Frameless multi-rod goods shelf structure of vertical continuous furnace

Abstract

The utility model belongs to the field of vacuum coating, and particularly relates to a frameless multi-rod goods shelf structure of a vertical continuous furnace, which comprises a support provided with a driving position for an external conveying driving structure to drive the support to move in a coating cavity; the bearing assembly comprises a feeding disc, a discharging disc and a plurality of bearing rods used for bearing workpieces, the two ends of each bearing rod are connected with the feeding disc and the discharging disc respectively, and the feeding disc is connected with the support. According to the utility model, the continuous moving coating requirement of the continuous furnace with a plurality of coating cavities can be met; based on the arrangement of the bearing assembly comprising the plurality of bearing rods between the upper bracket and the lower bracket, more workpieces can be borne by the plurality of bearing rods for film coating, and the film coating efficiency of the workpieces is higher; and when the goods shelf structure is used for coating, the bearing assemblies are only fixed through the supports, no frame or other shielding structures exist on the periphery, the workpieces cannot be shielded, and the coating effect of the workpieces is better.

Description

TECHNICAL FIELD

[0001] The utility model belongs to vacuum plating field, especially relates to a frameless vertical continuous furnace multi -pole shelf structure. BACKGROUND

[0002] Vacuum plating technology is an important branch of vacuum application technology, it involves the use of electron beam, molecular beam, ion beam, plasma beam, radio frequency and magnetron etc. a series of new technologies, for a kind of in vacuum the metal, alloy or compound is evaporated or sputtered, makes it condensation and deposit on the workpiece surface and forms the thin film method. In vacuum plating processing, usually workpiece is installed on the shelf, workpiece is carried through the shelf to carry out plating in the plating cavity of plating equipment;However, the existing shelf is directly installed in the plating cavity, only applicable to the single cavity plating equipment, cannot be applicable to the continuous plating requirement of continuous plating equipment with multiple cavities. SUMMARY

[0003] In order to solve the above problems, the primary purpose of the utility model is to provide a frameless vertical continuous furnace multi -pole shelf structure, the shelf structure can meet the continuous moving plating requirement of continuous furnace with multiple plating cavities.

[0004] Another purpose of the utility model is to provide a frameless vertical continuous furnace multi -pole shelf structure, the shelf structure has multiple carrying rods, and the plating efficiency of workpiece is higher;And the shelf structure does not block workpiece when plating, so that the plating effect of workpiece is better.

[0005] In order to achieve the above purpose, the technical scheme of the utility model is as follows.

[0006] A frameless vertical continuous furnace multi -pole shelf structure, characterized by comprising:

[0007] Support, the support is provided with the drive position for the external conveying drive structure to drive it to move in the plating cavity;

[0008] Carrying assembly, the carrying assembly includes a feeding disc, a discharging disc and multiple carrying rods for carrying workpieces, and the two ends of the multiple carrying rods are connected with the feeding disc and the discharging disc respectively, and the feeding disc is connected with the support.

[0009] In the shelf structure, when the coating process is carried out, the external conveying driving structure in the coating cavity can drive the shelf structure to vertically convey the coating between the coating cavities, thereby meeting the continuous movement coating requirement of the continuous furnace with multiple coating cavities; and based on the arrangement of the bearing assembly including the multiple bearing rods between the upper support and the lower support, more workpieces can be carried by the multiple bearing rods for coating, and the coating efficiency of the workpieces is higher; and when the shelf structure is coated, the bearing assembly is only fixed by the support, and there is no other shielding structure such as frame around the bearing assembly, so that the workpieces are not shielded, and the coating effect of the workpieces is better.

[0010] Further, the bearing assembly further comprises a rotating rod, one end of the rotating rod is connected with the feeding disc, the other end of the rotating rod is rotatably connected with the support, and the other end of the rotating rod penetrates out of the upper side of the support to form a rotating driving end.

