Online liquid mixing and blending system
The magnetic levitation technology solves the problem of high-precision proportioning and uniformity in online chemical mixing systems in the semiconductor industry. It achieves efficient, economical, and environmentally friendly synergistic removal of elemental mercury from flue gas and oxidized mercury from waste liquid, avoiding secondary pollution and reducing operating costs.
Patent Information
- Application Number
- CN202520035856.6
- Authority / Receiving Office
- CN · China
- Patent Type
- Utility models(China)
- Current Assignee / Owner
- Filing Date
- 2025-01-08
- Publication Date
- 2026-01-06
- Estimated Expiration
- 2035-01-08
AI Technical Summary
Existing technologies in online chemical mixing systems for the semiconductor industry struggle to achieve high-precision proportioning and uniform mixing, and the equipment is also bulky.
An online mixing and dispensing system using a magnetic levitation pump and flow meter achieves high-precision mixing through an independent delivery pipeline and utilizes an ultra-high speed impeller for rapid mixing, eliminating the need for buffer tanks and stirring tanks. The control device adjusts the flow rate and valve opening and closing to adapt to changes in the types of chemicals.
It achieves high-precision flow output and rapid uniform mixing, reduces equipment size, adapts to changes in chemical types without requiring hardware configuration changes, and improves process accuracy and uniformity.
Smart Images

Figure CN223760941U_ABST
Abstract
Description
Technical Field
[0001] This utility model relates to the field of liquid mixing technology, and in particular to an online mixing and homogenization system. Background Technology
[0002] In the semiconductor industry, chemicals are used in many processes, and often multiple chemicals need to be precisely prepared and mixed online before use. Precise proportioning helps control process accuracy, while thorough mixing helps control the uniformity of process results. Current proportioning systems mostly improve accuracy by adding buffer tanks and ensure thorough mixing by adding stirring tanks. Summary of the Invention
[0003] According to an embodiment of the present invention, an online mixing and homogenizing system is provided, comprising:
[0004] Several first conveying pipes, the first conveying pipes being used to convey liquid products;
[0005] Several first magnetic levitation pumps are connected to a first delivery pipe in a one-to-one correspondence.
[0006] Several flow meters are installed on the first delivery pipe;
[0007] The second conveying pipe is connected to several first conveying pipes;
[0008] The second magnetic levitation pump is connected to the second delivery pipe.
[0009] Furthermore, a check valve is also installed on the first delivery pipe, and the check valve is located at the rear end of the first magnetic levitation pump.
[0010] Furthermore, it also includes a control device, which is communicatively connected to the first magnetic levitation pump, the second magnetic levitation pump, and the flow meter.
[0011] Furthermore, the number of the first delivery pipe, the first magnetic levitation pump, and the flow meter is three.
[0012] According to the online mixing and homogenization system of this utility model embodiment, the magnetic levitation pump, due to its high speed adjustment ratio, can achieve a fairly wide flow adjustment range; by combining the first magnetic levitation pump with a flow meter, a stable flow output can be achieved without worrying about the influence between adjacent pipelines, thereby achieving high-precision online flow ratio, eliminating the need for a buffer tank, and reducing the overall size of the equipment; multiple liquid products (such as chemicals) are accurately proportioned through independent delivery pipelines and then enter the pump chamber of the second magnetic levitation pump. The ultra-high speed impeller can instantly and thoroughly mix the liquid and form a certain pressure to deliver it to the final point of use, reducing the use of a stirring tank; chemical mixtures of any proportion can be achieved with the same hardware configuration, and even if the types of chemicals are increased or decreased, it is only necessary to control the opening or closing of the valves of the corresponding independent branches.
[0013] It should be understood that both the foregoing general description and the following detailed description are exemplary and intended to provide further illustration of the claimed technology. Attached Figure Description
[0014] Figure 1 This is a partial structural schematic diagram according to an embodiment of the present utility model;
[0015] Figure 2 This is a schematic diagram according to an embodiment of the present utility model. Detailed Implementation
[0016] The preferred embodiments of the present invention will be described in detail below with reference to the accompanying drawings, further illustrating the present invention.
[0017] First, combine Figures 1-2 The online mixing and homogenizing system according to embodiments of the present invention is used for mixing and homogenizing liquids and has a wide range of applications.
