Recovery device and evaporation equipment
By designing a recycling device that uses heating components and drive components to recover the materials to be recycled from the baffle, the problem of gasified material adhesion is solved, the material utilization rate is improved and the production cost is reduced.
Patent Information
- Application Number
- CN202423211562.9
- Authority / Receiving Office
- CN · China
- Patent Type
- Utility models(China)
- Current Assignee / Owner
- Filing Date
- 2024-12-24
- Publication Date
- 2026-01-06
- Estimated Expiration
- 2034-12-24
AI Technical Summary
In actual production, most of the gasified material adheres to parts other than the components to be processed, resulting in low material utilization and high processing costs.
Design a recycling device including a heating component, a baffle, a driving component, and a recycling component. The driving component drives the baffle into the heating chamber, and the heat source component heats the material to be recycled on the baffle. The recycling component then performs the recycling.
This improved the utilization rate of materials to be recycled and reduced production costs.
Smart Images
Figure CN223766406U_ABST
Abstract
Description
Technical Field
[0001] This application relates to the field of vapor deposition technology, and more specifically, to a recycling device and vapor deposition equipment. Background Technology
[0002] In actual production processes, some procedures require processing components using gasified materials. However, most of the gasified material adheres to areas outside the components being processed. This portion of the material not adhering to the components cannot be recycled, resulting in low material utilization and high processing costs. Utility Model Content
[0003] This application provides a recycling device that employs the following technical solution:
[0004] A recycling device, characterized in that it comprises:
[0005] Heating components, baffles, drive components, and recycling components;
[0006] The heating assembly includes a heating chamber and a heat source component, wherein the heat source component is used to heat the heating chamber.
[0007] The driving component is connected to the baffle, and the driving component is used to drive the baffle into or out of the heating chamber;
[0008] The recycling component is disposed in the heating chamber and is used to recycle the material to be recycled on the baffle when the baffle is heated in the heating chamber.
[0009] Accordingly, this application also provides a vapor deposition apparatus, characterized in that it includes a cavity and a recovery device as described in any one of the above embodiments, wherein the recovery device is installed in the cavity.
[0010] Compared with the prior art, the embodiments of this application have the following main advantages:
[0011] When there is material to be recycled attached to the baffle, the baffle can be driven into the heating chamber by the driving component, and the baffle in the heating chamber is heated by the heat source component. Then, the material to be recycled on the baffle is recycled by the recycling component, thereby reusing the collected material to be recycled, improving the utilization rate of the material to be recycled and reducing production costs. Attached Figure Description
[0012] To more clearly illustrate the solutions in this application or the prior art, the drawings used in the description of the embodiments or the prior art will be briefly introduced below. Obviously, the drawings described below are some embodiments of this application. For those skilled in the art, other drawings can be obtained from these drawings without creative effort.
[0013] Figure 1 This is a schematic diagram of the structure of the recycling device provided in this embodiment of the utility model;
[0014] Figure 2 This is a schematic diagram of the vapor deposition equipment provided in this embodiment of the utility model.
[0015] Figure label:
[0016] 100. Evaporation equipment; 1. Recovery device; 11. Heating chamber; 111. Chamber wall; 112. Bottom wall; 12. Baffle; 13. Driving component; 131. Connecting part; 132. Driving part; 14. Recovery component; 141. Collection part; 142. Drainage part; 143. Heating part; 15. Heat insulation component; 16. Support component; 2. Evaporation source; 3. Evaporation substrate; 4. Evaporation mask; 5. Chamber. Detailed Implementation
[0017] Unless otherwise defined, all technical and scientific terms used herein have the same meaning as commonly understood by one of ordinary skill in the art to which this application belongs; the terminology used herein in the specification of the application is for the purpose of describing particular embodiments only and is not intended to be limiting of the application; the terms "comprising" and "having," and any variations thereof, in the specification, claims, and foregoing drawings of this application are intended to cover non-exclusive inclusion. The terms "second," "second," etc., in the specification, claims, or foregoing drawings of this application are used to distinguish different objects, not to describe a particular order.
