Constant volume tank for semiconductor machine

Abstract

The utility model discloses a constant volume tank for a semiconductor machine table, which is characterized in that a transparent hollow pipe body fixed on one side of the semiconductor machine table through a detachable fixing assembly can adapt to different machine table specifications; meanwhile, the liquid level sensor and the containing marks are arranged on the hollow pipe body, the first transparent plate and the second transparent plate are welded and fixed to the upper end opening and the lower end opening of the hollow pipe body, the sealing performance is guaranteed, the PVC material and the PFA material which are good in chemical stability and transparency are adopted respectively, cost is saved, and observation and maintenance are convenient. Valves are arranged on the pipeline and are in signal connection with an external PLC (Programmable Logic Controller), so that valve control and liquid level monitoring can be realized, and the liquid adding and discharging accuracy is improved; in addition, through the arrangement of the three-way pipe and the exhaust pipe, the constant volume tank has the cleaning and exhaust functions at the same time, and it is ensured that the interior is clean and the working environment is safe.

Description

TECHNICAL FIELD

[0001] The utility model belongs to the technical field of semiconductor manufacturing, especially relates to a constant volume tank for semiconductor machine table. BACKGROUND

[0002] In the semiconductor manufacturing process, the grinding liquid supply system (SDS) is divided into two kinds of central supply (Central) and direct supply (Local) machines. The Central machine is usually placed in the lower layer of the chemical mechanical polishing (CMP) equipment, with multiple supply points, large flow and long pipeline, suitable for large production and simple and stable mixed grinding liquid; The Local machine is usually placed beside the machine, with fewer supply points, small flow and pressure, suitable for research and development properties, relatively small production and complex mixing demand of grinding liquid. These systems ensure the stable supply and accurate proportioning of the grinding liquid, which is the key equipment in semiconductor manufacturing, and the constant volume reagent liquid is connected into the mixing tank (MIXTANK) in the semiconductor machine through the pipeline to realize the demand of constant volume and liquid addition. In addition, the semiconductor machine is generally provided with a drain (Drain) system and an exhaust (Exhaust) system.

[0003] In the existing semiconductor SDS Central&Local machine, the device for constant volume of hydrogen peroxide (H2O2) and ammonia (NH4OH) usually includes a constant volume tank, an inlet pipe and an outlet pipe. These devices, and by manually or automatically controlling the valve to adjust the inflow and outflow of liquid to ensure the accuracy and stability of constant volume, and usually use PTFE and other high-performance materials to ensure the purity of chemical liquid and the corrosion resistance of equipment.

[0004] Although the existing constant volume device meets the needs of semiconductor manufacturing to some extent, there are still some deficiencies and shortcomings:

[0005] 1. High cost: the constant volume tank of PTFE and other high-performance materials is expensive, and the customization cycle is long, which increases the production cost and time.

[0006] 2. Complex operation: the existing constant volume device usually needs manual intervention, which is complex and prone to human error.

[0007] 3. Difficult to clean: the cleaning and maintenance of the constant volume tank is difficult, and chemical liquid is easily left, affecting subsequent use.

[0008] 4. Inaccurate liquid level control: the existing liquid level sensor may not accurately determine the liquid level in some cases, resulting in inaccurate constant volume. INVENTION CONTENTS

[0009] To solve the problems in the prior art described above, the utility model discloses a kind of constant volume tank for semiconductor machine table, by adopting the simple design of PVC material, reduce cost and simplify maintenance;Simultaneously utilize the design of liquid level sensor and capacity scale, more accurate liquid level control is realized, and the constant volume accuracy is ensured;In addition, by reserving water inlet branch pipe on the first transparent plate and installing exhaust pipe and exhaust valve on the hollow pipe body side wall, it is convenient to flush, can effectively prevent residual, simultaneously realizes cleaning and exhaust function.

