Closed sampling system
By designing a closed sampling system, utilizing a rotating support frame and a gas-liquid separator, combined with ultrapure water and ultrasonic cleaning, the contamination problem in the sampling process of electronic chemicals was solved, achieving contamination-free sampling and ensuring the safety of chemicals in a cleanroom.
Patent Information
- Application Number
- CN202423294794.5
- Authority / Receiving Office
- CN · China
- Patent Type
- Utility models(China)
- Current Assignee / Owner
- Filing Date
- 2024-12-31
- Publication Date
- 2026-01-02
- Estimated Expiration
- 2034-12-31
AI Technical Summary
Electronic chemicals are susceptible to contamination during sampling, and existing non-closed sampling methods cannot effectively avoid the risk of contamination.
Design a closed sampling system, including a rotating support frame and a gas-liquid separator, which is connected to the sampling bottle through a liquid delivery pipe and a liquid return pipe. The system is cleaned with ultrapure water and an ultrasonic device to ensure the airtightness and cleanliness of the sampling process.
This reduces the risk of contamination during the sampling process in a cleanroom environment, prevents environmental pollutants from entering the sampling bottles, reduces the risk of chemical leakage, and ensures standardized sampling.
Smart Images
Figure CN223756415U_ABST
Abstract
Description
TECHNICAL FIELD
[0001] The utility model relates to a sampling system technical field, especially a kind of closed sampling system. BACKGROUND
[0002] The quality requirement of electronic chemicals is extremely high, the pollution risk of sample in sampling process is very high, but non-closed sampling is still used in the industry, in order to reduce the pollution in sampling process, the current adopted mode is mainly to improve sampling environment, sampling in dust-free room environment, but even in dust-free room environment, there is still pollution risk. SUMMARY
[0003] The technical problem to be solved by the utility model is that electronic chemicals are easily polluted in sampling process.
[0004] To solve the above technical problem, the technical scheme adopted by the utility model is: a closed sampling system, including rotary support frame fixed on base and gas-liquid separator, rotary support frame top is fixed with connecting cover for connecting sampling bottle, rotary support frame top is horizontally rotatably arranged, rotary support frame is provided with liquid sending pipe and liquid return pipe communicated with connecting cover, chemical pipe, ultrapure water pipe and nitrogen pipe are connected on liquid sending pipe, waste pipe is connected on liquid return pipe, ultrasonic device is connected on rotary support frame, and ultrasonic device is in contact with outer wall of sampling bottle when sampling bottle is connected with connecting cover.
[0005] Preferably, the movable end of the liquid return pipe is located at the inner top wall of the connecting cover, and the movable end of the liquid sending pipe is located below the connecting cover.
[0006] Preferably, the rotary support frame is fixed with a liquid level sensor on one side, and the liquid level sensor is located on one side below the connecting cover.
[0007] Preferably, the liquid discharge pipe is connected with a gas-liquid separator, the top end of the gas-liquid separator is connected with an exhaust pipe, and the bottom end of the gas-liquid separator is connected with the liquid discharge pipe.
[0008] Preferably, the inner top wall of the connecting cover is connected with a sealing ring, and the sealing ring is in a pressed state when the sampling bottle is connected with the connecting cover.
[0009] 1、The utility model provides a closed sampling system, adopts full-closed sampling, connects sampling bottle on connecting cover, carries out the cleaning and sampling work in sampling bottle inside through liquid sending pipe and liquid return pipe connected on connecting cover, avoids that pollutant in environment enters sampling bottle and pollutes sample piece, also reduces the risk of chemical leakage.
[0010] 2、Ultrapure water and ultrasonic wave are used to clean sampling bottle, to ensure the cleanliness of sampling bottle and the standardization of sampling operation. BRIEF DESCRIPTION OF DRAWINGS
[0011] The utility model will be further explained in connection with the drawings and embodiments:
[0012] Figure 1 It is the structure schematic diagram of the utility model embodiment.
[0013] Figure 2 It is the internal structure schematic of the sampling bottle in the utility model embodiment.
[0014] In the drawing: 1, chemical pipeline;2, ultrapure water pipeline;3, nitrogen pipeline;4, waste pipeline;5, exhaust pipeline;6, liquid discharge pipeline;7, gas-liquid separator;8, rotating support frame;9, connecting cover;10, liquid level sensor;11, ultrasonic device;12, liquid return pipe;13, liquid delivery pipe. DETAILED DESCRIPTION
[0015] As Figure 1 and Figure 2 Indicated, the utility model provides a closed sampling system, including fixed on the rotating support frame 8 and gas-liquid separator 7 of base, rotating support frame 8 top horizontal fixed for connecting the connecting cover 9 of sampling bottle, rotating support frame 8 top horizontal rotation setting, rotating support frame 8 in be provided with with connecting cover 9 intercommunication's liquid delivery pipe 13 and liquid return pipe 12, liquid delivery pipe 13 on and have chemical pipeline 1, ultrapure water pipeline 2 and nitrogen pipeline 3, liquid return pipe 12 on connecting have waste pipeline 4, rotating support frame 8 on connecting ultrasonic device 11, when sampling bottle and connecting cover 9 connect, ultrasonic device 11 and the outer wall of sampling bottle contact.