[0018] In this document, the term "embodiment" means that a particular feature, structure, or characteristic described in connection with an embodiment may be included in at least one embodiment of this application. The appearance of this phrase in various places throughout the specification does not necessarily refer to the same embodiment, nor is it a separate or alternative embodiment mutually exclusive with other embodiments. It will be explicitly and implicitly understood by those skilled in the art that the embodiments described herein can be combined with other embodiments.
[0019] To enable those skilled in the art to better understand the present application, the technical solutions in the embodiments of the present application will be clearly and completely described below with reference to the accompanying drawings. Physical vapor deposition (PVD) is a technique for forming thin films on the surface of materials using physical methods under vacuum conditions. Evaporation is an important PVD technique, which mainly involves heating a solid material in a high vacuum environment to sublimate or evaporate it, and then depositing it onto a specific substrate (such as a workpiece) to obtain a thin film. During the evaporation process, most of the evaporated material is deposited on non-substrate areas, resulting in significant waste. This application provides a recycling device 1 that can recover the evaporated material that is not deposited on the substrate, thereby improving the utilization rate of the evaporated material and reducing processing costs.
[0020] The following is combined with Figures 1 to 2 The following describes embodiments of the present invention.
[0021] Please refer to Figure 1 and Figure 2 The recycling device 1 of this application includes a heating assembly, a baffle 12, a driving component 13, and a recycling component 14;
[0022] The heating assembly includes a heating chamber 11 and a heat source (not shown in the figure), the heat source being used to heat the heating chamber 11;
[0023] The driving component 13 is connected to the baffle 12, and the driving component 13 is used to drive the baffle 12 into or out of the heating chamber 11;
[0024] The recycling component 14 is disposed in the heating chamber 11. The recycling component 14 is used to recycle the material to be recycled on the baffle 12 when the baffle 12 is heated in the heating chamber 11.
[0025] Specifically, during the fabrication of optoelectronic devices, the baffle 12 in the recycling device 1 can be placed in the environment (e.g., the same containment cavity) of the vaporized material to be recycled. At this time, when the vaporized material to be recycled acts on the device to be processed, some of the vaporized material will also adhere to the baffle 12 and form a liquid film or solid as the temperature decreases. Then, the driving unit 13 can drive the baffle 12 into the heating chamber 11, and the heat source can heat the heating chamber 11, causing the liquid material to be recycled on the baffle 12 to drip off and enter the recycling unit 14.
[0026] In summary, the recycling device 1 of this embodiment can effectively recycle materials to be recycled, thereby improving the utilization rate of the materials to be recycled and reducing the production cost of optoelectronic devices.
[0027] Specifically, please refer to [the relevant documentation] again. Figure 1 and Figure 2Taking the placement of the recovery device 1 in the vapor deposition equipment as an example, the recovery device 1 can be set above the vapor deposition source 2. The workpiece to be vapor-deposited (the device to be processed) is set above the recovery device 1. The vapor deposition source 2 contains the material to be recovered and has a vapor deposition source outlet (not shown in the figure). The material to be recovered in the vapor deposition source 2 is heated and evaporates or sublimates. The resulting gaseous material to be recovered is discharged through the vapor deposition source outlet. Part of the gaseous material to be recovered moves upward to the workpiece to be vapor-deposited and adheres to the workpiece to be vapor-deposited, thereby completing the vapor deposition of the workpiece to be vapor-deposited. Another part of the gaseous material to be recovered moves to the baffle 12 and solidifies and adheres to the baffle 12. The driving component 13 can drive the baffle 12 into the heating chamber 11. The heat source component heats the heating chamber 11 and the baffle 12 in the heating chamber 11, causing the solidified material to be recovered on the baffle 12 to liquefy. The recovery component 14 is used to recover the liquefied dripping material to be recovered from the baffle 12. The collected material to be recovered can be reused, improving the utilization rate of the material to be recovered.
[0028] It should be understood that the heating temperature of the heat source is not limited, and can be set according to the type of material to be recycled. Preferably, the heating temperature of the heat source is between 100°C and 1500°C. The shape of the heat source is also not limited; it can be a heating tube, heating wire, heating film, or other heating structures. The heating chamber 11 has a chamber wall 111, and the heat source can be fixed to the outer wall surface of the chamber wall 111; and / or, the heat source can be fixed to the inner wall surface of the chamber wall 111; and / or, the chamber wall 111 has a certain thickness, and the heat source can be fixed in the space between the inner and outer wall surfaces of the chamber wall 111.
