Differential exhaust mechanism and rotary valve device

Abstract

The utility model provides a differential exhaust mechanism and a rotary valve device, and the mechanism comprises a purging assembly which corresponds to a rotating shaft and is arranged at the penetrating position of the rotating shaft on a housing and is used for spraying purging gas to the rotating shaft; and the exhaust assembly is arranged corresponding to the penetrating position of the rotating shaft on the shell and is used for exhausting the purging gas after purging the rotating shaft. The purging assembly and the exhaust assembly correspond to the penetrating position of the rotating shaft on the shell, the purging assembly sprays purging gas to the rotating shaft, high-speed airflow of the purging gas has strong scouring force, and pollutants attached to the surface of the rotating shaft can be effectively scoured away. And meanwhile, the exhaust assembly exhausts air, and purge air with pollutants is exhausted away, so that the rotating shaft is cleaned in time. The purging assembly and the exhaust assembly play a role in removing pollutants and preventing the pollutants from entering the inner space of the shell at the communication position of the inner space of the shell and the external environment, and the problem that the pollutants enter the shell along the rotating shaft and pollute the inner space of the shell is avoided.

Description

Technical Field

[0001] This utility model relates to the field of semiconductor equipment technology, and in particular to a differential exhaust mechanism and a rotary valve device. Background Technology

[0002] In semiconductor equipment, some pipelines are equipped with rotary valves to control the opening and closing of the pipeline. However, the rotating shaft connection of existing rotary valves may be contaminated with contaminants. These contaminants can enter the rotary valve along the rotating shaft and potentially contaminate the inside of the housing.

[0003] In view of this, it is necessary to propose a differential exhaust mechanism and rotary valve device to solve the above problems. Utility Model Content

[0004] The purpose of this invention is to provide a differential exhaust mechanism and a rotary valve device to improve the problem that the rotating shaft of the existing rotary valve is contaminated with pollutants, which in turn causes pollution to the internal space of the housing.

[0005] This utility model provides a differential exhaust mechanism, including:

[0006] A purging assembly is provided at a through-hole on the housing of the rotary valve device corresponding to the rotating shaft of the rotary valve device and is used to inject purging gas onto the rotating shaft.

[0007] An exhaust assembly is provided at the point on the housing corresponding to the through-hole of the rotating shaft and is used to draw away the purge gas after purging the rotating shaft.

[0008] The beneficial effects of the differential exhaust mechanism provided by this utility model are as follows: a purging assembly and an exhaust assembly are provided at the penetration point of the rotating shaft on the housing. The purging assembly sprays purging gas onto the rotating shaft. Under the action of the high-speed airflow of the purging gas, the contaminants attached to the rotating shaft can be washed away. At the same time, the purging assembly draws air, so that the contaminants can be drawn away with the purging gas, thereby avoiding the problem of contaminants entering the housing along the rotating shaft and causing pollution to the internal space of the housing.

[0009] In one possible embodiment, the rotating shaft portion extends out of the housing to form an extension;

[0010] The purging assembly includes a first outer shell disposed on the outer wall of the housing and surrounding the extension portion, wherein a purging chamber is formed within the first outer shell surrounding the extension portion, and the purging chamber communicates with a gap located between the housing and the rotating shaft.

[0011] Its beneficial effects are as follows: the first outer shell is disposed on the outer wall of the housing and near the point where the rotating shaft passes through the housing, that is, the first outer shell is disposed near the gap between the housing and the rotating shaft, to ensure that contaminants on the protruding part are blown away and to prevent contaminants from entering the housing through the gap and contaminating the internal space of the housing. The purging chamber is disposed around the protruding part, which can ensure that the circumferential direction of the protruding part can be effectively purged and cleaned, avoiding the existence of cleaning dead corners that would affect the purging and cleaning effect.

[0012] In one possible embodiment, the exhaust assembly includes a second housing disposed on the side of the first housing away from the housing and surrounding the extension, the second housing having an exhaust chamber formed therearound the extension, the exhaust chamber communicating with the purge chamber.

[0013] Its beneficial effects are as follows: the second outer shell is located on the side of the first outer shell away from the housing, that is, the second outer shell and the first outer shell are connected. Since the exhaust chamber is connected to the purge chamber, by evacuating the exhaust chamber, the purge gas ejected from the purge chamber can be drawn away from the exhaust chamber after rinsing the surface of the extension, thereby achieving effective cleaning of the extension. No contaminants remain on the rotating shaft, thus preventing contaminants on the rotating shaft from entering the housing along the rotating shaft and causing pollution to the internal space of the housing. Both the exhaust chamber and the purge chamber are arranged around the extension.