[0010] To achieve the above object and other related purposes, the utility model adopts the following technical scheme:

[0011] The utility model provides a kind of constant volume tank for semiconductor machine table, including transparent hollow pipe body and the liquid level sensor being set in the hollow pipe body, the liquid level sensor is used to detect the liquid level position in the hollow pipe body;

[0012] The upper end port and the lower end port of the hollow pipe body are respectively fixed with first transparent plate and second transparent plate;The hollow pipe body, the first transparent plate and the second transparent plate all adopt PVC material quality;

[0013] Liquid inlet is formed on the first transparent plate, and liquid inlet main pipe is fixedly connected on the liquid inlet, and liquid inlet branch pipe and water inlet branch pipe are simultaneously connected at the inlet of liquid inlet main pipe, so that liquid inlet main pipe, liquid inlet branch pipe and water inlet branch pipe form three-way pipeline;Wherein, inlet hand valve is arranged on liquid inlet main pipe, for controlling the on-off of liquid inlet main pipe, and first hand valve and first pneumatic valve are arranged on liquid inlet branch pipe, and second pneumatic valve is arranged on water inlet branch pipe;

[0014] Liquid outlet is formed on the second transparent plate, and liquid outlet main pipe is fixedly connected on the liquid outlet, and liquid outlet branch pipe and waste branch pipe are simultaneously connected at the outlet of liquid outlet main pipe, so that liquid outlet main pipe, liquid outlet branch pipe and waste branch pipe form three-way pipeline;Wherein,

[0015] Liquid outlet branch pipe is connected to mixed liquid storage tank on semiconductor machine table, and waste branch pipe is connected to liquid discharge system on semiconductor machine table;Outlet hand valve is arranged on liquid outlet main pipe, for controlling the on-off of liquid outlet main pipe, third pneumatic valve is arranged on liquid outlet branch pipe, and fourth pneumatic valve is arranged on waste branch pipe.

[0016] As a preferred technical scheme, exhaust port is also formed on the side wall of the hollow pipe body close to the upper end port, and the exhaust port is connected to exhaust system on semiconductor machine table through exhaust pipe, and exhaust valve is arranged on the exhaust pipe.

[0017] As a preferred technical scheme, the hollow pipe body is further provided with a capacity scale, and the liquid level sensor is located at the upper end of the capacity scale.

[0018] As a preferred technical scheme, the waste discharge branch pipe is further provided with a check valve.

[0019] As a preferred technical scheme, the first transparent plate and the second transparent plate are respectively welded and fixed to the upper end port and the lower end port of the hollow pipe body.

[0020] As a preferred technical scheme, the lower end port edge of the hollow pipe body is inwardly contracted, so that the cross section of the lower end port of the hollow pipe body is in the shape of an inverted isosceles trapezoid.

[0021] As a preferred technical scheme, the diameter of the hollow pipe body ranges from 88 mm to 100 mm, and the length ranges from 20 cm to 25 cm.

[0022] As a further preferred technical scheme, the constant volume tank further comprises a detachable fixing assembly, the hollow pipe body is fixed to one side of the semiconductor machine through the detachable fixing assembly, the detachable fixing assembly comprises a track frame fixed to one side of the semiconductor machine and a mounting ring fixed to the hollow pipe body, the mounting ring is movably connected with the track frame and is locked and fixed to the track frame through a second fastener.

[0023] Further, a sliding block is fixed to the back side of the mounting ring, and a sliding groove with a shape matched with the sliding block is formed in the track frame.

[0024] Further, a gasket is arranged between the inner side wall of the mounting ring and the outer side wall of the hollow pipe body.

[0025] As described above, the utility model has the following beneficial effects:

[0026] (1) The constant volume tank for the semiconductor machine has the advantages that: the PVC transparent pipe with a diameter of 88 mm-100 mm and a length of 20-25 cm is used as the hollow pipe body, so that the material usage amount is reduced, and the cost is lowered; the PVC material is not only low in price, but also has good corrosion resistance and transparency, so that the internal condition is convenient to observe; meanwhile, the structure is simplified, the integrated PVC transparent plate is welded at the upper and lower ports of the hollow pipe body, so that the leakage is effectively prevented, the number of components is reduced, and the maintenance difficulty and cost are lowered.

[0027] (2) The utility model discloses a constant volume tank for semiconductor machine table, through installing liquid level sensor on constant volume tank, and through PLC control system realizes accurate monitoring and automatic control to liquid level, when liquid level reaches high liquid level, stops adding liquid automatically, opens valve and sends liquid into mixed liquid storage tank, can set multiple filling liquid adding operation under the condition of needing much, further ensures the accuracy of constant volume.

[0028] (3) The utility model discloses a constant volume tank for semiconductor machine table, and it has washing and exhaust functions, through reserving water inlet branch pipe for conveying deionized water (DIW) on constant volume tank, and through these valves, constant volume tank can be washed conveniently, ensures internal cleaning, prevents chemical liquid residue, in addition, through installing exhaust pipe and exhaust valve on constant volume tank upside, prevents smell volatilization, and can discharge waste gas produced in the washing process to exhaust system, keeps the cleanness and safety of working environment.

