Vertical continuous furnace single-rod goods shelf structure with frame

Abstract

The utility model belongs to the field of vacuum coating, and particularly relates to a single-rod goods shelf structure of a vertical continuous furnace with a frame, which is characterized by comprising an upper support, a lower support and a frame, and the upper support is provided with a driving position for an external conveying driving structure to drive the upper support to move in a coating cavity; a lower bracket; two ends of the connecting rod are respectively fixed with the upper bracket and the lower bracket; the two ends of the bearing rod are connected with the upper support and the lower support respectively. According to the utility model, the goods shelf structure can be driven to vertically convey and coat a film between the film coating cavities, so that the continuous moving film coating requirement of a continuous furnace with a plurality of film coating cavities can be met; the goods shelf structure is smaller in size and more flexible to use so as to meet the film coating requirement of a film coating cavity with a small size; and based on the arrangement of the connecting rods, the stability of the goods shelf structure can be effectively improved, and the reliability of the goods shelf structure is better.

Description

TECHNICAL FIELD

[0001] The utility model belongs to vacuum plating field, especially relates to a vertical continuous furnace single rod shelf structure with frame. BACKGROUND

[0002] Vacuum plating technology is an important branch of vacuum application technology, it involves the use of electron beam, molecular beam, ion beam, plasma beam, radio frequency and magnetron etc. a series of new technologies, for a kind of in vacuum the metal, alloy or compound is evaporated or sputtered, makes it condensation and deposit on the workpiece surface and forms the thin film method. In vacuum plating processing, usually workpiece is installed on shelf, workpiece is carried through shelf to carry out plating in the plating cavity of plating equipment;However, the existing shelf is directly installed in the plating cavity, only applicable to single-cavity plating equipment, cannot be applicable to the continuous movement plating demand of continuous plating equipment with multiple cavities. SUMMARY

[0003] In order to solve the above problems, the primary purpose of the utility model is to provide a vertical continuous furnace single rod shelf structure with frame, which can meet the continuous movement plating demand of continuous furnace with multiple plating cavities.

[0004] Another purpose of the utility model is to provide a vertical continuous furnace single rod shelf structure with frame, which is smaller in size and more flexible in use, suitable for plating demand of small-volume plating cavities. The shelf structure is more stable in structure and better in reliability.

[0005] In order to achieve the above purpose, the technical scheme of the utility model is as follows.

[0006] A vertical continuous furnace single rod shelf structure with frame, comprising:

[0007] An upper support, which is provided with a driving position for driving the movement of the shelf in the plating cavity by an external conveying driving structure;

[0008] A lower support;

[0009] A connecting rod, which is fixed at both ends to the upper support and the lower support respectively;

[0010] A carrying rod for carrying workpieces, which is connected at both ends to the upper support and the lower support respectively.

[0011] In the shelf structure, when carrying out coating processing, the external conveying driving structure in the coating cavity can drive the shelf structure to vertically convey coating between the coating cavities, thereby meeting the continuous moving coating demand of the continuous furnace with multiple coating cavities; and based on the single-rod type bearing rod arranged between the upper support and the lower support, the width of the shelf structure is narrower, the volume is smaller, and the shelf structure is more flexible in use, so as to be suitable for the coating demand of the small-volume coating cavity; and based on the arrangement of the connecting rod, the stability of the shelf structure can be effectively improved, so that the reliability of the shelf structure is better.

[0012] Further, the number of the connecting rods is two, one end of each of the two connecting rods is fixed with the two ends of the lower support, and the other end of each of the two connecting rods is fixed with the upper support, and the bearing rod is located between the two connecting rods.

[0013] Further, the two ends of the bearing rod are rotatably arranged on the upper support and the lower support, and a rotating driving end is formed on the upper side of the upper support through which the one end of the bearing rod penetrates.

[0014] Further, the upper side of the upper support is further provided with a positioning part for positioning the position of the shelf structure.

[0015] Further, the positioning part is provided with a shelf positioning groove.

[0016] Further, the bearing rod and the upper support are rotatably connected through a rotating bearing.

[0017] Further, the rotating driving end is provided with two or more driving protrusions.

[0018] Further, the rotating driving end is further provided with a rotating positioning groove, and the two or more driving protrusions are respectively located on the two sides of the rotating positioning groove.

[0019] Further, the driving position is a driving groove arranged on the left side or the right side of the upper support.

