Test system and test carrier thereof

Abstract

The utility model provides a test system and a test carrier thereof, and the test system comprises a test machine which comprises a test head and is used for the contact test with a probe card or a PCB; the test carrier is detachably connected with the test head and is used for detachably mounting a probe card or a PCB (Printed Circuit Board); wherein an accommodating groove matched with the probe card or the PCB in shape is formed in the test carrier, and an edge layer abutting against the test head and an inner layer located on the inner side of the edge layer are formed; an original probe station is replaced by the carrier to fix the probe card or the PCB, the carrier can be directly fixed on the testing head in a detachable mode such as a screw, and under the condition that the carrier is separated from the probe station, verification of parameters such as resistance and current of the testing machine and testing of electric leakage and capacitance contact parameters of the probe card can be rapidly and conveniently completed.

Description

TECHNICAL FIELD

[0001] The present application relates to the technical field of semiconductor technology, in particular to a test system and a test carrier thereof. BACKGROUND

[0002] With the continuous iteration of WAT (Wafer Accepted Test) semiconductor equipment, there are various types of wafer accepted test testers. The mainstream WAT test method on the market is to tightly connect the test head of the WAT tester with the probe station, and then test the wafer to be tested after connecting the tester and the wafer to be tested through the probe card as a link. Since the test parameters of the wafer to be tested are numerous and require high accuracy, the contact parameters between the tester and the probe card will directly affect the yield of the wafer to be tested, so the contact test of the test head and the probe card is an essential link before the formal test of the wafer to be tested.

[0003] In order to test the leakage and capacitance of the probe card and other parameters, the existing test method generally simulates the actual application environment to directly fasten the test head of the tester on the probe station. Since there are more than one type of probe card, the probe station needs to be controlled every time the probe card is replaced. If the test parameters of a certain probe card are not ideal, the tester needs to be disassembled from the probe station for replacement and troubleshooting. This operation is not only complex but also affects the test efficiency. At the same time, when verifying the tester before delivery, in order to verify the channel resistance, current, capacitance and other parameters of the tester, specific components need to be installed on the PCB according to the requirements of the tester, and then the PCBs with different components are replaced on the probe station in turn to complete the verification. At this time, the test head still needs to be turned over with the help of the probe station. This operation is time-consuming and has certain safety hazards for non-professionals when replacing. UTILITY MODEL CONTENT

[0004] The utility model solves all or part of the problems of the prior art. The utility model provides a carrier which can directly fix the probe card and the PCB on the test head of the tester. Compared with the probe card contact test and the verification of the tester by fastening the test head on the probe station, this scheme only needs to replace different types of probe cards and PCBs with different components in the carrier to complete the probe card contact test and the verification of the resistance, current and other parameters of the tester. This scheme is safe and convenient, can save manpower and time wasted in disassembling and hanging the tester, and thus improves the efficiency.

[0005] In a first aspect, the present application provides a test system, comprising:

[0006] a tester comprising a test head, for contact testing with a probe card or a PCB;

[0007] A test carrier is detachably connected with the test head, and is used for detachably mounting the probe card or the PCB board.

[0008] The test carrier is provided with a containing groove which is adapted to the shape of the probe card or the PCB board, an edge layer which is used for abutting against the test head, and an inner layer which is located inside the edge layer.

[0009] In an embodiment of the test system, the test carrier is made of PVC.

[0010] In an embodiment of the test system, the probe card comprises a PCB board and a probe assembly, the inner layer comprises a mounting layer and a center layer which are used for respectively containing the PCB board and the probe assembly, the height of the center layer is lower than that of the mounting layer, and the depth of the mounting layer is greater than the thickness of the PCB.

[0011] In an embodiment of the test carrier, the mounting layer is provided with at least one limiting pin which corresponds to a limiting hole on the probe card.

[0012] In an embodiment of the test carrier, the edge layer and the inner layer are provided with at least one mounting hole which is used for respectively detachably connecting with the test head and the probe card or the PCB board.

[0013] Another object of the present application is to provide a test carrier for a test system, wherein the test system comprises a test head which is used for testing, and a probe card or a PCB board, the test carrier is provided with a containing groove which is adapted to the shape of the probe card or the PCB board, an edge layer which is used for abutting against the test head, and an inner layer which is located inside the edge layer.

[0014] In an embodiment of the test carrier, the test carrier is made of PVC.