[0029] Further, please refer to Figure 1 The driving component 13 includes a connecting part 131 and a driving part 132. One end of the connecting part 131 is connected to the baffle 12, and the other end is connected to the driving part 132. The driving part 132 is used to drive the connecting part 131 so that the connecting part 131 drives the baffle 12 to enter or leave the heating chamber 11.
[0030] In this embodiment, power is provided to the connecting part 131 and the baffle 12. The connecting part 131 can be a connecting plate or a connecting rod, and the driving part 132 can include a cylinder, an electric cylinder, a linear motor, an electromagnet, or other types of driving components. The driving part 132 is a linear motor, and the connecting part 131 is a connecting rod. The linear motor drives the connecting rod and the baffle 12 to perform linear reciprocating motion (telescopic motion) so that the baffle 12 moves closer to or away from the driving part 132. The telescopic motion has a simple structure and can effectively reduce the energy consumption of the driving part 132.
[0031] Further, please refer to Figure 1 The driving part 132 is used to drive the connecting part 131 so that the connecting part 131 drives the baffle 12 to flip, and the flip angle of the baffle 12 is 0° to 180°.
[0032] In this embodiment, the drive unit 132 includes a rotating motor, and the connecting part 131 is a motor shaft. The motor drives the motor shaft to cause the baffle 12 to move in a circular motion around its own axis. During the circular motion of the baffle 12 around the axis of the motor shaft, it can flip to enter or leave the heating chamber 11. The flip angle of the baffle 12 is from 0° to 180°. Changing the position of the baffle 12 by flipping it allows the baffle 12 to avoid external devices, thereby improving the spatial adaptability of the recycling device 1.
[0033] Further, please refer to Figure 1 The heat source is located inside the heating chamber 11. At this time, the heat generated by the heat source can be fully transferred to the heating chamber 11 and the baffle 12 inside it, thereby improving the energy utilization rate of the recovery device 1.
[0034] Further, please refer to Figure 1 The recycling unit 14 includes a collection section 141 and a drainage section 142. The collection section 141 is disposed in the heating chamber 11 for collecting the material to be recycled on the baffle 12. The first end of the drainage section 142 is connected to the collection section 141 to recycle the collected material to be recycled into the recycling unit 14.
[0035] In this embodiment, the first end of the drainage section 142 is connected to the collection section 141, so the material to be recycled collected by the collection section 141 can be recycled into the recycling unit. It should be understood that the first end is the part of the drainage section 142 that is connected to the collection section 141.
[0036] Furthermore, the collection section 141 is provided with an inclined guide surface, which is connected to the first end of the diversion section 142 to guide the collected material to be recycled into the diversion section 142.
[0037] Specifically, the collection part 141 is located at the bottom of the heating chamber 11 and extends along the length of the heating chamber 11. The drainage part 142 is located on the lower side of the collection part 141. The upper part of the collection part 141 has an opening. The material to be recycled dripping from the baffle 12 drips onto the guide surface through the opening at the upper part of the collection part 141. Under the guiding effect of the guide surface and the gravity of the material to be recycled, the material to be recycled flows along the guide surface and collects at the lower end of the drain port. The drainage part 142 has an inlet and an outlet. The inlet is connected to the outlet, and the outlet is connected to an external device (such as the vapor deposition source 2 or a recycling box that can hold the material to be recycled). After the material to be recycled is discharged from the outlet, it enters the drainage part 142 through the inlet and finally flows back to the external device from the outlet, thus realizing the recycling of the material.
[0038] In this embodiment, the specific shape of the collecting part 141 is not limited; the collecting part 141 can be a disc-shaped structure, a box-shaped structure, a column-shaped structure, or other shapes. The specific shape of the draining part 142 is also not limited; the draining part 142 can be a box-shaped structure, a tubular structure, or other shapes.
[0039] Furthermore, the angle between the guide surface and the horizontal plane is 2° to 12°.
