Automatic liquid collecting device for wafer hanger

Abstract

The utility model provides an automatic liquid collecting device for a wafer hanger, which comprises a water collecting device arranged at the bottom of a lifting platform main body. The lifting platform body comprises a lifting module, and the output end of the lifting module is provided with a hanging tool body through a clamping device. A module shell is mounted on the outer side wall of the lifting module through bolts; the water collecting device is mounted on the outer side wall of the module shell through bolts; according to the automatic liquid collecting device, the cleanliness of a production environment and the durability of equipment are remarkably improved, the risks of cross contamination and equipment corrosion are effectively reduced, and a more reliable, efficient and environment-friendly solution is provided for the wafer treatment process.

Description

TECHNICAL FIELD

[0001] The utility model relates to wafer transport field especially relates to a kind of automatic liquid collecting device for wafer hanger. BACKGROUND

[0002] Wafer needs to contact various chemical liquid and deionized water when being treated in wet chemical process, carries out process such as warming, circulation, soaking, spraying, cleaning, and different liquid proportion needs to be placed in different tank container, wafer can enter corresponding tank to carry out process;

[0003] The mode that wafer enters different tank is divided into vertical type and horizontal type, wherein vertical type wet chemical equipment is more flexible, can simultaneously process multiple wafers, and is the main equipment in current market.Wafer is transferred between different tanks of vertical type equipment, needs to be taken and placed in vertical direction using lifting mechanism, and is carried in horizontal direction using moving platform, because moving platform is located above tank, so the combination mechanism of taking and placing and carrying is usually called "lifting module and overhead travelling crane";

[0004] Now commonly used wafer carrying is using lifting module and overhead travelling crane to take out wafer hanger or hanging basket from liquid in tank, then horizontally moves, and is placed into next tank;Because part of liquid is remained on hanger and wafer, it is taken out in the process, and often drops to workbench and equipment interior in subsequent carrying process, causes cross contamination and equipment corrosion. UTILITY MODEL CONTENTS

[0005] In order to solve the problem that part of liquid is remained on hanger and wafer in prior art, it is taken out in the process, and often drops to workbench and equipment interior in subsequent carrying process, causes cross contamination and equipment corrosion, the utility model provides a kind of automatic liquid collecting device for wafer hanger;

[0006] The utility model provides a kind of automatic liquid collecting device for wafer hanger adopts following technical scheme:

[0007] A kind of automatic liquid collecting device for wafer hanger, including water collecting device, the water collecting device is set in the bottom of lifting platform main body;The lifting platform main body includes lifting module, and the output end of the lifting module is installed with hanger body by clamping device;The outer wall of the lifting module is installed with module shell by bolt;The water collecting device is installed on the outer wall of module shell by bolt;

[0008] Further, the top of the lifting module is provided with lifting control motor for controlling the operation of the lifting module;The top of the module shell is installed with fixed plate by bolt;The lifting control motor is installed on the top of fixed plate by bolt;

[0009] Further, the clamping device comprises a clamping cylinder, the output end of the lifting module is provided with the clamping cylinder through bolting, the output end of the clamping cylinder is provided with a clamping plate through bolting, and the clamping plate is clamped and fixed with a hanger for carrying a wafer;

[0010] Further, the water collecting device comprises a water collecting tray, a cylinder, a protective cover and a mounting seat, the outer side wall of the module shell is provided with the mounting seat through bolting, the bottom of the mounting seat is provided with the protective cover through bolting, the protective cover is arranged on the lower side of the lifting module, the cylinder is fixedly arranged in the protective cover, the output end of the cylinder is provided with the water collecting tray through bolting, and the water collecting tray is completely moved to the lower side of the hanger when the cylinder reaches the maximum stroke.

[0011] Further, the width of the water collecting tray is greater than that of the lower edge of the hanger.

[0012] Further, the cylinder is a telescopic three-rod cylinder.

[0013] Further, the inner portion of the mounting seat is provided with a water pump through bolting, the outer side wall of the water collecting tray is provided with a water outlet, and the water inlet end of the water pump is connected with the water outlet.

