Insulation resistance measuring device and semiconductor processing system

Abstract

The utility model discloses an insulation resistance measuring device and a semiconductor processing system. The measuring device comprises a cabinet body, a fixing part, a measuring circuit and a control circuit. The fixing part is arranged on the upper surface of the cabinet body and comprises a first fixing unit. The first fixing unit comprises a first driving mechanism and a connecting part fixed on the upper surface of the cabinet body; and the first fixing block is movably connected with the first driving mechanism and is provided with a first measuring contact and at least one second measuring contact. The at least one second measuring contact is in contact with the measuring contact of the object to be measured, and the first measuring contact is grounded. The measuring circuit comprises a measuring module, one end of which is connected with the first measuring contact and the other end of which is connected with the at least one second measuring contact; one end of the first switch group is connected with the second measuring contact, and the other end of the first switch group is connected with the first measuring contact. The control circuit comprises a second switch group which is connected with the first driving mechanism. The measuring device can improve the reliability of a measuring result.

Description

Technical Field

[0001] This application relates to the field of electrical measuring equipment, and more specifically, to an insulation resistance measuring device and a semiconductor manufacturing system. Background Technology

[0002] In the semiconductor manufacturing industry, the insulation resistance of heaters needs to be measured during the manufacturing process to ensure product quality. Currently, insulation resistance testing is typically performed manually by operators using an insulation resistance meter.

[0003] The applicant found that while manual measurement offers strong subjective initiative, the reliability of the results is low due to significant individual differences among operators and the non-standardized measurement process. Furthermore, the irregular shape of the heater's bottom during measurement made it impossible to fix it flat, requiring both hands to hold the probes, which was inconvenient. Utility Model Content

[0004] This application aims to provide a standardized measuring device for measuring insulation resistance, thereby improving the reliability of measurement results.

[0005] According to one aspect of this application, an insulation resistance measuring device is provided. The insulation resistance measuring device includes a cabinet, a fixing part, a measuring circuit, and a control circuit. A connecting part is fixedly disposed on the upper surface of the cabinet. The connecting part is L-shaped, with its long arm end vertically fixed to the upper surface of the cabinet, and its short arm end forming a gap with the upper surface of the cabinet. The fixing part is fixedly disposed on the upper surface of the cabinet and includes a first fixing unit. The first fixing unit includes a first driving mechanism and a first fixing block. One end of the first driving mechanism is fixed to the short arm end of the connecting part. One end of the first fixing block is movably connected to the other end of the first driving mechanism and is driven by the first driving mechanism to reciprocate along a first direction perpendicular to the upper surface of the cabinet. The other end is provided with a first measuring contact and at least one second measuring contact. When the first fixing block contacts the object to be measured, at least one second measuring contact contacts the measuring contact of the object to be measured, and the first measuring contact is grounded. The measuring circuit is disposed in the cabinet and includes a measuring module and at least one first switch group. One end of the measuring module is electrically connected to the first measuring contact, and the other end is electrically connected to at least one second measuring contact. One end of the first switch group is electrically connected to at least one second measuring contact, and the other end is electrically connected to a first measuring contact, to control the measurement of the insulation resistance between the measuring contact of the object to be measured and the first measuring contact. The control circuit, located in the cabinet, includes the second switch group. The second switch group is electrically connected to the first drive mechanism to control its movement.

[0006] According to some embodiments of this application, the fixing part further includes a second fixing unit and a third fixing unit. The second fixing unit includes a second driving mechanism and a second fixing block. One end of the second driving mechanism is fixedly disposed on a first side. One end of the second fixing block is connected to the other end of the second driving mechanism. When the second driving mechanism slides, it drives the second fixing block to slide back and forth along a second direction. The third fixing unit includes a third driving mechanism and a third fixing block. One end of the third driving mechanism is fixedly disposed on a second side. One end of the third fixing block is connected to the other end of the third driving mechanism. When the third driving mechanism slides, it drives the third fixing block to slide back and forth along a second direction. The control circuit further includes a third switch group. The third switch group is connected to the second driving mechanism and the third driving mechanism, controlling the movement of the second driving mechanism and the third driving mechanism.

[0007] According to some embodiments of this application, the connecting portion further includes a protrusion. The protrusion is disposed on the inner side of the end of the long arm near the upper surface of the cabinet to contact the object to be measured.

