Full-automatic silicon wafer scribing machine with protection assembly

Abstract

The utility model relates to the technical field of silicon wafer slicing, in particular to a full-automatic silicon wafer scribing machine with a protection assembly, which comprises a fixed plate, connecting shafts are fixedly mounted on the lower surfaces of two ends of the fixed plate, a driving assembly is fixedly mounted on the side surface of the fixed plate, and the driving assembly comprises a motor, a guide rod is fixedly mounted on the inner side of the fixing plate, a sliding seat is slidably connected to the outer surface of the guide rod, an open groove is formed in the side wall of the sliding seat, a protective plate is rotatably mounted on the outer surface of the connecting shaft, two mounting pieces are fixedly mounted on the upper surface of the protective plate, a sliding rod is fixedly mounted on the inner side of each mounting piece, and a sliding block sleeves the outer surface of each sliding rod; the material loading and unloading device has the beneficial effects that the labor capacity of an operator is reduced, the requirement for manual intervention is reduced, material loading and unloading are quicker, the whole machining process is accelerated, the non-production time is shortened, the equipment utilization rate is increased, and then the working efficiency is improved.

Description

Technical Field

[0001] This utility model relates to the field of silicon wafer dicing, specifically a fully automatic silicon wafer dicing machine with built-in protective components. Background Technology

[0002] A silicon wafer dicing machine is a device used to dice silicon wafers, semiconductor wafers, and other thin sheet materials. It is commonly used in the semiconductor manufacturing industry to cut silicon wafers into smaller pieces for fabrication into integrated circuit chips, solar cells, and other microelectronic devices. The primary function of a silicon wafer dicing machine is to cut silicon wafers into wafers of specific sizes and shapes to meet the requirements of specific applications.

[0003] During the dicing process of silicon wafers, existing silicon wafer dicing machines may produce flying debris. Protective doors are usually used to protect operators and ensure their safety.

[0004] However, traditional protective doors still require manual opening. Due to work requirements, the materials used to make protective doors are heavy, and manual opening and closing is time-consuming, laborious, and inconvenient. In addition, traditional protective doors are slow to open and close, especially when materials are frequently entering and exiting, which greatly affects work efficiency. Utility Model Content

[0005] The purpose of this invention is to provide a fully automatic silicon wafer dicing machine with built-in protective components, in order to solve the problem mentioned in the background art that the traditional protective door still needs to be opened manually. Due to the work requirements, the material made of the protective door is heavy, and it is time-consuming, laborious and inconvenient to operate when opening and closing manually. In addition, the traditional protective door is slow to open and close, especially when materials are frequently entering and exiting, which greatly affects the work efficiency.

[0006] To achieve the above objectives, this utility model provides the following technical solution: a fully automatic silicon wafer dicing machine with built-in protective components, comprising:

[0007] The base has a fixed plate fixedly installed on its upper surface. Connecting shafts are fixedly installed on the lower surfaces of both ends of the fixed plate. A drive assembly is fixedly installed on the side surface of the fixed plate. The drive assembly includes a motor, a lead screw rotatably connected to the output end of the motor, a guide rod fixedly installed on the inner side of the fixed plate, a slide block slidably connected to the outer surface of the guide rod, and a slot is provided on the side wall of the slide block.

[0008] A protective plate is rotatably mounted on the outer surface of the connecting shaft. Two mounting parts are fixedly mounted on the upper surface of the protective plate. A sliding rod is fixedly mounted on the inner side of the mounting parts. A slider is sleeved on the outer surface of the sliding rod. A connecting rod is rotatably mounted on the upper surface of the slider. The end of the connecting rod away from the slider is rotatably connected to the slide block.

[0009] Preferably, the slide block is threadedly connected to the lead screw, and a first limiting plate is fixedly installed at the end of the guide rod away from the motor.

[0010] Preferably, the protective plate has a groove on its side wall, and a connecting component is slidably installed on the inner surface of the groove. The connecting component includes a movable rod, a tension spring is fixedly connected to the upper surface of the movable rod extending into the groove, a limit post is fixedly installed on the inner side of the movable rod, and a second limit plate is fixedly installed at one end of the limit post.

[0011] Preferably, a cleaning component is fixedly installed on the lower surface of the second limiting plate. The cleaning component includes a cleaning frame with two dovetail grooves on its inner surface.

[0012] Preferably, a cleaning swab is slidably installed on the inner surface of the dovetail groove, and the cleaning swab is in contact with the side wall of the protective plate.

[0013] Preferably, a collection groove is provided on the inner side of the bottom end of the protective plate, and the movable rod slides in the groove through the limiting post.

[0014] Compared with the prior art, the beneficial effects of this utility model are:

[0015] This utility model proposes a fully automatic silicon wafer dicing machine with built-in protective components;

[0016] By setting up a protective mechanism, when the protective plate is opened and closed, the drive motor drives the slide to move back and forth on the guide rod via the lead screw. During the movement of the slide, the connecting rod fixedly installed above the slide drives the slider to move back and forth on the slide rod, which in turn drives the protective plate to rotate through the connecting shafts connected to both ends of the fixed plate. This causes the protective plates on both sides of the upper surface of the base to open or close, reducing the workload of the operator, reducing the need for manual intervention, and making the loading and unloading of materials faster. This speeds up the entire processing flow, shortens non-productive time, improves equipment utilization, and ultimately improves work efficiency. Attached Figure Description

[0017] Figure 1 This is a schematic diagram of the overall structure of this utility model;

[0018] Figure 2 This is a schematic diagram of the explosion-disassembly structure of the protective mechanism of this utility model;

[0019] Figure 3 This is a schematic diagram of the cleaning component structure of this utility model;

[0020] Figure 4 For the present utility model Figure 3 Enlarged view of point A in the middle;

[0021] Figure 5 This is a schematic diagram of the drive component structure of this utility model.

