Device with deviation rectification detection and positioning functions

Abstract

The utility model relates to the technical field of semiconductor plate processing, in particular to a device with deviation correction detection and positioning functions. The device comprises a plate deviation rectification detection station, a jig positioning station, a deviation rectification detection assembly, a mobile camera group, a micro-motion plate beating air floating platform, a jig pin detection camera group and a jig pin detection horizontal camera group, wherein the micro-motion plate beating air floating platform is mounted on the plate deviation rectification detection station; the deviation rectification detection assembly and the movable camera set are installed above the plate deviation rectification detection station and are aligned with a plate on the micro-motion plate beating air floating platform, and the jig pin detection camera set and the jig pin detection horizontal camera set are installed on one side of the jig positioning station and are aligned with a jig on the jig positioning station. The plate is carried to the jig of the jig positioning station from the plate deviation correction detection station through an external conveying module. The device can adapt to detection of plate products of multiple sizes, the accuracy of plate beating, code scanning and pin detection is improved, and integration of multiple functions is achieved.

Description

TECHNICAL FIELD

[0001] The utility model relates to the technical field of semiconductor plate processing, especially to a device with deviation rectifying detection and positioning function. BACKGROUND

[0002] From the perspective of the plate clapping mechanism, the general plate clapping mechanism adopts the mode of platform plate clapping or conveying section plate clapping. The plate clapping mechanism greatly improves the production efficiency through automatic operation. The plate clapping mechanism is positioned at the specified position under the action of the motor.

[0003] From the perspective of the jig pin detection, pin detection has begun to be popular in industrial production. In industrial production, the pin is assembled on the jig in advance. The jig is conveyed by the module. The position and perpendicularity of the hole on the jig are detected after reaching the specified position to ensure product qualification.

[0004] The existing plate clapping mechanism and jig pin detection mechanism have the following problems:

[0005] (1) In a dark or lightless environment, the camera and the code reader cannot capture the plate and the two-dimensional code, so that the deviation rectifying and positioning and the code reading functions cannot normally operate, affecting product quality.

[0006] (2) The platform plate clapping and the conveying section plate clapping mode directly contact the plate clapping mechanism with the plate, which is easy to scratch the plate due to friction and generate dust pollution, thereby affecting the cleanliness of the plate and increasing the rework rate and scrap rate of the product.

[0007] (3) The function is single, and the plate clapping, positioning and code reading cannot be performed at one time. Multiple production lines and multiple machines are needed to interact, which is complicated, affects production efficiency, and increases labor cost investment.

[0008] (4) The existing plate clapping mechanism and pin detection mechanism can generally only detect one size of jig. For different sizes of products, different jigs need to be used for conveying. The current mechanism cannot adjust according to the size of the product. Different sizes of plates cannot be produced in a short time. The time investment is needed to replace the jig, the initial capital investment will also increase, which is not conducive to product production and is difficult to adapt to changes in market demand. INVENTION CONTENTS

[0009] The utility model provides a device with deviation rectifying detection and positioning function, which aims to solve the technical problems of the existing plate clapping mechanism and jig pin detection mechanism.

[0010] The utility model provides a device with deviation rectification detection and positioning function, including board deviation rectification detection station, fixture positioning station, deviation rectification detection subassembly, mobile camera group, micro -inching beat plate air cushion platform, fixture peg detection camera group, fixture peg detection horizontal camera group, micro -inching beat plate air cushion platform installs on board deviation rectification detection station, deviation rectification detection subassembly, mobile camera group install above board deviation rectification detection station and align the board on micro -inching beat plate air cushion platform, fixture peg detection camera group, fixture peg detection horizontal camera group install one side of fixture positioning station and align the fixture on fixture positioning station, and board is carried to the fixture on fixture positioning station from board deviation rectification detection station through external conveying module.

[0011] As a further improvement of the utility model, the deviation rectification detection subassembly comprises a visual base plate, a deviation rectification support and a first deviation rectification camera, a plurality of mounting holes are provided on the visual base plate, the first deviation rectification camera is connected to the mounting holes of the visual base plate through the deviation rectification support, and the lens of the first deviation rectification camera is aligned with the board on the micro-inching beat plate air cushion platform.