[0018] like Figures 1-2 As shown, the online mixing and homogenizing system of this utility model embodiment includes:
[0019] Several first conveying pipes 1, the first conveying pipes 1 being used to convey liquid products;
[0020] Several first magnetic levitation pumps 2 are connected to the first delivery pipe 1 in a one-to-one correspondence;
[0021] Several flow meters 3 are respectively installed on the first delivery pipe 1;
[0022] The second conveying pipe 4 is connected to several first conveying pipes 1;
[0023] The second magnetic levitation pump 5 is connected to the second delivery pipe 4.
[0024] Furthermore, such as Figures 1-2 As shown, in this embodiment, a check valve 6 is also provided on the first delivery pipe 1. The check valve 6 is located at the rear end of the first magnetic levitation pump 2 to prevent liquid backflow.
[0025] Furthermore, in this embodiment, a control device (existing technology) is also included. The control device is communicatively connected to the first magnetic levitation pump 2, the second magnetic levitation pump 5, and the flow meter 3. The control device can control the on / off state of the first magnetic levitation pump 2 and the second magnetic levitation pump 5 and display the flow rate of the flow meter 3.
[0026] Furthermore, such as Figures 1-2 As shown, in this embodiment, there are three components: the first delivery pipe 1, the first magnetic levitation pump 2, and the flow meter 3. The number of these three components can be selected according to requirements.
[0027] Working principle: The chemical liquids enter the corresponding first magnetic levitation pump 2 through the corresponding first delivery pipe 1, and then enter the second magnetic levitation pump 5 to be mixed and sent to the final use point.
[0028] Above, refer to Figures 1-2 This invention describes an online mixing and homogenization system according to an embodiment of the present invention. The magnetic levitation pump, due to its high speed adjustment ratio, can achieve a fairly wide flow rate adjustment range. The combination of the first magnetic levitation pump 2 and the flow meter 3 enables stable flow output without concern for interference between adjacent pipelines, thus achieving high-precision online flow rate proportioning, eliminating the need for a buffer tank and reducing the overall equipment size. Multiple liquid products (such as chemicals) are accurately proportioned through independent delivery pipelines before entering the pump chamber of the second magnetic levitation pump 5. The ultra-high speed impeller can instantly and thoroughly mix the liquids and create pressure to deliver them to the final point of use, reducing the need for a mixing tank. Chemical mixtures of any proportion can be achieved with the same hardware configuration; even if the types of chemicals are increased or decreased, only the opening or closing of the corresponding independent branch valves needs to be controlled.
[0029] It should be noted that, in this specification, the terms "comprising," "including," or any other variations thereof are intended to cover non-exclusive inclusion, such that a process, method, article, or apparatus that comprises a list of elements includes not only those elements but also other elements not expressly listed, or elements inherent to such process, method, article, or apparatus. Unless otherwise specified, an element defined by the phrase "comprising..." does not exclude the presence of additional identical elements in the process, method, article, or apparatus that includes that element.
[0030] Although the present invention has been described in detail through the above preferred embodiments, it should be understood that the above description should not be considered as a limitation of the present invention. Various modifications and substitutions to the present invention will be apparent to those skilled in the art after reading the above content. Therefore, the scope of protection of the present invention should be defined by the appended claims.
Claims
1. An online mixing and liquid preparation and mixing system, characterized in that, The utility model relates to a kind of liquid product conveying system, comprising: A plurality of first conveying pipes for conveying liquid products; A plurality of first magnetic levitation pumps corresponding to the first conveying pipes; A plurality of flow meters respectively arranged on the first conveying pipes; A second conveying pipe connected to the first conveying pipes; A second magnetic levitation pump connected to the second conveying pipe.
2. The online mixing and liquid preparation and mixing system of claim 1, wherein, A check valve is further arranged on the first conveying pipe, located at the rear end of the first magnetic levitation pump.
3. The online mixing and liquid preparation and mixing system of claim 1, wherein, The utility model further comprises a control device in communication with the first magnetic levitation pumps, the second magnetic levitation pump and the flow meters.
4. The online mixing and liquid preparation and mixing system of claim 1, wherein, The number of the first conveying pipes, the first magnetic levitation pumps and the flow meters is three.