Molybdenum corrosive liquid blending device

Abstract

The utility model relates to the technical field of molybdenum corrosive liquid production, in particular to a molybdenum corrosive liquid blending device. The blending device comprises at least two raw material barrels, a pure water pipeline, a helium pipeline and a phosphoric acid pipeline and further comprises a blending barrel, the top of the blending barrel is communicated with a raw material tank, the pure water pipeline, the helium pipeline and the phosphoric acid pipeline, a liquid outlet pipeline is arranged at the bottom of the blending barrel, and a circulating pump is arranged at the liquid outlet pipeline. The circulating pump is used for conveying liquid in the liquid conveying pipeline to the top of the blending barrel; the device further comprises a filtering pipeline, the filtering pipeline is communicated with the top of the blending barrel, and a second ball valve, a first-stage filter, a second-stage filter and a third-stage filter are sequentially arranged on the filtering pipeline in the liquid flowing direction. According to the utility model, the filtering efficiency can be improved, and the particle content in the finished product molybdenum corrosive liquid is reduced, so that the finished product quality of the molybdenum corrosive liquid is better improved.

Description

Technical Field

[0001] This utility model relates to the field of molybdenum etchant production technology, and more specifically, to a molybdenum etchant mixing device. Background Technology

[0002] Molybdenum etching solution, as an important chemical reagent, is widely used in metal processing, electronic equipment manufacturing, and other fields. However, with the continuous improvement of production processes and the increase in output, higher requirements are placed on the preparation of etching solutions. In traditional molybdenum etching solution mixing equipment, primary reliance is placed on disposable filtration devices. Due to the high pipeline pressure during filtration, this filtration method has difficulty effectively intercepting particulate matter, resulting in a large amount of residue and lower quality molybdenum etching solution. Utility Model Content

[0003] This invention provides a molybdenum etching solution mixing device, which can overcome some or all the defects of the prior art.

[0004] According to the present invention, a molybdenum etching solution mixing device includes at least one raw material tank, a pure water pipeline, a helium pipeline, and a phosphoric acid pipeline. It also includes a mixing tank, the top of which is connected to the raw material tank, the pure water pipeline, the helium pipeline, and the phosphoric acid pipeline. A liquid outlet pipeline is provided at the bottom of the mixing tank, and a circulation pump is installed at the liquid outlet pipeline to transport the liquid in the delivery pipeline to the top of the mixing tank. The circulation pump has a first inlet and a first outlet. The first inlet is connected to the liquid outlet pipeline, and a first pipeline is provided at the first outlet. A first feed inlet is correspondingly provided at the top of the mixing tank, and the first pipeline is connected to the first feed inlet. A first ball valve is provided at the first pipeline, and a first connection point is provided between the first ball valve and the circulation pump. A filter pipeline is provided at the first connection point, and the filter pipeline is connected to the top of the mixing tank. A second ball valve, a primary filter, a secondary filter, and a tertiary filter are sequentially provided on the filter pipeline along the liquid flow direction.

[0005] Preferably, the top of the raw material barrel is provided with a first discharge port, and a second pipeline is provided at the first discharge port. The top of the mixing barrel is provided with a second inlet, and the second pipeline is connected to the second inlet. A first solenoid valve and a feeding pump are provided in sequence at the second pipeline.

[0006] Preferably, a third ball valve and a fourth ball valve are provided at intervals at the liquid outlet pipeline. A purging pipeline is provided between the third ball valve and the fourth ball valve. The purging pipeline is connected to the first pipeline. The first pipeline is provided with a second connection point. The second connection point is located between the first connection point and the circulation pump. The purging pipeline is provided with a fifth ball valve, a pneumatic pump and a sixth ball valve in sequence along the liquid flow direction.