[0014] In one possible embodiment, the side of the second housing away from the first housing is sealed to the extension by a seal.

[0015] Its beneficial effect is that the seal acts as a seal between the exhaust member on the side away from the intake member and the extension.

[0016] In one possible embodiment, the seal is located on the side of the second housing away from the first housing and is fitted onto the extension, and the rotating shaft is rotatable within the seal.

[0017] Its beneficial effects are as follows: the sealing element is provided on the second outer shell and sleeved on the extension. Since the sealing element is not fixedly connected to the rotating shaft, the rotating shaft can rotate inside the sealing element. At the same time, the sealing element plays a sealing role between the side of the exhaust element away from the intake element and the extension.

[0018] In one possible embodiment, the seal is coated with a lubricating sealing material.

[0019] Its beneficial effects are as follows: on the one hand, the lubricating and sealing material plays a lubricating role, which can reduce friction and allow the rotating shaft to rotate more smoothly within the seal; on the other hand, the lubricating and sealing material also plays a sealing role, enhancing the sealing between the rotating shaft and the extension.

[0020] In one possible embodiment, the exhaust assembly further includes an exhaust pipe disposed on the second housing and an air extraction component connected to the exhaust pipe, the air extraction component being used to extract the purge gas after purging the rotating shaft.

[0021] Its beneficial effect is that the air extraction component can draw away the purge gas containing pollutants through the exhaust chamber and the exhaust pipe.

[0022] In one possible embodiment, the purging assembly further includes a purging conduit disposed on the first housing and a purging gas supply assembly connected to the purging conduit, the purging gas supply assembly being used to supply purging gas into the purging conduit.

[0023] Its beneficial effect is that the purge gas supply assembly introduces purge gas into the purge pipeline, and the purge gas enters the purge chamber to purge and clean the rotating shaft.

[0024] In one possible embodiment, the differential exhaust mechanism further includes a sealing cover disposed on the outer wall of the housing corresponding to the extension, and the purging assembly and the exhaust assembly are at least partially located within the sealing cover.

[0025] Its beneficial effect is that the sealing cover isolates the rotating shaft from the external environment, preventing pollutants from the external environment from contaminating the rotating shaft.

[0026] In one possible embodiment, the extension is rotatably mounted on the sealing cover via a bearing.

[0027] Its beneficial effect is that the bearing can reduce the friction between the sealing cover and the extension, so that the rotating shaft can rotate more smoothly.

[0028] In one possible embodiment, the bearing is coated with a lubricating sealing material.

[0029] This utility model also provides a rotary valve device, including a housing, a rotary valve body, and a differential exhaust mechanism as described in any of the above embodiments, wherein the rotary valve body is rotatably disposed within the housing via a rotating shaft. Attached Figure Description

[0030] Figure 1 This is a schematic diagram of the installation of the differential exhaust mechanism of this utility model in one embodiment.

[0031] Figure 2 This is a schematic diagram of the differential exhaust mechanism of this utility model mounted on a rotating shaft.

[0032] Figure 3 This is a schematic diagram of the installation of the differential exhaust mechanism of this utility model in another embodiment.

[0033] Explanation of reference numerals in the attached drawings: 100, differential exhaust mechanism; 110, purging assembly; 111, first housing; 1111, purging chamber; 112, purging pipeline; 113, first gap; 120, exhaust assembly; 121, second housing; 1211, exhaust chamber; 122, exhaust pipeline; 123, second gap; 130, seal; 140, sealing cover; 150, bearing; 200, housing; 210, gap; 300, rotary valve body; 310, rotating shaft; 311, extension; 400, drive component. Detailed Implementation

[0034] To make the objectives, technical solutions, and advantages of the embodiments of this utility model clearer, the technical solutions of the embodiments of this utility model will be clearly and completely described below with reference to the accompanying drawings. Obviously, the described embodiments are only some embodiments of this utility model, not all embodiments. Based on the embodiments of this utility model, all other embodiments obtained by those skilled in the art without creative effort are within the protection scope of this utility model.

