Blowing and sucking integrated cleaning head with anti-blocking function for etching machine cavity

Abstract

The utility model belongs to the technical field of blowing and sucking integrated cleaning heads, and particularly relates to a blowing and sucking integrated cleaning head with an anti-blocking function for an etching machine cavity, which comprises a controller and a storage box connected to one end of the controller, the other end of the storage box is connected with a communicating rod, the other end of the communicating rod is connected with a cleaning head cover, and the cleaning head cover is connected with the controller. According to the utility model, the motor in the controller is operated to operate to drive the end part of the cleaning head cover to blow or suck air, so that impurities in the cavity of the etching machine are treated, and when a filter screen on the surface of a filter plate is blocked, a guide block on the inner wall of the filter plate slides along a sliding groove in the surface of the controller, so that the filter screen is blocked. And meanwhile, the magnetic block is quickly disassembled from one end of the controller, so that a filter screen on the surface of the filter plate can be quickly disassembled and cleaned conveniently, the phenomenon that the interior of the blowing and sucking integrated cleaning head is blocked due to the fact that quick disassembly and assembly cannot be achieved is avoided, and the service life of the blowing and sucking integrated cleaning head is prolonged.

Description

Technical Field

[0001] This utility model belongs to the field of etching machine cavity processing technology, specifically relating to an integrated blow-suction cleaning head for etching machine cavities with anti-clogging function. Background Technology

[0002] The blow-suction cleaning head for etching machine chambers is a tool specifically designed for cleaning the chambers of etching machines. Combining blowing and suction functions, this head, through its specific design, can simultaneously blow away impurities and suck up residues during the cleaning process, thereby improving cleaning efficiency. Its working principle may involve multiple aspects such as airflow control, pressure regulation, and filtration purification.

[0003] Blow-suction integrated cleaning heads are widely used in semiconductor manufacturing, microelectronics processing, and other fields, playing a crucial role in the maintenance and upkeep of etching machines. The combined blow-suction method significantly shortens cleaning time and improves production efficiency. However, a significant problem has arisen when using these heads to clean impurities accumulated inside etching machine cavities. A key design flaw in most blow-suction integrated cleaning heads currently on the market lies in the overly complex and cumbersome installation method between the filter and the cleaning head body. This complex design not only increases the difficulty of initial installation but, more importantly, makes it difficult for operators to quickly and effectively remove and clean or replace the filter after prolonged use and the accumulation of impurities. Due to the inconvenience of filter removal, impurities and particles gradually accumulate inside the cleaning head over time, potentially leading to blockages. Utility Model Content

[0004] The purpose of this invention is to provide an integrated blow-suction cleaning head for etching machine cavities with anti-clogging function. This addresses a key design flaw in most currently available integrated blow-suction cleaning heads: the overly complex and cumbersome installation method between the filter and the cleaning head body. This complex design not only increases the difficulty of initial installation, but more importantly, after prolonged use and the accumulation of impurities, operators often find it difficult to quickly and effectively remove the filter for cleaning or replacement. Due to the inconvenience of filter removal, impurities and particles gradually accumulate inside the cleaning head over time, potentially leading to clogging.

[0005] To achieve the above objectives, this utility model provides the following technical solution: an integrated blow-suction cleaning head for an etching machine cavity with anti-clogging function, comprising a controller and a storage box connected to one end of the controller, a connecting rod connected to the other end of the storage box, and a cleaning head cover connected to the other end of the connecting rod;

[0006] A filter plate is connected to one end of the controller near the storage box. A filter screen is installed at the opening of the filter plate. A guide block is connected to the inner wall of the filter plate. A sliding groove is opened on the surface of the controller near the guide block. A magnetic block is connected to one side surface of the guide block.

[0007] As a preferred embodiment of the anti-clogging cleaning head for the etching machine cavity of this utility model, the filter plate and the guide block are an integral structure, and the filter plate is slidably connected to the sliding groove through the guide block.

[0008] As a preferred embodiment of the anti-clogging cleaning head for the etching machine cavity of this utility model, the guide block is magnetically connected to the docking end of the controller via a magnetic block.

[0009] As a preferred embodiment of the anti-clogging cleaning head for the etching machine cavity of this utility model, a sliding block is connected to the outer wall of the storage box, and a sliding seat is connected to the outer wall of the controller near the sliding block.

