High-precision four-axis motion platform

Abstract

The utility model discloses a high-precision four-axis motion platform which comprises a bearing platform 1, a transverse motion assembly 2, a longitudinal motion assembly 3, a first-level height motion assembly 4, a second-level height motion assembly 5 and a material table 52, the transverse motion assembly 2 is laid on the bearing platform 1, and the transverse motion assembly 2 bears the longitudinal motion assembly 3 to do transverse motion on the bearing platform 1. The longitudinal movement assembly 3 bears the first-level height movement assembly 4 to do longitudinal movement on the bearing platform 1, the first-level height movement assembly 4 bears the second-level height movement assembly 5 to move perpendicular to the bearing platform 1, and the second-level height movement assembly 5 bears the material table 52 to do high-precision movement perpendicular to the bearing platform 1 on the basis of the first-level height movement assembly 4. Height movement is divided into two stages, so that the height movement precision is improved by one order of magnitude, and the situation that materials are poor in machining due to insufficient height or are extruded and damaged due to too high height is avoided.

Description

TECHNICAL FIELD

[0001] The utility model relates to the field of precision machining equipment, and particularly relates to a high-precision four-axis motion platform. BACKGROUND

[0002] Robots have been widely applied to various fields of enterprise intelligent manufacturing transformation. As an important branch of robots, mobile robots emphasize the characteristics of movement, and a docking device or a device is added to the mobile robot to assist / replace manual operation to complete material carrying and docking, but the stability and docking precision of the robot are required to be relatively strict in the scene of replacing manual operation, such as in semiconductor processing, the requirement for precision is relatively strict, and the traditional robot is difficult to meet the requirements of precision and stability. SUMMARY

[0003] The utility model aims at providing a high-precision four-axis motion platform, and the specific technical scheme is as follows:

[0004] A high-precision four-axis motion platform comprises a bearing platform, a transverse motion assembly, a longitudinal motion assembly, a first-level height motion assembly, a second-level height motion assembly, and a material table, the transverse motion assembly is laid on the bearing platform, the transverse motion assembly carries the longitudinal motion assembly to move transversely on the bearing platform, the longitudinal motion assembly carries the first-level height motion assembly to move longitudinally on the bearing platform, the first-level height motion assembly carries the second-level height motion assembly to move perpendicularly to the bearing platform, and the second-level height motion assembly carries the material table to move perpendicularly to the bearing platform on the basis of the first-level height motion assembly.

[0005] The transverse motion assembly comprises a first linear motor, a first track, and a first bearing panel, the first track is laid on the bearing platform, and the first linear motor controls the first bearing panel to move along the first track; the longitudinal motion assembly comprises a second linear motor, a second track, and a second bearing panel, the second track is laid on the first bearing panel, and the second linear motor controls the second bearing panel to move along the second track; the first-level height motion assembly comprises a third linear motor, a third track, a third bearing panel, and a bearing support, the bearing support is fixedly arranged on the second bearing panel, the third track is laid on the bearing support and is perpendicular to the bearing platform, and the third linear motor controls the third bearing panel to move along the third track; the second-level height motion assembly is arranged on the third bearing panel, and the second-level height motion assembly comprises a DD motor and the material table, and the DD motor carries the material table to move with high precision.

[0006] The first track is arranged as two, the two first tracks are laid on the bearing platform, two first sliders are fixedly arranged on the side of the first bearing panel facing the first track, the two first sliders correspond to the two first tracks one by one, the first stator of the first linear motor is fixedly arranged on the bearing platform, the first mover of the first linear motor is fixedly arranged with the first bearing panel, and the moving direction of the first linear motor is parallel to the first track.

[0007] The second track is arranged as two, the two second tracks are laid on the first bearing panel, two second sliders are arranged on the side of the second bearing panel facing the second track, the two second sliders correspond to the two second tracks one by one, the second stator of the second linear motor is fixedly arranged on the first bearing panel, the second mover of the second linear motor is fixedly arranged with the second bearing panel, and the moving direction of the second linear motor is parallel to the second track.

[0008] The bearing support includes an elongated bottom plate and a first frame, the elongated bottom plate is fixedly arranged on the second bearing panel, the first frame is fixedly arranged at the middle part of the elongated bottom plate, the third linear motor is arranged as two groups and arranged at two ends of the elongated bottom plate, the third track is arranged as a plurality of tracks and laid on the first frame, the third bearing panel includes a top plate and a second frame, the second frame is arranged at the middle part of the top plate, a plurality of third sliders are arranged on the second frame, the third sliders correspond to the third tracks one by one, the third stator of the third linear motor is fixedly connected with the bearing support, and the third mover of the third linear motor is fixedly connected with the third bearing panel.

[0009] The first-level height motion assembly further includes a cylinder, and the base end of the cylinder and the output end of the cylinder are fixedly connected with the third bearing panel and the bearing support respectively.