[0020] Further, the number of the driving grooves is two or more.

[0021] Further, the driving groove comprises a vertical pushing surface and an inclined separation surface.

[0022] Further, the upper support or the lower support is provided with a guide assembly for guiding the movement of the shelf structure.

[0023] Further, the guide assembly comprises a plurality of guide bearings, and the guide bearings are rotatably arranged on the upper side of the upper support.

[0024] The beneficial effects of this utility model are as follows: In this rack structure, during the coating process, the external conveying drive structure inside the coating cavity can drive the rack structure to vertically convey the coating between the coating cavities through the drive position of the upper support, thereby meeting the continuous moving coating requirements of a continuous furnace with multiple coating cavities; and based on the setting of the single-rod bearing rod between the upper and lower supports, the rack structure is narrower and smaller in size, making it more flexible in use and suitable for the coating requirements of small-volume coating cavities; and based on the setting of the connecting rod, the stability of the rack structure can also be effectively improved, making the rack structure more reliable. Attached Figure Description

[0025] Figure 1 This is a schematic diagram of the structure of this utility model.

[0026] Icon labels:

[0027] 1. Upper support; 11. Drive slot; 111. Vertical pushing surface; 112. Inclined release surface; 12. Positioning part; 13. Shelf positioning slot;

[0028] 2. Lower support;

[0029] 3. Connecting rod;

[0030] 4. Support rod; 41. Rotary drive end; 42. Drive protrusion; 43. Rotary positioning groove; 44. Rotary bearing;

[0031] 5. Guide assembly; 51. Guide bearing. Detailed Implementation

[0032] To make the objectives, technical solutions, and advantages of this utility model clearer, the present utility model will be further described in detail below with reference to the accompanying drawings and embodiments. It should be understood that the specific embodiments described herein are merely illustrative of the present utility model and are not intended to limit the present utility model.

[0033] See Figure 1 This embodiment provides a framed vertical continuous furnace single-pole rack structure, including:

[0034] The upper support 1 is provided with a drive position for an external conveying drive structure to move within the coating cavity.

[0035] Lower bracket 2;

[0036] Connecting rod 3, with its two ends fixed to upper bracket 1 and lower bracket 2 respectively;

[0037] The support rod 4 is used to support the workpiece. The support rod 4 is vertically arranged between the upper support 1 and the lower support 2, and the upper and lower ends of the support rod 4 are respectively connected to the upper support 1 and the lower support 2.

[0038] In the shelf structure, when carrying out the coating process, the conveying driving structure in the coating cavity of the continuous furnace can drive the shelf structure to vertically convey the coating between the coating cavities, thereby meeting the continuous coating requirement of the continuous furnace with multiple coating cavities; based on the single-rod type bearing rod 4 arranged between the upper support 1 and the lower support 2, the width of the shelf structure is narrower, the volume is smaller, and the shelf structure is more flexible in use, so as to be suitable for the coating requirement of the small-volume coating cavity; and based on the arrangement of the connecting rod 3, the stability of the shelf structure can be effectively improved, so that the reliability of the shelf structure is better.

[0039] In the embodiment, the number of the connecting rods 3 is two, the lower ends of the two connecting rods 3 are respectively fixed to the left and right ends of the lower support 2, the upper ends of the two connecting rods 3 are respectively fixed to the upper support 1, and the bearing rod 4 is located between the two connecting rods 3. The arrangement of the two connecting rods 3 can make the structure between the upper support 1 and the lower support 2 more stable.

[0040] In the embodiment, the two ends of the bearing rod 4 are respectively rotatably arranged on the upper support 1 and the lower support 2, and the one end of the bearing rod 4 penetrates through the upper side of the upper support 1 to form a rotary driving end 41. The external rotary driving structure in the coating cavity can drive the bearing rod 4 to rotate through the rotary driving end 41 to rotate the workpiece on the bearing rod 4 for coating.

[0041] In the embodiment, the upper side of the upper support 1 is further provided with a positioning portion 12 for positioning the position of the shelf structure. When the shelf structure moves into the corresponding coating cavity for coating, the external positioning structure in the coating cavity can position the position of the shelf structure through the positioning portion 12 to ensure that the shelf structure is located at the correct coating position and the position is stable during coating.

[0042] In the embodiment, the positioning portion 12 is provided with a shelf positioning groove 13. The external positioning structure can be positioned by inserting into the shelf positioning groove 13.

