Reaction cavity overflow structure of industrial waste gas treatment equipment

Abstract

The utility model relates to a reaction chamber overflow structure of industrial waste gas treatment equipment, which structurally comprises an overflow part welding pipe coaxially arranged in a reaction chamber body, a flue gas inlet at the top of the reaction chamber body is arranged above the top end of the overflow part welding pipe, a CDA chamber sealing plate is arranged in the reaction chamber body close to the top end, the overflow part welding pipe penetrates through the CDA chamber sealing plate, and the overflow part welding pipe penetrates through the CDA chamber sealing plate. And the top end of the overflow part welding pipe is higher than the CDA chamber sealing plate. The reaction chamber has the advantages that the structural design is simple and reasonable, the processing is easy, the reaction time of mixed gas is prolonged by prolonging the path of the mixed gas, the reaction efficiency is improved, and meanwhile, the cooling effect can be improved by removing dust adhered to the inner wall of the reaction chamber through overflow.

Description

Technical Field

[0001] This utility model relates to an overflow structure of the reaction chamber of an industrial waste gas treatment device, belonging to the field of waste gas treatment technology. Background Technology

[0002] In the manufacturing process of chips and circuit boards, cleaning, resist homogenization, resist removal, etching, and development are essential steps. Thin film deposition, photolithography, and etching are the three core processes in integrated circuit manufacturing, requiring repeated operations throughout the process. As the linewidth of integrated circuits continues to shrink, the manufacturing process becomes increasingly complex. According to statistics, a 20-nanometer process requires approximately 1000 steps, while 10-nanometer and 7-nanometer processes require over 1400 steps. This significant increase in process steps translates to increased pollutant emissions.

[0003] To avoid environmental pollution, the waste gas generated by the semiconductor manufacturing industry needs to be treated by waste gas treatment equipment before being emitted to meet emission standards.

[0004] In existing technologies, the reaction chamber in waste gas treatment equipment has a short stroke, and the generated dust will adhere to the inner wall of the reaction chamber, resulting in poor cooling effect. At the same time, due to the adhesion of dust, the diameter of the inner cylinder of the reaction chamber gradually decreases, resulting in increased flow rate, shortened reaction time, and reduced reaction efficiency. Utility Model Content

[0005] This utility model proposes an overflow structure for the reaction chamber of an industrial waste gas treatment device. Its purpose is to overcome the above-mentioned shortcomings of the existing technology, improve reaction efficiency, prevent dust generated in the reaction chamber from adhering to the inner wall, and improve the cooling effect and reduce the temperature of the reaction chamber wall.

[0006] The technical solution of this utility model is as follows: An overflow structure for the reaction chamber of an industrial waste gas treatment device. The structure includes an overflow welded pipe coaxially installed within the reaction chamber body. Above the top of the overflow welded pipe is the flue gas inlet at the top of the reaction chamber body. A CDA chamber sealing plate is located near the top of the reaction chamber body. The overflow welded pipe passes through the CDA chamber sealing plate, and its top end is higher than the CDA chamber sealing plate. The overflow welded pipe serves as both a gas reaction chamber and a flow channel. Flue gas enters through the flue gas inlet, flows into the overflow welded pipe, flows downwards, and then upwards, passing between the overflow welded pipe and the reaction chamber body before exiting through the flue gas outlet. The CDA chamber sealing plate separates the overflow water from the lower chamber.

[0007] Preferably, the overflow section welded pipe is connected to the CDA chamber sealing plate via a welded mounting plate, and a fluororubber gasket is provided between the welded mounting plate and the inner wall of the reaction chamber body. The welded mounting plate is used to fix the overflow section welded pipe to the outer reaction chamber, and overlaps with the CDA chamber sealing plate to improve strength. The fluororubber gasket is used for sealing the connection between the welded mounting plate and the outer reaction chamber.