[0010] The cylinder is arranged as two, and the two cylinders are arranged on the two sides of the first frame in the length direction of the elongated bottom plate, so as to ensure the stable operation of the first-level height motion assembly and avoid tilting and the like.

[0011] The above technical scheme of the utility model has the following beneficial technical effects: the design of four-axis movement fully guarantees the movement precision, especially the division of height movement into two levels improves the height movement precision by one order of magnitude, and avoids the damage of material extrusion due to insufficient height or excessive height. BRIEF DESCRIPTION OF DRAWINGS

[0012] Figure 1 It is a structural schematic diagram of the utility model;

[0013] Figure 2 It is a structural schematic diagram of the horizontal motion assembly in the utility model;

[0014] Figure 3 It is a structural schematic diagram of the vertical motion assembly in the utility model;

[0015] Figure 4 is the structure schematic view of the first level motion assembly in the utility model;

[0016] Figure 5 is the structure schematic view of the second level motion assembly in the utility model;

[0017] 1-carries platform, 2-cross direction motion assembly, 21-first stator, 22-first mover, 23-first track, 24-first bearing panel, 25-first sliding block, 3-longitudinal motion assembly, 31-second stator, 32-second mover, 33-second track, 34-second bearing panel, 35-second sliding block, 4-first level motion assembly, 41-first frame, 42-top plate, 43-third linear motor, 44-third track, 45-third sliding block, 46-long strip-shaped bottom plate, 47-second frame, 5-second level motion assembly, 51-DD motor, 52-material table. DETAILED DESCRIPTION

[0018] In order to make the purpose, technical scheme and advantage of the utility model more clear and explicit, the utility model is further explained in detail below in combination with specific implementation manners and with reference to the drawings. It should be understood that these descriptions are only exemplary, and are not intended to limit the scope of the utility model. In addition, in the following description, the description of known structures and technologies is omitted to avoid unnecessary confusion of the concept of the utility model.

[0019] A high-precision four-axis motion platform, comprising: a carrying platform 1, a cross direction motion assembly 2, a longitudinal motion assembly 3, a first level motion assembly 4, a second level motion assembly 5 and a material table 52, the cross direction motion assembly 2 is laid on the carrying platform 1, the cross direction motion assembly 2 carries the longitudinal motion assembly 3 to move in the cross direction on the carrying platform 1, the longitudinal motion assembly 3 carries the first level motion assembly 4 to move in the longitudinal direction on the carrying platform 1, the first level motion assembly 4 carries the second level motion assembly 5 to move perpendicular to the carrying platform 1, and the second level motion assembly 5 carries the material table 52 to move in high precision perpendicular to the carrying platform 1 on the basis of the first level motion assembly 4. The design of four-axis motion fully guarantees the motion precision, especially the division of height motion into two levels makes the height motion precision improve by one order of magnitude, and avoids the processing failure caused by insufficient height or the damage caused by material extrusion due to excessive height.

[0020] The transverse motion assembly 2 comprises a first linear motor, a first track 23 laid on the bearing platform 1, and a first bearing panel 24 controlled by the first linear motor to move along the first track 23; the longitudinal motion assembly comprises a second linear motor, a second track 33 laid on the first bearing panel 24, and a second bearing panel 34 controlled by the second linear motor to move along the second track 33; the first-level height motion assembly 4 comprises a third linear motor 43, a third track 44 laid on a bearing support fixedly arranged on the second bearing panel 34 and perpendicular to the bearing platform 1, and a third bearing panel controlled by the third linear motor 43 to move along the third track 44; the second-level height motion assembly 5 arranged on the third bearing panel comprises a DD motor 51 and a material table 52.

[0021] The first track 23 is provided in two, the two first tracks 23 are laid on the bearing platform 1, the first bearing panel 24 is fixedly arranged with two first sliding blocks 25 on the side facing the first track 23, the two first sliding blocks 25 correspond to the two first tracks 23 one by one, the first stator 21 of the first linear motor is fixedly arranged on the bearing platform 1, the first mover 22 of the first linear motor is fixedly arranged with the first bearing panel 24, and the moving direction of the first linear motor is parallel to the first track 23.

[0022] The second track 33 is provided in two, the two second tracks 33 are laid on the first bearing panel 24, the second bearing panel 34 is provided with two second sliding blocks 35 on the side facing the second track 33, the two second sliding blocks 35 correspond to the two second tracks 33 one by one, the second stator 31 of the second linear motor is fixedly arranged on the first bearing panel 24, the second mover 32 of the second linear motor is fixedly arranged with the second bearing panel 34, and the moving direction of the second linear motor is parallel to the second track 33.

[0023] The bearing support comprises a long strip-shaped bottom plate 46 fixedly arranged on the second bearing panel 34 and a first frame 41 fixedly arranged in the middle of the long strip-shaped bottom plate 46, the third linear motor 43 is provided in two groups and arranged at both ends of the long strip-shaped bottom plate 46, the third track 44 is provided in multiple and laid on the first frame 41, the third bearing panel comprises a top plate 42 and a second frame 47 arranged in the middle of the top plate 42, the second frame 47 is provided with multiple third sliding blocks 45, the third sliding blocks 45 correspond to the third tracks 44 one by one, the third stator of the third motor is fixedly connected with the bearing support, and the third mover of the third motor is fixedly connected with the third bearing panel.