[0008] According to some embodiments of this application, the measuring device further includes a main power supply circuit. The main power supply circuit is disposed in a cabinet and includes a main switch and a power supply. One end of the main switch is electrically connected to the power distribution line. The power supply input terminal is electrically connected to the other end of the main switch. The power supply obtains a first voltage from the power distribution line through the input terminal and converts the first voltage into a second voltage. The power supply output terminal outputs the second voltage.

[0009] According to some embodiments of this application, the first switch group includes a first switch and a first relay. One end of the first switch is electrically connected to the output terminal of a power supply. The first relay includes a first coil and a first inductive switch. One end of the first coil is electrically connected to the output terminal of the power supply, and the other end is electrically connected to the other end of the first switch. One end of the first inductive switch is electrically connected to a second measuring contact, and the other end is electrically connected to one end of a measuring module.

[0010] According to some embodiments of this application, the second switch group includes a second switch and a second relay. One end of the second switch is electrically connected to the output terminal of a power supply. The second relay includes a second coil and a second inductive switch. One end of the second coil is electrically connected to the output terminal of the power supply, and the other end is electrically connected to the other end of the second switch. One end of the second inductive switch is electrically connected to a first drive mechanism, and the other end is electrically connected to the output terminal of the power supply.

[0011] According to some embodiments of this application, the third switch group includes a third switch, a third relay, and a fourth relay. The third switch has one end electrically connected to the output terminal of a power source. The third relay includes a third coil and a third inductive switch. One end of the third coil is electrically connected to the output terminal of the power source, and the other end is electrically connected to the other end of the third switch. One end of the third inductive switch is electrically connected to the second drive mechanism, and the other end is electrically connected to the output terminal of the power source. The fourth relay includes a fourth coil and a fourth inductive switch. One end of the fourth coil is electrically connected to the output terminal of the power source, and the other end is electrically connected to the other end of the third switch. The fourth inductive switch has one end electrically connected to the third drive mechanism, and the other end is electrically connected to the output terminal of the power source.

[0012] According to some embodiments of this application, the first drive mechanism, the second drive mechanism, and the third drive mechanism are all cylinders.

[0013] According to another aspect of this application, this application provides a semiconductor manufacturing system, which includes an insulation resistance measuring device as described above.

[0014] Beneficial effects

[0015] Through the above technical solution, this application controls the movement of the first driving mechanism 2 via a control circuit, thereby driving the first fixed block to move so that the first fixed block comes into contact with the object to be measured 2. On the one hand, it can fix the position of the object to be measured, and on the other hand, it can make the first measuring contact and the second measuring contact come into contact with the object to be measured.

[0016] This application uses a measuring circuit to control the measurement of the insulation resistance of the object under test. Compared with manual measurement using test leads, this method is more standardized, thereby reducing errors caused by individual differences in manual measurement and improving the reliability of the measurement results. Attached Figure Description

[0017] To more clearly illustrate the technical solutions in the embodiments of this application, the accompanying drawings used in the description of the embodiments will be briefly introduced below. Obviously, the accompanying drawings described below are only some embodiments of this application. For those skilled in the art, other drawings can be obtained based on these drawings without creative effort.

[0018] Figure 1 A schematic diagram of the structure of an insulation resistance measuring device according to an embodiment of this application is shown;

[0019] Figure 2 This diagram illustrates another structural schematic of an insulation resistance measuring device according to an embodiment of the present application;

[0020] Figure 3 This diagram shows a structural schematic of a fixing part according to an embodiment of the present application;

[0021] Figure 4 This shows another structural schematic diagram of the fixing part according to an embodiment of the present application;

[0022] Figure 5 A schematic diagram showing a first measuring contact and a second measuring contact according to an embodiment of this application is shown;

[0023] Figure 6 A schematic diagram showing the object to be measured placed in an insulation resistance measuring device according to an embodiment of this application;

[0024] Figure 7 A schematic diagram of a measurement circuit according to an embodiment of this application is shown;

[0025] Figure 8 A schematic diagram of a control circuit according to an embodiment of this application is shown;

[0026] Figure 9 A schematic diagram of a main power-in circuit according to an embodiment of this application is shown.