[0029] (4) The utility model discloses a constant volume tank for semiconductor machine table, through detachable fixing assembly, the constant volume tank can adapt to different specifications and sizes of different semiconductor machine tables and different pipeline positions, has flexible adaptability, ensures the stability and operation convenience of constant volume tank, and when not using, also convenient to disassemble and store. BRIEF DESCRIPTION OF DRAWINGS

[0030] Figure 1 It is the pipeline connection structure schematic diagram of constant volume tank and semiconductor machine table in the utility model.

[0031] Figure 2 It is the schematic diagram of hollow pipe body of constant volume tank and semiconductor machine table when being fixed through detachable fixing assembly.

[0032] Figure 3 It is the sectional view of A-A in Figure 2 .

[0033] Figure 4 It is the structure schematic diagram when being provided with gasket. Figure 3

[0034] ​The specific annotations in the attached drawings are as follows: 1. Semiconductor base; 11. Drainage system; 12. Mixed liquid storage tank; 13. Exhaust system; 2. Track frame; 3. Mounting ring; 31. Washer; 4. Hollow tube body; 41. Capacity scale; 42. Exhaust pipe; 421. Exhaust valve; 5. First transparent plate; 51. Main inlet pipe; 511. Inlet manual valve; 52. Inlet branch pipe; 521. First manual valve; 522. First pneumatic valve; 53. Water inlet branch pipe; 531. Second pneumatic valve; 6. Second transparent plate; 61. Main outlet pipe; 611. Outlet manual valve; 62. Outlet branch pipe; 621. Third pneumatic valve; 63. Waste discharge branch pipe; 631. Fourth pneumatic valve; 632. Check valve; 7. Liquid level sensor. Detailed Implementation

[0035] To better understand the purpose, structure, and function of this utility model, the technical solutions of this utility model will be clearly and completely described below with reference to the accompanying drawings of the embodiments of this utility model. Obviously, the described embodiments are only some embodiments of this utility model, and not all embodiments.

[0036] In the description of this utility model, it should be noted that the positional relationships indicated by terms such as "longitudinal", "lateral", "up", "down", "front", "back", "left", "right", "vertical", "horizontal", "top", "bottom", "inner", and "outer" are based on the positional relationships shown in the accompanying drawings and are only for the convenience of describing the embodiments of this utility model and simplifying the description. They are not intended to indicate or imply that the device or element referred to must have a specific orientation, be constructed and operated in a specific direction, and therefore should not be construed as a limitation of this utility model.

[0037] Example

[0038] like Figure 1 As shown, this embodiment provides a volumetric container for use on a semiconductor machine, including a transparent hollow tube 4 and a liquid level sensor 7 disposed inside the hollow tube 4. The liquid level sensor 7 is used to detect the liquid level position inside the hollow tube 4. Preferably, an exhaust port is also provided on the side wall near the upper end of the hollow tube 4. The exhaust port is connected to the exhaust system 13 on the semiconductor machine 1 through an exhaust pipe 42. Furthermore, an exhaust valve 421 is provided on the exhaust pipe 42 to prevent odor from evaporating. More preferably, the hollow tube 4 is also provided with a volume scale 41 to determine the liquid level. The liquid level sensor 7 is located at the uppermost end of the volume scale 41. The volume scale 41 is implemented by attaching a measuring label to the outer surface of the hollow tube 4, and the unit of measurement of the volume scale 41 is ml.

[0039] The upper end port and the lower end port of the hollow pipe body 4 are respectively fixed with a first transparent plate 5 and a second transparent plate 6, which are respectively welded to the upper end port and the lower end port of the hollow pipe body 4 for preventing leakage; welding fixation can effectively prevent the leakage of liquid and gas, ensuring the sealing of the constant volume tank, playing a physical blocking role, at the same time, combined with the transparent characteristics of the first transparent plate 5, the second transparent plate 6 and the hollow pipe body 4, the operator can also observe the internal situation of the hollow pipe body 4, so as to facilitate monitoring and maintenance. In this embodiment, the lower end port edge of the hollow pipe body 4 is inwardly contracted, so that the cross section of the lower end port of the hollow pipe body 4 is inverted isosceles trapezoidal, ensuring that the liquid in the constant volume tank can be smoothly discharged.