[0035] Rotary valves, as a common control element, play a crucial role in semiconductor equipment, primarily controlling the flow of fluid within pipelines. However, semiconductor equipment demands exceptionally high cleanliness standards. The manufacturing process must be carried out in an ultra-clean environment because even the slightest contamination can severely impact the performance of semiconductor materials, leading to increased defect rates, performance degradation, or even complete failure of semiconductor devices.

[0036] The rotary valve body is rotatably mounted inside the housing via a rotating shaft. Since the rotating shaft needs to extend outside the housing to connect with the drive component, if contaminants accumulate on the rotating shaft, these contaminants may enter the housing through the gap between the housing and the rotating shaft as the shaft rotates, thus causing contamination of the pipeline.

[0037] To address the problems existing in the prior art, embodiments of this utility model provide a differential exhaust mechanism, applied to the rotary valve device of a pipeline on a semiconductor device. Figure 1 This is a schematic diagram of the installation of the differential exhaust mechanism of this utility model in one embodiment. See also: Figure 1The differential exhaust mechanism 100 includes a purging assembly 110 and an exhaust assembly 120. The purging assembly 110 is disposed at a through-hole on the housing 200 of the rotary valve device corresponding to the rotating shaft 310 of the rotary valve device and is used to inject purging gas into the rotating shaft 310. The exhaust assembly 120 is disposed at a through-hole on the housing 200 corresponding to the rotating shaft 310 and is used to remove the purging gas after purging the rotating shaft 310. The purging gas can be flexibly selected according to the actual process; for example, the purging gas can be an inert gas.

[0038] The position where the rotating shaft 310 passes through the housing 200 of the rotary valve device can be understood as the connection point between the internal space of the housing 200 and the external environment. The rotating shaft 310 can rotate through the through-hole device on the housing 200. Since there is a gap 210 between the rotating shaft 310 and the housing 200 at this through-hole position, if the rotating shaft 310 is contaminated, the contaminants may enter the housing 200 through the through-hole position of the rotating shaft 310, thereby contaminating the internal space of the housing 200. In this embodiment, a purge assembly 110 and an exhaust assembly 120 are corresponding to the through-hole position of the rotating shaft 310 on the housing 200. The purge assembly 110 sprays purge gas onto the rotating shaft 310. The high-speed airflow of the purge gas has a strong scouring force, which can effectively wash away the contaminants attached to the surface of the rotating shaft 310. At the same time, the exhaust assembly 120 extracts the purge gas containing contaminants to achieve timely cleaning of the rotating shaft 310. The purging assembly 110 and the exhaust assembly 120 serve to remove contaminants at the connection between the internal space of the housing 200 and the external environment, and to prevent contaminants from entering the internal space of the housing 200. This avoids contaminants from entering the housing 200 along the rotating shaft 310 and causing contamination to the internal space of the housing 200, thereby preventing contamination of the pipelines on the semiconductor equipment due to contamination in the rotary valve device, and thus effectively improving product quality.

[0039] In one embodiment, Figure 2 This is a schematic diagram of the differential exhaust mechanism of this utility model mounted on a rotating shaft. See also: Figure 1 and Figure 2 The rotating shaft 310 extends out of the housing 200 to form an extension 311. The purging assembly 110 includes a first outer shell 111 disposed on the outer wall of the housing 200 and surrounding the extension 311. A purging chamber 1111 is formed inside the first outer shell 111 and surrounds the extension 311. The purging chamber 1111 communicates with the gap 210 located between the housing 200 and the rotating shaft 310. Purging gas is introduced into the purging chamber 1111 to achieve purging and cleaning of the rotating shaft 310.

[0040] In this embodiment, the first outer shell 111 is disposed near the gap 210 between the housing 200 and the rotating shaft 310 and is located on the outer wall of the housing 200. This can be understood as the first outer shell 111 covering the extension 311. By introducing purge gas into the purge chamber 1111, the contaminants on the extension 311 are washed away by the airflow of the purge gas. The exhaust assembly 120 then extracts the purge gas containing contaminants, ensuring that contaminants are removed before entering the gap 210, preventing contaminants from entering the housing 200 from the gap 210 and contaminating the internal space of the housing 200. The purge chamber 1111 is arranged around the extension 311, allowing the airflow of purge gas to flow around the extension 311 and wash its surface, ensuring that the entire circumference of the extension 311 is effectively cleaned, avoiding dead cleaning corners that could lead to contaminant residue, thereby improving the cleaning effect.