[0010] As a preferred embodiment of the anti-clogging cleaning head for the etching machine cavity of this utility model, two sliding blocks are provided. The two sliding blocks are symmetrically arranged about the transverse central axis of the storage box, and the storage box is connected to the sliding seat through the sliding blocks.

[0011] As a preferred embodiment of the etching machine cavity cleaning head with anti-clogging function of this utility model, a positioning spring is connected to the surface opening of the sliding block, and a positioning buckle is connected to the other end of the positioning spring. A positioning groove is provided on the inner wall of the sliding seat near the positioning buckle.

[0012] Compared with the prior art, the beneficial effects of this utility model are:

[0013] This invention operates by controlling a motor inside the controller, which drives the end of the cleaning head to blow or suck air, thereby processing impurities inside the etching chamber. When the filter screen on the surface of the filter plate becomes clogged, the guide block on the inner wall of the filter plate slides along the sliding groove on the surface of the controller, and at the same time, the magnetic block is quickly separated from one end of the controller. This facilitates the quick disassembly and cleaning of the filter screen on the surface of the filter plate, avoiding the phenomenon of blockage inside the blow-suction integrated cleaning head due to the inability to quickly disassemble and assemble, thus improving the service life of the blow-suction integrated cleaning head. Attached Figure Description

[0014] The accompanying drawings are provided to further illustrate the present invention and form part of the specification. They are used together with the embodiments of the present invention to explain the present invention, but do not constitute a limitation thereof. In the drawings:

[0015] Figure 1 This is a schematic diagram of the overall structure of the blowing and suction integrated cleaning head of this utility model;

[0016] Figure 2 This is a schematic cross-sectional view of the storage box structure of this utility model;

[0017] Figure 3 This is a schematic diagram of the filter plate installation structure of this utility model;

[0018] Figure 4 This is a schematic diagram of the filter screen installation structure of this utility model;

[0019] Figure 5 This is a schematic diagram of the sliding block connection structure of this utility model.

[0020] In the diagram: 1. Controller; 2. Storage box; 3. Connecting rod; 4. Cleaning head cover; 5. Filter plate; 6. Filter screen; 7. Guide block; 8. Sliding groove; 9. Magnetic block; 10. Sliding block; 11. Sliding seat; 12. Positioning spring; 13. Positioning buckle. Detailed Implementation

[0021] The technical solutions of the present utility model will be clearly and completely described below with reference to the accompanying drawings of the embodiments. Obviously, the described embodiments are only some embodiments of the present utility model, and not all embodiments. Based on the embodiments of the present utility model, all other embodiments obtained by those of ordinary skill in the art without creative effort are within the protection scope of the present utility model.

[0022] Please see Figure 1-5 The present invention provides the following technical solution: an integrated blow-suction cleaning head for an etching machine cavity with anti-clogging function, including a controller 1 and a storage box 2 connected to one end of the controller 1, a connecting rod 3 connected to the other end of the storage box 2, and a cleaning head cover 4 connected to the other end of the connecting rod 3.

[0023] A filter plate 5 is connected to one end of the controller 1 near the storage box 2. A filter screen 6 is installed at the opening of the filter plate 5. A guide block 7 is connected to the inner wall of the filter plate 5. A sliding groove 8 is opened on the surface of the controller 1 near the guide block 7. A magnetic block 9 is connected to one side of the guide block 7.

[0024] Preferably, the filter plate 5 and the guide block 7 are an integral structure, and the filter plate 5 is slidably connected to the sliding groove 8 through the guide block 7.

[0025] In practical use, by sliding the guide block 7 along the sliding groove 8, the filter screen 6 on the surface of the filter plate 5 can be quickly removed, making it convenient to clean the filter screen 6 on the surface of the filter plate 5 and avoiding clogging during use.

[0026] Preferably, the guide block 7 is magnetically connected to the docking end of the controller 1 via the magnetic block 9.

[0027] In practical use, the magnetic block 9 at one end of the guide block 7 is magnetically attracted to the controller 1, which facilitates the quick assembly of the filter plate 5.

[0028] Preferably, a sliding block 10 is connected to the outer wall of the storage box 2, and a sliding seat 11 is connected to the outer wall of the controller 1 near the sliding block 10.

[0029] In practical use, by engaging the sliding block 10 with the sliding seat 11, the storage box 2 can be quickly assembled.

[0030] Preferably, there are two sliding blocks 10, which are symmetrically arranged about the horizontal central axis of the storage box 2. The storage box 2 is connected to the sliding seat 11 through the sliding blocks 10.