[0040] The first transparent plate 5 is provided with a liquid inlet, and the liquid inlet is fixedly connected with a liquid inlet main pipe 51. The liquid inlet main pipe 51 is simultaneously connected with a liquid inlet branch pipe 52 and a water inlet branch pipe 53 at the inlet, so that the liquid inlet main pipe 51, the liquid inlet branch pipe 52 and the water inlet branch pipe 53 form a three-way pipeline. The liquid inlet main pipe 51 is provided with an inlet hand valve 511 for controlling the on-off of the liquid inlet main pipe 51. The liquid inlet branch pipe 52 is provided with a first hand valve 521 and a first pneumatic valve 522. The water inlet branch pipe 53 is provided with a second pneumatic valve 531. In this embodiment, the waste discharge branch pipe 63 is also provided with a check valve 632. The water inlet branch pipe 53 is used for transporting pure water (DIW). The liquid inlet branch pipe 52 is used for transporting the reagent to be constant volume. The reagent to be constant volume is hydrogen peroxide (H2O2) or ammonia water (NH4OH), so the sealing requirement is higher.

[0041] The second transparent plate 6 is provided with a liquid outlet, and the liquid outlet is fixedly connected with a liquid outlet main pipe 61. The liquid outlet main pipe 61 is simultaneously connected with a liquid outlet branch pipe 62 and a waste discharge branch pipe 63 at the outlet, so that the liquid outlet main pipe 61, the liquid outlet branch pipe 62 and the waste discharge branch pipe 63 form a three-way pipeline. The liquid outlet branch pipe 62 is connected to the mixed liquid storage tank 12 on the semiconductor machine 1. The waste discharge branch pipe 63 is connected to the liquid discharge main pipe in the liquid discharge system 11 in the semiconductor machine 1. The liquid outlet main pipe 61 is provided with an outlet hand valve 611 for controlling the on-off of the liquid outlet main pipe 61. The liquid outlet branch pipe 62 is provided with a third pneumatic valve 621. The waste discharge branch pipe 63 is provided with a fourth pneumatic valve 631.

[0042] In the embodiment, the hollow tube body 4, the first transparent plate 5 and the second transparent plate 6 are all made of PVC material, which has good chemical stability and transparency, so that the condition inside the constant volume tank can be seen at a glance; the liquid inlet main pipe 51, the liquid inlet branch pipe 52 and the water inlet branch pipe 53 are all made of PFA pipe with an outer diameter of 1 / 2 inch and an inner diameter of 3 / 8 inch, which has excellent chemical resistance and high temperature resistance. The position of the hollow tube body 4 is determined according to the position of the liquid discharge main pipe, the exhaust system 13 and the surface obstacles of the semiconductor machine 1, so that the hollow tube body 4 is located above the liquid discharge main pipe and avoids the obstacles, and is located close to the exhaust system 13, which ensures that the paths of liquid addition and air exhaust are the shortest, saves the cost of pipeline setting, and improves the efficiency of liquid addition and air exhaust treatment; and the length of the hollow tube body 4 is determined according to the height of the semiconductor machine 1, in the embodiment, the diameter of the hollow tube body 4 ranges from 88mm to 100mm, and the length ranges from 20cm to 25cm.

[0043] As shown in Figure 2 and Figure 3 The constant volume tank also includes a detachable fixing assembly, the hollow tube body 4 is vertically installed and fixed on one side of the semiconductor machine 1 through the detachable fixing assembly, which ensures the level of the liquid surface, improves the measurement accuracy of the liquid level sensor 7, and through the detachable fixing assembly, the constant volume tank can adapt to different specifications and sizes of different semiconductor machines 1 and different pipeline positions, which has flexible adaptability, ensures the stability of the constant volume tank and the convenience of operation, and is also convenient to disassemble and store when not in use.