[0043] In the embodiment, the bearing rod 4 and the upper support 1 are rotatably connected through a rotary bearing 44.

[0044] In the embodiment, the rotary driving end 41 is provided with two or more driving protrusions 42. The external rotary driving structure can drive the rotation of the rotary driving end 41 through the two or more driving protrusions 42.

[0045] In the embodiment, the rotating driving end 41 is further provided with a rotating positioning groove 43, and two or more driving protrusions 42 are respectively located on the two sides of the rotating positioning groove 43. The rotating positioning groove 43 is arranged to facilitate the external rotating driving structure to extend into the rotating positioning groove 43 to drive the rotating driving end 41 to rotate.

[0046] In the embodiment, the driving position is a driving groove 11 arranged on the left side or the right side of the upper support 1. The external conveying driving structure can drive the shelf structure to move by extending into the driving groove 11.

[0047] In the embodiment, the number of the driving grooves 11 is two or more.

[0048] In the embodiment, the driving groove 11 comprises a vertical pushing surface 111 and an inclined separation surface 112. The vertical pushing surface 111 is a position abutted by the external conveying driving structure when the external conveying driving structure drives the shelf structure, and the inclined separation surface 112 is a position passed through by the external conveying driving structure when the external conveying driving structure separates from the shelf structure.

[0049] In the embodiment, the upper support 1 or the lower support 2 is provided with a guide assembly 5 for guiding the movement of the shelf structure. The guide assembly 5 is arranged to guide the movement of the shelf structure.

[0050] In the embodiment, the guide assembly 5 comprises a plurality of guide bearings 51, and the guide bearings 51 are rotatably arranged on the upper side of the upper support 1.

[0051] It should be noted that the specific way of mounting, fixing or hanging the workpiece on the bearing rod 4 is the prior art, and is not the design point of the utility model, and thus is not described in detail in the utility model. In addition, the structures of the above-mentioned external structures are not the structures to be protected in the utility model, and thus are not described in detail in the utility model.

[0052] The above is only a preferred embodiment of the utility model, and is not used to limit the utility model. Any modification, equivalent replacement and improvement within the spirit and principle of the utility model should be included in the protection scope of the utility model.

Claims

1. A framed vertical continuous furnace single-pole rack structure, characterized in that, include: The upper support is provided with a drive position for an external conveying drive structure to move within the coating cavity; Lower support; A connecting rod, the two ends of which are fixed to the upper bracket and the lower bracket, respectively; A support rod for supporting the workpiece, the two ends of which are connected to the upper support and the lower support, respectively.

2. The framed vertical continuous furnace single-pole rack structure according to claim 1, characterized in that, The number of connecting rods is two. One end of each connecting rod is fixed to both ends of the lower bracket, and the other end of each connecting rod is fixed to the upper bracket. The bearing rod is located between the two connecting rods.

3. The framed vertical continuous furnace single-pole rack structure according to claim 1, characterized in that, The two ends of the support rod are rotatably mounted on the upper and lower supports, respectively, and one end of the support rod extends through the upper side of the upper support to form a rotation drive end.

4. The framed vertical continuous furnace single-pole rack structure according to claim 1, characterized in that, The upper side of the upper support is also provided with a positioning part for positioning the shelf structure.

5. The framed vertical continuous furnace single-pole rack structure according to claim 3, characterized in that, The support rod and the upper support are rotatably connected by a rotary bearing.

6. The framed vertical continuous furnace single-pole rack structure according to claim 3, characterized in that, The rotary drive end is provided with two or more drive protrusions.

7. A framed vertical continuous furnace single-pole rack structure according to claim 6, characterized in that, The rotary drive end is also provided with a rotary positioning groove, and two or more drive protrusions are located on both sides of the rotary positioning groove.

8. The framed vertical continuous furnace single-pole rack structure according to claim 1, characterized in that, The drive position is a drive slot located on the left or right side of the upper bracket.

9. A framed vertical continuous furnace single-pole rack structure according to any one of claims 1-8, characterized in that, The upper or lower support is equipped with a guide component for guiding the movement of the rack structure.

10. A framed vertical continuous furnace single-pole rack structure according to claim 9, characterized in that, The guide assembly includes multiple guide bearings, which are rotatably mounted on the upper side of the upper bracket.

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