[0041] In one specific embodiment, see Figure 2 There is a first gap 113 between the first outer shell 111 and the extension 311. The first gap 113 communicates with the purge chamber 1111 and the gap 210 located between the housing 200 and the rotating shaft 310. The first gap 113 can ensure that the airflow of the purge gas can flow more fully around the extension 311 and flush away all contaminants on the periphery of the extension 311.

[0042] In another specific embodiment, see Figure 2 The first outer shell 111 has a first through hole in the middle, which communicates with the purge chamber 1111. It can be understood that the first through hole is the chamber opening of the purge chamber 1111, and the extension 311 passes through the first through hole. The shape of the first outer shell 111 is not limited here. The first outer shell 111 can be in the shape of a ring, a square ring, etc.

[0043] In one embodiment, see Figure 2 The purging assembly 110 also includes a purging pipe 112 disposed on the first housing 111 and a purging gas supply assembly (not shown in the figure) connected to the purging pipe 112. The purging gas supply assembly is used to supply purging gas into the purging pipe 112. Purging gas is introduced into the purging pipe 112 through the purging gas supply assembly. The purging gas enters the purging chamber 1111 from the purging pipe 112. The airflow of the purging gas washes away contaminants on the surface of the extension 311 to purge and clean the rotating shaft 310.

[0044] In one embodiment, see Figure 1 and Figure 2The exhaust assembly 120 includes a second housing 121 disposed on the side of the first housing 111 away from the housing 200 and surrounding the extension 311. An exhaust chamber 1211 is formed inside the second housing 121 and surrounds the extension 311. The exhaust chamber 1211 communicates with the purge chamber 1111. By evacuating the exhaust chamber 1211, the purge gas after purging the extension 311 is removed.

[0045] In this embodiment, the second outer shell 121 is located on the side of the first outer shell 111 away from the housing 200. The exhaust chamber 1211 is connected to the purge chamber 1111. It can be understood that the first outer shell 111 and the second outer shell 121 are placed side by side over the extension 311. The first outer shell 111 and the second outer shell 121 protect and isolate the extension 311 to prevent the extension 311 from being contaminated by the external environment. At the same time, by venting the purge chamber 1111 and evacuating the exhaust chamber 1211, the purge gas ejected from the purge chamber 1111 can be quickly drawn away from the exhaust chamber 1211 after rinsing the surface of the extension 311, thereby achieving rapid and effective cleaning of the extension 311.

[0046] Furthermore, since both the exhaust chamber 1211 and the purge chamber 1111 are arranged around the extension 311, the airflow of the purge gas circumferentially cleans the extension 311, ensuring comprehensive cleaning. Simultaneously, the circumferential suction effect on the purge chamber 1111 side allows the purge gas, carrying away all the pollutants, to be drawn into the exhaust chamber 1211, preventing pollutants from remaining in the extension 311, exhaust chamber 1211, and purge chamber 1111. This synergistic effect of circumferential scouring and suction significantly improves the cleaning effect on the extension 311. The circumferential suction effect on the purge chamber 1111 side not only accelerates the discharge of pollutants but also enhances the scouring effect of the purge gas. Due to the larger suction range, the purge gas can more effectively remove pollutants from the surface of the extension 311. Moreover, since both the purge chamber 1111 and the exhaust chamber 1211 are arranged around the extension 311, the airflow can flow quickly to the exhaust chamber 1211 along a preset path after rinsing the extension 311, ensuring that the pollutants that have been rinsed off can be discharged in a timely and effective manner.

[0047] In one embodiment, see Figure 2 The second outer shell 121 and the extension 311 have a second gap 123. The second gap 123 communicates with the exhaust chamber 1211 and the first gap 113 respectively. The second gap 123 can ensure that the purging gas at the first gap 113 can enter the second gap 123 more smoothly and be drawn away through the exhaust chamber 1211.

[0048] In another embodiment, see Figure 2 The second outer shell 121 has a second through hole in the middle, which communicates with the exhaust chamber 1211. It can be understood that the second through hole is the chamber opening of the exhaust chamber 1211, and the protrusion 311 passes through the second through hole. The shape of the second outer shell 121 is not limited here. The second outer shell 121 can be in the shape of a ring, a square ring, etc.

