Multi-chamber parallel type vacuum heat treatment furnace

Abstract

The utility model relates to the technical field of vacuum heat treatment furnaces, in particular to a multi-chamber parallel vacuum heat treatment furnace, which comprises a charging chamber, a preheating chamber, a cooling chamber, a heat treatment chamber and a transition chamber which are respectively provided with an independent vacuum system. The charging chamber, the preheating chamber, the cooling chamber and the heat treatment chamber are connected to the two sides of the transition chamber in the length direction through on-off devices correspondingly, and a workpiece transfer device is arranged in the transition chamber. According to the multi-chamber parallel type vacuum heat treatment furnace, a plurality of vacuum chambers such as the charging chamber, the preheating chamber, the cooling chamber and the heat treatment chamber are arranged in parallel, and each chamber can work independently and does not interfere with one another, so that the production efficiency is remarkably improved, the energy consumption is reduced, the flexibility is enhanced, and the maintenance and the vacuum chamber expansion are easy.

Description

TECHNICAL FIELD

[0001] The utility model relates to vacuum heat treatment furnace technical field, concretely relates to a kind of multi-chamber parallel type vacuum heat treatment furnace. BACKGROUND

[0002] Traditional vacuum heat treatment furnace mostly adopts single-chamber structure, i.e. heating and cooling process are carried out in the same furnace body. This single-chamber structure vacuum heat treatment furnace has multiple significant defects. First, since heating and cooling are carried out in the same space, it results in slow heating speed and long cooling time, thus increasing energy consumption and prolonging production cycle. Second, single-chamber structure limits production efficiency, because in one processing cycle, the furnace body can only process a batch of workpieces, and when the batch of workpieces completes processing, the processing of the next batch of workpieces can be carried out.

[0003] In addition, with the increasing requirement of industrial production for continuity and efficiency, series connection type continuous heat treatment furnace is gradually applied. However, series connection type continuous heat treatment furnace also has obvious problems. Once one of the chambers needs to be overhauled or maintained, the whole equipment needs to be shut down, which seriously affects production efficiency. Therefore, series connection type continuous heat treatment furnace has deficiencies in flexibility and reliability.

[0004] In summary, traditional single-chamber structure and series connection type continuous heat treatment furnace have certain limitations in the field of vacuum heat treatment, and cannot meet the demand of modern industrial production for high efficiency, continuity and flexibility.

[0005] Therefore, it is necessary to develop a new type of vacuum heat treatment furnace to solve the problems existing in the prior art. SUMMARY

[0006] To solve the above problems, the utility model provides a kind of multi-chamber parallel type vacuum heat treatment furnace, which is provided with multiple vacuum chambers such as charging chamber, preheating chamber, cooling chamber and heat treatment chamber in parallel, each chamber can work independently without interference; It has significant technical effects in significantly improving production efficiency, reducing energy consumption, enhancing flexibility, improving automation degree, being easy to maintain and expand, and optimizing process parameters.

[0007] The technical scheme of the utility model is as follows:

[0008] A kind of multi-chamber parallel type vacuum heat treatment furnace, including charging chamber, preheating chamber, cooling chamber, heat treatment chamber and transition chamber, charging chamber, preheating chamber, cooling chamber, heat treatment chamber and transition chamber are respectively provided with individual vacuum system, charging chamber, preheating chamber, cooling chamber and heat treatment chamber are connected in the length direction of transition chamber two sides by on-off device, workpiece transfer device is arranged in transition chamber.

[0009] The on-off device is a plug valve.

[0010] The workpiece transfer device comprises a fixed track arranged in the transition chamber and an AGV trolley, the fixed track is arranged along the length direction of the transition chamber, and the AGV trolley travels in the transition chamber along the fixed track.

[0011] The charging chamber is provided with two plug valves, one plug valve is arranged between the charging chamber and the transition chamber, and the other plug valve is used for charging the workpiece from outside the charging chamber.

[0012] The charging chamber, the preheating chamber, the cooling chamber and the heat treatment chamber are respectively provided with one or more than one.

[0013] The preheating chamber provides a vacuum heating environment with a temperature not higher than 600 DEG C.

[0014] The heat treatment chamber provides a vacuum heating environment with a temperature not lower than 1200 DEG C.

