Track device for substrate processing

Abstract

The utility model relates to the technical field of substrate processing, and discloses a track device for substrate processing, which comprises a guide assembly and a clamping assembly, the guide assembly is arranged below the clamping assembly, the guide assembly comprises a fixing frame, one side of the fixing frame is connected with a conveying motor, the output end of the conveying motor is fixedly connected with a rotating shaft, and the rotating shaft is fixedly connected with the clamping assembly. The rotating shaft is connected with a driving belt wheel, a conveying belt is arranged on the driving belt wheel, one end of the conveying belt is connected with a driven belt wheel, a guide groove is formed in the inner side of the fixing frame, and the upper end of the fixing frame is connected with a fixing vertical plate. According to the utility model, the substrate can quickly and accurately move among different processing procedures, the overall processing efficiency is improved, and the substrate can be clamped, so that the processing process can be continuously and stably carried out, the possibility of loosening of the substrate is reduced, and the processing quality is improved.

Description

TECHNICAL FIELD

[0001] The utility model relates to the technical field of substrate processing, specifically to a track device for substrate processing. BACKGROUND

[0002] In the field of substrate processing, the track device is not only an indispensable part of the production line, but also the key to ensuring smooth and efficient operation of the entire processing flow.

[0003] The track device for substrate processing in the prior art still has some deficiencies in use: the existing track device for substrate processing often cannot move accurately when conveying the substrate, and the existing track device for substrate processing often cannot clamp the substrate stably, which may cause the substrate to loosen during processing. SUMMARY

[0004] The utility model discloses a track device for substrate processing to solve the shortcomings in the prior art.

[0005] To achieve the above object, the utility model adopts the following technical scheme: a track device for substrate processing, including guide assembly and clamping assembly, the guide assembly is located below the clamping assembly, and the guide assembly includes a fixed frame, the fixed frame side is connected with conveying motor, and the output end of conveying motor is fixedly connected with rotating shaft, and the rotating shaft is connected with driving pulley, the driving pulley is equipped with conveying belt, and one end of conveying belt is connected with driven pulley, and the inner side of fixed frame is equipped with guide groove, the upper end of fixed frame is connected with fixed vertical plate, and the upper side of fixed vertical plate is connected with rotating roller.

[0006] Further description of the above technical scheme:

[0007] The conveying motor is fixedly connected to the bracket provided on one side of the fixed frame, and the rotating shaft is rotatably connected to the fixed frame, and the driving pulley is fixedly connected to the rotating shaft.

[0008] Further description of the above technical scheme:

[0009] One end of the conveying belt is connected to the driving pulley, and the other end of the conveying belt away from the driving pulley is connected to the driven pulley, and the guide groove is provided on one side of the fixed frame.

[0010] Further description of the above technical scheme:

[0011] The lower end of the fixed vertical plate is fixedly connected to the upper side of the fixed frame, and the rotating roller is rotatably connected to the groove provided on the fixed vertical plate.

[0012] Further description of the above technical scheme:

[0013] The clamping assembly comprises a hydraulic telescopic rod, a fixed plate is connected to the upper end of the hydraulic telescopic rod, a clamping motor is connected to one side of the fixed plate, a double-threaded rod is fixedly connected to the output end of the clamping motor, a fixed clamping block is connected to the double-threaded rod, a sliding block is connected to the lower end of the fixed clamping block, and a sliding groove is connected to the sliding block, and a rubber pad is connected to one side of the fixed clamping block.

[0014] As a further description of the above technical solution:

[0015] The lower end of the hydraulic telescopic rod is fixedly connected to a fixed frame, and the fixed plate is fixedly connected to the upper end of the hydraulic telescopic rod.

[0016] As a further description of the above technical solution:

[0017] The clamping motor is fixedly connected to a support provided on one side of the fixed plate, the double-threaded rod is rotatably connected to a support provided on the fixed plate, and the fixed clamping block is threadedly connected to the double-threaded rod.

[0018] As a further description of the above technical solution:

[0019] The sliding block is fixedly connected to the lower end of the fixed clamping block, the sliding block is slidably connected in the sliding groove provided on the fixed plate, and the rubber pad is fixedly connected to one side of the fixed clamping block.

[0020] The utility model has the advantages of the following beneficial effects:

[0021] 1. By starting the conveying motor, the conveying motor drives the rotating shaft to rotate, the rotating shaft drives the driving pulley to rotate, and the driving pulley drives the conveying belt to rotate, thereby driving the substrate placed above to move, so that the substrate moves quickly and accurately between different processing procedures, improving the overall processing efficiency.

[0022] 2. By starting the clamping motor, the clamping motor drives the double-threaded rod to rotate, the double-threaded rod drives the fixed clamping block to move, thereby driving the sliding block to slide in the sliding groove provided on the fixed plate for guidance, so that the fixed clamping block moves inward to clamp the substrate, so that the processing process can be continuously and stably carried out, reducing the possibility of substrate loosening, thereby improving the processing quality. BRIEF DESCRIPTION OF DRAWINGS

[0023] Figure 1 A perspective structural schematic view of the track device for substrate processing is provided for the utility model;

[0024] Figure 2 A partial structural schematic view of the track device for substrate processing is provided for the utility model; Figure One

[0025] Figure 3 ​The utility model provides a kind of local structure schematic diagram of track device of substrate processing Figure Two .