[0016] The sampling system includes the following working conditions:
[0017] State one, ultrapure water wash bottle, in this state, need to tighten the sampling bottle on connecting cover 9, and keep sampling bottle in the state of vertical, open the valve on ultrapure water pipeline 2, waste pipeline 4 and exhaust pipeline 5, close the valve of chemical pipeline 1, nitrogen pipeline 3 and liquid discharge pipeline 6, fill ultrapure water into sampling bottle through liquid delivery pipe 13, after filling sampling bottle to eight full, close the valve of ultrapure water pipeline 2 and nitrogen pipeline 3, then open ultrasonic device 11, and ultrasonic cleaning is carried out, after cleaning thirty seconds, rotate sampling bottle and ultrasonic device 11 to the inverted state through rotating support frame 8, open ultrasonic device 11 again and clean thirty seconds, open the valve on nitrogen pipeline 3, waste pipeline 4 and liquid discharge pipeline 6, and liquid discharge and blow dry are carried out.
[0018] State two, chemical rinsing sampling bottle, in this state, the sampling bottle needs to be kept in an upright state, the valves on the chemical pipeline 1, waste pipeline 4 and exhaust pipeline 5 are opened, the valves on the ultrapure water pipeline 2, nitrogen pipeline 3 and liquid discharge pipeline 6 are closed, the chemical is filled into the sampling bottle, and then the sampling bottle is filled to 80% full, the valves on the ultrapure water pipeline 2 and nitrogen pipeline 3 are closed, and then the ultrasonic device 11 is started, ultrasonic cleaning is carried out, and the cleaning lasts for 30 seconds, the valves on the nitrogen pipeline 3, waste pipeline 4 and liquid discharge pipeline 6 are opened, and liquid discharge and drying are carried out.
[0019] State three, sampling state, in this state, the sampling bottle is kept in an upright state, the valves on the chemical pipeline 1, waste pipeline 4 and exhaust pipeline 5 are opened, the valves on the ultrapure water pipeline 2, nitrogen pipeline 3 and liquid discharge pipeline 6 are closed, the chemical is filled into the sampling bottle, and then all the valves are closed.
[0020] As shown in Figure 1 and Figure 2 , the movable end of the liquid return pipe 12 is located at the inner top wall of the connecting cover 9, and the movable end of the liquid feeding pipe 13 is located below the connecting cover 9. When the sampling bottle is discharged, the sampling bottle is in an inverted state, the liquid in the sampling bottle is discharged through the liquid return pipe 12, and the setting of the pipe opening of the liquid return pipe 12 can empty the liquid in the sampling bottle.
[0021] As shown in Figure 1 , one side of the rotating support frame 8 is fixedly provided with a liquid level sensor 10, and the liquid level sensor 10 is located on one side below the connecting cover 9. The liquid level sensor 10 is used for detecting the liquid level of the chemical or ultrapure water in the sampling bottle, so that the sampling bottle can be accurately filled to 80% full when being filled.
[0022] As shown in Figure 1 , the liquid discharge pipeline 6 is connected with a gas-liquid separator 7, the top end of the gas-liquid separator 7 is connected with an exhaust pipeline 5, and the bottom end of the gas-liquid separator 7 is connected with a liquid discharge pipeline 6. After the sampling bottle is inverted, the internal liquid is transported to the gas-liquid separator 7 through the waste pipeline 4, then nitrogen is transported through the nitrogen pipeline 3, the sampling bottle is dried, and the gas and the liquid enter the gas-liquid separator 7, the gas is discharged from the exhaust pipeline 5 at the top, and the liquid is discharged from the liquid discharge pipeline 6 at the bottom.
[0023] As a preferred embodiment of the utility model, in order to ensure the sealing property of the connecting cover 9 and the sampling bottle, the inner top wall of the connecting cover 9 is connected with a sealing ring, and the sealing ring is in a pressed state when the sampling bottle is connected with the connecting cover 9.
Claims
1. A closed sampling system, characterized by: The utility model relates to a kind of sampling device, including fixed on the rotary support frame (8) and gas-liquid separator (7) of pedestal, rotary support frame (8) top horizontal fixed for connecting cover (9) for connecting sampling bottle, rotary support frame (8) top horizontal rotation is arranged, rotary support frame (8) is provided with with the liquid delivery pipe (13) and liquid return pipe (12) in communication with connecting cover (9), liquid delivery pipe (13) is connected with chemical pipeline (1), ultrapure water pipeline (2) and nitrogen pipeline (3) on and, liquid return pipe (12) is connected with waste pipe (4), rotary support frame (8) is connected ultrasonic device (11), when sampling bottle is connected with connecting cover (9), ultrasonic device (11) is contacted with the outer wall of sampling bottle.
2. A closed sampling system as claimed in claim 1, characterized in that The active end of the liquid return pipe (12) is located at the inner top wall of the connecting cover (9), and the active end of the liquid delivery pipe (13) is located below the connecting cover (9).
3. A closed sampling system as claimed in claim 2, characterized in that: One side of the rotary support frame (8) is fixed with a liquid level sensor (10), and the liquid level sensor (10) is located on one side below the connecting cover (9).
4. The closed sampling system of claim 1, wherein: The top end of the gas-liquid separator (7) is connected with an exhaust pipe (5), and the bottom end of the gas-liquid separator (7) is connected with a liquid discharge pipe (6).
5. The closed sampling system of claim 1, wherein: The inner top wall of the connecting cover (9) is connected with a sealing ring, and the sealing ring is in a pressed state when the sampling bottle is connected with the connecting cover (9).