Test fixture suitable for unpackaged thin film transistor
By designing test fixtures suitable for unpackaged thin-film transistors, the problems of inflexible application and device damage caused by traditional test equipment are solved, enabling efficient and convenient non-destructive testing and reliability assessment.
Patent Information
- Application Number
- CN202520059629.7
- Authority / Receiving Office
- CN · China
- Patent Type
- Utility models(China)
- Current Assignee / Owner
- Filing Date
- 2025-01-10
- Publication Date
- 2026-01-09
- Estimated Expiration
- 2035-01-10
AI Technical Summary
Traditional testing methods mainly rely on probe stations or packaged testing equipment, which cannot be flexibly applied in field testing or production lines. They also cannot perform reliability testing on unpackaged thin-film transistors, are prone to damaging devices, and cannot detect defects while powered on.
A test fixture including a base and a pressure plate was designed, which combines structures such as mask slots, limiting slots, pin slots and mask plates to achieve accurate testing and protection of unpackaged thin-film transistors. It can be integrated into a reliability testing device for live testing.
This fixture is compact and portable, improving testing efficiency and convenience. It is adaptable to thin-film transistors of different sizes, enabling non-destructive testing and comprehensive evaluation of device performance and reliability.
Smart Images
Figure CN223786510U_ABST
Abstract
Description
Technical Field
[0001] This utility model relates to the field of transistor testing equipment technology, and more specifically, to a test fixture suitable for unpackaged thin-film transistors. Background Technology
[0002] In the semiconductor industry, thin-film transistors (TFTs) are important electronic devices widely used in display technology, sensors, and integrated circuits. For unpackaged TFTs, electrical performance testing is a crucial step in evaluating their performance and quality. However, traditional testing methods mainly rely on probe stations or post-packaged testing equipment, which have many limitations.
[0003] While probe stations provide a precise testing environment, their large size, weight, and difficulty in movement limit their flexibility in field testing or production lines. This is especially true for unpackaged thin-film transistors, whose fragile structure and thin electrodes make traditional bonding and packaging processes not only less suitable but also potentially damaging.
[0004] Furthermore, when conducting reliability tests (such as thermal stress, mechanical stress, and radiation stress) in the unpackaged state, traditional test equipment cannot be integrated into the test setup, making it impossible to perform live testing. Many defects can only be induced and detected during live testing, which makes a comprehensive evaluation of unpackaged thin-film transistors difficult. Utility Model Content
[0005] The purpose of this invention is to provide a test fixture suitable for unpackaged thin-film transistors, in order to solve the problem that the traditional test methods mentioned in the background art mainly rely on probe stations or packaged test equipment, which have many limitations.
[0006] To achieve the above objectives, this utility model provides a test fixture suitable for unpackaged thin-film transistors, including a base and a pressure plate; the base is provided with a mask groove and a limiting groove; the pressure plate is provided with a pin groove and a pressure plate groove; a mask is provided inside the mask groove, and a pin is provided on the mask; a limiting piece is provided on the limiting groove to limit the position of the pressure plate; the pin passes through the pin groove.
[0007] Preferably, the base and the pressure plate are provided with through holes and blind holes of the same diameter. The pressure plate is fixed to the base by bolts passing through the through holes and blind holes and locking with nuts.
[0008] Preferably, the mask has a plurality of electrode holes evenly distributed on both sides, and the bottom end of the pin is connected to the electrode holes.
[0009] Preferably, the limiting groove and the limiting piece are provided with limiting holes of the same diameter. The limiting piece is fixed on the limiting groove by passing a bolt through the limiting hole and locking it with a nut.
[0010] Preferably, the pins are positioned by a connecting plate, which has several positioning holes, and the upper end of the pin passes through the positioning holes and the pin slot in sequence.
[0011] Preferably, the pin slot is a strip structure, and the pins are arranged parallel to each other at equal intervals along the pin slot.
[0012] Preferably, the top of the connecting plate is provided with several washers, which are fitted onto the pins and the bottom surface is in contact with the connecting plate.
[0013] Preferably, the pressure plate groove is located at the bottom of the pressure plate, and the bottom of the pressure plate groove and the top of the mask groove together form a test space.
[0014] Compared with the prior art, the beneficial effects of this utility model are as follows:
[0015] This test fixture, applicable to unpackaged thin-film transistors, consists of a base and a pressure plate. It is compact, lightweight, and portable, making it easy to apply flexibly in field testing or on production lines, greatly improving testing efficiency and convenience.