[0008] Preferably, the top of the overflow welded pipe is provided with overflow baffles that extend upwards and outwards from the inner wall of the overflow welded pipe at even intervals along its circumference. This ensures that the overflow water can flow evenly into the interior of the overflow welded pipe and simultaneously flush along the inner wall, preventing the dust generated by the reaction from adhering to the wall and avoiding the overflow water from having no support, which would cause water to impact the high-temperature zone in the middle, resulting in water vaporization and increased humidity.

[0009] Preferably, the bottom end of the overflow welded pipe is connected to the lower cone with a bottom opening. This is used for gas guidance and dispersion. The reduced diameter increases the outlet flow velocity, allowing the exhaust gas to be injected further.

[0010] Preferably, the lower cone opening faces away from the flue gas outlet on the side of the reaction chamber body. This extends the gas travel distance within the internal chamber.

[0011] Preferably, the lower cone opening is provided with several rectangular dispersion ports evenly spaced circumferentially. This facilitates more uniform dispersion of the generated waste gas, allowing it to be better cleaned and absorbed by the sprayed water, further improving reaction efficiency.

[0012] The advantages of this utility model are: simple and reasonable structural design, easy to process, extended reaction time of mixed gas by extending the path of mixed gas, improved reaction efficiency, and improved cooling effect by overflow to remove dust adhering to the inner wall of reaction chamber. Attached Figure Description

[0013] Figure 1 This is a schematic diagram of the overflow structure of the reaction chamber in the industrial waste gas treatment equipment of this utility model.

[0014] Figure 2 yes Figure 1 A schematic diagram of the structure of the lower cone.

[0015] Figure 3 This is a schematic diagram showing the installation position of the overflow structure in the reaction chamber of the industrial waste gas treatment equipment of this utility model.

[0016] In the diagram, 1 is the overflow welded pipe, 2 is the CDA chamber sealing plate, 3 is the overflow baffle, 4 is the lower cone, 41 is the dispersion port, 5 is the welded mounting plate, 6 is the fluororubber gasket, 7 is the reaction chamber body, 71 is the flue gas inlet, 72 is the flue gas outlet, 73 is the cooling spray interface, 74 is the observation hole, 75 is the observation hole / spare port, 76 is the hand hole, and 77 is the temperature measuring port. Detailed Implementation

[0017] The present invention will be further described in detail below with reference to embodiments and specific implementation methods.

[0018] like Figure 1-3 As shown, an overflow structure for the reaction chamber of an industrial waste gas treatment device includes an overflow welded pipe 1 coaxially installed inside the reaction chamber body 7. The top of the overflow welded pipe 1 is a flue gas inlet 71 at the top of the reaction chamber body 7. A CDA chamber sealing plate 2 is provided near the top of the reaction chamber body 7. The overflow welded pipe 1 passes through the CDA chamber sealing plate 2 and is connected to the CDA chamber sealing plate 2 through a welded mounting plate 5. A fluororubber gasket 6 is provided between the welded mounting plate 5 and the inner wall of the reaction chamber body 7. The top of the overflow welded pipe 1 is higher than the CDA chamber sealing plate 2. Overflow baffles 3 are evenly spaced around the top of the overflow welded pipe 1, extending upward and outward from the inner wall of the overflow welded pipe 1. The bottom end of the overflow welded pipe 1 is connected to a lower cone 4 with a bottom opening. The opening of the lower cone 4 faces the opposite direction to the flue gas outlet 72 on the side of the reaction chamber body 7. Several rectangular dispersion ports 41 are evenly spaced around the opening of the lower cone 4.

[0019] Based on the above structure, specifically...

[0020] The overflow section welded pipe 1 is used for the gas reaction chamber and flow channel. Flue gas enters through the flue gas inlet 71, flows into the overflow section welded pipe 1, flows downward from the opening of the lower cone 4, and then flows upward through the space between the overflow section welded pipe 1 and the reaction chamber body 7 and flows out from the flue gas outlet 72.

[0021] CDA chamber sealing plate 2 is used to separate the overflow water from the lower chamber.

[0022] The overflow baffle 3 ensures that the overflow water can flow evenly into the overflow section welded pipe 1 and at the same time flush along the inner wall, ensuring that the dust generated by the reaction does not stick to the wall. It also prevents the overflow water from having no support, thus causing water to impact the high-temperature zone in the middle, resulting in water vaporization and increased humidity.