[0040] In this embodiment, the angle between the guide surface and the horizontal plane allows the material to be recycled collected by the collection section 141 to enter the drainage section 142 at a high speed. It should be understood that the angle between the guide surface and the horizontal plane can be any value or a range formed by any two values of 2°, 3°, 4°, 5°, 6°, 7°, 8°, 9°, 10°, 11°, and 12°.
[0041] Further, please refer to Figure 1 The recycling component 14 also includes a heating section 143, which is used to heat the drainage section 142.
[0042] The orthogonal projection of baffle 12 on the bottom wall 112 of heating chamber 111 (orthogonal projection direction is...) Figure 1 The first projection is the projection of the collecting part 141 in the opposite direction of the Z direction, and the second projection is the projection of the collecting part 141 on the bottom wall 112 of the heating chamber 11. The first projection is located within the range of the second projection; and / or,
[0043] The drainage section 142 is provided with a storage chamber (not shown in the figure), the opening of which is connected to the collection section 141. The storage chamber is used to store materials to be recycled.
[0044] In this embodiment, the first projection is located within the range of the second projection. Therefore, when the baffle 12 is heated by the heating chamber 11, the liquefied material to be recycled falling from it will inevitably be located on the collection section 141, thereby improving the collection rate of the material to be recycled in the collection section 141. The storage chamber provided in the drainage section has its opening connected to the collection section 141, so it can collect the liquefied material to be recycled, thereby preventing the material to be recycled from overflowing.
[0045] In this embodiment, the heating part 143 maintains the temperature of the draining part 142 within the temperature range where the material to be recycled liquefies, preventing the material to be recycled from solidifying on the draining part 142 after cooling. In this embodiment, the shape of the heating part 143 is not limited; the heating part 143 can be a heating tube, heating wire, heating film, or other heating structures. Preferably, the heating part 143 is a heating film, which covers the outer wall surface of the draining part 142.
[0046] In one embodiment, please refer to Figure 1The recycling device 1 also includes a heat insulation component 15, and the heating chamber 11 is provided with a chamber wall 111, with the heat insulation component 15 fixed on the outer wall surface of the chamber wall 111.
[0047] In this embodiment, the heat insulation component 15 has the effect of heat preservation and insulation. The heat insulation component 15 is fixed on the outer wall surface of the cavity wall 111. On the one hand, the heat insulation component 15 can prevent the heat of the heating cavity 11 from being transferred to other components and affecting the normal operation of other components; on the other hand, the heat insulation component 15 can reduce the heat loss in the heating cavity 11 and ensure the heating effect of the heating cavity 11.
[0048] In this embodiment, the type of heat insulation component 15 is not limited, and the heat insulation component 15 can be heat insulation cotton, heat insulation felt, heat insulation foam, heat insulation metal foil, etc. Preferably, the heat insulation component 15 is heat insulation cotton, which is wrapped around the outer wall surface of the cavity wall 111.
[0049] In one embodiment, please refer to Figure 1 The recycling device 1 also includes a support member 16, which is used to support the recycling device 1.
[0050] According to an embodiment of the present invention, a vapor deposition apparatus 100 is also provided, including a cavity 5 and a recovery device 1 as described above, wherein the recovery device 1 is installed in the cavity 5.
[0051] In this embodiment, the material to be recycled diffuses in the cavity 5. The vapor deposition equipment 100 can collect the material to be recycled on the baffle 12 by setting a recycling device 1 in the cavity 5, and reuse the collected material to be recycled, thereby improving the utilization rate of the material to be recycled.
[0052] Further, please refer to Figure 2 The vapor deposition equipment 100 also includes a vapor deposition source 2 and a vapor deposition substrate 3 for placing the workpiece to be vapor deposited. The vapor deposition substrate 3 and the vapor deposition source 2 are disposed opposite to each other in the cavity 5, and the recovery device 1 is located between the vapor deposition substrate and the vapor deposition source 2.
[0053] In this embodiment, the vapor deposition source 2 releases the gas of the material to be recovered. The recovery device 1 is located between the vapor deposition substrate and the vapor deposition source 2. Therefore, when the vaporized material to be recovered acts on the workpiece to be vapor-deposited on the vapor deposition substrate, some of the vaporized material to be recovered will also adhere to the baffle 12 and form a liquid film or solid as the temperature decreases. At this time, the driving member 13 can drive the baffle 12 into the heating chamber 11, and the heat source can heat the heating chamber 11 so that the liquid material to be recovered on the baffle 12 drips down and enters the recovery device 14.