[0012] As a further improvement of the utility model, the deviation rectification detection subassembly further comprises a code reading head, the code reading head is connected to the mounting holes of the visual base plate through the deviation rectification support, and the lens of the code reading head is aligned with the board on the micro-inching beat plate air cushion platform.

[0013] As a further improvement of the utility model, the mobile camera group comprises a camera mounting plate, a mobile motor, a mobile screw rod, a sliding block, a camera support and a second deviation rectification camera, the camera mounting plate is connected to the mounting holes of the visual base plate, the mobile motor is connected to the camera mounting plate, the output end of the mobile motor is connected to the mobile screw rod, the sliding block is threadedly connected to the mobile screw rod, the second deviation rectification camera is connected to the sliding block through the camera support, and the lens of the second deviation rectification camera is aligned with the board on the micro-inching beat plate air cushion platform.

[0014] As a further improvement of the utility model, the micro-inching beat plate air cushion platform comprises a platform mounting plate, a platform light source and a light transmission plate, the platform light source is connected to the platform mounting plate, the light transmission plate is connected above the platform light source, air outlet holes and air inlet interfaces are provided on the light transmission plate, the air outlet holes are uniformly distributed on the surface of the light transmission plate, the air inlet interfaces are communicated with the air outlet holes through the inner cavity of the light transmission plate, the air inlet interfaces are connected with a gas supply device, and the board is placed on the surface of the light transmission plate.

[0015] As a further improvement of the utility model, the micro-motion beating plate air floating platform further comprises a beating plate rod, a beating plate lens, a beating plate motor, a beating plate lead screw and a beating plate slide rail, the beating plate motor and the beating plate slide rail are connected at the bottom of the platform mounting plate, the output end of the beating plate motor is connected with the beating plate lead screw, the bottom of the beating plate rod is slidably connected with the beating plate slide rail, and the bottom of the beating plate rod is further threadedly connected with the beating plate lead screw, the beating plate lens is connected at the top of the beating plate rod, and the beating plate lens is aligned with the surface of the light transmission plate.

[0016] As a further improvement of the utility model, the micro-motion beating plate air floating platform further comprises a position alignment robot, and the position alignment robot is connected at the bottom of the platform mounting plate.

[0017] As a further improvement of the utility model, the position alignment robot comprises an X-axis fine adjustment slide plate, a Y-axis fine adjustment slide plate, a rotary fine adjustment plate and a robot base, the robot base is fixedly installed, the X-axis fine adjustment slide plate is slidably connected to the robot base, the Y-axis fine adjustment slide plate is slidably connected to the X-axis fine adjustment slide plate, the rotary fine adjustment plate is rotatably connected to the Y-axis fine adjustment slide plate, and the bottom of the platform mounting plate is fixedly connected to the rotary fine adjustment plate.

[0018] As a further improvement of the utility model, the jig pin detection camera group comprises a detection support, a detection light source and a first detection camera, the detection support is installed at one side of the jig positioning station, the detection light source is connected to the detection support and aligned with the jig positioning station, and the first detection camera is connected to the detection support and aligned above the jig of the jig positioning station.

[0019] As a further improvement of the utility model, the jig pin detection horizontal camera group comprises a detection support and a second detection camera, the detection support is installed at one side of the jig positioning station, and the second detection camera is connected to the detection support and horizontally aligned with the jig of the jig positioning station.

[0020] The utility model discloses the beneficial effect is: through the adjustable nature of deviation rectification detection component and mobile camera group, can adapt to the detection of multiple size plate product, use micro-motion beating plate air floating platform can effectively reduce the product surface wear, and the jig pin detection camera group provides enough light source and increases the accuracy of beating plate, code scanning and pin detection, and the jig pin detection camera group and the jig pin detection horizontal camera group cooperate, and the cover closing degree before and after the jig opening and closing is detected from multiple directions, and the whole machine realizes the size adjustment of plate, beating plate, positioning, code reading, jig detection multifunctional integration. BRIEF DESCRIPTION OF DRAWINGS

[0021] Figure 1 It is the whole structure diagram of the utility model with deviation rectification detection and positioning function device.