[0011] Further, the bearing assembly further comprises a sun gear and multiple planetary gears, the sun gear and the multiple planetary gears are rotatably arranged in the feeding disc, the multiple planetary gears are arranged around the side of the sun gear to mesh with the sun gear, one end of the multiple bearing rods penetrates into the feeding disc to be connected with the multiple planetary gears respectively; the limiting rod for limiting the rotation of the sun gear is further arranged on the feeding disc, one end of the limiting rod penetrates through the feeding disc to form a positioning end for cooperating with the external positioning structure at the coating position, the other end of the limiting rod penetrates into the feeding disc to be connected with the sun gear.

[0012] Further, the bearing assembly further comprises a transmission sleeve rod, two ends of the transmission sleeve rod are connected with the feeding disc and the feeding disc respectively, and the transmission sleeve rod is rotatably sleeved outside the limiting rod.

[0013] Further, the upper side of the support is further provided with a positioning portion for positioning the position of the shelf structure.

[0014] Further, the positioning portion is provided with a shelf positioning groove.

[0015] Further, the transmission sleeve rod and the support are rotatably connected through a bearing.

[0016] Further, the rotating driving end is provided with two or more driving protrusions.

[0017] Further, the rotating driving end is further provided with a rotating positioning groove, and the two or more driving protrusions are located on both sides of the rotating positioning groove.

[0018] Further, the driving position is a driving groove arranged on the left side or the right side of the support.

[0019] Further, the number of the driving grooves is two or more.

[0020] Further, the bracket is provided with a guide assembly for guiding the movement of the shelf structure.

[0021] Further, the guide assembly comprises a plurality of guide bearings rotatably arranged on the upper side of the bracket.

[0022] The beneficial effects of the utility model lie in that, in the shelf structure, when film plating processing is carried out, the external conveying driving structure in the film plating cavity can drive the shelf structure to vertically convey film plating between the film plating cavities through the driving position of the bracket, thereby meeting the continuous film plating requirement of the continuous furnace with multiple film plating cavities; and based on the arrangement of the bearing assembly comprising the multiple bearing rods between the upper bracket and the lower bracket, more workpieces can be plated through the multiple bearing rods, and the film plating efficiency of the workpieces is higher; and when the shelf structure is plated, the bearing assembly is only fixed through the bracket, and there is no frame or other shielding structure around, so that the workpieces are not shielded, and the film plating effect of the workpieces is better. BRIEF DESCRIPTION OF DRAWINGS

[0023] Fig. 1 is the structure schematic view when the utility model cooperates with the external positioning structure.

[0024] Fig. 2 is the sectional view of the utility model.

[0025] REFERENCE NUMERALS:

[0026] 1, bracket; 11, driving groove; 12, positioning portion; 13, shelf positioning groove;

[0027] 2, bearing assembly; 21, feeding disc; 22, discharging disc; 23, bearing rod; 24, rotating rod; 241, rotating driving end; 242, driving protrusion; 243, rotating positioning groove; 25, sun gear; 26, planetary gear; 27, limiting rod; 271, positioning end; 28, transmission sleeve rod;

[0028] 3, guide assembly; 31, guide bearing;

[0029] 4, external positioning structure. DETAILED DESCRIPTION

[0030] In order to make the purpose, technical scheme and advantages of the utility model more clear, the utility model is further described in detail below in combination with the drawings and examples. It should be understood that the specific examples described herein are only used to explain the utility model, and are not used to limit the utility model.

[0031] Referring to Figs. 1-2 , the embodiment provides a frameless vertical continuous furnace multi-rod shelf structure, which comprises:

[0032] The bracket 1 is provided with a driving position for driving the bracket 1 to move in the coating cavity by an external conveying driving structure;

[0033] The bearing assembly 2 comprises a feeding disc 21, a discharging disc 22 and a plurality of bearing rods 23 for bearing workpieces, both ends of the plurality of bearing rods 23 are respectively connected with the feeding disc 21 and the discharging disc 22, and the feeding disc 21 is connected with the bracket 1.

