Universal high-pressure cleaning jig for semiconductor disc parts

Abstract

The utility model relates to the technical field of part cleaning in the semiconductor industry, in particular to a universal high-pressure cleaning jig for semiconductor disc type parts, which comprises basic support plates, four connecting rods and a partition wall, the two oppositely arranged basic support plates are connected through the four connecting rods, adjustable buckle type hole sites are arranged on the basic support plates, and the partition wall is arranged in the adjustable buckle type hole sites. The two ends of the connecting rod are fixedly connected into the adjustable buckle type hole positions of the basic supporting plates on the two sides respectively, and the connecting rod is provided with a partition used for clamping semiconductor disc parts. The universal high-pressure cleaning jig for the semiconductor disc parts has the advantages of simple structure, low manufacturing cost, simplicity and convenience in operation, reliability in connection, convenience in maintenance, light weight, high universality, high adaptability and the like, can be widely applied to the high-pressure cleaning process of the semiconductor disc parts, and improves the working efficiency and the cleaning quality.

Description

Technical Field

[0001] This utility model relates to the field of semiconductor component cleaning technology, specifically to a general-purpose high-pressure cleaning fixture for semiconductor disk-type components. Background Technology

[0002] In semiconductor manufacturing, the cleaning process for disk-shaped components is crucial, directly affecting the cleanliness of the chip surface and consequently the quality and performance of the entire semiconductor product. Traditional single-piece high-pressure cleaning methods are not only inefficient for mass production of disk-shaped components, but also require significant manpower and resources, resulting in substantial waste. Furthermore, the instability of the components during cleaning further impacts the cleaning effect and product quality.

[0003] To improve cleaning efficiency, reduce labor costs, and increase production capacity, there is an urgent need for a solution capable of rapidly and in large-scale cleaning of disc-shaped parts. In this context, designing a universal high-pressure cleaning fixture suitable for semiconductor disc-shaped parts is particularly important. This fixture needs to be able to stably clamp circular parts of different diameters and thicknesses to ensure that the parts do not shift or deform during cleaning, thereby guaranteeing consistent cleaning results and part quality.

[0004] However, existing cleaning fixtures often suffer from poor versatility, complex clamping, and high costs, making it difficult to meet the needs of large-scale cleaning of disk-shaped parts in semiconductor manufacturing. Therefore, developing a universal high-pressure cleaning fixture for semiconductor disk-shaped parts that is simple in structure, low in cost, stable in support, and highly versatile is of great significance for improving production efficiency, reducing costs, and enhancing product quality. Utility Model Content

[0005] To address the aforementioned problems, this utility model provides a universal high-pressure cleaning fixture for semiconductor disk-type parts. This universal high-pressure cleaning fixture for semiconductor disk-type parts has advantages such as simple structure, low manufacturing cost, easy operation, reliable connection, easy maintenance, light weight, strong versatility, and strong adaptability. It can be widely used in the high-pressure cleaning process of semiconductor disk-type parts, improving work efficiency and cleaning quality.

[0006] The technical solution of this utility model is as follows:

[0007] A general-purpose high-pressure cleaning fixture for semiconductor disk-type parts includes a base support plate, connecting rods, and partitions. Two opposing base support plates are connected by four connecting rods. Adjustable snap-fit ​​holes are provided on the base support plates. The two ends of the connecting rods are respectively fixedly connected to the adjustable snap-fit ​​holes on the two base support plates. Partitions for mounting semiconductor disk-type parts are installed on the connecting rods.

[0008] The adjustable snap-fit ​​hole includes a horizontally arranged elongated hole and two arc-shaped holes symmetrically arranged along the vertical center plane of the foundation support plate. Several snap-fit ​​holes are evenly distributed on the elongated hole and the arc-shaped holes. Two connecting rods are installed in the elongated hole and two connecting rods are installed in the arc-shaped holes respectively.

[0009] A weight-reducing hole is provided at the center of the base support plate.

[0010] A threaded hole for suspension is provided on the base support plate.