[0014] Further, the inner portion of the water collecting tray is further provided with a liquid level sensor for controlling overflow of liquid collected by the water collecting tray, and the water pump is started when the liquid level sensor is triggered.

[0015] Further, the outer side wall of the module shell is provided with a mounting rack through bolting, the inner portion of the mounting rack is provided with a position sensor, the triggering module of the position sensor is arranged on the top of the hanger, and the position sensor is electrically connected with the external control end of the cylinder.

[0016] In conclusion, the utility model has the advantages of:

[0017] The utility model discloses a lifting module, a clamping device and a water collecting device are added, the technical problem that the wafer hanger and the residual liquid on the wafer are easy to drop to the workbench and the equipment inside in the taking-out and handling process in the prior art, thereby causing cross contamination and equipment corrosion is successfully solved, the telescopic three-rod cylinder of the water collecting device is driven to move the water collecting tray to the lower side of the lifted hanger accurately, and the residual liquid on the wafer and the hanger is effectively collected, the width of the water collecting tray is greater than that of the hanger, and the residual liquid is ensured to be collected completely, the water pump is combined with the water outlet skillfully, and the intelligent monitoring of the liquid level sensor realizes the timely recovery and processing of the liquid, prevents the accumulation and overflow of the liquid, and the application of the position sensor is used to detect whether the hanger is clamped in place, prevents the hanger from being clamped off-center or slipping, and prevents the hanger from interfering with the water collecting tray, thereby guaranteeing the safety, stability and reliability of the mechanism.

[0018] In summary, the automatic liquid collection device of this invention not only significantly improves the cleanliness of the production environment and the durability of the equipment, but also effectively reduces the risk of cross-contamination and equipment corrosion, providing a more reliable, efficient, and environmentally friendly solution for the wafer processing process. Attached Figure Description

[0019] Figure 1 This is a schematic diagram of the overall structure of this utility model;

[0020] Figure 2 This is a schematic diagram of the operation of the water collection device of this utility model;

[0021] Figure 3 This utility model Figure 2 An enlarged schematic diagram of part A in the middle;

[0022] Figure 4 This is a schematic diagram of the overall structure of the water collection device of this utility model.

[0023] As shown in the figure: 1-Lifting control motor, 2-Fixing plate, 3-Lifting module, 4-Clamping cylinder, 5-Mounting bracket, 6-Position sensor, 7-Clamping plate, 8-Hanging fixture, 9-Wafer, 10-Water receiving tray, 11-Cylinder, 12-Protective cover, 13-Mounting base, 14-Water pump, 15-Module housing. Detailed Implementation

[0024] The following is in conjunction with the appendix Figures 1-4 The present invention will be further described in detail below:

[0025] This utility model discloses an automatic liquid collection device for wafer racks, such as... Figure 1 , 2 As shown, the device includes a water collection device located at the bottom of the main body of the lifting platform. The main body of the lifting platform includes a lifting module 3, and a hanger body is mounted on the output end of the lifting module 3 via a clamping device. A module housing 15 is bolted to the outer wall of the lifting module 3. The water collection device is bolted to the outer wall of the module housing 15. In this embodiment, the device can automatically collect and recycle residual chemicals on the wafer and hanger during the wafer processing process, especially when the wafer is removed from the processing solution, to prevent cross-contamination and equipment corrosion caused by chemical dripping. Through the rational design of the overall structure, the automatic collection and recycling of chemicals during the wafer processing process is realized, improving the cleanliness of the production environment and the durability of the equipment.

[0026] like Figure 1 , 2As shown, the top of the lifting module 3 is provided with a lifting control motor 1 for controlling the operation of the lifting module 3; the top of the module shell 15 is bolted with a fixed plate 2; the lifting control motor 1 is bolted on the top of the fixed plate 2; the clamping device includes a clamping cylinder 4, and the output end of the lifting module 3 is bolted with the clamping cylinder 4; the output end of the clamping cylinder 4 is bolted with a clamping plate 7; the clamping plate 7 is clamped and fixed with a hanger 8 for carrying a wafer 9;