[0022] Figure 2is a structure diagram of the deviation rectifying detection assembly in the utility model;

[0023] Figure 3 is a structure diagram of the mobile camera group in the utility model;

[0024] Figure 4 is an upper view structure diagram of the micro-motion platen air floating platform in the utility model;

[0025] Figure 5 is a lower view structure diagram of the micro-motion platen air floating platform in the utility model;

[0026] Figure 6 is a structure diagram of the jig pin detection camera group in the utility model;

[0027] Figure 7 is a structure diagram of the jig pin detection horizontal camera group in the utility model. DETAILED DESCRIPTION

[0028] In order to make the purpose, technical scheme and advantages of the utility model more clearly, the utility model is further described in detail below by combining with the drawings and examples.

[0029] As Figure 1 shown, the device with deviation rectifying detection and positioning function of the utility model, including board rectifying detection station 1, jig positioning station 2, deviation rectifying detection assembly 3, mobile camera group 4, micro-motion platen air floating platform 5, jig pin detection camera group 6, jig pin detection horizontal camera group 7, micro-motion platen air floating platform 5 is installed on board rectifying detection station 1, deviation rectifying detection assembly 3, mobile camera group 4 is installed on board rectifying detection station 1 top and aligns the board piece on micro-motion platen air floating platform 5, jig pin detection camera group 6, jig pin detection horizontal camera group 7 is installed on the side of jig positioning station 2 and aligns the jig on jig positioning station 2, board piece 8 is handled from board rectifying detection station 1 to the jig 9 on jig positioning station 2 by external conveying module.

[0030] As Figure 2 shown, deviation rectifying detection assembly 3 includes visual bottom plate 31, deviation rectifying support 32, first deviation rectifying camera 34, visual bottom plate 31 is equipped with multiple mounting hole positions 33, first deviation rectifying camera 34 is connected on the mounting hole position 33 of visual bottom plate 31 through deviation rectifying support 32, the lens of first deviation rectifying camera 34 aligns board piece 8 on micro-motion platen air floating platform 5.

[0031] Deviation rectifying detection assembly 3 further includes code reading head 35, code reading head 35 is connected on the mounting hole position 33 of visual bottom plate 31 through deviation rectifying support 32, the lens of code reading head 35 aligns board piece 8 on micro-motion platen air floating platform 5.

[0032] The main function of the deviation correction detection assembly 3 is to ensure the accuracy and stability of the plate in the production process. By detecting the position of the plate, the accurate deviation correction control system sends signals to the central processor. According to the preset instructions, the central processor controls the micro-motion plate air floating platform 5 to swing through the positioning robot 59, corrects the position of the plate 8, improves the accuracy of plate positioning, and improves the efficiency of the production line and the quality of the products. The design of the multiple mounting holes 33 on the top of the visual base plate 31 can change the installation position of the first deviation correction camera 34 and the code reading head 35 according to the actual situation, which is suitable for deviation correction positioning in various situations. The code reading head 35 can be used for plate production process tracing, which is beneficial to production process monitoring.

[0033] As shown in Figure 3 , the mobile camera group 4 includes a camera mounting plate 41, a mobile motor, a mobile lead screw 42, a sliding block 43, a camera support 45, and a second deviation correction camera 44. The camera mounting plate 41 is connected to the mounting hole 33 of the visual base plate 31, the mobile motor is connected to the camera mounting plate 41, the output end of the mobile motor is connected to the mobile lead screw 42, the sliding block 43 is threadedly connected to the mobile lead screw 42, and the second deviation correction camera 44 is connected to the sliding block 43 through the camera support 45. The lens of the second deviation correction camera 44 is aligned with the plate 8 on the micro-motion plate air floating platform 5.