[0054] It should be understood that the specific position of the baffle 12 in the vapor deposition equipment 100 is not limited. The baffle 12 of the recovery device 1 can be located above the vapor deposition source 2 and adjacent to the vapor deposition source outlet. The baffle 12 can be moved relative to the vapor deposition source outlet to open or cover the vapor deposition source outlet. Alternatively, the baffle 12 can be located between the vapor deposition source 2 and the vapor deposition substrate 3, adjacent to the vapor deposition substrate 3. The baffle 12 can be moved relative to the substrate 3 to be vapor deposited to open or cover the substrate 3 to be vapor deposited.
[0055] In this embodiment, please further refer to Figure 1 and Figure 2 The baffle 12 has a first position and a second position. When the baffle 12 is in the first position, the projections of the baffle 12, the vapor deposition source 2 and the vapor deposition substrate 3 on the horizontal plane at least partially overlap. When the baffle 12 is in the second position, the projection of the baffle 12 on the horizontal plane does not overlap with the projections of the vapor deposition source 2 and the vapor deposition substrate 3 on the horizontal plane.
[0056] The drive unit 13 is used to drive the baffle 12 to move so that the baffle 12 switches between a first position and a second position.
[0057] In this embodiment, before the material is vaporized in the formal heating zone, the vaporization source 2 has a heating stage. During this stage, the vaporized material cannot be directly used to process the vaporization substrate 3. To recover the material to be recovered in this stage, a baffle 12 can be set in a first position. At this time, the baffle 12 covers the outlet of the vaporization source (the projections of the baffle 12, the vaporization source 2, and the vaporization substrate 3 on the horizontal plane at least partially overlap). As the temperature of the vaporization source 2 rises, gaseous material to be recovered gradually begins to be generated in the vaporization source 2. The gaseous material to be recovered slowly adheres to and solidifies on the baffle 12. The recovery device 1 is equipped with a rate monitor (not shown in the figure). The rate monitor is used to monitor the rate at which the vaporization source 2 generates gaseous material to be recovered. When the rate at which the gaseous material to be recovered reaches a certain value... When the preset value is reached, the driving component 13 drives the baffle 12 to move to the second position, and the baffle 12 moves away from the vapor deposition source 2 (the projection of the baffle 12 on the horizontal plane does not overlap with the projection of the vapor deposition source 2 and the vapor deposition substrate 3 on the horizontal plane), so as to open the vapor deposition source outlet. The gaseous material to be recycled can be discharged through the vapor deposition source outlet and move upward. At the same time, the baffle 12 moves into the heating chamber 11, and the heat source component heats the heating chamber 11 and the baffle 12 in the heating chamber 11, so that the solidified material to be recycled on the baffle 12 liquefies. The recycling component 14 is used to recycle the liquefied dripping material to be recycled on the baffle 12.
[0058] Furthermore, the number of recycling devices 1 is at least one; when the number of recycling devices 1 is at least two, several recycling devices 1 are spaced apart between the vapor deposition source 2 and the vapor deposition substrate 3.
[0059] In this embodiment, when the vapor deposition equipment includes at least two recycling devices 1, the recycling devices are located near the vapor deposition source 2 and near the vapor deposition substrate 3, respectively. This allows for the simultaneous recycling of materials on both baffles 12. After the vapor deposition source 2 starts operating, the vapor deposition equipment 100 also needs to align the vapor deposition substrate 3 to ensure it is processed in a preset position. Therefore, during the alignment operation of the vapor deposition substrate 3, the baffle 12 of the recycling device 1 near the vapor deposition source 2 is in a second position, while the baffle 12 of the recycling device 1 near the vapor deposition substrate 3 is in a first position, with the baffle 12 positioned between the vapor deposition source 2 and the vapor deposition substrate 3, thus preventing the material to be recycled from contacting the vapor deposition substrate 3.