[0026] Legend:

[0027] 1, guide assembly;2, clamping assembly;101, fixed frame;102, conveying motor;103, rotating shaft;104, driving pulley;105, conveying belt;106, driven pulley;107, guide groove;108, fixed vertical plate;109, rotating roller;201, hydraulic telescopic rod;202, fixed plate;203, clamping motor;204, bidirectional threaded rod;205, fixed clamping block;206, sliding block;207, sliding groove;208, rubber pad. DETAILED DESCRIPTION

[0028] The technical solutions in the embodiments of the utility model will be clearly and completely described below with reference to the drawings in the embodiments of the utility model. Obviously, the described embodiments are only part of the embodiments of the utility model, not all the embodiments. Based on the embodiments in the utility model, all other embodiments obtained by those skilled in the art without creative labor belong to the scope of protection of the utility model.

[0029] Reference Figures 1-3 , the utility model provides a kind of track device of substrate processing, it includes: guide assembly 1 and clamping assembly 2.

[0030] Specifically, guide assembly 1 is located below clamping assembly 2, and guide assembly 1 includes fixed frame 101, one side of fixed frame 101 is connected with conveying motor 102, and the output end of conveying motor 102 is fixedly connected with rotating shaft 103, and rotating shaft 103 is connected with driving pulley 104, driving pulley 104 is provided with conveying belt 105, one end of conveying belt 105 is connected with driven pulley 106, and the inner side of fixed frame 101 is provided with guide groove 107, the upper end of fixed frame 101 is connected with fixed vertical plate 108, and the upper side of fixed vertical plate 108 is connected with rotating roller 109, clamping assembly 2 includes hydraulic telescopic rod 201, and the upper end of hydraulic telescopic rod 201 is connected with fixed plate 202, and one side of fixed plate 202 is connected with clamping motor 203, the output end of clamping motor 203 is fixedly connected with bidirectional threaded rod 204, and bidirectional threaded rod 204 is connected with fixed clamping block 205, and the lower end of fixed clamping block 205 is connected with sliding block 206, sliding block 206 is connected with sliding groove 207, and one side of fixed clamping block 205 is connected with rubber pad 208.

[0031] In the embodiment, guide assembly 1 and clamping assembly 2 constitute the track device of substrate processing related to the application, and stable processing conveying during substrate processing is realized.

[0032] In the embodiment, the solid substance refers to a solid substance used as an attachment base of other substances or devices.

[0033] In the embodiment, the driving pulleys 104 are provided in two groups, and the two groups of driving pulleys 104 are driven to rotate by the rotating shafts 103.

[0034] It should be noted that the conveying belts 105 are provided in two groups, and the two groups of conveying belts 105 are driven to rotate by the driving pulleys 104, thereby driving the substrate to move.

[0035] Specifically, the conveying motor 102 is fixedly connected to the bracket provided on one side of the fixed frame 101, the rotating shaft 103 is rotatably connected to the fixed frame 101, the driving pulley 104 is fixedly connected to the rotating shaft 103, one end of the conveying belt 105 is connected to the driving pulley 104, the end of the conveying belt 105 away from the driving pulley 104 is connected to the driven pulley 106, the guide groove 107 is provided on one side of the fixed frame 101, the lower end of the fixed vertical plate 108 is fixedly connected to the upper side of the fixed frame 101, and the rotating roller 109 is rotatably connected to the groove provided on the fixed vertical plate 108.

[0036] As a preferred embodiment, the substrate can slide in the guide groove 107 provided on the inner side of the fixed frame 101 for guidance.

[0037] As a preferred embodiment, the rotating roller 109 is rotatably connected to the groove provided on the fixed vertical plate 108, thereby assisting the movement of the substrate when the substrate moves.

[0038] Specifically, the lower end of the hydraulic telescopic rod 201 is fixedly connected to the fixed frame 101, the fixed plate 202 is fixedly connected to the upper end of the hydraulic telescopic rod 201, the clamping motor 203 is fixedly connected to the bracket provided on one side of the fixed plate 202, the bidirectional threaded rod 204 is rotatably connected to the bracket provided on the fixed plate 202, the fixed clamping block 205 is threadedly connected to the bidirectional threaded rod 204, the sliding block 206 is fixedly connected to the lower end of the fixed clamping block 205, the sliding block 206 is slidingly connected to the sliding groove 207 provided on the fixed plate 202, and the rubber pad 208 is fixedly connected to one side of the fixed clamping block 205.

[0039] As a preferred embodiment, the sliding block 206 is slidingly connected to the sliding groove 207, and when the bidirectional threaded rod 204 is rotated to drive the fixed clamping block 205 to move, the sliding block 206 slides in the sliding groove 207 for guidance.