[0031] In practical use, the sliding block 10 is slid along the inner wall of the sliding seat 11 to facilitate the directional movement of the storage box 2.

[0032] Preferably, a positioning spring 12 is connected to the surface opening of the sliding block 10, and a positioning buckle 13 is connected to the other end of the positioning spring 12. A positioning groove is provided on the inner wall of the sliding seat 11 near the positioning buckle 13.

[0033] In practical use, by squeezing the positioning spring 12 with the positioning buckle 13, the positioning buckle 13 is disengaged from the fixed mode between itself and the sliding seat 11, thus making it easy to remove the storage box 2.

[0034] The working principle of this utility model is as follows: First, the motor inside the controller 1 is operated to drive the cleaning head 4 to blow or suck air, thereby processing the impurities inside the etching cavity. When the filter screen 6 on the surface of the filter plate 5 becomes clogged, the guide block 7 on the inner wall of the filter plate 5 slides along the sliding groove 8 on the surface of the controller 1, and at the same time, the magnetic block 9 is quickly separated from one end of the controller 1, so as to facilitate the quick disassembly and cleaning of the filter screen 6 on the surface of the filter plate 5. Then, the magnetic block 9 is quickly magnetically attached to the docking end of the controller 1 to avoid the phenomenon of blockage inside the blow-suction integrated cleaning head due to the inability to quickly disassemble and assemble, thus improving the service life of the blow-suction integrated cleaning head. In addition, by sliding the sliding block 10 on the outside of the storage box 2 along the sliding seat 11, the positioning buckle 13 is driven to squeeze the positioning spring 12, thereby causing the positioning buckle 13 to disengage from the sliding seat 11. Then, the storage box 2 is quickly removed from the docking end of the controller 1, so as to facilitate the quick emptying of the impurities inside the storage box 2, thus improving the practicality of the blow-suction integrated cleaning head.

[0035] Finally, it should be noted that the above description is merely a preferred embodiment of this utility model and is not intended to limit the utility model. Although the utility model has been described in detail with reference to the foregoing embodiments, those skilled in the art can still modify the technical solutions described in the foregoing embodiments or make equivalent substitutions for some of the technical features. Any modifications, equivalent substitutions, improvements, etc., made within the spirit and principles of this utility model should be included within the protection scope of this utility model.

Claims

1. A blow-suction integrated cleaning head with anti-blocking function for the cavity of an etching machine, comprising a controller (1) and a storage box (2) connected to one end of the controller (1), characterized in that: The other end of the storage box (2) is connected with a communication rod (3), and the other end of the communication rod (3) is connected with a cleaning head cover (4); The controller (1) is connected with a filter plate (5) near one end of the storage box (2), an opening of the filter plate (5) is provided with a filter screen (6), an inner wall of the filter plate (5) is connected with a guide block (7), a surface of the controller (1) near the guide block (7) is provided with a sliding groove (8), and one side surface of the guide block (7) is connected with a magnetic block (9).

2. The blow-suction integrated cleaning head for the etching machine cavity with the anti-blocking function according to claim 1, characterized in that: The filter plate (5) and the guide block (7) are an integral structure, and the filter plate (5) is slidably connected with the sliding groove (8) through the guide block (7).

3. The blow-suction integrated cleaning head for the etching machine cavity with the anti-blocking function according to claim 1, characterized in that: The guide block (7) is magnetically connected with the butt end of the controller (1) through the magnetic block (9).

4. The blow-suction integrated cleaning head for the etching machine cavity with the anti-blocking function according to claim 1, characterized in that: The outer side wall of the storage box (2) is connected with a sliding block (10), and the outer side wall of the controller (1) near the sliding block (10) is connected with a sliding seat (11).

5. The blow-suction integrated cleaning head for the etching machine cavity with the anti-blocking function according to claim 4, characterized in that: The sliding block (10) is provided with two, and the two sliding blocks (10) are symmetrically arranged about the transverse central axis of the storage box (2), and the storage box (2) is connected with the sliding seat (11) through the sliding block (10).

6. The blow-suction integrated cleaning head for the etching machine cavity with the anti-blocking function according to claim 4, characterized in that: The surface of the sliding block (10) is connected with a positioning spring (12) at an opening, the other end of the positioning spring (12) is connected with a positioning buckle (13), and the inner wall of the sliding seat (11) near the positioning buckle (13) is provided with a positioning groove.

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