[0027] Figure label:

[0028] Insulation resistance measuring device 100; object to be measured 200.

[0029] Cabinet 1; Fixing part 2; Measuring circuit 3; Control circuit 4; Main power supply circuit 5; Connection part 6.

[0030] First side 11; Second side 12.

[0031] First fixing unit 21; second fixing unit 22; third fixing unit 23.

[0032] Measurement module 31; first switch group 32.

[0033] Second switch group 41; Third switch group 42.

[0034] Main switch 51; power supply 52; plug 53.

[0035] Bump 61.

[0036] First drive mechanism 211; first fixed block 212.

[0037] Second drive mechanism 221; second fixed block 222.

[0038] Third drive mechanism 231; third fixed block 232.

[0039] First switch 321; first relay 322.

[0040] Second switch 411; second relay 412.

[0041] Third switch 421; third relay 422; fourth relay 423.

[0042] First coil 3221; First inductive switch 3222.

[0043] Second coil 4121; Second inductive switch 4122.

[0044] Third coil 4221; Third inductive switch 4222.

[0045] Fourth coil 4231; Fourth inductive switch 4232.

[0046] First measuring contact 2121, second measuring contact 2122.

[0047] First direction α; second direction β; third direction θ. Detailed Implementation

[0048] Exemplary embodiments will now be described more fully with reference to the accompanying drawings. However, these exemplary embodiments can be implemented in many forms and should not be construed as limited to the embodiments set forth herein; rather, they are provided so that this application will be thorough and complete, and will fully convey the concept of the exemplary embodiments to those skilled in the art. The same reference numerals in the drawings denote the same or similar parts, and therefore repeated descriptions of them will be omitted.

[0049] The described features, structures, or characteristics can be combined in any suitable manner in one or more embodiments. Numerous specific details are provided in the following description to give a full understanding of embodiments of this disclosure. However, those skilled in the art will recognize that the technical solutions of this disclosure can be practiced without one or more of these specific details, or other methods, components, materials, devices, etc. In these cases, well-known structures, methods, devices, implementations, materials, or operations will not be shown or described in detail.

[0050] Furthermore, the terms “comprising” and “having”, and any variations thereof, are intended to cover non-exclusive inclusion. For example, a process, method, system, product, or apparatus that includes a series of steps or units is not limited to the steps or units listed, but may optionally include steps or units not listed, or may optionally include other steps or units inherent to such process, method, product, or apparatus.

[0051] The terms "first," "second," etc., in the specification, claims, and accompanying drawings of this application are used to distinguish different objects, not to describe a specific order.

[0052] The technical solutions of this application will be clearly and completely described below with reference to the accompanying drawings of the embodiments. Obviously, the described embodiments are only some, not all, of the embodiments of this application. All other embodiments obtained by those skilled in the art based on the embodiments of this application without creative effort are within the scope of protection of this application.

[0053] The applicant also discovered that, because the insulation resistance meter has a high-voltage output and the test leads are energized, operators may accidentally touch the test leads during manual measurement, causing a tingling sensation in their hands and leading to measurement errors.

[0054] According to one aspect of this application, an insulation resistance measuring device 100 is provided. See also... Figure 1 The insulation resistance measuring device 100 includes a cabinet 1, a fixing part 2, and a measuring circuit 3. Figure 1 (not shown in the image) and control circuit 4 ( Figure 1 (Not shown in the image).

[0055] A connecting part 6 is fixedly installed on the upper surface of the cabinet 1. The connecting part 6 is L-shaped, with the long arm end of the connecting part 6 vertically fixed to the upper surface of the cabinet 1, and the short arm end of the connecting part 6 forming a gap with the upper surface of the cabinet 1.

[0056] See Figures 1-4 The fixing part 2 is fixedly disposed on the upper surface of the cabinet 1. The fixing part 2 includes a first fixing unit 21. The first fixing unit 21 includes a first drive mechanism 211 and a first fixing block 212. One end of the first drive mechanism 211 is fixed to the short arm end of the connecting part 6. One end of the first fixing block 212 is movably connected to the other end of the first drive mechanism 211.

[0057] The first fixed block 212 is driven by the first driving mechanism 211 to reciprocate along a first direction α perpendicular to the upper surface of the cabinet 1.