[0016] The mask grooves, mask plates, and pin structures in the fixture design enable the fixture to adapt to unpackaged thin-film transistors of different sizes and specifications, improving the fixture's versatility and adaptability. Traditional bonding and packaging processes may damage unpackaged thin-film transistors, while this invention, through the cooperation of the pressure plate and mask plate, and the precise alignment of the pins with the electrode holes, achieves non-destructive testing of the devices, effectively protecting the integrity and performance of the devices.
[0017] This test fixture can be integrated into various reliability testing devices, such as thermal stress, mechanical stress, and radiation stress testing equipment, to achieve charged testing of unpackaged thin-film transistors, thereby providing a more comprehensive evaluation of device performance and reliability. Attached Figure Description
[0018] Figure 1 This is a schematic diagram of the overall structure of this utility model;
[0019] Figure 2 This is a partial structural schematic diagram of the present invention;
[0020] The meanings of the labels in the diagram are as follows:
[0021] 1. Base; 11. Mask groove; 12. Limiting groove; 2. Pressure plate; 21. Pin groove; 22. Pressure plate groove; 3. Mask; 31. Pin; 32. Connecting plate; 33. Washer; 4. Limiting piece. Detailed Implementation
[0022] The technical solutions of the present utility model will be clearly and completely described below with reference to the accompanying drawings of the embodiments. Obviously, the described embodiments are only some embodiments of the present utility model, and not all embodiments. Based on the embodiments of the present utility model, all other embodiments obtained by those of ordinary skill in the art without creative effort are within the protection scope of the present utility model.
[0023] This invention provides a test fixture suitable for unencapsulated thin-film transistors, such as... Figures 1-2 As shown, the fixture includes a base 1 and a pressure plate 2. The base 1 has a mask groove 11 and a limiting groove 12. The pressure plate 2 has a pin slot 21 and a pressure plate groove 22. A mask 3 is installed inside the mask groove 11, and pins 31 are mounted on the mask 3. A limiting piece 4 is installed on the limiting groove 12 to restrict the position of the pressure plate 2. The pins 31 pass through the pin slot 21. The mask groove 11 and limiting groove 12 on the base 1 provide stable support and precise positioning for the fixture. The pin slot 21 and pressure plate groove 22 on the pressure plate 2, in conjunction with the structure on the base, form a complete test space. The carefully positioned pins 31 on the mask 3 installed inside the mask groove 11 can accurately align with the electrodes of the thin-film transistor, ensuring accurate transmission of test signals. The limiting piece 4 on the limiting groove 12 effectively restricts the position of the pressure plate 2, ensuring stability and reliability during the test process. The design of the pin 31 passing through the pin slot 21 makes the operation of the test fixture simple and easy, while ensuring the accuracy and efficiency of the test. Overall, the test fixture has a reasonable structural design and complete functions, providing an accurate and stable solution for testing unpackaged thin-film transistors.
[0024] In this embodiment, the base 1 and the pressure plate 2 are provided with through holes and blind holes of the same diameter. Bolts are used to pass through the through holes and blind holes, and nuts are used to lock the pressure plate 2 onto the base 1. This design ensures that the pressure plate 2 can be firmly fixed onto the base 1, guaranteeing the stability and reliability of the test fixture during the testing process and avoiding test errors caused by the pressure plate loosening.
[0025] Specifically, several electrode holes are evenly distributed on both sides of the mask 3, and the bottom end of the pin 31 is connected to the electrode holes. This design allows the pin 31 to accurately align with the electrode holes on the mask 3, thereby ensuring that the test signal can be smoothly transmitted to the thin-film transistor, improving the accuracy and efficiency of the test.
[0026] Furthermore, the limiting groove 12 and the limiting piece 4 are provided with limiting holes of the same diameter. By passing bolts through the limiting holes and locking them with nuts, the limiting piece 4 is fixed to the limiting groove 12. This design allows the limiting piece 4 to be firmly fixed to the limiting groove 12, effectively limiting the position of the pressure plate 2 and ensuring stability and consistency during the testing process.
[0027] Furthermore, the pins 31 are positioned together by a connecting plate 32, which has several positioning holes. The upper ends of the pins 31 pass through the positioning holes and the pin slots 21 in sequence. This design allows the pins 31 to be accurately positioned on the connecting plate 32, ensuring accurate relative positions between the pins and improving the accuracy and reliability of the test.
[0028] Furthermore, the pin slot 21 has a strip-shaped structure, and the pins 31 are arranged parallel to each other and at equal intervals along the pin slot 21. This design allows the pins 31 to be neatly arranged in the pin slot 21, which facilitates the installation and replacement of the pins, and also improves the efficiency and accuracy of the test.
[0029] Furthermore, the top of the connecting plate 32 is provided with several washers 33, which are fitted onto the pin 31 and have their bottom surfaces in contact with the connecting plate 32. This design allows the pin 31 to distribute pressure through the washers 33 when subjected to pressure, protecting the pin and the connecting plate from damage and extending the service life of the test fixture.