[0007] Preferably, the filter pipeline includes a first branch located between the first connection point and the primary filter, a second ball valve located at the first branch, a second branch located between the primary filter and the secondary filter, a seventh ball valve located at the second branch, a third branch located between the secondary filter and the tertiary filter, a second solenoid valve and an eighth ball valve located at the third branch, a fourth branch located between the tertiary filter and the top of the mixing tank, a third feed inlet located at the top of the mixing tank, the third feed inlet being connected to the fourth branch, and a ninth ball valve located at the fourth branch.

[0008] As a preferred option, a third connection point is provided at the fourth branch, which is located between the third-stage filter and the ninth ball valve. A fifth branch is provided at the third connection point, and a dispensing container is provided at the end of the fifth branch.

[0009] Preferably, a fourth connection point is provided at the third branch, which is located between the secondary filter and the second solenoid valve. A sixth branch is formed at the first connection point. A fifth connection point is provided at the first branch between the first ball valve and the first feed inlet. The fifth connection point is connected to the sixth branch. A tenth ball valve is provided at the sixth branch.

[0010] As a preferred embodiment, a third pipeline is provided between the helium pipeline and the top of the mixing barrel, and a fourth feed port is provided at the top of the mixing barrel. The fourth feed port is connected to the third pipeline, and a third solenoid valve is provided at the third pipeline.

[0011] As a preferred embodiment, a fourth pipeline is provided between the pure water pipeline and the top of the mixing tank, and a fifth feed inlet is provided at the top of the mixing tank. The fifth feed inlet is connected to the fourth pipeline, and a fourth solenoid valve is provided at the fourth pipeline.

[0012] Preferably, a fifth pipeline is provided between the phosphoric acid pipeline and the top of the blending tank, and a sixth feed inlet is provided at the top of the blending tank. The sixth feed inlet is connected to the fifth pipeline, and a fifth solenoid valve is provided at the fifth pipeline.

[0013] As a preferred embodiment, the top of the mixing tank is provided with a second discharge port, and a sixth pipeline is provided at the second discharge port. The sixth pipeline is connected to a storage tank, and a sixth solenoid valve and a liquid pump are sequentially provided along the liquid flow direction of the sixth pipeline.

[0014] Beneficial effects:

[0015] In this invention, two raw material tanks are used to store the raw materials for molybdenum etching solution and the additives for molybdenum etching solution, respectively. A circulation pump is used to enable the liquid in the mixing tank to flow out from the bottom and then flow in from the top, thereby realizing the circulation of the liquid in the mixing tank and thus improving the mixing efficiency. The filter pipeline can perform staged filtration of the liquid in the mixing tank, which improves the filtration efficiency and reduces the particle content in the finished molybdenum etching solution, thereby improving the quality of the finished molybdenum etching solution. Attached Figure Description

[0016] Figure 1 This is a schematic diagram of a molybdenum corrosion solution mixing device. Detailed Implementation

[0017] To further understand the content of this utility model, a detailed description of the utility model is provided in conjunction with the embodiments. It should be understood that the embodiments are merely illustrative and not limiting of the utility model.

[0018] Example 1

[0019] Seen in Figure 1 This embodiment provides a molybdenum etching solution mixing device, including two raw material tanks 1, a pure water pipeline 2, a helium pipeline 3, and a phosphoric acid pipeline 4, and a mixing tank 5. The top of the mixing tank 5 is connected to the raw material tanks, the pure water pipeline 2, the helium pipeline 3, and the phosphoric acid pipeline 4. The bottom of the mixing tank 5 is provided with a liquid outlet pipeline 6, and a circulation pump 61 is provided at the liquid outlet pipeline 6. The circulation pump 61 is used to transport the liquid in the delivery pipeline to the top of the mixing tank 5. The circulation pump 61 has a first inlet 611 and a first outlet 612. The first inlet 611 is connected to the liquid outlet pipeline 6. The first outlet 612 is provided with a first pipeline 62, and the top of the mixing tank 5 is provided with a first feed inlet 51. The first pipeline 62 is connected to the first feed inlet 51. The first pipeline 62 is provided with a first ball valve 621. The first ball valve 621 and the circulating pump 61 are provided with a first connection point 622. The first connection point 622 is provided with a filter pipeline 7. The filter pipeline 7 is connected to the top of the mixing tank 5. Along the liquid flow direction, the filter pipeline 7 is provided with a second ball valve 71, a primary filter 72, a secondary filter 73 and a tertiary filter 74 in sequence.