[0034] The function of the mobile camera group 4 is to move the second deviation correction camera 44 through the cooperation of the mobile motor and the mobile lead screw 42. According to different sizes of the plate 8, the position of the second deviation correction camera 44 can be adjusted, so that the deviation correction effect can be achieved for plates of different sizes.

[0035] As shown in Figure 4 and Figure 5 , the micro-motion plate air floating platform 5 includes a platform mounting plate 51 and a platform light source 52, and a light transmission plate 53. The platform light source 52 is connected to the platform mounting plate 51, and the light transmission plate 53 is connected above the platform light source 52. The light transmission plate 53 is provided with gas outlets 531 and a gas inlet interface 532. The multiple gas outlets 531 are uniformly distributed on the surface of the light transmission plate 53, the gas inlet interface 532 communicates with the gas outlets 531 through the inner cavity of the light transmission plate 53, the gas inlet interface 532 is connected to a gas supply device, and the plate 8 is placed on the surface of the light transmission plate 53.

[0036] The platform light source 52 can illuminate the plate placed above through the light transmission plate 53, and provide light source for the shooting of the plate camera lens 55, the first deviation correction camera 34, and the second deviation correction camera 44. The light transmission plate 53 introduces air flow through the gas inlet interface 532 and discharges it from the multiple gas outlets 531, forming an air film on the surface of the light transmission plate 53, so that the plate 8 does not directly contact the surface of the light transmission plate 53, avoiding abrasion of the plate.

[0037] The micro-ping plate air floating platform 5 further comprises a ping plate rod 54, a ping plate lens 55, a ping plate motor 56, a ping plate lead screw 57, and a ping plate sliding rail 58. The ping plate motor 56 and the ping plate sliding rail 58 are linked at the bottom of the platform mounting plate 51. The output end of the ping plate motor 56 is connected to the ping plate lead screw 57. The bottom of the ping plate rod 54 is slidingly connected to the ping plate sliding rail 58, and is further threadedly connected to the ping plate lead screw 57. The ping plate lens 55 is connected to the top of the ping plate rod 54 and is aligned with the surface of the light transmission plate 53. The ping plate motor 56 drives the ping plate rod 54 to move along the ping plate sliding rail 58 through the ping plate lead screw 57, thereby driving the ping plate lens 55 to scan above the surface of the light transmission plate 53, so as to detect whether there is a defect on the surface of the board piece 8.

[0038] The micro-ping plate air floating platform 5 further comprises a positioning robot 59 connected to the bottom of the platform mounting plate 51. The positioning robot 59 comprises an X-axis fine adjustment sliding plate 592, a Y-axis fine adjustment sliding plate 593, a rotary fine adjustment plate 594, and a robot base 591. The robot base 591 is fixedly installed. The X-axis fine adjustment sliding plate 592 is slidingly connected to the robot base 591. The Y-axis fine adjustment sliding plate 593 is slidingly connected to the X-axis fine adjustment sliding plate 592. The rotary fine adjustment plate 594 is rotatably connected to the Y-axis fine adjustment sliding plate 593. The bottom of the platform mounting plate is fixedly connected to the rotary fine adjustment plate 594. The X-axis fine adjustment sliding plate 592 can be finely adjusted and moved in the left-right direction relative to the robot base 591. The Y-axis fine adjustment sliding plate 593 can be finely adjusted and moved in the front-rear direction relative to the X-axis fine adjustment sliding plate 592. The rotary fine adjustment plate 594 can be rotated relative to the Y-axis fine adjustment sliding plate 593. The cooperation of the X-axis fine adjustment sliding plate 592, the Y-axis fine adjustment sliding plate 593, and the rotary fine adjustment plate 594 realizes the position adjustment of the platform mounting plate 51 in XYθ, thereby completing the positioning of the board piece 8 on the micro-ping plate air floating platform 5.