[0049] In one specific embodiment, see Figure 1 and Figure 2 The exhaust assembly 120 also includes an exhaust pipe 122 disposed on the second housing 121 and an air extraction component (not shown in the figure) connected to the exhaust pipe 122. The air extraction component is used to remove the purge gas after purging the rotating shaft 310. The specific type of air extraction component is not limited here; for example, the air extraction component is a device capable of pumping air, such as an air pump. Through the pumping action of the air extraction component, the purge gas carrying contaminants is drawn into the exhaust chamber 1211 and then removed through the exhaust pipe 122, ensuring that the contaminants flushed away can be discharged in a timely and effective manner.

[0050] In one embodiment, see Figure 1 and Figure 2 The side of the second outer shell 121 away from the first outer shell 111 is sealed with the extension 311 by a seal 130. The seal 130 is a sealing ring or the like. The number of seals 130 is not limited here. Under the sealing action of the seal 130, even if the rotating shaft 310 rotates, the extension 311 and the side of the second outer shell 121 away from the first outer shell 111 can be effectively sealed.

[0051] In one embodiment, the seal 130 is disposed on the side of the second housing 121 away from the first housing 111 and sleeved on the extension 311, allowing the rotating shaft 310 to rotate within the seal 130. The design of the seal 130 not only allows the rotating shaft 310 to rotate freely but also forms a reliable seal between the exhaust port on the side away from the intake port and the extension 311, thereby enhancing the sealing performance.

[0052] In one specific embodiment, see Figure 1 and Figure 2The seal 130 is coated with a lubricating sealing material, such as vacuum grease or silicone grease. This lubricating sealing material significantly reduces the friction between the extension 311 and the seal 130, making the rotation of the rotating shaft 310 within the seal 130 smoother and preventing wear caused by friction between the rotating shaft 310 and the seal 130. The lubricating sealing material not only lubricates but also provides excellent sealing performance. It fills the tiny gaps between the extension 311 and the seal 130, enhancing the seal between them. The lubricating sealing material on the extension 311 can be removed by the inflation of the purging gas supply assembly and the extraction of the evacuation assembly, thus preventing it from entering the housing 200 along the rotating shaft 310 and contaminating the internal space of the housing 200.

[0053] In one embodiment, see Figure 1 and Figure 2 The differential exhaust mechanism 100 also includes a sealing cover 140 corresponding to the protrusion 311 disposed on the outer wall of the housing 200, with the purging assembly 110 and the exhaust assembly 120 at least partially located inside the sealing cover 140. The design of the sealing cover 140 can prevent the protrusion 311 of the rotating shaft 310 from directly contacting the external environment, preventing pollutants from the external environment from falling on the protrusion 311, thereby playing a role in isolating and protecting the protrusion 311.

[0054] The housing 200 is a vacuum side, and the sealing cover 140 is an atmospheric side. By installing a purging assembly 110 and an exhaust assembly 120 on the extension 311 of the rotating shaft 310 extending out of the housing 200, contaminants on the extension 311 can be flushed away. The exhaust assembly 120 can also be used to remove the purging gas and contaminants, thus preventing contaminants from entering the housing 200 along the rotating shaft 310 and causing contamination of the vacuum side.

[0055] In one specific embodiment, see Figure 1 and Figure 2 The first housing 111 and the second housing 121 are located inside the sealing cover 140. The purge pipe 112 extends out of the sealing cover 140 and is connected to the purge gas supply assembly located outside the sealing cover 140. The exhaust pipe 122 extends out of the sealing cover 140 and is connected to the suction device located outside the sealing cover 140.

[0056] In one embodiment, see Figure 1 and Figure 2The protrusion 311 is rotatably mounted on the sealing cover 140 via bearings 150. The number of bearings 150 is not limited here. The bearings 150 connect the protrusion 311 and the sealing cover 140. Due to the rolling action of the rolling elements inside the bearings 150, sliding friction can be converted into rolling friction, thereby greatly reducing frictional resistance. This ensures that the rotating shaft 310 will not experience excessive frictional resistance during rotation and will not experience jamming, thus guaranteeing the smoothness and stability of the rotation of the rotating shaft 310.

[0057] In one specific embodiment, the inner ring of the bearing 150 is fitted onto the extension 311, and the outer ring of the bearing 150 is disposed on the side wall of the sealing cover 140 away from the housing 200. When the rotating shaft 310 rotates, the relative rotation of the inner and outer rings, along with the rotation of the rolling elements between the inner and outer rings, provides lubrication, ensuring that the rotating shaft 310 can rotate smoothly.