[0020] According to the solution provided in this embodiment, the two raw material tanks 1 are used to store the raw materials of molybdenum etching solution and the additives of molybdenum etching solution, respectively. The circulation pump 61 is used to realize the liquid in the blending tank 5 flowing out from the bottom and flowing in from the top, thereby realizing the liquid circulation in the blending tank 5, thereby improving the blending efficiency. The filter pipeline 7 can perform graded filtration of the liquid in the blending tank 5, thereby improving the filtration efficiency and reducing the particle content in the finished molybdenum etching solution, thereby improving the finished quality of the molybdenum etching solution.

[0021] In addition, the filter pipe 7 can also make the liquid in the mixing tank 5 flow out from the bottom and then flow in from the top, thereby realizing the multiple filtration of the liquid in the mixing tank 5, and further reducing the amount of particles in the finished molybdenum corrosion solution.

[0022] It is understandable that the primary filter 72, the secondary filter 73, and the tertiary filter 74 are all 7-core filters, which can better ensure the flow rate in the filter pipeline 7.

[0023] The raw material barrel 1 is provided with a first discharge port 11 at the top, and a second pipeline 12 is provided at the first discharge port 11. The blending barrel 5 is provided with a second inlet 52 at the top. The second pipeline 12 is connected to the second inlet 52. A first solenoid valve 121 and a feeding pump 122 are provided in sequence at the second pipeline 12, thus better realizing the conveying of raw materials from the raw material barrel 1 to the blending barrel 5.

[0024] In this embodiment, the filter pipeline 7 includes a first branch 75 located between the first connection point 622 and the primary filter 72, a second ball valve 71 located at the first branch 75, a second branch 76 located between the primary filter 72 and the secondary filter 73, a seventh ball valve 761 located at the second branch 76, a third branch 77 located between the secondary filter 73 and the tertiary filter 74, a second solenoid valve 771 and an eighth ball valve 772 located sequentially at the third branch 77, a fourth branch 78 located between the tertiary filter 74 and the top of the mixing tank 5, a third feed inlet 53 located at the top of the mixing tank 5, the third feed inlet 53 being connected to the fourth branch 78, and a ninth ball valve 781 located at the fourth branch 78.

[0025] Furthermore, a fourth connection point 773 is provided at the third branch 77, which is located between the secondary filter 73 and the second solenoid valve 771. A sixth branch 775 is formed at the first connection point 622. A fifth connection point 774 is provided between the first ball valve 621 and the first feed inlet 51 in the first branch 75. The fifth connection point 774 is connected to the sixth branch 775. A tenth ball valve 776 is provided at the sixth branch 775. The liquid in the filter pipe 7 can be transported from the secondary filter 73 to the top of the mixing tank 5 through the sixth branch 775.

[0026] In this embodiment, a third pipeline 31 is provided between the helium pipeline 3 and the top of the mixing barrel 5. A fourth feed inlet 54 is provided at the top of the mixing barrel 5, and the fourth feed inlet 54 is connected to the third pipeline 31. A third solenoid valve 32 is provided at the third pipeline 31. A fourth pipeline 21 is provided between the pure water pipeline 2 and the top of the mixing barrel 5. A fifth feed inlet 55 is provided at the top of the mixing barrel 5, and the fifth feed inlet 55 is connected to the fourth pipeline 21. A fourth solenoid valve 22 is provided at the fourth pipeline 21. A fifth pipeline 41 is provided between the phosphoric acid pipeline 4 and the top of the mixing barrel 5. A sixth feed inlet 56 is provided at the top of the mixing barrel 5, and the sixth feed inlet 56 is connected to the fifth pipeline 41. A fifth solenoid valve 42 is provided at the fifth pipeline 41.