[0044] The detachable fixing assembly includes a track frame 2 fixed on one side of the semiconductor machine 1 and a mounting ring 3 clamped on the hollow tube body 4, the mounting ring 3 is movably connected with the track frame 2 and is locked and fixed on the track frame 2 through a second fastener, specifically, the mounting ring 3 is fixed with a sliding block on the back side, the track frame 2 is provided with a sliding groove with a shape matched with the sliding block, the sliding groove is provided with a threaded hole and matched with a second fastener, so that the hollow tube body 4 can move along the sliding groove direction of the track frame 2 with the mounting ring 3 and be fixed, thereby realizing the adjustment of the position of the hollow tube body 4 and facilitating the connection of the pipeline. In the embodiment, the back side of the track frame 2 closely abuts one side of the semiconductor machine 1 and is locked and fixed on the semiconductor machine 1 through a first fastener, thereby improving the fixing stability of the constant volume tank and facilitating the arrangement of the pipelines between the constant volume tank and the semiconductor machine 1; and the number of the mounting ring 3 is two, the two mounting rings 3 are respectively clamped on the upper end and the lower end of the hollow tube body 4, and the two mounting rings 3 are locked and fixed on the track frame 2 through the second fastener. In other embodiments, as shown in Figure 4As shown, a gasket 31 is arranged between the inner wall of the mounting ring 3 and the outer wall of the hollow pipe body 4, so as to effectively increase the friction, and the mounting ring 3 can also be adapted to hollow pipe bodies 4 of different diameters through the gasket 31.

[0045] In actual work, the specific use method of the utility model is as follows:

[0046] Firstly, the constant volume tank is installed and fixed on one side of the semiconductor machine 1 through the detachable fixing assembly. Specifically, the longitudinal position of the constant volume tank is determined according to the current layout of the liquid discharge system 11, the gas discharge system 13 and the semiconductor machine 1, the track frame 2 is fixed on the semiconductor machine 1 by using the first fastener, and the sliding groove direction of the track frame 2 is perpendicular to the ground, so that the constant volume tank is ensured to be located above the liquid discharge main pipe after installation and to avoid obstacles on the side wall of the semiconductor machine 1, and the air outlet on the side wall of the constant volume tank faces the inlet of the gas discharge system 13 on the semiconductor machine 1; then, the sliding block on the mounting ring 3 is inserted into the sliding groove of the track frame 2, and the second fastener is tightened to preliminarily fix the hollow pipe body 4, then the pipelines are connected, and the position of the hollow pipe body 4 is adjusted after the second fastener is loosened, and the pipelines are arranged.

[0047] Then, in the initial state that the outlet hand valve 611 is closed, the inlet hand valve 511 and the first hand valve 521 are opened, liquid is introduced by using the first pneumatic valve 522, the liquid level sensor 7 and the capacity scale 41 are used to confirm the liquid amount, and the first pneumatic valve 522 is closed and the liquid introduction is stopped when the liquid is introduced to the high liquid level each time; then, the outlet hand valve 611 and the third pneumatic valve 621 are opened, so that the liquid in the constant volume tank after constant volume enters the mixed liquid storage tank 12 on the semiconductor machine 1. If the required liquid amount is large, multiple filling and liquid introduction can be set; after the liquid introduction and constant volume are completed, the first pneumatic valve 522 and the third pneumatic valve 621 are closed, and the second pneumatic valve 531 is opened to introduce pure water to flush the constant volume tank, and after the flushing, the fourth pneumatic valve 631 is opened to discharge the flushing waste liquid in the constant volume tank into the liquid discharge main pipe on the semiconductor machine 1.

[0048] It should be noted that in the embodiment, the valves on the pipelines of the constant volume tank and the liquid level sensor 7 in the constant volume tank are connected with the external PLC controller signal, the opening and closing of the valves are realized through the PLC controller, the signal from the liquid level sensor 7 is received through the PLC controller, and the start and stop of the first pneumatic valve 522 are controlled, the above functions belong to the prior art, and are not improvements on the PLC program itself.

[0049] The above merely describes preferred embodiments of the present application and is not intended to limit the present application, and any modifications or equivalent replacements to these features and embodiments made by those skilled in the art without departing from the spirit and scope of the present application shall be covered by the present application. In addition, the features and embodiments can be modified under the guidance of the present application to adapt to specific conditions and materials without departing from the spirit and scope of the present application. Therefore, the present application is not limited by the specific embodiments disclosed herein, and all embodiments falling within the scope of the claims of the present application shall be covered by the present application.