[0060] When the vapor deposition source outlet is opened, the gaseous material to be recycled is discharged through the vapor deposition source outlet. The gaseous material to be recycled mainly adheres to and solidifies on the baffle 12 near the vapor deposition substrate 3. After the vapor deposition substrate 3 completes the alignment operation and the temperature of the vapor deposition source 2 is kept constant, the driving component 13 drives the baffle 12 to move to the second position. The baffle 12 moves away from the straight line between the vapor deposition substrate 3 and the vapor deposition source 2, and the gaseous material to be recycled can move to the vapor deposition substrate 3 to achieve vapor deposition on the vapor deposition substrate 3. At the same time, the baffle 12 in the recycling device near the vapor deposition substrate moves into the heating chamber 11. The heat source component heats the heating chamber 11 and the baffle 12 in the heating chamber 11, causing the solidified material to be recycled on the baffle 12 to liquefy. The recycling component 14 is used to collect the liquefied dripping material to be recycled from the baffle 12. In this embodiment, the recycling device 1 includes two devices, which are located near the vapor deposition source 2 and near the vapor deposition substrate 3, respectively. At this time, the material to be recycled on the two baffles 12 is recycled at the same time, which greatly improves the utilization rate of the material to be recycled.
[0061] It should be understood that the vapor deposition equipment 100 may also include a vapor deposition mask 4, which is used to control the position of the material to be recycled on the vapor deposition substrate 3, and is located between the vapor deposition substrate 3 and the recycling device 1. The vapor deposition substrate 3 may be a substrate. The heating temperature of the heat source is not limited, and the heating temperature of the heat source can be set according to the type of material to be recycled. Preferably, the heating temperature of the heat source is 100°C to 1500°C; the shape of the heat source is also not limited, and the heat source can be a heating tube, a heating wire, a heating film, or other heating structures.
[0062] Furthermore, when the number of recycling devices 1 is at least 2, the distance between the recycling device 1 closest to the vapor deposition substrate 3 and the vapor deposition substrate 3 is 50mm to 200mm.
[0063] In this embodiment, the distance between the recycling device 1, which is closest to the vapor deposition substrate 3, and the vapor deposition substrate 3 is... Figure 2As shown in reference numeral A, the distance between the recycling device 1 and the vapor deposition substrate 3 is such that, during steps such as alignment of the vapor deposition substrate 3 where contact with the material to be recycled is not required, the recycling device 1 can adequately shield the vaporized material to be recycled from contact with the vapor deposition substrate 3, thereby improving the recycling efficiency of the recycling device 1. It should be understood that the distance between the recycling device 1 and the vapor deposition substrate 3 should be the same as the distance between the baffle 12 and the vapor deposition substrate 3. The distance between the recycling device 1 and the vapor deposition substrate 3 can be any value or a range formed by any two of the following: 50mm, 60mm, 70mm, 80mm, 90mm, 100mm, 110mm, 120mm, 130mm, 140mm, 150mm, 160mm, 170mm, 180mm, 190mm, and 200mm.
[0064] Furthermore, the distance between the recovery device closest to the vapor deposition source 2 and the vapor deposition source is 20mm to 150mm.
[0065] In this embodiment, the distance between the recovery device 1, which is closest to the vapor deposition source 2, and the vapor deposition source 2 is... Figure 2 As shown in reference numeral B, the distance between the recycling device 1 and the vapor deposition source 2 is such that during steps such as the heating and start-up of the vapor deposition source 2, where the spillage of the material to be recycled is not required, the recycling device 1 can adequately shield the material to be recycled, thereby improving the recycling efficiency of the recycling device 1. It should be understood that the distance between the recycling device 1 and the vapor deposition substrate 3 should be the same as the distance between the baffle 12 and the vapor deposition substrate 3. The distance between the recycling device 1 and the vapor deposition substrate 3 can be any value or a range formed by any two of the following: 20mm, 30mm, 40mm, 50mm, 60mm, 70mm, 80mm, 90mm, 100mm, 110mm, 120mm, 130mm, 140mm, and 150mm.