[0027] The top of the mixing tank 5 is provided with a second discharge port 57, and a sixth pipeline 571 is provided at the second discharge port 57. The sixth pipeline 571 is connected to a storage tank 8. The sixth pipeline 571 is provided with a sixth solenoid valve 572 and a liquid pump 573 in sequence along the liquid flow direction. The second discharge port 57 extends to the bottom of the mixing pipe. The liquid pump 573 can transport the finished molybdenum corrosion solution mixed in the mixing tank 5 to the storage tank 8 for preservation.

[0028] Example 2

[0029] This embodiment provides a molybdenum etching solution mixing device, which differs from the molybdenum etching solution mixing device in Embodiment 1 in that a third ball valve 63 and a fourth ball valve 64 are spaced apart at the outlet pipeline 6. A purging pipeline 65 is provided between the third ball valve 63 and the fourth ball valve 64. The purging pipeline 65 is connected to the first pipeline 62. The first pipeline 62 is provided with a second connection point 651. The second connection point 651 is located between the first connection point 622 and the circulation pump 61. The purging pipeline 65 is provided with a fifth ball valve 652, a pneumatic pump 653 and a sixth ball valve 654 in sequence along the liquid flow direction.

[0030] Among them, the pneumatic pump 653 can empty the residual liquid in the mixing tank 5, thereby avoiding the residual liquid from affecting the solution to be mixed in the next batch.

[0031] Furthermore, a third connection point 782 is provided at the fourth branch 78, which is located between the three-stage filter 74 and the ninth ball valve 781. A fifth branch 79 is provided at the third connection point 782, and a dispensing tank is provided at the end of the fifth branch 79. The residual liquid is dispensed into the dispensing tank through the emptying pipe 65, the first pipe 62, the first branch 75, the second branch 76, the third branch 77, the fourth branch 78, and the fifth branch 79, thereby achieving better recovery of the residual liquid.

[0032] It is readily understood that those skilled in the art can combine, split, or reorganize the embodiments provided in this application to obtain other embodiments, all of which do not exceed the protection scope of this application.

[0033] Working principle:

[0034] When using this molybdenum etching solution mixing device, during the mixing of the molybdenum etching solution, the raw materials are first discharged from the raw material tank 1 to the mixing tank 5 via the feed pump 122. Simultaneously, the phosphoric acid pipeline 4, helium pipeline 3, and pure water pipeline 2 simultaneously supply the raw materials into the mixing tank 5. After all the raw materials have been supplied, the first solenoid valve 121, the third solenoid valve 32, the fourth solenoid valve 22, and the fifth solenoid valve 42 are closed. Then, the first ball valve 621, the third ball valve 63, and the fourth ball valve 64 are opened, and the circulation pump 61 is started, causing the liquid in the mixing tank 5 to flow out from the bottom and then flow back in from the top. This promotes the mixing of various components in the mixing tank 5. After mixing for a certain period of time, the first ball valve 621 is closed and the second ball valve 71 is opened, allowing the liquid in the mixing tank 5 to enter the filter pipe 7. If it needs to pass through the first-stage filter 72, the second-stage filter 73, and the third-stage filter 74 before returning to the mixing tank 5, the seventh ball valve 761, the eighth ball valve 772, and the ninth ball valve 781 need to be opened. If it only needs to pass through the first-stage filter 72 and the second-stage filter 73 before returning to the mixing tank 5, the seventh ball valve 761, the eighth ball valve 772, and the tenth ball valve 776 need to be opened.

[0035] After a period of filtration and circulation, the mixing is completed. Then, the circulation pump 61 is turned off, and the sixth solenoid valve 572 and the liquid extraction pump 573 are turned on to extract the finished molybdenum corrosion solution from the mixing tank 5 into the storage tank 8 for preservation.