Claims

1. A volume-regulating container for use on a semiconductor machine, characterized in that, The utility model provides a liquid level sensor, including transparent hollow pipe body (4) and the liquid level sensor (7) for detecting the liquid level position in the hollow pipe body (4) are arranged in the hollow pipe body (4), the liquid level sensor (7) is arranged in the hollow pipe body (4) inside, The upper end port and the lower end port of the hollow pipe body (4) are respectively fixed with a first transparent plate (5) and a second transparent plate (6); the hollow pipe body (4), the first transparent plate (5) and the second transparent plate (6) are all made of PVC material. The first transparent plate (5) is provided with a liquid inlet, and the liquid inlet is fixedly connected with a liquid inlet main pipe (51); the liquid inlet main pipe (51) is simultaneously connected with a liquid inlet branch pipe (52) and a water inlet branch pipe (53) at the inlet thereof, so that the liquid inlet main pipe (51), the liquid inlet branch pipe (52) and the water inlet branch pipe (53) form a three-way pipeline; the liquid inlet main pipe (51) is provided with an inlet hand valve (511) for controlling the on-off of the liquid inlet main pipe (51); the liquid inlet branch pipe (52) is provided with a first hand valve (521) and a first pneumatic valve (522); and the water inlet branch pipe (53) is provided with a second pneumatic valve (531). The second transparent plate (6) is provided with a liquid outlet, and the liquid outlet is fixedly connected with a liquid outlet main pipe (61); the liquid outlet main pipe (61) is simultaneously connected with a liquid outlet branch pipe (62) and a waste discharge branch pipe (63) at the outlet thereof, so that the liquid outlet main pipe (61), the liquid outlet branch pipe (62) and the waste discharge branch pipe (63) form a three-way pipeline; the liquid outlet branch pipe (62) is connected to a mixed liquid storage tank (12) of a semiconductor machine (1); the waste discharge branch pipe (63) is connected to a liquid discharge system (11) of the semiconductor machine (1); the liquid outlet main pipe (61) is provided with an outlet hand valve (611) for controlling the on-off of the liquid outlet main pipe (61); the liquid outlet branch pipe (62) is provided with a third pneumatic valve (621); and the waste discharge branch pipe (63) is provided with a fourth pneumatic valve (631). An air outlet is formed in the side wall of the hollow pipe body (4) close to the upper end port; the air outlet is connected to an exhaust system (13) of the semiconductor machine (1) through an air exhaust pipe (42); and the air exhaust pipe (42) is provided with an exhaust valve (421).

2. The constant volume tank for use in a semiconductor machine as claimed in claim 1, wherein, The hollow pipe body (4) is further provided with a capacity scale (41), and the liquid level sensor (7) is located at the uppermost end of the capacity scale (41).

3. The constant volume tank for use in a semiconductor machine as claimed in claim 1, wherein, The waste discharge branch pipe (63) is further provided with a check valve (632).

4. The constant volume tank for use in a semiconductor machine as recited in claim 1, wherein, The first transparent plate (5) and the second transparent plate (6) are respectively welded and fixed to the upper end port and the lower end port of the hollow pipe body (4).

5. The constant volume tank for use in a semiconductor machine as recited in claim 1, wherein, The lower end port edge of the hollow pipe body (4) is inwardly contracted, so that the cross section of the lower end port of the hollow pipe body (4) is in the shape of an inverted isosceles trapezoid.

6. The constant volume tank for use in a semiconductor manufacturing tool as recited in claim 1, wherein, The diameter of the hollow pipe body (4) ranges from 88 mm to 100 mm, and the length ranges from 20 cm to 25 cm.

7. The constant volume tank for use in a semiconductor manufacturing tool as recited in claim 1, wherein, ​ 8. The constant volume tank for use in a semiconductor machine as claimed in any one of claims 1-7, wherein, Also include detachable fixed assembly, the hollow pipe body (4) is fixed by detachable fixed assembly on one side of semiconductor machine table (1), the detachable fixed assembly includes the track frame (2) fixed on one side of semiconductor machine table (1) and the mounting ring (3) of the clamp fixed on the hollow pipe body (4), the mounting ring (3) is movably connected with the track frame (2) and is locked and fixed on the track frame (2) by the second fastener.

9. The constant volume tank for use in a semiconductor machine as recited in claim 8, wherein, The back side of the mounting ring (3) is fixed with a sliding block, and the track frame (2) is provided with a sliding groove with a shape matched with the sliding block.

10. The constant volume tank for use in a semiconductor machine as recited in claim 9, wherein, A gasket (31) is further arranged between the inner side wall of the mounting ring (3) and the outer side wall of the hollow pipe body (4).

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