[0066] Obviously, the embodiments described above are only some embodiments of this application, not all embodiments. The accompanying drawings show preferred embodiments of this application, but do not limit the patent scope of this application. This application can be implemented in many different forms; rather, the purpose of providing these embodiments is to provide a more thorough and comprehensive understanding of the disclosure of this application. Although this application has been described in detail with reference to the foregoing embodiments, those skilled in the art can still modify the technical solutions described in the foregoing specific embodiments, or make equivalent substitutions for some of the technical features. Any equivalent structures made using the content of this application's specification and drawings, directly or indirectly applied to other related technical fields, are similarly within the scope of patent protection of this application.
Claims
1. A recycling device, characterized in that, The recycling device comprises a heating assembly, a baffle, a driving member and a recycling member. The heating assembly comprises a heating cavity and a heat source member, and the heat source member is used for heating the heating cavity. The driving member is connected with the baffle, and the driving member is used for driving the baffle to enter or leave the heating cavity. The recycling member is arranged in the heating cavity, and the recycling member is used for recycling the material to be recycled on the baffle when the baffle is heated in the heating cavity. The driving member comprises a connecting part and a driving part, one end of the connecting part is connected with the baffle, and the other end is connected with the driving part.
2. The recycling apparatus of claim 1, wherein The driving part is used for driving the connecting part to drive the baffle to enter or leave the heating cavity; and / or The driving part is used for driving the connecting part to drive the baffle to overturn, and the overturning angle of the baffle is 0° to 180°. The recycling device further comprises a heat insulation member, the heating cavity has a cavity wall, and the heat insulation member is fixed on the outer wall surface of the cavity wall; and / or 3. The recycling apparatus of claim 2, wherein, The heat source member is located in the heating cavity; and / or The driving part comprises a linear motor, the connecting part is a connecting rod, and the linear motor is used for driving the connecting rod to make linear reciprocating motion to drive the baffle to approach or move away from the driving part; and / or The driving part comprises a rotating motor, the connecting part is a motor shaft, and the rotating motor is used for driving the motor shaft to make circumferential motion around its own axis to drive the baffle to overturn to enter or leave the heating cavity. The recycling member comprises a collecting part and a flow guiding part; 4. The recycling apparatus of claim 1, wherein The collecting part is arranged in the heating cavity to collect the material to be recycled on the baffle, and the first end of the flow guiding part is in communication with the collecting part to recycle the collected material to be recycled into the recycling member. An inclined flow guiding surface is arranged on the collecting part, and the flow guiding surface is in communication with the first end of the flow guiding part to guide the collected material to be recycled into the flow guiding part.
5. The recycling apparatus of claim 4, wherein, The included angle between the flow guiding surface and the bottom wall of the heating cavity is 2° to 12°; 6. The recycling apparatus of claim 5, wherein, And / or, the recycling member further comprises a heating part, and the heating part is used for heating the flow guiding part. The baffle has a first projection on the bottom wall of the heating cavity, the collecting part has a second projection on the bottom wall of the heating cavity, and the first projection is located in the range of the second projection; 7. The recycling apparatus of claim 4, wherein And / or A storage cavity is arranged in the flow guiding part, and the opening of the storage cavity is in communication with the collecting part, and the storage cavity is used for storing the material to be recycled. The evaporation device further comprises an evaporation source and an evaporation substrate for placing a workpiece to be evaporated, the evaporation substrate and the evaporation source are oppositely arranged in the cavity, and the recycling device is located between the evaporation substrate and the evaporation source.
8. An evaporation apparatus, characterized by, 9. The evaporation apparatus according to claim 8, characterized in that, 10. The evaporation apparatus according to claim 9, wherein The baffle has a first position and a second position, when the baffle is in the first position, the projection of the baffle, the evaporation source and the evaporation substrate on a horizontal plane at least partially overlaps, when the baffle is in the second position, the projection of the baffle on a horizontal plane is completely not overlapped with the projection of the evaporation source and the evaporation substrate on a horizontal plane; The driving member is used to drive the baffle to move, so as to switch the baffle between the first position and the second position; and / or, The number of the recovery devices is at least 1; when the number of the recovery devices is at least 2, several recovery devices are arranged at intervals between the evaporation source and the evaporation substrate; and / or, When the number of the recovery devices is at least 2, the distance between the recovery device closest to the evaporation substrate and the evaporation substrate is 50mm-200mm; and / or, The distance between the recovery device closest to the evaporation source and the evaporation source is 20mm-150mm.