[0058] Optionally, the first drive mechanism 211 can be a cylinder. The cylinder's intake or exhaust pipe is connected to the cylinder, thereby controlling the cylinder's sliding.

[0059] According to the example embodiment, see Figure 3 and- Figure 5The other end of the first fixing block 212 is provided with a first measuring contact 2121 and at least one second measuring contact 2122. For example, the other end of the first fixing block 212 is provided with a first measuring contact 2121 and six second measuring contacts 2122. The first measuring contact 2121 can be a grounding contact. The first measuring contact 2121 can be located on the side of the first fixing block 212, and the second measuring contacts 2122 can be located on the lower surface of the first fixing block 212. The first measuring contact 2121 and at least one second measuring contact 2122 can be fixed to the first fixing block 212 by set screws.

[0060] The six second measuring contacts 2122 are second measuring contact 2122a-second measuring contact 2122f.

[0061] See Figure 6 The object to be measured 200 can be placed on the upper surface of the cabinet 1.

[0062] The first driving mechanism 211 (such as a cylinder) drives the first fixing block 212 to move downward along the first direction α, which allows the first fixing block 212 to move closer to the object to be measured 200. When the first fixing block 212 contacts the object to be measured 200, the first fixing block 212 can fix the object to be measured 200 between the cabinet 1 and the first fixing block 212. Furthermore, at least one second measuring contact 2122 is in contact with the measuring contact of the object to be measured 200, and the first measuring contact 2121 is grounded, that is, the first measuring contact 2121 can contact the outer wall of the object to be measured 200.

[0063] For example, the object to be measured 200 can be a heater. Since the heater is relatively long, the upper surface of the cabinet 1 can also be provided with through holes so that the cabinet 1 can accommodate the heater when it is placed on the upper surface of the cabinet 1.

[0064] The upper part of the heater includes six terminals, namely terminals a through f. These six terminals can be divided into connection terminals corresponding to two sets of three-phase power. Specifically, terminals a through c correspond to U1, V1, and W1 of the first set of three-phase power, respectively, and terminals d through f correspond to U2, V2, and W2 of the second set of three-phase power, respectively. These six terminals (terminals a through f) can serve as the measuring contacts for the object to be measured 200.

[0065] For example, the second measuring contacts 2122a-2122f correspond to the heater's terminals a-f. When the first fixing block 212 is in contact with the heater, the second measuring contacts 2122a-2122f are in contact with the heater's terminals a-f.

[0066] According to the example embodiment, the measurement circuit 3 can be housed within the cabinet 1. See also Figure 7 The measurement circuit 3 includes a measurement module 31 and at least one first switch group 32.

[0067] One end of the measurement module 31 is electrically connected to the first measurement contact 2121, and the other end of the measurement module 31 is electrically connected to at least one second measurement contact 2122.

[0068] For example, the measurement module 31 can be an insulation resistance meter. One end of the measurement module 31 can be the black probe of the insulation resistance meter, and the other end of the measurement module 31 can be the red probe of the insulation resistance meter.

[0069] See Figure 7 One end of the first switch group 32 is electrically connected to at least one second measuring contact 2122, and the other end of the first switch group 32 is electrically connected to the first measuring contact 2121, so as to control the measurement of the insulation resistance between the measuring contact of the object to be measured 200 and the first measuring contact 2121.

[0070] For example, see Figure 8 The control circuit 3 includes six first switch groups 32, namely first switch group 32a-first switch group 32f. The first switch groups 32a-first switch group 32f are connected in parallel. Furthermore, the first switch groups 32a-first switch group 32f respectively control the electrical connection between the six second measuring contacts 2122 (second measuring contacts 2122a-second measuring contacts 2122f) and the first measuring contacts, thereby controlling the measurement of the insulation resistance between the six terminals (terminals a-f) of the heater and the first measuring contacts 2121 (i.e., the outer wall of the heater).

[0071] For example, when the first switch group 32a is turned on, the electrical connection between the second measuring contact 2122a and the first measuring contact 2121 is made, and the measuring module 31 can measure the insulation resistance value between the heater terminal a and the outer wall of the heater.

[0072] According to the example embodiment, the control circuit 4 can be housed within the cabinet 1. See also Figure 8 The control circuit 4 includes a second switch group 41. The second switch group 41 is electrically connected to the first drive mechanism 211 and controls the movement of the first drive mechanism 211.