[0015] In an embodiment of the test carrier, the probe card comprises a PCB board and a probe assembly, the inner layer comprises a mounting layer and a center layer which are used for respectively containing the PCB board and the probe assembly, the height of the center layer is lower than that of the mounting layer, and the depth of the mounting layer is greater than the thickness of the PCB.

[0016] In an embodiment of the test carrier, the mounting layer is provided with at least one limiting pin which corresponds to a limiting hole on the probe card.

[0017] In an embodiment of the test carrier, the edge layer and the inner layer are provided with at least one mounting hole which is used for respectively detachably connecting with the test head and the probe card or the PCB board.

[0018] The utility model provides a test carrier for WAT test system can replace original probe station fixed probe card or PCB, this carrier can be directly fixed on test head through screw etc. BRIEF DESCRIPTION OF DRAWINGS

[0019] In order to more clearly illustrate the technical scheme in the embodiments of the present application or the related technical scheme, the drawings needed to be used in the embodiment or related technical description will be briefly introduced as follows, and obviously, the drawings in the following description are only some embodiments of the present application, and for those skilled in the art, other drawings can also be obtained without creative labor on the basis of these drawings.

[0020] Figure 1 It is a top view of the carrier in an embodiment. DETAILED DESCRIPTION

[0021] The technical scheme in the embodiments of the present application will be described clearly and completely in combination with the drawings in the embodiments of the present application, and obviously, the described embodiments are only some embodiments of the present application, rather than all the embodiments. Based on the embodiments in the present application, all other embodiments obtained by those skilled in the art without creative labor are within the protection scope of the present application.

[0022] A test system, comprising:

[0023] A test machine, comprising a test head, for contact test with a probe card or a PCB;

[0024] A test carrier, detachably connected with the test head, for detachable installation of the probe card or the PCB;

[0025] The test carrier is provided with a containing groove adapted to the shape of the probe card or the PCB, forming an edge layer abutting against the test head and an inner layer inside the edge layer.

[0026] Because the probe card or the PCB is circular, the containing groove is a circular cavity, and the diameter of the containing groove is not less than the diameter of the probe card or the PCB. The probe card or the PCB is installed in the containing groove, and the test carrier is abutted against and detachably connected with the test head instead of the probe station. In the case of being separated from the probe station, the test machine resistance, current and other parameter verification and the probe card leakage, capacitance contact parameter test can be quickly and conveniently completed.

[0027] In an embodiment, the test carrier is made of PVC, and other insulating materials that cannot conduct electricity can also be used.

[0028] In an embodiment, the probe card comprises a PCB board and a probe assembly, the probe assembly is installed at the center of the PCB and partially protrudes from the PCB board, therefore, in order to adapt to the test of the probe card, the inner layer comprises a mounting layer and a center layer for respectively accommodating the PCB board and the probe assembly, the height of the center layer is lower than that of the mounting layer for protecting the needle tip of the probe card, and the depth of the mounting layer is greater than the thickness of the PCB.

[0029] In an embodiment, the mounting layer is provided with at least one limiting pin corresponding to the limiting hole on the probe card.

[0030] In an embodiment, the edge layer and the inner layer are provided with at least one mounting hole for respectively detachably connecting with the test head and the probe card or the PCB board, in this embodiment, the detachable connection is illustratively provided as screw fixing, and other connection modes such as clamping, magnetic washing and bonding can also be adopted.

[0031] In a specific embodiment, an example of the test carrier is described in detail.

[0032] Figure 1 is a top view of the test carrier in the utility model, which is used for a test system, wherein the test system comprises a test head for testing and a probe card or a PCB board, the test carrier is provided with an accommodating groove matched with the shape of the probe card or the PCB board, an edge layer abutting against the test head is formed, and an inner layer located on the inner side of the edge layer is formed.

[0033] In an embodiment, the test carrier is illustratively made of PVC material, and other insulating materials incapable of conducting electricity can also be adopted.

[0034] In an embodiment, the probe card comprises a PCB board and a probe assembly, the probe assembly is installed at the center of the PCB and partially protrudes from the PCB board, therefore, in order to adapt to the test of the probe card, the inner layer comprises a mounting layer and a center layer for respectively accommodating the PCB board and the probe assembly, the height of the center layer is lower than that of the mounting layer for protecting the needle tip of the probe card, and the depth of the mounting layer is greater than the thickness of the PCB.