[0039] The micro-ping plate air floating platform 5 can effectively reduce or eliminate errors caused by improper placement and deviation of the board piece during production. The positioning accuracy can reach ±2μm. The board piece and the air floating platform are in a non-contact state through air floating adjustment, which avoids direct contact during the position adjustment of the board piece and causes wear on the surface of the board piece. The size, shape, position, and surface defects of the board piece are detected. This non-contact detection method can significantly improve the precision and quality of the product, reduce the waste rate and rework cost, and help to improve the stability of the production equipment and ensure the continuity and efficient operation of the production line.

[0040] As Figure 6As shown, the jig pin detection camera group 6 includes a detection bracket 61, a detection light source 62, and a first detection camera 63. The detection bracket 61 is installed on one side of the jig positioning station 2, the detection light source 62 is connected to the detection bracket 61 and aligned with the jig positioning station 2, and the first detection camera 63 is connected to the detection bracket 61 and aligned above the jig 9 of the jig positioning station 2.

[0041] The main function of the jig pin detection camera group 6 is to capture the two hole positions of the jig edge. The detection bracket 61 is used to erect the detection light source 62 and the first detection camera 63 at a high position of the jig positioning station 2. The light source is used to illuminate the hole position of the jig 9, and the first detection camera 63 is used to detect whether the hole position of the jig 9 matches the pin position and whether the pin is inserted into the hole. The two-dimensional code on the jig is identified to trace the production process of the product.

[0042] As shown in Figure 7 The jig pin detection horizontal camera group 7 includes a detection support 71 and a second detection camera 72. The detection support 71 is installed on one side of the jig positioning station 2, and the second detection camera 72 is connected to the detection support 71. The second detection camera 72 is horizontally aligned with the jig 9 of the jig positioning station 2.

[0043] The second detection camera 72 is erected on the horizontal position of the jig positioning station 2 through the detection support 71, so that the horizontal identification camera can shoot the jig 9 in the horizontal direction. The jig pin detection camera group 6 can be used to judge the closing degree of the upper cover plate before and after the opening and closing of the jig 9, capture whether the pin is inserted into the hole of the plate, judge whether the hole distance is abnormal, realize double detection, and improve the detection success rate.

[0044] The micro-motion plate shooting mechanism mainly includes a deviation correction detection assembly 3, a moving camera group 4, and a micro-motion plate air floating platform 5. The micro-motion plate shooting mechanism first shoots the plate through the plate shooting mechanism, then detects the position between the plates through the camera, and finally adjusts accurately and stably within the stroke range by using the alignment robot 59 to ensure that all parts of the equipment can be accurately aligned and matched, avoid errors and instability of the plate caused by large-scale adjustment, and effectively protect the surface of the product to ensure the quality of the product.

[0045] The working process of the micro-motion plate shooting mechanism is as follows:

[0046] 1) Adjust the first deviation correction camera 34, the second deviation correction camera 44, and the code reader according to the size of the plate and the position to be detected.

[0047] 2) After the suction cup places the unprocessed plate on the micro-motion plate air floating platform 5, the plate shooting rod 54 drives the plate shooting lens 55 to first shoot and clamp parallel to the short side of the plate under the drive of the plate shooting motor 56.

[0048] 3) First deviation rectification camera 34 and second deviation rectification camera 44 will transmit the captured board position to the central processor with the assistance of light source, the central processor will analyze the board state and position deviation data, and then feedback the deviation data to the alignment robot 59;

[0049] 4) The alignment robot 59 will adjust the position of the board in front, back, left, right and at a certain angle according to the data until the board is located at the set board taking position;

[0050] 5) After positioning, the code reader will scan the two-dimensional code on the board, record and sort the board, and realize the informatization management and production process traceability of the production process;

[0051] 6) If the board state is judged as NG, the NG board will be transferred to the NG position by the suction cup, and the jig loading process will not be performed.

[0052] The jig pin detection camera group 6 and the jig pin detection horizontal camera group 7 can shoot the pin from multiple angles to determine whether the position of the jig is accurate by detecting the position of the pin. The detection camera group can detect whether the cover plate has been assembled, check whether the pin is aligned with the mounting hole of the board, the height difference, etc., to ensure the accuracy of assembly.