[0073] For example, when the second switch group 41 is turned on, the air intake pipe of the first drive mechanism 211 (such as a cylinder) is connected to the first drive mechanism 211 (such as a cylinder). The first drive mechanism 211 drives the first fixed block 212 to move downward along the first direction α. ​​When the first measuring contact 2121 contacts the outer wall of the object to be measured 200 (such as a heater), the first fixed block 212 stops moving, and the second measuring contact 2122a-2122f contacts the corresponding terminals a-f of the heater.

[0074] Through the above embodiments, this application controls the movement of the first driving mechanism 211 through the control circuit 4, thereby driving the first fixing block 212 to move so that the first fixing block 212 comes into contact with the object to be measured 200. On the one hand, the position of the object to be measured 200 can be fixed, and on the other hand, the first measuring contact 2121 and the second measuring contact 2122 can come into contact with the object to be measured 200.

[0075] This application uses a measuring circuit to control the measurement of the insulation resistance of the object to be measured 200. Compared with manual testing using test leads, this method is more standardized, thereby reducing errors caused by individual differences in manual measurement and improving the reliability of the measurement results.

[0076] Optionally, see Figures 1-4 The fixing part 2 further includes a second fixing unit 22 and a third fixing unit 23. The second fixing unit 22 includes a second driving mechanism 221 and a second fixing block 222. One end of the second driving mechanism 221 is fixedly disposed on the first side 11. One end of the second fixing block 222 is movably connected to the other end of the second driving mechanism 221. The second driving block 222 is driven by the second driving mechanism 221 and reciprocates along a second direction β. The second direction β can be the direction formed by the side perpendicular to the first side 11.

[0077] See Figures 1-4 The third fixing unit 23 includes a third driving mechanism 231 and a third fixing block 232. One end of the third driving mechanism 231 is fixedly disposed on the second side 12. The second side 12 is the side symmetrical to the first side 11. One end of the third fixing block 232 is movably connected to the other end of the third driving mechanism 231. The third fixing block 232 is driven by the third driving mechanism 231 and reciprocates along the second direction β.

[0078] Optionally, the second drive structure 221 and the third drive mechanism 231 can be cylinders.

[0079] See Figure 5The control circuit 4 also includes a third switch group 42. The third switch group 42 is electrically connected to the second drive mechanism 221 and the third drive mechanism 231, and controls the movement of the second drive mechanism 221 and the third drive mechanism 231.

[0080] For example, when the third switch group 42 is turned on, the air intake pipe of the second drive mechanism 221 (e.g., a cylinder) is connected to the second drive mechanism 221 (e.g., a cylinder), and the air intake pipe of the third drive mechanism 231 (e.g., a cylinder) is connected to the third drive mechanism 231 (e.g., a cylinder). The second drive mechanism 221 drives the second fixing block 222 to move inward along the second direction β towards the inside of the cabinet 1. The third drive mechanism 231 drives the third fixing block 232 to move inward along the second direction β towards the inside of the cabinet 1. This continues until the second fixing block 222 and the third fixing block 232 contact the outer wall of the object to be measured 200 (e.g., a heater), so that the second fixing block 222 and the third fixing block 232 clamp the object to be measured 200 on opposite sides along the second direction.

[0081] Through the above embodiments, this application controls the second fixing unit 22 and the third fixing unit 23 via the third switch group 42 to fix the object to be measured 200 from both sides, making the placement of the object to be fixed 200 more stable. Furthermore, this application avoids the problem of the object to be measured 200 becoming displaced during the clamping process by using the second drive mechanism 221 and the third drive mechanism 231 simultaneously, thereby preventing damage to the object to be measured 200.

[0082] Optionally, see Figures 3-4 The connecting part 6 also includes a protrusion 61. The protrusion 61 is disposed on the inner side of the long arm end of the connecting part 6 near the upper surface of the cabinet 1, so as to contact the outer wall of the object to be measured 200, thereby fixing the object to be measured 200 along the third direction θ formed with the first side 11.