[0015] The cooling chamber is provided with a heat exchanger and a cooling motor.

[0016] The beneficial effects of the utility model lie in:

[0017] 1. The multi-chamber parallel type vacuum heat treatment furnace improves production efficiency: the charging chamber, the preheating chamber, the cooling chamber and the heat treatment chamber are arranged in parallel, each chamber can work independently and does not interfere with each other, while one chamber is processing workpieces, other chambers can also simultaneously process different steps, thereby greatly shortening the overall processing period and improving production efficiency.

[0018] 2. The multi-chamber parallel type vacuum heat treatment furnace reduces energy consumption: each vacuum chamber is provided with a separate vacuum system, the vacuum degree and heating temperature can be independently controlled according to actual process requirements, and energy waste caused by the heating and cooling process in the traditional single-chamber structure is avoided; the multi-chamber parallel design also reduces the waiting time, further reducing energy consumption.

[0019] 3. The multi-chamber parallel type vacuum heat treatment furnace enhances flexibility: since each chamber is independent and connected through the transition chamber, workpieces can be flexibly transferred between chambers, so that the equipment can adapt to various process requirements, not only different batches of the same product can be processed, but also different products can be processed at the same time, greatly enhancing the flexibility of the equipment.

[0020] 4、The utility model discloses a kind of multi-chamber parallel type vacuum heat treatment furnace, transition chamber is provided with AGV trolley and fixed track, realize the automation of workpiece transfer, not only save manpower cost, also improve the accuracy and efficiency of transfer, entire processing process is highly automated, helpful to reduce human error and improve production quality.

[0021] 5、The utility model discloses a kind of multi-chamber parallel type vacuum heat treatment furnace, the multi-chamber parallel type vacuum heat treatment furnace is easy to maintain and expand, each vacuum chamber is equipped with separate valve and vacuum system structure, it is convenient to maintain and overhaul independently;In addition, since equipment adopts modular design, can be easily increased each warehouse section and vacuum chamber according to actual capacity demand, realize more efficient production, not only reduce maintenance cost, also improve the expansibility of equipment. BRIEF DESCRIPTION OF DRAWINGS

[0022] The scheme and advantages of the present application will become clear to those skilled in the art from the following detailed description of the preferred embodiments. The drawings are only for the purpose of illustrating the preferred embodiments and are not considered to be limiting of the present utility model.

[0023] In the drawings:

[0024] Figure 1 It is the component schematic view of a kind of multi-chamber parallel type vacuum heat treatment furnace of the utility model embodiment;

[0025] Figure 2 It is the schematic view of the AGV trolley of a kind of multi-chamber parallel type vacuum heat treatment furnace of the utility model embodiment;

[0026] Figure 3 It is the schematic view of the loading chamber of a kind of multi-chamber parallel type vacuum heat treatment furnace of the utility model embodiment;

[0027] Figure 4 It is the schematic view of the preheating chamber of a kind of multi-chamber parallel type vacuum heat treatment furnace of the utility model embodiment;

[0028] Figure 5 It is the schematic view of the cooling chamber of a kind of multi-chamber parallel type vacuum heat treatment furnace of the utility model embodiment;

[0029] Figure 6 It is the schematic view of the heat treatment chamber of a kind of multi-chamber parallel type vacuum heat treatment furnace of the utility model embodiment;

[0030] Components represented by various reference signs in the drawings are:

[0031] The utility model: 1, loading chamber, 2, preheating chamber, 3, cooling chamber, 4, transition chamber vacuum system, 5, heat treatment chamber, 6, transition chamber, 7, fixed track, 8, electric control cabinet, 9, AGV trolley. Detailed Implementation

[0032] like Figures 1 to 6 As shown, the multi-chamber parallel vacuum heat treatment furnace mainly consists of a charging chamber 1, a preheating chamber 2, a cooling chamber 3, a heat treatment chamber 5, a transition chamber 6, a transition chamber vacuum system 4, an electrical control cabinet 8, and an AGV trolley 9.

[0033] The loading chamber 1 is located at the very beginning of the entire process flow, with gate valves installed at both ends. One gate valve is connected to the transition chamber 6 for workpiece transfer; the other gate valve is used to dock with the external glove box protected by inert gas, so that the workpiece can be loaded into the loading chamber under a protective atmosphere. The loading chamber does not have heating elements and remains at room temperature, primarily providing a vacuum environment for the workpiece to transition from the protective atmosphere to the vacuum environment.