[0034] In the shelf structure, when the coating process is performed, the external conveying driving structure in the coating cavity can drive the shelf structure to vertically convey coating between the coating cavities through the driving position of the bracket 1, thereby meeting the continuous movement coating demand of the continuous furnace with multiple coating cavities; and based on the bearing assembly 2 comprising the plurality of bearing rods 23 between the upper bracket 1 and the lower bracket 1, more workpieces can be coated by the plurality of bearing rods 23, and the coating efficiency of the workpieces is higher; and when the shelf structure is coated, the bearing assembly 2 is only fixed by the bracket 1, and there is no other shielding structure such as frame around the bearing assembly 2, so that the workpieces are not shielded, and the coating effect of the workpieces is better.

[0035] In the embodiment, the bearing assembly 2 further comprises a rotating rod 24, one end of the rotating rod 24 is connected with the feeding disc 21, the other end of the rotating rod 24 is rotatably connected with the bracket 1, and the other end of the rotating rod 24 penetrates through the upper side of the bracket 1 to form a rotating driving end 241. The external rotating driving structure in the coating cavity can drive the bearing assembly 2 to rotate through the rotating driving end 241 to rotate the workpieces on the bearing rods 23 for coating.

[0036] In the embodiment, the bearing assembly 2 further comprises a sun gear 25 and a plurality of planetary gears 26, the sun gear 25 and the plurality of planetary gears 26 are rotatably arranged in the upper disc 21, the plurality of planetary gears 26 are arranged around the sun gear 25 to engage with the sun gear 25, and one end of each of the plurality of bearing rods 23 extends into the upper disc 21 to be connected with the plurality of planetary gears 26 respectively. The lower disc 22 is further provided with a limiting rod 27 for limiting the rotation of the sun gear 25, one end of the limiting rod 27 penetrates through the lower disc 22 to form a positioning end 271 for cooperating with the external positioning structure 4 at the coating position, and the other end of the limiting rod 27 extends into the upper disc 21 to be connected with the sun gear 25. When the shelf structure enters the coating position of the coating cavity, the external positioning structure 4 can be moved to the positioning end 271 to be positioned; at this time, the rotary driving end 241 is driven to rotate by the external rotary driving structure to perform rotary coating; specifically, in the process, the rotary driving end 241 drives the upper disc 21 to rotate, at this time, the sun gear 25 is limited by the cooperation of the limiting rod 27 and the external positioning structure 4 and cannot rotate, so the sun gear 25 does not rotate with the upper disc 21; further, when the upper disc 21 rotates, the plurality of planetary gears 26 and the lower disc 22 are driven to rotate, at this time, the planetary gears 26 rotate around the sun gear 25 to engage, so that the bearing rod 23 not only revolves around the axis, but also rotates to improve the coating effect of the workpiece on the bearing rod 23. Specifically, the limiting rod 27 can be a square rod or provided with flat ends or fixed to the sun gear 25 and the external positioning structure 4 by other fixing structures at both ends to limit the rotation of the sun gear 25, so that the sun gear 25 does not rotate when the upper disc 21 rotates.

[0037] In the embodiment, the bearing assembly 2 further comprises a transmission sleeve rod 28, both ends of the transmission sleeve rod 28 are connected with the upper disc 21 and the lower disc 22 respectively, and the transmission sleeve rod 28 is rotatably sleeved outside the limiting rod 27. The transmission sleeve rod 28 can more stably drive the lower disc 22 to rotate when the upper disc 21 rotates.

[0038] In the embodiment, the bracket 1 is further provided with a positioning portion 12 for positioning the position of the shelf structure. When the shelf structure moves into the coating cavity for coating, the external locking structure in the coating cavity can position the position of the shelf structure through the positioning portion 12 to ensure that the shelf structure is located at the correct coating position and the position of the shelf is stable during coating.

[0039] In the embodiment, the positioning portion 12 is provided with a shelf positioning groove 13. The external locking structure can be positioned by inserting into the shelf positioning groove 13.

[0040] In the embodiment, the transmission sleeve rod 28 is rotatably connected with the support 1 through a bearing.

[0041] In the embodiment, the rotating driving end 241 is provided with two or more driving protrusions 242. The external rotating driving structure can drive the rotation of the rotating driving end 241 through the two or more protrusions.