[0083] Optionally, the insulation resistance measuring device 100 also includes a main power supply circuit 5. The main power supply circuit 5 is located within the cabinet 1. See also... Figure 9 The main power supply circuit 5 includes a main switch 51 and a power supply 52. ​​One end of the main switch 51 is electrically connected to the power distribution line. The input end of the power supply 52 is electrically connected to the other end of the main switch 51. The power supply 52 obtains a first voltage from the power distribution line through its input end and converts the first voltage into a second voltage. The output end of the power supply 52 outputs the second voltage.

[0084] According to the example embodiment, the first voltage can be the AC voltage output from the power distribution line, typically AC 220V or AC 380V. The second voltage can be the DC voltage suitable for the operation of the measuring circuit 3 and the control circuit 4.

[0085] For example, the main switch 51 can be a miniature circuit breaker, and the power supply 52 can be a switching power supply. When the miniature circuit breaker is turned on, the switching power supply converts the AC 380V voltage of the power distribution line to DC 24V voltage.

[0086] Optionally, see Figure 7 The first switch group 32 includes a first switch 321 and a first relay 322. One end of the first switch 321 is electrically connected to the output terminal of the power supply 52. ​​The first relay 322 includes a first coil 3221 and a first inductive switch 3222. One end of the first coil 3221 is electrically connected to the output terminal of the power supply 52, and the other end of the first coil 3221 is electrically connected to the other end of the first switch 321. One end of the first inductive switch 3222 is electrically connected to the second measuring contact 2122, and the other end of the first inductive switch 3222 is electrically connected to one end of the measuring module 31.

[0087] Optionally, see Figure 8 The second switch group 41 includes a second switch 411 and a second relay 412. One end of the second switch 411 is electrically connected to the output terminal of the power supply 52. ​​The second relay 412 includes a second coil 4121 and a second inductive switch 4122. One end of the second coil 4121 is electrically connected to the output terminal of the power supply, and the other end of the second coil 4121 is electrically connected to the other end of the second switch 411. One end of the second inductive switch 4122 is electrically connected to the first drive mechanism, and the other end of the second inductive switch 4122 is electrically connected to the output terminal of the power supply 52.

[0088] Optionally, see Figure 8 The third switch group 42 includes a third switch 421, a third relay 422, and a fourth relay 423. One end of the third switch 421 is electrically connected to the output terminal of the power supply 52.

[0089] The third relay 422 includes a third coil 4221 and a third inductive switch 4222. One end of the third coil 4221 is electrically connected to the output terminal of the power supply 52, and the other end of the third coil 4221 is electrically connected to the other end of the third switch 421. One end of the third inductive switch 4222 is electrically connected to the second drive mechanism 221, and the other end of the third inductive switch 4222 is connected to the electrical output terminal of the power supply 52.

[0090] The fourth relay 423 includes a fourth coil 4231 and a fourth inductive switch 4232. One end of the fourth coil 4231 is electrically connected to the output terminal of the power supply 52, and the other end of the fourth coil 4231 is electrically connected to the other end of the third switch 421. One end of the fourth inductive switch 4232 is electrically connected to the third drive mechanism 231, and the other end of the fourth inductive switch 4232 is electrically connected to the output terminal of the power supply 52.

[0091] For example, the first switch 321, the second switch 411 and the third switch 421 can all be two-position switches.

[0092] An electrical cabinet can be installed at the bottom of cabinet 1, and brackets can be installed on both sides of the bottom of cabinet 1. (See also...) Figure 2 The first switch 321, the second switch 411, and the third switch 421 can be installed on the side surface of the cabinet 1. The first relay 322, the second relay 412, the third relay 422, and the fourth relay 423 can be installed in the electrical cabinet of the cabinet 1.

[0093] For example, see Figure 7 The measuring circuit 3 includes six first switch groups 32. The six first switch groups are connected in parallel. The first inductive switch 3222 can be the normally open contact of the first relay 322.

[0094] The six first switch groups 32 can be first switch groups 32a-32f, the six first switches 321 can be first switches 321a-32f, the six first relays 322 can be first relays 322a-322f, the six first coils 3221 can be first coils 3221a-3221f, and the six first inductive switches 3222 can be first inductive switches 3222a-3222f.