[0034] The preheating chamber 2 is a low-temperature chamber equipped with heating components, providing a vacuum heating environment with a temperature not exceeding 600℃. The preheating chamber is mainly used for initial preheating and degassing of workpieces, preparing them for subsequent high-temperature heat treatment.

[0035] Cooling chamber 3 is a vacuum chamber with rapid cooling function, which is equipped with a heat exchanger and a cooling motor. This chamber can withstand a gas pressure of 0.2 MPa (absolute pressure), enabling rapid cooling of workpieces from the heat treatment chamber from 1200°C to room temperature.

[0036] Heat treatment chamber 5 is a high-temperature heating chamber, equipped with high-temperature resistant heating components, capable of heating workpieces to over 1200℃. This chamber is the key vacuum chamber for the final heat treatment of the workpiece.

[0037] The transition chamber 6 is an extra-long vacuum chamber used to connect the loading chamber, preheating chamber, heat treatment chamber, and cooling chamber. It is equipped with fixed tracks 7 and AGV trolleys 9, which can move along the fixed tracks to transfer workpieces between the chambers.

[0038] AGV, or Automated Guided Vehicle, is a transport vehicle equipped with electromagnetic or optical automatic guidance devices, capable of traveling along a prescribed guidance path, and possessing safety protection and various transfer functions.

[0039] The electrical control cabinet 8 is used to control the electrical system of the entire equipment, including the vacuum system, heating system, cooling system of each chamber, and the walking system of the AGV trolley.

[0040] A multi-chamber parallel vacuum heat treatment method, comprising the following steps: loading workpieces into a loading chamber 1, pressure balancing with a transition chamber 6 after vacuumizing, opening an insertion valve between the loading chamber 1 and the transition chamber 6; transferring the workpieces to at least one of a preheating chamber 2, a heat treatment chamber 5 or a cooling chamber 3 in parallel through an AGV trolley 9 on a fixed track 7 in the transition chamber 6; preheating and degassing in the preheating chamber 2, high-temperature treatment in the heat treatment chamber 5 or rapid cooling in the cooling chamber 3; independently controlling the vacuum system and process parameters of each chamber, and dynamically isolating each chamber from the transition chamber 6 through the insertion valve.

[0041] The specific implementation is as follows:

[0042] Loading: In a glove box with inert gas protection, the workpieces are loaded into the loading chamber through another insertion valve of the loading chamber 1. Then the insertion valve is closed, and the loading chamber is vacuumized by the vacuum system of the loading chamber.

[0043] Transferring to the transition chamber: After the pressure balancing between the loading chamber and the transition chamber 6, the insertion valve between the loading chamber and the transition chamber is opened. The AGV trolley 9 enters the loading chamber through mechanical transmission by the forks on the top of the AGV trolley 9 to take out the workpieces and transfer them to the transition chamber 6.

[0044] Preheating treatment: The AGV trolley 9 moves on the fixed track 7 to transfer the workpieces to the preheating chamber 2 for preheating treatment. The preheating chamber operates according to the set heating curve, and after the end, the AGV trolley transfers the workpieces to the heat treatment chamber 5.

[0045] High-temperature heat treatment: The heat treatment chamber 5 performs high-temperature treatment on the workpieces according to the set heating curve. After the end, the AGV trolley transfers the workpieces to the cooling chamber 3.

[0046] Rapid cooling: The cooling chamber 3 performs rapid cooling treatment on the workpieces to cool the workpieces from high temperature to normal temperature.

[0047] Taking out the workpieces: After the cooling is completed, the door of the cooling chamber is opened, and the workpieces are taken out.

[0048] The whole process is fully automated, which saves manpower and helps to reduce costs; each chamber can increase the number of chambers according to process requirements, which can improve production efficiency.