[0053] The working process of the jig pin detection camera group 6 and the jig pin detection horizontal camera group 7 is as follows:

[0054] 1) The jig is sent to the set position by the horizontal movement module;

[0055] 2) The first detection camera 63 on the top and the second detection camera 72 group on the horizontal first use the detection light source 62 to position the pin, and then detect the cover plate after confirming the position;

[0056] 3) The detection content is the accuracy of the position of the jig and the closing degree of the cover plate before and after the opening and closing of the jig, and the obtained picture and data are sent to the central processor;

[0057] 4) The central processor calculates the positioning of the hole, the distance, and whether the height of the cover plate after closing meets the requirements according to the original set program.

[0058] The device with deviation rectification detection and positioning function has the following advantages:

[0059] (1) It has certain flexibility and adaptability, and can adapt to different models and specifications of products. For example, by adjusting the fixed position of the camera, the board shooting mechanism can adapt to different sizes of products, and by adjusting the moving camera group 4, the board shooting mechanism can adapt to different sizes of products, thereby realizing the shooting of different size products;

[0060] (2) Multi-orientation pin detection jig can observe the product from more perspectives, which helps to find possible local abnormalities or changes, confirms whether the detection results of different positions are consistent, reduces the deviation caused by single position detection, thereby realizes more accurate identification and classification of the cover combination degree, reduces the overall detection time cost, improves the detection efficiency and accuracy;

[0061] (3) The air floating platform can avoid the direct contact between the product and the plate mechanism, which can avoid the wear of the product surface, can significantly improve the precision and quality of the product, can reduce the waste rate and rework cost, can help to improve the stability of the production equipment, and can ensure the continuity and efficient operation of the production line;

[0062] (4) Sufficient light source can increase the accuracy of the plate, code scanning and pin detection. The light source can illuminate the target and increase the brightness of the target, overcome the interference of the environmental light, make the target features and background information in the image get the best separation, help the image processing, ensure the stability of the image, and also improve the positioning, measurement, identification accuracy of the vision system and the running speed of the system. This is particularly important for machines that detect under different lighting conditions. Stable image input is an important prerequisite to ensure detection accuracy, reduces downtime caused by material problems, and improves the overall efficiency of the production line;

[0063] (5) The multi-function integration of the machine can complete multiple tasks through a single machine, which reduces the machine footprint, reduces the initial investment and maintenance cost, simplifies the production process and reduces the operation complexity, improves the operation convenience, makes the production more efficient and accurate, helps to improve the product quality and production efficiency. This production method is more easily adapted to changes in market demand, whether it is to increase product types or to change product sizes, it can quickly adjust the production strategy to meet the new needs of the market and improve competitiveness.

[0064] The above is a further detailed description of the utility model in combination with the preferred embodiment, which cannot be considered as limiting the specific implementation of the utility model to these descriptions. For ordinary skilled persons in the technical field to which the utility model belongs, without departing from the concept of the utility model, a number of simple deductions or substitutions can be made, which should be considered as belonging to the protection scope of the utility model.

Claims

1. An apparatus having a misregistration detection and positioning function, characterized by comprising: The utility model provides a kind of board piece deviation rectification detection station, jig positioning station, deviation rectification detection component, mobile camera group, micro-motion plate air floating platform, jig pin detection camera group, jig pin detection horizontal camera group, the micro-motion plate air floating platform is installed on board piece deviation rectification detection station, deviation rectification detection component, mobile camera group are installed above board piece deviation rectification detection station and align on the board piece on micro-motion plate air floating platform, jig pin detection camera group, jig pin detection horizontal camera group are installed in one side of jig positioning station and align on the jig of jig positioning station, and board piece is carried from board piece deviation rectification detection station to the jig of jig positioning station by external conveying module.

2. The apparatus having a deviation correction detection and positioning function according to claim 1, wherein, The deviation rectification detection component includes a visual base plate, a deviation rectification support, and a first deviation rectification camera. The visual base plate is provided with a plurality of mounting hole positions. The first deviation rectification camera is connected to the mounting hole positions of the visual base plate through the deviation rectification support. The lens of the first deviation rectification camera is aligned with the board on the micro-motion plate air floating platform.