[0095] For example, when the first switch 321a is pressed, placing it in the first position, the first switch 321a is turned on. The turn on of the first switch 321a energizes the first coil 3221a, which in turn closes the first inductive switch 3222a, forming a circuit between the second measuring contact 2122a and the first measuring contact 2121. This allows for the measurement of the insulation resistance between the heater's terminal a and the heater's outer wall, i.e., the insulation resistance of the U1 phase of the object under test 200.

[0096] When the first switch 321a is pressed and placed in the second position, the first switch 321a is turned off.

[0097] The control process of the first switch 321b-321f is the same as that of the first switch 321a, and will not be described again here.

[0098] Through the above embodiments, this application controls the switching of the first switch 321 to control the conduction of the corresponding measurement circuit in order to measure the insulation resistance of different phases of the object to be measured.

[0099] See Figure 8The second inductive switch 4122 can be a normally open contact of the second relay 412. The third inductive switch 4222 can be a normally open contact of the third relay 422. The fourth inductive switch 4232 can be a normally open contact of the third relay.

[0100] For example, when the second switch 411 is pressed and placed in the first position, the second switch 411 is turned on. The turn on of the second switch 411 energizes the second coil 4121, which in turn closes the second inductive switch 4122. The air intake pipe of the first drive mechanism 211 (such as a cylinder) is connected to the first drive mechanism 211, driving the first drive mechanism 211 to move, thereby controlling the first fixed block 212 to move downward along the first direction α, which can make the first fixed block 212 move closer to the object to be measured 200.

[0101] When the second switch 411 is pressed and placed in the second position, the second switch 411 is turned off. The turning off of the second switch 411 de-energizes the second coil 4121, thereby turning off the second inductive switch 4122. The air outlet of the first drive mechanism 211 (such as a cylinder) is connected to the first drive mechanism 211, driving the first drive mechanism 211 to move, which in turn controls the first fixed block 212 to move upward along the first direction α, allowing the first fixed block 212 to move away from the object to be measured 200.

[0102] For example, when the third switch 421 is pressed, placing it in the first position, the third switch 421 is turned on. The turn on of the third switch 421 energizes the third coil 4221 and the fourth coil 4231, thereby closing the third inductive switch 4222 and the fourth inductive switch 4232. The air intake pipe of the second drive mechanism 221 (such as a cylinder) is connected to the second drive mechanism 221, driving the second drive mechanism 221 to move, thereby controlling the second fixed block 222 to move inwards along the second direction β towards the inside of the cabinet 1. The air intake pipe of the third drive mechanism 231 (such as a cylinder) is connected to the third drive mechanism 231, driving the third drive mechanism 231 to move, thereby controlling the third fixed block 232 to move inwards along the second direction β towards the inside of the cabinet 1.

[0103] When the third switch 421 is pressed, placing it in the second position, the third switch 421 is turned off. The turning off of the third switch 421 de-energizes the third coil 4221 and the fourth coil 4231, thereby turning off the third sensor switch 4222 and the fourth sensor switch 4232. The air outlet pipe of the second drive mechanism 221 (e.g., a cylinder) is connected to the second drive mechanism 221, driving it to move, thereby controlling the second fixed block 222 to move outward along the second direction β towards the outside of the cabinet 1. The air outlet pipe of the third drive mechanism 231 (e.g., a cylinder) is connected to the third drive mechanism 231, driving it to move, thereby controlling the third fixed block 232 to move outward along the second direction β towards the outside of the cabinet 1.

[0104] According to another aspect of this application, this application provides a semiconductor manufacturing system, which includes an insulation resistance measuring device 100 as described above.

[0105] Finally, it should be noted that the above description is merely a preferred embodiment of this application and is not intended to limit this application. Although this application has been described in detail with reference to the foregoing embodiments, those skilled in the art can still modify the technical solutions of the foregoing embodiments or make equivalent substitutions for some of the technical features. Any modifications, equivalent substitutions, improvements, etc., made within the spirit and principles of this application should be included within the protection scope of this application.