[0030] Furthermore, the pressure plate groove 22 is located at the bottom of the pressure plate 2, and the bottom of the pressure plate groove 22 and the top of the mask groove 11 together form a test space. This design allows the thin-film transistor to be placed in the test space, which facilitates the testing operation and also protects the thin-film transistor from interference from the external environment, thereby improving the accuracy and reliability of the test.
[0031] In use, the test fixture of this invention, applicable to unpackaged thin-film transistors, first installs the mask 3 into the mask groove 11 of the base 1, ensuring precise alignment of the pin 31 with the electrode hole on the mask 3. The limiting plate 4 is fixed to the limiting groove 12 of the base 1 with bolts, and its position is adjusted to stably restrict the movement of the pressure plate 2. The bottom end of the pin 31 is connected to the electrode hole on the mask 3, and the upper end passes through the positioning hole on the connecting plate 32, and then through the pin groove 21 on the pressure plate 2. A washer 33 is fitted onto the top of the connecting plate 32 to protect the pin and the connecting plate. Bolts are used to pass through the through holes and blind holes on the base 1 and the pressure plate 2, and then tightened with nuts to firmly fix the pressure plate 2 onto the base 1. At this point, a test space is formed between the bottom of the pressure plate groove 22 and the top of the mask groove 11.
[0032] Place the unpackaged thin-film transistor (TFT) in the test space, ensuring accurate contact between the TFT electrodes and pin 31. Adjust the parameters of the test fixture, such as test voltage and current, according to the test requirements.
[0033] The test equipment is started, and the test signal is transmitted to the electrodes of the thin-film transistor through pin 31 for electrical performance testing. During the test, the test equipment records relevant electrical parameters, such as resistance, capacitance, and current. After the test is completed, the test equipment outputs the test results, including the specific values of the electrical parameters. The test results are analyzed to evaluate whether the electrical performance of the thin-film transistor meets the requirements.
[0034] The foregoing has shown and described the basic principles, main features, and advantages of this utility model. Those skilled in the art should understand that this utility model is not limited to the above embodiments. The embodiments and descriptions in the specification are merely preferred examples and are not intended to limit the utility model. Various changes and modifications can be made to this utility model without departing from its spirit and scope, and all such changes and modifications fall within the scope of the claimed utility model. The scope of protection of this utility model is defined by the appended claims and their equivalents.
Claims
1. A test fixture suitable for unpackaged thin-film transistors, characterized in that: It includes a base (1) and a pressure plate (2); the base (1) is provided with a mask groove (11) and a limiting groove (12); the pressure plate (2) is provided with a pin groove (21) and a pressure plate groove (22); a mask plate (3) is provided inside the mask groove (11), and a pin (31) is provided on the mask plate (3); a limiting piece (4) is provided on the limiting groove (12) to limit the position of the pressure plate (2); the pin (31) passes through the pin groove (21).
2. The test fixture for unpackaged thin-film transistors according to claim 1, characterized in that: The base (1) and the pressure plate (2) are provided with through holes and blind holes of the same diameter. The pressure plate (2) is fixed on the base (1) by bolts passing through the through holes and blind holes and by locking with nuts.
3. The test fixture for unpackaged thin-film transistors according to claim 1, characterized in that: The mask (3) has several electrode holes evenly distributed on both sides, and the bottom end of the pin (31) is connected to the electrode holes.
4. The test fixture for unpackaged thin-film transistors according to claim 1, characterized in that: The limiting groove (12) and the limiting piece (4) are provided with limiting holes of the same diameter. The limiting piece (4) is fixed on the limiting groove (12) by passing a bolt through the limiting hole and locking it with a nut.
5. The test fixture for unpackaged thin-film transistors according to claim 3, characterized in that: The pins (31) are positioned by a connecting plate (32), which has several positioning holes. The upper end of the pin (31) passes through the positioning hole and the pin groove (21) in sequence.
6. The test fixture for unpackaged thin-film transistors according to claim 5, characterized in that: The pin slot (21) is a strip structure, and the pins (31) are arranged parallel to each other at equal intervals along the pin slot (21).
7. The test fixture for unpackaged thin-film transistors according to claim 5, characterized in that: The top of the connecting plate (32) is provided with several washers (33), which are sleeved on the pin (31) and have their bottom surfaces in contact with the connecting plate (32).
8. The test fixture for unpackaged thin-film transistors according to claim 1, characterized in that: The pressure plate groove (22) is located at the bottom of the pressure plate (2), and the bottom of the pressure plate groove (22) and the top of the mask groove (11) together form a test space.