[0011] The connecting rod includes a cylindrical connecting rod, with both ends of the cylindrical connecting rod being fixedly connected to the foundation support plates on both sides. The partition is a wedge-shaped partition, with a central hole 2 at the center of the wedge-shaped partition that mates with the cylindrical connecting rod. Several wedges for mounting semiconductor disk-like parts are provided on the outer periphery of the wedge-shaped partition.

[0012] Optionally, the connecting rod includes a cylindrical connecting rod and a square connecting rod. The two ends of the cylindrical connecting rod are fixedly connected to the base support plates on both sides, and the square connecting rod has a central hole that matches the cylindrical connecting rod. Several square partitions for mounting semiconductor disk-like parts are provided on the outer periphery of the square connecting rod.

[0013] The square partition is equipped with various sizes and specifications to accommodate semiconductor disk-type components of different thicknesses.

[0014] Two threaded holes with different intervals are provided on the four sides of the square connecting rod for installing square partitions of different sizes.

[0015] The square partition is an L-shaped panel with countersunk holes on the horizontal plate. Screws pass through the countersunk holes and threaded holes to fix the square partition to the square connecting rod.

[0016] The cylindrical connecting rod has external threads at both ends. After the external threads at both ends pass through the adjustable snap-fit ​​holes and are adjusted to the correct position, the cylindrical connecting rod is securely connected to the base support plate by locking nuts.

[0017] The beneficial effects of this utility model are as follows:

[0018] 1. This utility model discloses a universal high-pressure cleaning fixture for semiconductor disk-type parts. The main structure of this universal high-pressure cleaning fixture for semiconductor disk-type parts consists of a base support plate, connecting rods and partitions. These components are all plate-type or rotary structures, which can be processed using three-axis machine tools and lathes, thereby reducing manufacturing costs and improving production efficiency.

[0019] 2. This utility model discloses a universal high-pressure cleaning fixture for semiconductor disk-type parts. The screws and nuts used in this universal high-pressure cleaning fixture for semiconductor disk-type parts are standard parts and are made of stainless steel, which not only has high strength but also corrosion resistance. It is easy to operate and has stable clamping force, ensuring the reliability and durability of the fixture.

[0020] 3. This utility model discloses a universal high-pressure cleaning fixture for semiconductor disk-type parts. The various components of this universal high-pressure cleaning fixture for semiconductor disk-type parts are connected to each other by screws and nuts. This connection method is not only low in cost, but also secure and reliable, ensuring that the fixture will not loosen or deform during use.

[0021] 4. This utility model discloses a universal high-pressure cleaning fixture for semiconductor disk-type parts. The fixture is entirely made of POM (polyoxymethylene) material, which has excellent wear resistance, impact resistance, and self-lubricating properties, facilitating maintenance and cleaning. Furthermore, POM is lightweight, making it easy to handle and use on-site, thus improving work efficiency.

[0022] 5. This utility model discloses a universal high-pressure cleaning fixture for semiconductor disk-type parts. The base support plate of this fixture is provided with adjustable snap-fit ​​holes, allowing it to be used with partitions of different sizes, thus adapting to semiconductor disk-type parts of various dimensions. This design makes the fixture highly versatile and widely applicable in the high-pressure cleaning process of semiconductor disk-type parts of different specifications and models.

[0023] 6. This utility model discloses a universal high-pressure cleaning fixture for semiconductor disk-type parts. The connecting rod of this fixture has external threads at both ends, allowing the position of the connecting rod to be changed by adjusting the position of the locking nut, thus accommodating parts of different sizes. This design not only improves the fixture's flexibility but also enhances its ability to adapt to different working environments. Attached Figure Description

[0024] The advantages and solutions of this application will become clear to those skilled in the art upon reading the following detailed description of preferred embodiments. The accompanying drawings are for illustrative purposes only and are not intended to limit the scope of this invention.