Claims

1. A measuring device for insulation resistance, characterized in that, The measuring device comprises: a cabinet body, an upper surface of the cabinet body is fixedly provided with a connecting part, the connecting part is L-shaped, a long arm end of the connecting part is fixedly perpendicular to the upper surface of the cabinet body, and a short arm end of the connecting part forms a gap with the upper surface of the cabinet body; a fixed part fixedly provided on the upper surface of the cabinet body, comprising: a first fixed unit, comprising: a first driving mechanism, one end of which is fixed to the short arm end of the connecting part; a first fixed block, one end of which is movably connected to the other end of the first driving mechanism, and the other end of which is provided with a first measuring contact and at least one second measuring contact; in the case that the first fixed block contacts a to-be-measured object, the at least one second measuring contact contacts a measuring contact of the to-be-measured object, and the first measuring contact is grounded; a measuring circuit, provided in the cabinet body, comprising: a measuring module, one end of which is electrically connected to the first measuring contact, and the other end of which is electrically connected to the at least one second measuring contact; at least one first switch group, one end of which is electrically connected to the at least one second measuring contact, and the other end of which is electrically connected to the first measuring contact, so as to control the measurement of the insulation resistance between the measuring contact of the to-be-measured object and the first measuring contact; a control circuit, provided in the cabinet body, comprising: a second switch group, electrically connected to the first driving mechanism, for controlling the movement of the first driving mechanism.

2. The measuring device according to claim 1, wherein: the fixed part further comprises: a second fixed unit, fixedly provided on a first side of the upper surface of the cabinet body, comprising: a second driving mechanism, one end of which is fixedly provided on the first side; a second fixed block, one end of which is movably connected to the other end of the second driving mechanism, and the other end of which is reciprocally movable along a second direction formed by a side perpendicular to the first side; in the case that the second driving mechanism slides, the second fixed block is driven to reciprocally move along the second direction; a third fixed unit, fixedly provided on a second side of the upper surface of the cabinet body, comprising: a third driving mechanism, one end of which is fixedly provided on the second side; a third fixed block, one end of which is movably connected to the other end of the third driving mechanism, and the other end of which is reciprocally movable along the second direction; the control circuit further comprises: a third switch group, electrically connected to the second driving mechanism and the third driving mechanism, for controlling the movement of the second driving mechanism and the third driving mechanism.

3. The measuring device of claim 1, wherein, the connecting part further comprises: a protrusion, provided on the inner side of the long arm end close to the one end of the upper surface of the cabinet body, so as to contact the to-be-measured object.

4. The measuring device of claim 2, wherein, the measuring device further comprises: a main power input circuit, provided in the cabinet body, comprising: a main switch, one end of which is electrically connected to a power distribution line; a power supply, an input end of which is electrically connected to the other end of the main switch, the power supply obtains a first voltage from the power distribution line through the input end, and converts the first voltage into a second voltage, and an output end of the power supply outputs the second voltage.

5. The measuring device of claim 4, wherein, the first switch group comprises: A first switch, one end of which is electrically connected to the output end of the power supply; A first relay, comprising: A first coil, one end of which is electrically connected to the output end of the power supply, and the other end of which is electrically connected to the other end of the first switch; A first inductive switch, one end of which is electrically connected to the second measurement contact, and one end of which is electrically connected to one end of the measurement module.

6. The measuring device of claim 5, wherein, The second switch group comprises: A second switch, one end of which is electrically connected to the output end of the power supply; A second relay, comprising: A second coil, one end of which is electrically connected to the output end of the power supply, and the other end of which is electrically connected to the other end of the second switch; A second inductive switch, one end of which is electrically connected to the first driving mechanism, and the other end of which is electrically connected to the output end of the power supply.

7. The measuring device of claim 4, wherein, The third switch group comprises: A third switch, one end of which is electrically connected to the output end of the power supply; A third relay, comprising: A third coil, one end of which is electrically connected to the output end of the power supply, and the other end of which is electrically connected to the other end of the third switch; A third inductive switch, one end of which is electrically connected to the second driving mechanism, and the other end of which is electrically connected to the output end of the power supply; A fourth relay, comprising: A fourth coil, one end of which is electrically connected to the output end of the power supply, and the other end of which is electrically connected to the other end of the third switch; A fourth inductive switch, one end of which is electrically connected to the third driving mechanism, and the other end of which is electrically connected to the output end of the power supply.

8. The measuring device of claim 2, wherein, The first driving mechanism, the second driving mechanism, and the third driving mechanism are all air cylinders.

9. A semiconductor processing system, comprising: The semiconductor process system comprises the insulation resistance measuring device according to any one of claims 1-8.

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