[0027] As shown in Figure 1 , 2 , the water collecting device includes a water collecting tray 10, a cylinder 11, a protective cover 12, and a mounting seat 13; the outer side wall of the module shell 15 is bolted with the mounting seat 13; the bottom of the mounting seat 13 is bolted with the protective cover 12; the protective cover 12 is arranged on the lower side of the lifting module 3; the inside of the protective cover 12 is fixedly provided with the cylinder 11; the output end of the cylinder 11 is bolted with the water collecting tray 10; the water collecting tray 10 is completely moved to the directly below the hanger 8 when the cylinder 11 reaches the maximum stroke; in this embodiment, the mounting seat 13 plays a role in supporting and fixing the components of the water collecting device, and the protective cover 12 protects the components such as the cylinder 11 from the interference and damage of the external environment; the cylinder 11 drives the linear motion of the water collecting tray 10, and when the wafer 9 is taken out from the processing liquid, the cylinder 11 drives the water collecting tray 10 to move to the directly below the lifted hanger 8 to receive the residual liquid on the hanger 8 and the wafer 9; through the design of the water collecting device, the automatic collection and recovery of the residual liquid on the wafer 9 and the hanger 8 are realized, and the dripping and cross contamination of the liquid are effectively prevented;

[0028] As shown in Figure 4 , the width of the water collecting tray 10 is greater than the width of the lower edge of the hanger 8; in this embodiment, the water collecting tray 10 is used for collecting and storing the liquid, and its width is greater than the width of the hanger 8, which ensures that the liquid can be completely received;

[0029] As shown in Figure 4 , the cylinder 11 is a telescopic three-bar cylinder; in this embodiment, the telescopic three-bar cylinder has greater carrying capacity and higher stability, which can prevent the cylinder rod from being deformed and drooping due to insufficient strength, and the water collecting tray from scratching and colliding with the upper end of other hangers being processed in the liquid tank during horizontal carrying;

[0030] As shown in Figure 2 , 4As shown, the inside of the mounting seat 13 is provided with a water pump 14 through bolt mounting; the outer side wall of the water pan 10 is provided with a water outlet, and the water inlet end of the water pump 14 is connected with the water outlet; the inside of the water pan 10 is also provided with a liquid level sensor for controlling the overflow of the liquid received by the water pan 10, and the water pump 14 is started when the liquid level sensor is triggered; in this embodiment, when the liquid in the water pan 10 reaches a certain amount, the water pump 14 is started to pump out the liquid and deliver it to the recycling system; in addition, the inside of the water pan 10 is also provided with a liquid level sensor for controlling the overflow of the liquid received by the water pan 10; when the liquid level sensor is triggered, the water pump 14 is started to timely pump out the liquid and prevent the liquid from overflowing and causing pollution;

[0031] As shown in the figure, Figure 3 As shown, the outer side wall of the module shell 15 is provided with a mounting rack 5 through bolt mounting; the inside of the mounting rack 5 is provided with a position sensor 6; the trigger module of the position sensor 6 is arranged at the top of the hanger 8; the position sensor 6 is electrically connected with the external control end of the air cylinder 11, and in this embodiment, the trigger module of the position sensor 6 is arranged at the top of the hanger 8, when the hanger 8 moves to the specified position, the position sensor 6 is triggered to send a signal to the external control end of the air cylinder 11 to control the air cylinder 11 to drive the water pan 10 to move to the position directly below the hanger 8; the automatic control and precise positioning of the water collecting device are realized.

[0032] The implementation principle of the embodiment of the utility model is:

[0033] 1, drive the lifting module 3 to move to the feeding area, the module is lowered, the clamping air cylinder 4 is opened, the hanger 8 is clamped, the lifting module 3 is lifted to lift the hanger 8, and the whole module is moved and carried to the position directly above the next groove together with the wafer 9.

[0034] 2, the lifting module 3 is lowered, the wafer 9 hanger 8 is put into the process tank, the clamping air cylinder 4 is loosened, and the process of the product is handled.

[0035] 3, after the process is handled, the clamping air cylinder 4 clamps the hanger 8 again, the lifting module 3 is lifted to lift the product, and most of the carried liquid medicine is dropped after a few seconds.

[0036] 4, two position sensors 6 are designed at the module shell 15, when the hanger 8 is lifted to the position without loosening, the air cylinder 11 is extended to push the water pan 10 to the position below the lifted hanger 8 to start water receiving.