[0035] In an embodiment, the mounting layer is provided with at least one limiting pin corresponding to the limiting hole on the probe card.

[0036] In an embodiment, the edge layer and the inner layer are provided with at least one mounting hole for respectively detachably connecting with the test head and the probe card or the PCB board, the mounting holes can be arranged at different positions to adapt to different types of probe cards or PCBs.

[0037] In this embodiment, the detachable connection is illustratively provided as screw fixing, and other connection modes such as clamping, magnetic washing and bonding can also be adopted.

[0038] Specifically, in order to fix the carrier to the test head, four small holes with the same size as the through holes of the edge layer of the carrier are needed to be opened on the test head in advance, and the inside is threaded. The front view of the carrier is shown in Figure 1 The carrier disc can be divided into three layers, i.e. the edge layer, the mounting layer and the center layer, i.e. the mounting layer and the center layer constitute the inner layer; the mounting layer is slightly lower than the edge layer and is used to fix the needle card; the center layer is slightly lower than the mounting layer and is used to protect the needle tip of the probe card. The edge layer of the carrier has four circular through holes, i.e. hole 1, hole 2, hole 3 and hole 4, and the inside is threaded, which is used to fix the carrier to the test head by using screws. The inner layer of the carrier has hole 5, hole 6, hole 7 and hole 8, which is used to fix the probe card to the carrier by using screws. The mounting layer of the carrier has pin 20 and pin 21 (i.e. limiting pin), which is used to limit the probe card when it is placed on the carrier, prevent the direction of the probe card from changing, and also facilitate the alignment of the reserved hole position of the probe card with the through hole of the mounting layer of the carrier. The needle tip position of the probe card is located in the center layer of the carrier, which is slightly lower than the mounting layer, and is used to protect the needle tip of the probe card from external force.

[0039] Based on the above carrier disc, the contact verification of the probe card and the test machine can be completed without the help of the probe station. When different types of probe cards and PCB boards with components are needed to be replaced, only the screws fixed in the hole 5, 6, 7 and 8 positions of the inner layer of the carrier disc need to be removed and replaced.

[0040] Finally, it should be noted that: the above embodiments are only used to illustrate the technical solutions of the present application, and not to limit them; although the present application has been described in detail with reference to the foregoing embodiments, those skilled in the art should understand that they can still modify the technical solutions recorded in the foregoing embodiments, or make equivalent replacement to part of the technical features; and these modifications or replacements do not make the essence of the corresponding technical solutions deviate from the spirit and scope of the technical solutions of the embodiments of the present application.

Claims

1. A test system, characterized by, The utility model relates to a test machine, including test head for with probe card or PCB board contact test, test carrier with test head detachable connection for probe card or PCB board detachable installation, wherein, the test carrier is equipped with the accommodation groove that is suitable for the shape of probe card or PCB board in, forms the edge layer that abuts with test head, and the inner layer that is located in the inside of edge layer. The test carrier is made of PVC material. The probe card comprises a PCB board and a probe assembly, the inner layer comprises an installation layer and a center layer for accommodating the PCB board and the probe assembly respectively, the height of the center layer is lower than that of the installation layer, and the depth of the installation layer is greater than the thickness of the PCB. The installation layer is provided with at least one limiting pin corresponding to the limiting hole on the probe card.

2. The test system of claim 1, wherein, The edge layer and the inner layer are provided with at least one mounting hole for detachable connection with the test head and the probe card or the PCB board respectively.

3. The test system of claim 1, wherein, The test carrier is made of PVC material.

4. The test system of claim 3, wherein, The probe card comprises a PCB board and a probe assembly, the inner layer comprises an installation layer and a center layer for accommodating the PCB board and the probe assembly respectively, the height of the center layer is lower than that of the installation layer, and the depth of the installation layer is greater than the thickness of the PCB.

5. The test system of claim 1, wherein, The installation layer is provided with at least one limiting pin corresponding to the limiting hole on the probe card.

6. A test carrier for use in a test system, wherein the test system includes a test head for testing, and a probe card or PCB board, characterized in that, The edge layer and the inner layer are provided with at least one mounting hole for detachable connection with the test head and the probe card or the PCB board respectively.

7. The test carrier of claim 6, wherein, ​ 8. The test carrier of claim 6, wherein, ​ 9. The test carrier of claim 8, wherein, ​ 10. The test carrier of claim 6, wherein, ​

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