opening control valve on blowdown pipe 121 regularly to discharge these accumulated impurities outside the tank and keep the inside of one tank 12 clean.

[0039] In the embodiment two, on the basis of the embodiment one,

[0040] Two tanks 145 are installed on the right side of one tank 12, the left end of two tanks 145 is butt-jointed with the right end of one tank 12, base 14 is installed on bottom plate 1 through bolt, sliding seat 141 is slid on base 14, two tanks 145 are locked on sliding seat 141 through U-shaped locking screw 112, two outlet pipes 146 are connected to the lower end of two tanks 145, control valve is installed on two outlet pipes 146, and its function is: cleaning liquid filtered by filter membrane 1451 enters two tanks 145 and is discharged through two outlet pipes 146, if cleaning liquid reaches recycling standard, it can be introduced into the washing process of filter tank 2 again to realize efficient use of water resources.

[0041] Example three, on the basis of example one and example two,

[0042] The front end of the sliding seat 141 is provided with four groups of side plates 142 through bolts, and the four groups of side plates 142 are provided with threaded holes. The base 14 is provided with a lead screw 143 through a bearing. The lead screw 143 is threadedly connected with the threaded holes of the four groups of side plates 142. The base 14 is provided with a motor 144 through bolts. The output shaft of the motor 144 is connected with the left end of the lead screw 143. The motor 144 drives the lead screw 143 to move the sliding seat 141 and the No. 2 tank 145. The position of the No. 2 tank 145 can be adjusted according to the actual working condition. When the No. 2 tank 145 is separated from the No. 1 tank 12, the filter membrane 1451 can be replaced.

[0043] The working principle of the embodiment is as follows: the chemical liquid enters the filter tank 2 through the liquid inlet pipe 25, the filter cartridge 23 first plays a coarse filtering role, effectively intercepts larger particle impurities in the liquid, and reduces the burden of subsequent fine filtering, then the liquid continues to flow to the right, flows through the fiber filter layer 24, the fiber filter layer 24 further removes small particles and part of colloidal substances with its fine structure, greatly improves the purity of the chemical liquid, and the chemical liquid that has completed double filtering finally flows out from the right end head 22 connected with the first liquid outlet pipe 221, meets the strict requirements of chemical production on the quality of the liquid, and realizes fine filtering of the chemical liquid. When it is necessary to flush and maintain the filter tank 2, the flushing pipe 26 is opened, the cleaning liquid containing impurities flows into the first tank 12 from the lower end of the filter tank 2 under the precise control of the electromagnetic valve 13, and the filter membrane 1451 installed in the reducing hole at the right end of the first tank 12 intercepts larger particle impurities such as solid residues, dust lumps and the like that fall off in the filter tank 2. In the process of continuous flow and filtration of the cleaning liquid, the intercepted impurities gradually accumulate at the bottom of the first tank 12. By periodically opening the control valve on the blowdown pipe 121 at the lower end of the first tank 12, the accumulated impurities can be discharged outside the tank, the inside of the first tank 12 is kept clean, the first tank 12 can always efficiently perform preliminary filtering on the cleaning liquid, the processing flow of the cleaning liquid is smooth, the processed cleaning liquid is discharged through the second liquid outlet pipe 146 connected with the lower end of the second tank 145, if the cleaning liquid meets the recycling standard, it can be introduced into the flushing process of the filter tank 2 through a specific pipeline, the water resource is efficiently utilized, the electric motor 144 is started, the output shaft of the electric motor 144 stably drives the screw rod 143 to rotate through the bolts, the rotating movement of the screw rod 143 is accurately converted into the linear movement of the sliding seat 141 and the second tank 145 connected with the sliding seat 141, thereby the position of the second tank 145 can be flexibly adjusted, for example, when the filter membrane 1451 in the first tank 12 needs to be replaced, the second tank 145 can be separated from the first tank 12 through the adjusting structure, so that the staff has a convenient space for operation.

[0044] In this paper, the following points need attention:

[0045] 1. The drawings of the embodiments of the present disclosure only relate to the structures involved in the embodiments of the present disclosure, and other structures can refer to the general design.

[0046] 2. In the case of no conflict, the embodiments of the present disclosure and the features in the embodiments can be combined to obtain new embodiments.

[0047] The above is only a specific implementation of the present disclosure, but the protection scope of the present disclosure is not limited thereto, any person skilled in the art can easily think of changes or replacements within the technical range disclosed in the present disclosure, which should be covered within the protection scope of the present disclosure.

Claims

1. A chemical liquid polishing device, comprising: The utility model discloses a chemical liquid precision filtering equipment, which belongs to the field of chemical industry. The bottom plate (1) is characterized by being provided with three groups of supports (11) fixed thereon, the upper ends of the three groups of supports (11) being provided with filter tanks (2) made of stainless steel, the left and right ends of the filter tank (2) being respectively provided with a left end head (21) and a right end head (22), the left end head (21) being provided with a thread, the left end head (21) being screwed with an end cover (211), the right end head (22) being connected with a first liquid outlet pipe (221), the filter tank (2) being internally provided with a filter cartridge (23) and a fiber filter layer (24), the fiber filter layer (24) being located at the right side of the filter cartridge (23), the upper end of the filter tank (2) being provided with a liquid inlet pipe (25), and the filter tank (2) being provided with a flushing pipe (26) and a dust sensor (27), and the lower end of the filter tank (2) being connected with an electromagnetic valve (13).

2. The chemical liquid precision filtering equipment according to claim 1 is characterized in that The two groups of supports (11) near the left side of the bottom plate (1) are each provided with a fixed seat (111), the fixed seat (111) is provided with a first tank (12), the two groups of fixed seats (111) are each provided with a U-shaped locking screw (112), and the first tank (12) is locked between the U-shaped locking screw (112) and the fixed seat (111).

3. The chemical liquid precision filtering equipment according to claim 2 is characterized in that The first tank (12) is connected with the lower end of the electromagnetic valve (13), the right end of the first tank (12) is provided with a variable-diameter hole, and the variable-diameter hole is provided with a filter membrane (1451).

4. The chemical liquid precision filtering equipment according to claim 3 is characterized in that The lower end of the first tank (12) is connected with a blowdown pipe (121), and the blowdown pipe (121) is provided with a control valve.

5. The chemical liquid precision filtering equipment according to claim 4 is characterized in that The right side of the first tank (12) is provided with a second tank (145), the left end of the second tank (145) is connected with the right end of the first tank (12), the bottom plate (1) is provided with a base (14), the base (14) is provided with a sliding seat (141), and the second tank (145) is locked on the sliding seat (141) through the U-shaped locking screw (112).

6. The chemical liquid precision filtering equipment according to claim 5 is characterized in that The lower end of the second tank (145) is connected with a second liquid outlet pipe (146), and the second liquid outlet pipe (146) is provided with a control valve.

7. The chemical liquid precision filtering equipment according to claim 5 is characterized in that The front end of the sliding seat (141) is provided with four groups of side plates (142), the four groups of side plates (142) are each provided with a threaded hole, the base (14) is provided with a lead screw (143) through a bearing, the lead screw (143) is threadedly connected with the threaded holes of the four groups of side plates (142), the base (14) is provided with a motor (144), and the output shaft of the motor (144) is connected with the left end of the lead screw (143).

Images