[0037] 5, after the water pan 10 is extended to start water receiving, the whole mechanism does not need to wait and immediately translates to carry the product to the position directly above the next process tank

[0038] 6, the air cylinder 11 is retracted to retract the water pan 10; the lifting module 3 is prepared to be lowered to start the next round of work.

[0039] 7、When the water reaches a certain amount, the whole set of mechanism travels to the predetermined position, the water pump 14 starts, the medicine water in the water receiving tray 10 is pumped out and discharged to the designated drain.

[0040] The basic principle and main features of the present application and the advantages of the present application are shown and described above. The various components mentioned in the present application are common techniques in the existing field, which should be understood by the skilled person in the industry. The present application is not limited by the above examples, and the above examples and descriptions in the specification are only to illustrate the principle of the present application. Without departing from the spirit and scope of the present application, various changes and improvements can be made to the present application, and these changes and improvements all fall within the scope of the claimed present application. The scope of protection of the present application is defined by the appended claims and their equivalents.

Claims

1. An automatic liquid collecting device for a wafer hanger, characterized by comprising: The utility model provides a kind of wafer carrier lifting device, including water collecting device, the water collecting device is arranged in the bottom of lifting platform body;The lifting platform body includes lifting module (3), the output end of lifting module (3) is installed with hanger body by clamping device;The outer wall of lifting module (3) is installed with module shell (15) by bolt;Water collecting device is installed on the outer wall of module shell (15) by bolt.

2. The automatic liquid collecting device for a wafer holder according to claim 1, characterized by The top of the lifting module (3) is provided with a lifting control motor (1) for controlling the operation of the lifting module (3); the top of the module shell (15) is provided with a fixing plate (2) by bolt; the lifting control motor (1) is installed on the top of the fixing plate (2) by bolt.

3. The automatic liquid collecting device for a wafer holder according to claim 2, characterized by The clamping device includes a clamping cylinder (4), and the output end of the lifting module (3) is provided with the clamping cylinder (4) by bolt; the output end of the clamping cylinder (4) is provided with a clamping plate (7) by bolt; the clamping plate (7) is provided with a hanger (8) for carrying a wafer (9).

4. The automatic liquid collecting device for a wafer holder according to claim 1, characterized by The water collecting device includes a water collecting tray (10), a cylinder (11), a protective cover (12), and a mounting seat (13); the outer wall of the module shell (15) is provided with the mounting seat (13) by bolt; the bottom of the mounting seat (13) is provided with the protective cover (12) by bolt; the protective cover (12) is arranged on the lower side of the lifting module (3); the inside of the protective cover (12) is fixedly provided with the cylinder (11); the output end of the cylinder (11) is provided with the water collecting tray (10) by bolt; the water collecting tray (10) is completely moved to the directly below of the hanger (8) when the cylinder (11) reaches the maximum stroke.

5. The automatic liquid collecting device for a wafer holder according to claim 4, characterized by The width of the water collecting tray (10) is greater than the width of the lower edge of the hanger (8).

6. The automatic liquid collecting device for a wafer holder according to claim 4, wherein The cylinder (11) is a telescopic three-bar cylinder.

7. The automatic liquid collecting device for a wafer holder according to claim 4, wherein The inside of the mounting seat (13) is provided with a water pump (14) by bolt; the outer wall of the water collecting tray (10) is provided with a water outlet, and the water inlet end of the water pump (14) is connected with the water outlet.

8. The automatic liquid collecting device for a wafer holder according to claim 7, characterized by The inside of the water collecting tray (10) is further provided with a liquid level sensor for controlling the overflow of the liquid collected by the water collecting tray (10), and the water pump (14) is started when the liquid level sensor is triggered.

9. The automatic liquid collecting device for a wafer holder according to claim 4, characterized by The outer wall of the module shell (15) is provided with a mounting rack (5) by bolt; the inside of the mounting rack (5) is provided with a position sensor (6); the triggering module of the position sensor (6) is arranged on the top of the hanger (8); the position sensor (6) is electrically connected with the external control end of the cylinder (11).

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