[0036] The present invention and its embodiments have been described above illustratively. This description is not restrictive, and the embodiments shown are only part of the embodiments of the present invention. The actual structure is not limited to this. Therefore, if those skilled in the art are inspired by this description and design similar structures and embodiments without departing from the inventive spirit of the present invention, such designs should fall within the protection scope of the present invention.

Claims

1. A molybdenum etching solution compounding device comprising at least one raw material tank, a pure water line, a helium gas line, and a phosphoric acid line, characterized in that, The application also discloses a pipeline system.

2. The molybdenum etchant liquid compounding device according to claim 1, characterized by, The raw material tank top is provided with a first discharge port, the first discharge port is provided with a second pipeline, the compounding tank top is correspondingly provided with a second feeding port, the second pipeline is communicated with the second feeding port, and the second pipeline is sequentially provided with a first electromagnetic valve and a feeding pump.

3. The molybdenum etchant liquid compounding device according to claim 1, characterized by, The liquid outlet pipeline is provided with a third ball valve and a fourth ball valve at intervals, the third ball valve and the fourth ball valve are provided with a cleaning pipeline, the cleaning pipeline is communicated with the first pipeline, the first pipeline is correspondingly provided with a second connection point, the second connection point is located between the first connection point and the circulating pump, and the cleaning pipeline is sequentially provided with a fifth ball valve, a pneumatic pump and a sixth ball valve along the liquid flow direction.

4. The molybdenum etchant liquid compounding device according to claim 1, characterized by The filtering pipeline comprises a first branch provided between the first connection point and the primary filter, the second ball valve is arranged at the first branch, a second branch is arranged between the primary filter and the secondary filter, the second branch is provided with a seventh ball valve, a third branch is arranged between the secondary filter and the tertiary filter, the third branch is sequentially provided with a second electromagnetic valve and an eighth ball valve, a fourth branch is arranged between the tertiary filter and the compounding tank top, the compounding tank top is correspondingly provided with a third feeding port, the third feeding port is communicated with the fourth branch, and the fourth branch is provided with a ninth ball valve.

5. The molybdenum etching solution compounding apparatus according to claim 4, wherein The fourth branch is provided with a third connection point, the third connection point is located between the tertiary filter and the ninth ball valve, the third connection point is provided with a fifth branch, and the fifth branch is provided with a sub-packaging tank at the tail end.

6. The molybdenum etching solution compounding apparatus according to claim 4, wherein The third branch is provided with a fourth connection point, the fourth connection point is arranged between the secondary filter and the second electromagnetic valve, a sixth branch is formed at the first connection point, a fifth connection point is arranged between the first ball valve and the first feeding port, the fifth connection point is communicated with the sixth branch, and the sixth branch is provided with a tenth ball valve.

7. The molybdenum etchant liquid compounding apparatus according to claim 1, wherein The helium pipeline is communicated with the compounding tank top through a third pipeline, the compounding tank top is correspondingly provided with a fourth feeding port, the fourth feeding port is communicated with the third pipeline, and the third pipeline is provided with a third electromagnetic valve.

8. The molybdenum etchant solution compounding apparatus according to claim 1, wherein The pure water pipeline is communicated with the compounding tank top through a fourth pipeline, the compounding tank top is correspondingly provided with a fifth feeding port, the fifth feeding port is communicated with the fourth pipeline, and the fourth pipeline is provided with a fourth electromagnetic valve.

9. The molybdenum etchant solution compounding apparatus according to claim 1, wherein The phosphoric acid pipeline is communicated with the compounding tank top through a fifth pipeline, the compounding tank top is correspondingly provided with a sixth feeding port, the sixth feeding port is communicated with the fifth pipeline, and the fifth pipeline is provided with a fifth electromagnetic valve.

10. The molybdenum etchant solution compounding apparatus according to claim 1, wherein The compounding tank top is provided with a second discharge port, the second discharge port is provided with a sixth pipeline, the sixth pipeline is communicated with a storage tank, and the sixth pipeline is sequentially provided with a sixth electromagnetic valve and a liquid pumping pump along the liquid flow direction.

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