[0049] The device can realize simultaneous operation of multiple product processes in industrial production, which is illustrated by a specific example as follows:

[0050] In the Nd-Fe-B workpiece sintering process that needs to protect the feed, the workpiece can be connected with the loading chamber 1 plug valve in the glove box with inert gas protection, at this time the loading chamber 1 has been emptied of oxygen, also filled with protective gas, the plug valve of the connecting surface is opened, and the Nd-Fe-B workpiece is transferred to the loading chamber 1; then the loading chamber 1 plug valve is closed, the loading chamber 1 is evacuated by the vacuum system of the loading chamber 1, and when the pressure of the transition chamber 6 is balanced, the plug valve between the loading chamber 1 and the transition chamber 6 is opened, and the workpiece is transferred to the transition chamber 6 by the AGV car. According to the Nd-Fe-B sintering process, the workpiece is transferred to the preheating chamber 2 by the AGV car for preheating,

[0051] Since the other three heat treatment chambers 5 have the function of high-temperature heating, when the other chambers are in an idle state, the workpiece can also be directly transferred to the heat treatment chamber 5 by the AGV car 9 according to the process needs, and after the heating and holding are finished, the workpiece is transferred to the cooling chamber 3 at this temperature by the AGV car, and the workpiece is rapidly cooled in this chamber.

[0052] Because of the particularity of this set of equipment, the chambers and the transition chamber 6 are in parallel form, and these chambers have low-temperature heating vacuum chambers, high-temperature heating vacuum chambers, and independent cooling chambers for cooling, so this provides a variety of selection space for workpieces of different products and different processes. When the processing amount of workpieces for the same product is small, some heat treatment chambers are in an idle state, which can be used to process workpieces in different fields. Because each chamber is independent of each other, it is independent because each chamber has the function of separate heating; and each chamber is related to each other, because each chamber is connected through the transition chamber, and the workpieces in each chamber can be transferred to each other by the AGV car, so the whole set of equipment will not be limited to producing only one product, and can produce different types of products at the same time with multiple processes.

[0053] Since this set of equipment is a plurality of vacuum chambers with the same function, each bin section can be modularly assembled, and the bin sections and vacuum chambers can be increased according to the production capacity needs to achieve more efficient production.

Claims

1. A multi-chamber parallel type vacuum heat treatment furnace, characterized by, It comprises a charging chamber (1), a preheating chamber (2), a cooling chamber (3), a heat treatment chamber (5) and a transition chamber (6), the charging chamber (1), the preheating chamber (2), the cooling chamber (3), the heat treatment chamber (5) and the transition chamber (6) are respectively provided with a separate vacuum system, the charging chamber (1), the preheating chamber (2), the cooling chamber (3) and the heat treatment chamber (5) are connected on both sides of the length direction of the transition chamber (6) through on-off devices, and a workpiece transfer device is arranged in the transition chamber (6).

2. A multi-chamber vacuum heat treatment furnace in parallel type according to claim 1, wherein, The on-off device is a plug valve.

3. A multi-chamber vacuum heat treatment furnace in parallel type as claimed in claim 1, characterized in that, The workpiece transfer device comprises a fixed track (7) arranged in the transition chamber (6) and an AGV trolley (9), the fixed track (7) is arranged along the length direction of the transition chamber (6), and the AGV trolley (9) walks in the transition chamber (6) along the fixed track (7).

4. A multi-chamber vacuum heat treatment furnace in parallel type according to claim 2, wherein, The charging chamber (1) is provided with two plug valves, one plug valve is installed between the charging chamber (1) and the transition chamber (6), and the other plug valve is used for loading workpieces from outside the charging chamber (1).

5. A multi-chamber vacuum heat treatment furnace in parallel type as claimed in claim 3, wherein, The charging chamber (1), the preheating chamber (2), the cooling chamber (3) and the heat treatment chamber (5) are respectively provided with more than one.

6. A multi-chamber vacuum heat treatment furnace in parallel type as claimed in claim 1, characterized in that, The preheating chamber (2) provides a vacuum heating environment with a temperature not higher than 600 DEG C.

7. A multi-chamber vacuum heat treatment furnace in parallel type as claimed in claim 1, characterized in that, The heat treatment chamber (5) provides a vacuum heating environment with a temperature not lower than 1200 DEG C.

8. A multi-chamber vacuum heat treatment furnace in parallel type as claimed in claim 1, characterized in that, A heat exchanger and a cooling motor are arranged in the cooling chamber (3).

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