[0040] It should be noted that the rubber pad 208 is fixedly connected to one side of the fixed clamping block 205 for clamping the substrate, and the fixed clamping block 205 is provided in two groups.

[0041] In use, the substrate to be processed is inserted into the guide groove and placed on the conveying belt, the conveying motor is started, the conveying motor drives the rotating shaft to rotate, the rotating shaft drives the driving pulley to rotate, the driving pulley drives the conveying belt to rotate, thereby driving the substrate placed above to move, and the substrate moves on the rotating roller, then the hydraulic telescopic rod is started, the hydraulic telescopic rod drives the fixed plate to move upwards, the height of the fixed clamping block is flush with the height, at this time, the clamping motor is started, the clamping motor drives the bidirectional threaded rod to rotate, the bidirectional threaded rod drives the fixed clamping block to move, thereby driving the sliding block to slide in the sliding groove provided on the fixed plate to guide, so that the fixed clamping block moves inward to clamp the substrate.

[0042] The track device for substrate processing of the utility model enables the substrate to be quickly and accurately moved between different processing procedures, improves the overall processing efficiency, and enables the substrate to be clamped, so that the processing process can be continuously and stably performed, the possibility of substrate loosening is reduced, and the processing quality is improved.

[0043] It should be noted that the electrical elements appearing in this document are all connected with the main controller and 220V mains electricity, and the main controller can be a conventional known device controlled by a computer, etc., and the detailed description of known functions and known components is omitted in the specific embodiment of the present disclosure. In order to ensure the compatibility of the device, the operation means adopted is consistent with the parameters of the market appliances.

[0044] Finally, it should be noted that: the above only describes the preferred embodiments of the utility model, and is not used to limit the utility model, although the utility model has been described in detail with reference to the foregoing embodiments, for those skilled in the art, the technical solutions recorded in the foregoing embodiments can still be modified, or some technical features can be replaced, any modification, equivalent replacement, improvement, etc. within the spirit and principles of the utility model should be included in the protection scope of the utility model.

Claims

1. A track apparatus for substrate processing, characterized by: Including guide assembly (1) and clamping assembly (2), the guide assembly (1) is arranged below the clamping assembly (2), and the guide assembly (1) includes a fixed frame (101), one side of the fixed frame (101) is connected with a conveying motor (102), the output end of the conveying motor (102) is fixedly connected with a rotating shaft (103), and the rotating shaft (103) is connected with a driving pulley (104), the driving pulley (104) is provided with a conveying belt (105), one end of the conveying belt (105) is connected with a driven pulley (106), and the inner side of the fixed frame (101) is provided with a guide groove (107), the upper end of the fixed frame (101) is connected with a fixed vertical plate (108), and the upper side of the fixed vertical plate (108) is connected with a rotating roller (109).

2. A track apparatus for substrate processing according to claim 1, wherein: The conveying motor (102) is fixedly connected to the support provided on one side of the fixed frame (101), and the rotating shaft (103) is rotatably connected to the fixed frame (101), and the driving pulley (104) is fixedly connected to the rotating shaft (103).

3. A track apparatus for substrate processing according to claim 2, wherein: One end of the conveying belt (105) is connected to the driving pulley (104), and the other end of the conveying belt (105) is connected to the driven pulley (106), and the guide groove (107) is arranged on one side of the fixed frame (101).

4. A track apparatus for substrate processing according to claim 3, wherein: The lower end of the fixed vertical plate (108) is fixedly connected to the upper side of the fixed frame (101), and the rotating roller (109) is rotatably connected in the groove provided on the fixed vertical plate (108).

5. A track apparatus for substrate processing according to claim 4, wherein: The clamping assembly (2) includes a hydraulic telescopic rod (201), and the upper end of the hydraulic telescopic rod (201) is connected with a fixed plate (202), and one side of the fixed plate (202) is connected with a clamping motor (203), the output end of the clamping motor (203) is fixedly connected with a bidirectional threaded rod (204), and the bidirectional threaded rod (204) is connected with a fixed clamping block (205), and the lower end of the fixed clamping block (205) is connected with a sliding block (206), the sliding block (206) is connected with a sliding groove (207), and one side of the fixed clamping block (205) is connected with a rubber pad (208).

6. A track apparatus for substrate processing according to claim 5, wherein: The lower end of the hydraulic telescopic rod (201) is fixedly connected to the fixed frame (101), and the upper end of the fixed plate (202) is fixedly connected to the hydraulic telescopic rod (201).

7. A track apparatus for substrate processing according to claim 6, wherein: The clamping motor (203) is fixedly connected to the support provided on one side of the fixed plate (202), and the bidirectional threaded rod (204) is rotatably connected to the support provided on the fixed plate (202), and the fixed clamping block (205) is threadedly connected to the bidirectional threaded rod (204).

8. A track apparatus for substrate processing according to claim 7, wherein: The sliding block (206) is fixedly connected to the lower end of the fixed clamping block (205), and the sliding block (206) is slidably connected in the sliding groove (207) provided on the fixed plate (202), and the rubber pad (208) is fixedly connected to one side of the fixed clamping block (205).

Images