[0058] In one specific embodiment, a lubricating sealing material is applied to the bearing 150. The lubricating sealing material on the bearing 150 has a lubricating effect, which can significantly reduce the frictional resistance of the bearing 150 during operation, making the operation of the bearing 150 smoother.

[0059] This utility model also provides a rotary valve device. Figure 3 This is a schematic diagram of the installation of the differential exhaust mechanism of this utility model in another embodiment. See also: Figure 1 and Figure 3 The rotary valve device includes a housing 200, a rotary valve body 300, and a differential exhaust mechanism 100 as described in any of the above embodiments. The rotary valve body 300 is rotatably disposed within the housing 200 via a rotating shaft 310.

[0060] In one specific embodiment, see Figure 1 A rotating shaft 310 is provided at one end of the rotary valve body 300. The extended portion 311 of the rotating shaft 310 extends out of the sealing cover 140 and is connected to the drive member 400. The drive member 400 is used to drive the rotating shaft 310 to rotate.

[0061] In one specific embodiment, see Figure 3 Rotary valve body 300 is provided with two rotating shafts 310 at opposite ends. Both rotating shafts 310 extend out of housing 200. Differential exhaust mechanism 100 is provided for the extended portions 311 of the two rotating shafts 310. The extended portion 311 of one of the rotating shafts 310 extends out of sealing cover 140 and is connected to drive member 400. Drive member 400 is used to drive rotating shaft 310 to rotate.

[0062] Specifically, the driving component 400 is a device such as a motor or rotary cylinder that can drive the rotary shaft 310 to rotate. The specific type of driving component 400 is not limited here and can be flexibly selected according to actual process requirements.

[0063] The technical effects of the differential exhaust mechanism and rotary valve device of this utility model will be explained in detail below.

[0064] 1. A purge assembly 110 and an exhaust assembly 120 are provided at the point where the rotating shaft 310 of the rotary valve device passes through. The purge assembly 110 sprays purge gas onto the rotating shaft 310, which can wash away contaminants adhering to the rotating shaft 310. At the same time, the exhaust assembly 120 extracts the purge gas to prevent contaminants from entering the housing 200 with the rotating shaft 310, thus avoiding the problem of pollution inside the housing 200.

[0065] 2. The first outer casing 111 is disposed on the outer wall of the housing 200 and is arranged around the extension 311 of the rotating shaft 310. The purge chamber 1111 is connected to the gap 210 between the housing 200 and the rotating shaft 310. By introducing purge gas into the purge chamber 1111, the airflow washes away contaminants on the surface of the extension 311, causing the contaminants to detach from the extension 311. The exhaust assembly 120 extracts the purge gas containing contaminants, preventing contaminants from entering the interior of the housing 200 through the gap 210. The purge chamber 1111 is designed to surround the extension 311, allowing the purge gas to thoroughly clean the extension 311, avoiding cleaning dead spots and improving the cleaning effect.

[0066] 3. The purge chamber 1111 and the exhaust chamber 1211 are arranged around the extension 311, so that the purge gas can thoroughly flush the surface of the rotating shaft 310, ensuring that the extension 311 is thoroughly cleaned. The circumferential suction of the purge chamber 1111 can effectively suck up and discharge the pollutants flushed down, preventing pollutant residue, and at the same time enhancing the cleaning effect of the purge gas.

[0067] 4. A sealing element 130 is provided between the side of the second outer shell 121 away from the first outer shell 111 and the extension 311 to prevent external contaminants from entering the exhaust chamber 1211. The sealing element 130 is sleeved on the extension 311 and is not fixedly connected to the rotating shaft 310, allowing the rotating shaft 310 to rotate smoothly within the sealing element 130. This design ensures both sealing performance and does not affect the rotational flexibility of the rotating shaft 310.

[0068] 5. The lubricating sealing material plays a lubricating role, which can reduce friction and make the rotating shaft 310 rotate more smoothly within the seal 130; at the same time, the lubricating sealing material can also enhance the sealing performance between the rotating shaft 310 and the seal 130.

[0069] 6. A sealing cover 140 is provided on the outer wall of the housing 200, which houses the first outer shell 111, the second outer shell 121, and at least part of the protrusion 311, thus isolating them from the external environment. This design can prevent pollutants from the external environment from contaminating the penetration point of the rotating shaft 310 on the housing 200.