[0042] In the embodiment, the rotating driving end 241 is further provided with a rotating positioning groove 243, and the two or more driving protrusions 242 are respectively located on the two sides of the rotating positioning groove 243. The rotating positioning groove 243 is arranged to facilitate the external rotating driving structure to extend into the rotating positioning groove 243 to drive the rotation of the rotating driving end 241.

[0043] In the embodiment, the driving position is a driving groove 11 arranged on the left side or the right side of the support 1. The external conveying driving structure can drive the movement of the shelf structure by extending into the driving groove 11.

[0044] In the embodiment, the number of the driving grooves 11 is two or more.

[0045] In the embodiment, the support 1 is provided with a guiding assembly 3 for guiding the movement of the shelf structure. The guiding assembly 3 is arranged to guide the movement of the shelf structure.

[0046] In the embodiment, the guiding assembly 3 includes a plurality of guiding bearings 31 rotatably arranged on the upper side of the support 1.

[0047] It is worth noting that the specific way of mounting or fixing or hanging the workpiece on the bearing rod 23 is prior art, and is not the design point of the utility model, so it is not described in the utility model. In addition, the structure of each external structure is not the structure to be protected by the utility model, so it is not described in the utility model.

[0048] The above is only a preferred embodiment of the utility model, and is not used to limit the utility model. Any modification, equivalent replacement and improvement within the spirit and principle of the utility model should be included in the protection scope of the utility model.

Claims

1. A frameless vertical continuous furnace multi-bar rack structure, characterized in that, include: A support frame is provided with a drive position for an external conveying drive structure to move within the coating cavity. The support assembly includes an upper loading tray, an lower loading tray, and multiple support rods for supporting workpieces. Both ends of the multiple support rods are connected to the upper loading tray and the lower loading tray, respectively. The upper loading tray is connected to the bracket.

2. The frameless vertical continuous furnace multi-bar rack structure according to claim 1, characterized in that, The supporting component also includes a rotating rod, one end of which is connected to the feeding tray, and the other end of which is rotatably connected to the bracket, with the other end of the rotating rod extending through the upper side of the bracket to form a rotation drive end.

3. The frameless vertical continuous furnace multi-rod rack structure according to claim 2, characterized in that, The support assembly also includes a sun gear and multiple planetary gears, all of which are rotatably mounted in the loading tray. The multiple planetary gears are arranged around the sun gear to mesh with it. One end of each of the multiple support rods extends into the loading tray to connect with the multiple planetary gears respectively. The unloading tray is also provided with a limiting rod to restrict the rotation of the sun gear. One end of the limiting rod passes through the unloading tray to form a positioning end for cooperating with an external positioning structure at the coating position. The other end of the limiting rod extends into the loading tray to connect with the sun gear.

4. The frameless vertical continuous furnace multi-rod rack structure according to claim 3, characterized in that, The load-bearing assembly also includes a transmission sleeve rod, the two ends of which are connected to the upper and lower feed trays respectively, and the transmission sleeve rod is rotatably sleeved on the outside of the limiting rod.

5. The frameless vertical continuous furnace multi-bar rack structure according to claim 1, characterized in that, The upper side of the support is also provided with a positioning part for positioning the shelf structure.

6. The frameless vertical continuous furnace multi-rod rack structure according to claim 2, characterized in that, The rotary drive end is provided with two or more drive protrusions.

7. The frameless vertical continuous furnace multi-rod rack structure according to claim 6, characterized in that, The rotary drive end is also provided with a rotary positioning groove, and two or more drive protrusions are located on both sides of the rotary positioning groove.

8. The frameless vertical continuous furnace multi-rod rack structure according to claim 1, characterized in that, Furthermore, the drive position is a drive slot located on the left or right side of the bracket.

9. A frameless vertical continuous furnace multi-bar rack structure according to any one of claims 1-8, characterized in that, The support frame is equipped with a guide assembly for guiding the movement of the shelving structure.

10. The frameless vertical continuous furnace multi-bar rack structure according to claim 9, characterized in that, The guide assembly includes multiple guide bearings, which are rotatably mounted on the upper side of the bracket.

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