[0023] The lower cone 4 is used for gas guidance and dispersion. Its opening is opposite to the flue gas inlet 71, which can extend the gas travel in the internal chamber. The reduced diameter increases the outlet flow rate, making the exhaust gas spray distance farther. At the same time, the outlet has a dispersion port 41, which facilitates more uniform dispersion of the generated exhaust gas, better cleaning and absorption by the spray water, and further improves the reaction efficiency.

[0024] The welding mounting plate 5 is used to fix the overflow section welding pipe 1 to the outer reaction chamber, and overlaps with the CDA chamber sealing plate 2. By increasing the thickness, the strength is improved. It is preferable to use the same specification material, which can reduce the material specifications and reduce the material cost.

[0025] Fluororubber gasket 6 is used for welding mounting plate 5 and sealing the connection between it and the external reaction chamber. Example

[0026] Based on technical parameters such as the gas flow velocity of 1 m / s in the reaction chamber and the gas residence time in the reaction chamber of 0.4 s, the inner diameter of the overflow welded pipe 1 is calculated to be 130 mm and the length is 380 mm. The CDA chamber sealing plate 2 is set 33.5 mm downward from the top of the overflow welded pipe 1. 24 overflow baffles 3 are evenly distributed at the top of the overflow welded pipe 1. The lower cone 4 is 100.7 mm high. The bevel at the bottom of the lower cone 4 is set 30° to the right when viewed from the front of the overflow welded pipe 1. The size of the dispersion port 41 is 4*20 mm.

[0027] All of the components described above are existing technologies, and those skilled in the art can use any model and existing design that can achieve their corresponding functions.

[0028] The above description is only a preferred embodiment of the present utility model. It should be noted that for those skilled in the art, several modifications and improvements can be made without departing from the inventive concept of the present utility model, and these all fall within the protection scope of the present utility model.

Claims

1. An overflow structure for the reaction chamber of an industrial waste gas treatment device, characterized in that, The overflow welded pipe (1) is coaxially installed in the reaction chamber body (7). The top of the overflow welded pipe (1) is the flue gas inlet (71) at the top of the reaction chamber body (7). The CDA chamber sealing plate (2) is provided in the reaction chamber body (7) near the top. The overflow welded pipe (1) passes through the CDA chamber sealing plate (2). The top of the overflow welded pipe (1) is higher than the CDA chamber sealing plate (2). The overflow welded pipe (1) is used for the gas reaction chamber and flow channel. The flue gas enters from the flue gas inlet (71), flows into the overflow welded pipe (1), flows downward, and then flows upward through the space between the overflow welded pipe (1) and the reaction chamber body (7) and flows out from the flue gas outlet (72).

2. The overflow structure of the reaction chamber of an industrial waste gas treatment device as described in claim 1, characterized in that, The overflow section welded pipe (1) is connected to the CDA chamber sealing plate (2) through the welded mounting plate (5), and a fluororubber gasket (6) is provided between the welded mounting plate (5) and the inner wall of the reaction chamber body (7).

3. The overflow structure of the reaction chamber of an industrial waste gas treatment device as described in claim 1, characterized in that, The overflow section welded pipe (1) is provided with overflow baffles (3) that extend upward and outward from the inner wall of the overflow section welded pipe (1) at even intervals around the top circumference.

4. The overflow structure of the reaction chamber of an industrial waste gas treatment device as described in claim 1, characterized in that, The bottom end of the overflow welded pipe (1) is connected to the lower cone (4) with the bottom opening.

5. The overflow structure of the reaction chamber of an industrial waste gas treatment device as described in claim 4, characterized in that, The opening of the lower cone (4) faces the opposite direction to the flue gas outlet (72) on the side of the reaction chamber body (7).

6. The overflow structure of the reaction chamber of an industrial waste gas treatment device as described in claim 4, characterized in that, The lower cone (4) has several rectangular openings (41) evenly spaced around its circumference.

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