[0070] 7. The bearing 150 reduces the friction between the sealing cover 140 and the extension 311, allowing the rotating shaft 310 to rotate more smoothly. At the same time, the bearing 150 also supports the rotating shaft 310, enhancing the stability of the structure.

[0071] In the description of this utility model, it should be understood that the terms "comprising" and "having" as used herein, and any variations thereof, are intended to cover non-exclusive inclusion, for example, a process, method, system, product, or device that includes a series of steps or units is not necessarily limited to those steps or units that are explicitly listed, but may include other steps or units that are not explicitly listed or that are inherent to such process, method, product, or device.

[0072] It should be understood that the terms "length", "width", "upper", "lower", "front", "rear", "left", "right", "vertical", "horizontal", "top", "bottom", "inner", and "outer" indicate the orientation or positional relationship based on the orientation or positional relationship shown in the accompanying drawings. They are only for the convenience of describing this utility model and simplifying the description, and do not indicate or imply that the device or element referred to must have a specific orientation, or be constructed and operated in a specific orientation. Therefore, they should not be construed as limitations on this utility model.

[0073] Furthermore, the terms "first" and "second" are used for descriptive purposes only and should not be construed as indicating or implying relative importance or implicitly specifying the number of technical features indicated. Thus, a feature defined as "first" or "second" may explicitly or implicitly include one or more of that feature. In the description of this utility model, unless otherwise stated, "a plurality of" means two or more.

[0074] While the embodiments of this utility model have been described in detail above, it will be apparent to those skilled in the art that various modifications and variations can be made to these embodiments. However, it should be understood that such modifications and variations fall within the scope and spirit of this utility model as set forth in the claims. Furthermore, the utility model described herein may have other embodiments and can be implemented or realized in various ways. Unless otherwise defined, the technical or scientific terms used herein should have the ordinary meaning understood by one of ordinary skill in the art to which this utility model pertains.

Claims

1. A differential exhaust mechanism characterized by, The application comprises: a purging assembly arranged corresponding to the penetration of the rotating shaft in the housing of the rotary valve device and used for spraying purging gas to the rotating shaft; an exhaust assembly arranged corresponding to the penetration of the rotating shaft in the housing and used for exhausting the purging gas after purging the rotating shaft.

2. The differential exhaust mechanism according to claim 1, characterized by, The rotating shaft partially extends out of the housing to form an extension; The purging assembly comprises a first shell arranged on the outer wall of the housing and surrounding the extension, and a purging chamber is formed in the first shell and surrounds the extension, and the purging chamber communicates with the gap between the housing and the rotating shaft.

3. The differential exhaust mechanism according to claim 2, characterized by, The exhaust assembly comprises a second shell arranged on the side of the first shell away from the housing and surrounding the extension, and an exhaust chamber is formed in the second shell and surrounds the extension, and the exhaust chamber communicates with the purging chamber.

4. The differential exhaust mechanism according to claim 3, characterized by The side of the second shell away from the first shell and the extension are sealed by a sealing member.

5. The differential exhaust mechanism according to claim 4, characterized by The sealing member is arranged on the side of the second shell away from the first shell and sleeved on the extension, and the rotating shaft can rotate in the sealing member.

6. The differential exhaust mechanism according to claim 5, characterized by The sealing member is coated with a lubricating sealing material.

7. The differential exhaust mechanism according to claim 3, characterized by The exhaust assembly further comprises an exhaust pipeline arranged on the second shell and a gas extraction member connected with the exhaust pipeline, and the gas extraction member is used for exhausting the purging gas after purging the rotating shaft.

8. The differential exhaust mechanism according to claim 2, characterized by The purging assembly further comprises a purging pipeline arranged on the first shell and a purging gas supply assembly connected with the purging pipeline, and the purging gas supply assembly is used for supplying purging gas to the purging pipeline.

9. The differential exhaust mechanism according to any one of claims 2 to 8, characterized by, Further comprising a sealing cover arranged on the outer wall of the housing corresponding to the extension, and the purging assembly and the exhaust assembly are at least partially located in the sealing cover.

10. The differential exhaust mechanism according to claim 9, characterized by The extension is rotatably penetrated in the sealing cover through a bearing.

11. A rotary valve apparatus, characterised in that, A housing, a rotary valve body rotatably arranged in the housing through a rotating shaft, and a differential exhaust mechanism as claimed in any one of claims 1-10.

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