[0025] In the attached diagram:

[0026] Figure 1 This is a three-dimensional structural schematic diagram of a general-purpose high-pressure cleaning fixture for semiconductor disk-type parts according to Embodiment 1 of this utility model;

[0027] Figure 2This is a three-dimensional structural diagram of the base support plate of a general high-pressure cleaning fixture for semiconductor disk-type parts according to Embodiment 1 of this utility model;

[0028] Figure 3 This is a three-dimensional structural diagram of the cylindrical connecting rod of a general high-pressure cleaning fixture for semiconductor disk-type parts according to Embodiment 1 of this utility model;

[0029] Figure 4 This is a three-dimensional structural diagram of a wedge-shaped partition in a general high-pressure cleaning fixture for semiconductor disk-type parts according to Embodiment 1 of this utility model.

[0030] Figure 5 This is a three-dimensional structural schematic diagram of a general-purpose high-pressure cleaning fixture for semiconductor disk-type parts according to Embodiment 2 of this utility model;

[0031] Figure 6 This is a three-dimensional structural diagram of a square connecting rod of a general high-pressure cleaning fixture for semiconductor disk-type parts according to Embodiment 2 of this utility model;

[0032] Figure 7 This is a three-dimensional structural diagram of the square partition of a general high-pressure cleaning fixture for semiconductor disk-type parts according to Embodiment 2 of this utility model.

[0033] The components represented by the various reference numerals in the diagram are:

[0034] This utility model includes: 1. a base support plate; 11. an adjustable snap-fit ​​hole; 12. a weight-reducing hole; 13. a threaded hole one; 2. a cylindrical connecting rod; 21. an external thread; 3. a square connecting rod; 31. a center hole one; 32. a threaded hole two; 4. a wedge-shaped partition; 41. a center hole two; 42. a wedge shape; 5. a square partition; 51. an L-shaped plate; 52. a countersunk hole; 6. a locking nut; and 7. a screw. Detailed Implementation

[0035] like Figure 1 and Figure 5 As shown, the general high-pressure cleaning fixture for semiconductor disk-type parts mainly includes a base support plate 1, a connecting rod, and a partition.

[0036] The two opposing base support plates 1 are securely connected by four connecting rods.

[0037] like Figure 2 As shown, adjustable snap-fit ​​holes 11 are cleverly designed on the base support plate 1. These holes allow the two ends of the connecting rod to be flexibly fixed in different positions according to actual needs. A partition specifically designed for mounting semiconductor disk-type components is installed on the connecting rod.

[0038] To achieve wider applicability, this invention employs two types of partitions: a wedge-shaped partition 4 and a square partition 5. Both types of partitions offer advantages such as high versatility and stable two-point support clamping. They are connected to the connecting rod spindle via a central hole, ensuring stable support of the parts during the cleaning process. The position of the partition on the base support plate can be easily adjusted according to the size of the parts being cleaned, and locked with a nut, achieving quick adjustment and stable support.

[0039] Specifically, the wedge-shaped partition 4 is designed to hold thinner (1mm-18.5mm) disc-shaped or ring-shaped parts. Its wedge structure not only provides additional clamping force but also ensures the stability of the parts during the cleaning process. The square partition 5, on the other hand, is suitable for thicker (10mm-50mm) parts. After being tightened with screws, it connects with the square connecting rod 3 to achieve more stable support.

[0040] A weight-reducing hole 12 is provided at the center of the base support plate 1, which not only reduces the overall weight of the fixture but also facilitates drainage during the cleaning process. At the same time, a threaded hole 13 for suspension is also provided on the base support plate, which makes it convenient to suspend the fixture on the cleaning equipment for operation.

[0041] In Example 1, the connecting rod in the wedge-shaped partition 4 includes a cylindrical connecting rod 2, such as... Figure 3 and Figure 4 As shown, the two ends of the cylindrical connecting rod 2 are fixedly connected to the base support plates 1 on both sides. The partition is a wedge-shaped partition 4. The wedge-shaped partition 4 has a central hole 41 that cooperates with the cylindrical connecting rod 2. Several wedges 42 for mounting semiconductor disk-like parts are provided on the outer periphery of the wedge-shaped partition 4.