[0024] The first height movement assembly 4 further comprises a cylinder, a base end of the cylinder is fixedly connected with the third bearing panel, and an output end of the cylinder is fixedly connected with the bearing support.

[0025] The cylinder is provided in two, and the two cylinders are arranged on two sides of the first frame 41 in the length direction of the long strip-shaped bottom plate 46, so as to ensure the stable operation of the first height movement assembly and avoid tilting and the like.

Claims

1. A high-precision four-axis motion platform, characterized in that, It comprises a bearing platform (1), a transverse motion assembly (2), a longitudinal motion assembly (3), a first-level height motion assembly (4), a second-level height motion assembly (5) and a material table (52), the transverse motion assembly (2) is laid on the bearing platform (1), the transverse motion assembly (2) carries the longitudinal motion assembly (3) to make transverse motion on the bearing platform (1), the longitudinal motion assembly (3) carries the first-level height motion assembly (4) to make longitudinal motion on the bearing platform (1), the first-level height motion assembly (4) carries the second-level height motion assembly (5) to move perpendicular to the bearing platform (1), and the second-level height motion assembly (5) carries the material table (52) to make high-precision motion perpendicular to the bearing platform (1) on the basis of the first-level height motion assembly (4).

2. The high-precision four-axis motion platform according to claim 1, wherein: the transverse motion assembly (2) comprises a first linear motor, a first track (23) and a first bearing panel (24), the first track (23) is laid on the bearing platform (1), and the first linear motor controls the first bearing panel (24) to move along the first track (23); the longitudinal motion assembly (3) comprises a second linear motor, a second track (33) and a second bearing panel (34), the second track (33) is laid on the first bearing panel (24), and the second linear motor controls the second bearing panel (34) to move along the second track (33); the first-level height motion assembly (4) comprises a third linear motor (43), a third track (44), a third bearing panel and a bearing support, the bearing support is fixedly arranged on the second bearing panel (34), the third track (44) is laid on the bearing support and is perpendicular to the bearing platform (1), and the third linear motor (43) controls the third bearing panel to move along the third track (44); and the second-level height motion assembly (5) is arranged on the third bearing panel, and comprises a DD motor (51) and a material table (52), the DD motor (51) carries the material table (52) to make high-precision motion. The first track (23) is provided as two, the two first tracks (23) are laid on the bearing platform (1), two first sliders (25) are fixedly arranged on the side of the first bearing panel (24) facing the first tracks (23), the two first sliders (25) correspond to the two first tracks (23) one by one, a first stator (21) of the first linear motor is fixedly arranged on the bearing platform (1), a first mover (22) of the first linear motor is fixedly arranged with the first bearing panel (24), and the moving direction of the first linear motor is parallel to the first track (23). ​ ​ ​ ​ 3. The high-precision four-axis motion platform of claim 2, wherein, ​ 4. The high-precision four-axis motion platform of claim 2, wherein, The second track (33) is provided in two, and the second track (33) is laid on the first bearing panel (24), the second bearing panel (34) is provided with two second sliders (35) on the side facing the second track (33), the second slider (35) corresponds to the second track (33) one by one, the second stator (31) of the second linear motor is fixedly arranged on the first bearing panel (24), the second mover (32) of the second linear motor is fixedly arranged with the second bearing panel (34), the moving direction of the second linear motor is parallel to the second track (33).

5. The high-precision four-axis motion platform of claim 2, wherein, The bearing support includes a long strip-shaped bottom plate (46) and a first frame (41), the long strip-shaped bottom plate (46) is fixedly arranged on the second bearing panel (34), the first frame (41) is fixedly arranged in the middle of the long strip-shaped bottom plate (46), the third linear motor (43) is provided in two groups and arranged at both ends of the long strip-shaped bottom plate (46), the third track (44) is provided in multiple and laid on the first frame (41), the third bearing panel includes a top plate (42) and a second frame (47), the second frame (47) is arranged in the middle of the top plate (42), a plurality of third sliders (45) are arranged on the second frame (47), the third slider (45) and the third track (44) correspond one by one, the third stator of the third linear motor is fixedly connected with the bearing support, and the third mover of the third linear motor is fixedly connected with the third bearing panel.

6. The high-precision four-axis motion platform of claim 5, wherein, The first-level height motion assembly (4) further includes a cylinder, and the base end of the cylinder and the output end of the cylinder are fixedly connected with the third bearing panel and the bearing support respectively.

7. The high-precision four-axis motion platform of claim 6, wherein, The cylinder is provided in two, and the two cylinders are arranged on both sides of the first frame (41) in the length direction of the long strip-shaped bottom plate (46), so as to ensure the stable operation of the first-level height motion assembly and avoid tilting.

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