3. The apparatus of claim 2, wherein the apparatus further comprises a sensor configured to detect a position of the apparatus. The deviation rectification detection component further includes a code reading head. The code reading head is connected to the mounting hole positions of the visual base plate through the deviation rectification support. The lens of the code reading head is aligned with the board on the micro-motion plate air floating platform.

4. The apparatus of claim 2, wherein the apparatus further comprises a sensor for detecting a deviation of the apparatus from a predetermined path. The mobile camera group includes a camera mounting plate, a mobile motor, a mobile screw rod, a sliding block, a camera support, and a second deviation rectification camera. The camera mounting plate is connected to the mounting hole positions of the visual base plate. The mobile motor is connected to the camera mounting plate. The output end of the mobile motor is connected to the mobile screw rod. The sliding block is threadedly connected to the mobile screw rod. The second deviation rectification camera is connected to the sliding block through the camera support. The lens of the second deviation rectification camera is aligned with the board on the micro-motion plate air floating platform.

5. The apparatus of claim 1, wherein the apparatus further comprises a sensor configured to detect a position of the apparatus. The micro-motion plate air floating platform includes a platform mounting plate, a platform light source, and a light transmission plate. The platform light source is connected to the platform mounting plate. The light transmission plate is connected above the platform light source. The light transmission plate is provided with air outlet holes and an air inlet interface. The air outlet holes are uniformly distributed on the surface of the light transmission plate. The air inlet interface is in communication with the air outlet holes through the inner cavity of the light transmission plate. The air inlet interface is connected to a gas supply device. The board is placed on the surface of the light transmission plate.

6. The apparatus of claim 5, wherein the apparatus further comprises a sensor for detecting the deviation of the object from the predetermined path. The micro-motion plate air floating platform further includes a plate rod, a plate lens, a plate motor, a plate screw rod, and a plate sliding rail. The plate motor and the plate sliding rail are linked to the bottom of the platform mounting plate. The output end of the plate motor is connected to the plate screw rod. The bottom of the plate rod is slidingly connected to the plate sliding rail. The bottom of the plate rod is also threadedly connected to the plate screw rod. The plate lens is connected to the top of the plate rod. The plate lens is aligned with the surface of the light transmission plate.

7. The apparatus of claim 5, wherein the apparatus further comprises a sensor for detecting a deviation of the apparatus from the predetermined path. The micro-motion plate air floating platform further includes a positioning robot. The positioning robot is connected to the bottom of the platform mounting plate.

8. The apparatus of claim 7, wherein the apparatus further comprises a sensor for detecting a deviation of the apparatus from a predetermined path. The positioning robot includes an X-axis fine adjustment sliding plate, a Y-axis fine adjustment sliding plate, a rotating fine adjustment plate, and a robot base. The robot base is fixedly installed. The X-axis fine adjustment sliding plate is slidingly connected to the robot base. The Y-axis fine adjustment sliding plate is slidingly connected to the X-axis fine adjustment sliding plate. The rotating fine adjustment plate is rotatably connected to the Y-axis fine adjustment sliding plate. The bottom of the platform mounting plate is fixedly connected to the rotating fine adjustment plate.

9. The apparatus of claim 1, wherein the apparatus further comprises a sensor configured to detect a position of the apparatus. The jig pin detection camera group comprises a detection support, a detection light source and a first detection camera. The detection support is installed on one side of the jig positioning station. The detection light source is connected to the detection support and is aligned with the jig positioning station. The first detection camera is connected to the detection support and is aligned above the jig of the jig positioning station.

10. The apparatus of claim 1, wherein the apparatus further comprises a sensor configured to detect a position of the apparatus. The jig pin detection horizontal camera group comprises a detection support and a second detection camera. The detection support is installed on one side of the jig positioning station. The second detection camera is connected to the detection support and is horizontally aligned with the jig of the jig positioning station.

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