[0042] In Example 2, the connecting rods in the square partition 5 include columnar connecting rods 2 and square connecting rods 3, such as... Figure 6 and Figure 7 As shown, the two ends of the cylindrical connecting rod 2 are fixedly connected to the base support plates 1 on both sides. The square connecting rod 3 has a center hole 31 that mates with the cylindrical connecting rod 2. Several square partitions 5 for mounting semiconductor disk-like parts are provided on the outer periphery of the square connecting rod 3. To further enhance the versatility of the fixture, threaded holes 32 with different intervals are provided on the four sides of the square connecting rod 3 for mounting square partitions 5 of different sizes. The square partition 5 adopts an L-shaped plate 51 design, with countersunk holes 52 provided on the horizontal plate. The square partition is fixed to the square connecting rod by screws 7 passing through the countersunk holes and engaging with the threaded holes 32.

[0043] Overall, this fixture is made of POM material, which offers advantages such as light weight, ease of maintenance, and field use. Its components are connected by screws and nuts, ensuring both low cost and reliable locking. The adjustable snap-fit ​​design on the support plate, combined with partitions of different sizes, allows the fixture to be used with parts of various dimensions, making it highly versatile.

[0044] In practical use, select a suitable partition based on the thickness requirements of the parts and adjust its position on the base support plate. Then, place the parts on the partition and clamp them in place to secure them. The threaded holes on the base support plate allow for suspended cleaning. When rinsing the upper surface of the parts with a high-pressure water gun, water flows through the parts and out through a large hole in the center of the worktable, ensuring the surface of the parts is free of impurities.

Claims

1. A semiconductor disc-like part general high-pressure cleaning jig, characterized by, The utility model provides a kind of adjustable buckle type hole (11) including a horizontal direction setting long hole and two arc-shaped strip holes being symmetrically arranged along the vertical center plane of base support plate (1), and a plurality of clamping holes are uniformly arranged on the long hole and the arc-shaped strip hole, two connecting rods are installed in the long hole, and two connecting rods are installed in the arc-shaped strip hole.

2. The semiconductor disc-like part general high-pressure cleaning jig according to claim 1, characterized by, A weight-reducing hole (12) is arranged at the center position of the base support plate (1).

3. The semiconductor disc-like part general high-pressure cleaning jig according to claim 1, characterized by, A threaded hole one (13) for hanging is arranged on the base support plate (1).

4. The semiconductor disc-like part general high-pressure cleaning jig according to claim 1, characterized by, The connecting rod includes a cylindrical connecting rod (2), and the two ends of the cylindrical connecting rod (2) are fixedly connected with the base support plates (1) on both sides, respectively.

5. The semiconductor disc-like part general high-pressure cleaning jig according to claim 1, characterized by, The connecting rod includes a cylindrical connecting rod (2) and a square connecting rod (3), the two ends of the cylindrical connecting rod (2) are fixedly connected with the base support plates (1) on both sides, respectively, the center of the square connecting rod (3) is provided with a center hole one (31) matched with the cylindrical connecting rod (2), and a plurality of square partitions (5) for clamping semiconductor disc parts are arranged on the outer periphery of the square connecting rod (3).

6. The semiconductor disc-like part general high-pressure cleaning jig according to claim 1, characterized by, The square partition (5) is provided with multiple size specifications for clamping semiconductor disc parts of different thicknesses.

7. The semiconductor disc-like part general high-pressure cleaning jig according to claim 6, characterized by, Different-interval threaded hole twos (32) for mounting square partitions (5) of different sizes are arranged on the four faces of the square connecting rod (3).

8. The semiconductor disc-like part general high-pressure cleaning jig according to claim 7, characterized by, The square partition (5) is an L-shaped plate (51), a countersunk hole (52) is arranged on the horizontal plate of the L-shaped plate (51), and a screw (7) passes through the countersunk hole (52) and is matched with the threaded hole two (32) to fix the square partition (5) on the square connecting rod (3).

9. The semiconductor disc-like part general high-pressure cleaning jig according to claim 8, characterized by, External threads (21) are arranged at the two ends of the cylindrical connecting rod (2), the external threads (21) at the two ends are adjusted to the proper position through the adjustable buckle type hole (11), and then the cylindrical connecting rod (2) and the base support plate (1) are stably connected through a locking nut (6).

10. The semiconductor disc-like part general high-pressure cleaning jig according to claim 5 or 6, characterized by, ​

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