[0022] In the diagram: 1. Base; 2. Fixing plate; 3. Motor; 4. Slide; 5. Slot; 6. Guide rod; 7. Lead screw; 8. First limiting plate; 9. Connecting shaft; 10. Protective plate; 11. Mounting component; 12. Slide rod; 13. Slider; 14. Connecting rod; 15. Slide groove; 16. Tension spring; 17. Movable rod; 18. Limiting post; 19. Second limiting plate; 20. Cleaning frame; 21. Dovetail groove; 22. Cleaning cotton swab; 23. Collection tank. Detailed Implementation

[0023] To make the objectives, technical solutions, and advantages of this utility model clear and complete, the embodiments of this utility model will be further described in detail below with reference to the accompanying drawings. It should be understood that the specific embodiments described herein are only some, not all, embodiments of this utility model, and are merely used to explain the embodiments of this utility model. They are not intended to limit the embodiments of this utility model. All other embodiments obtained by those skilled in the art without creative effort are within the scope of protection of this utility model.

[0024] Please see Figures 1-5 The present invention provides the following two preferred embodiments:

[0025] Example 1:

[0026] To reduce operator workload, shorten non-productive time, and improve work efficiency, connecting shafts 9 are fixedly installed on the lower surfaces of both ends of the fixed plate 2. A drive assembly is fixedly installed on the side surface of the fixed plate 2, including a motor 3. A lead screw 7 is rotatably connected to the output end of the motor 3. A guide rod 6 is fixedly installed on the inner side of the fixed plate 2. A slide block 4 is slidably connected to the outer surface of the guide rod 6. A slot 5 is provided on the side wall of the slide block 4. A protective plate 10 is rotatably installed on the outer surface of the connecting shafts 9. Two mounting parts 11 are fixedly installed on the upper surface of the protective plate 10. A slide rod 12 is fixedly installed on the inner side of the mounting parts 11. A slider 13 is sleeved on the outer surface of the slide rod 12. A connecting rod 14 is rotatably installed on the upper surface of the slider 13. The end of the connecting rod 14 away from the slider 13 is connected to the slide block. 4. Rotary connection: The slide block 4 is threadedly connected to the lead screw 7. The first limiting plate 8 is fixedly installed at the end of the guide rod 6 away from the motor 3. When the protective plate 10 is opened and closed, the drive motor 3 drives the slide block 4 to move back and forth on the guide rod 6 through the lead screw 7. During the movement of the slide block 4, the connecting rod 14 fixedly installed above the slide block 4 drives the slider 13 to move back and forth on the slide rod 12, thereby driving the protective plate 10 to rotate through the connecting shaft 9 rotatably connected at both ends of the fixed plate 2. This causes the protective plates 10 on both sides of the upper surface of the base 1 to open or close, reducing the workload of the operator, reducing the need for manual intervention, making the loading and unloading of materials faster, thereby speeding up the entire processing flow, shortening non-production time, improving equipment utilization, and thus improving work efficiency.

[0027] Example 2:

[0028] Based on Embodiment 1, in order to clean the dirt splashed on the inner side of the protective plate 10, a groove 15 is provided on the side wall of the protective plate 10. A connecting assembly is slidably installed on the inner surface of the groove 15. The connecting assembly includes: a movable rod 17, a tension spring 16 fixedly connected to the upper surface of the movable rod 17 extending into the groove 15, a limit post 18 fixedly installed on the inner side of the movable rod 17, a second limit plate 19 fixedly installed at one end of the limit post 18, and a cleaning assembly fixedly installed on the lower surface of the second limit plate 19. The cleaning assembly includes: a cleaning frame 20, and the cleaning frame 20... Two dovetail grooves 21 are formed on the inner surface. A cleaning cotton swab 22 is slidably installed on the inner surface of the dovetail groove 21. The cleaning cotton swab 22 is in contact with the side wall of the protective plate 10. A collection groove 23 is provided on the inner side of the bottom end of the protective plate 10. The movable rod 17 slides in the slide groove 15 through the limiting post 18. By pulling down the movable rod 17, the movable rod 17 drives the second limiting plate 19 to stretch downward through the tension spring 16. The cleaning cotton swab 22 contacts the side wall of the protective plate 10. During the downward stretching process, the dirt on the inner wall of the protective plate 10 is cleaned and collected in the collection groove 23.

[0029] Working Principle: To reduce operator workload, shorten non-productive time, and improve work efficiency, during operation, when the protective plate 10 is opened and closed, the drive motor 3 drives the slide 4 to move back and forth on the guide rod 6 via the lead screw 7. During the movement of the slide 4, the connecting rod 14 fixedly installed above the slide 4 drives the slider 13 to move back and forth on the slide rod 12, thereby causing the protective plate 10 to rotate via the connecting shaft 9 rotatably connected to both ends of the fixed plate 2. This causes the protective plates 10 on both sides of the upper surface of the base 1 to open or close, reducing operator workload, minimizing the need for manual intervention, and making material loading and unloading faster. This accelerates the entire processing flow, shortens non-productive time, improves equipment utilization, and ultimately increases work efficiency.

[0030] Although embodiments of the present invention have been shown and described, it will be understood by those skilled in the art that various changes, modifications, substitutions and alterations can be made to these embodiments without departing from the principles and spirit of the present invention, the scope of which is defined by the appended claims and their equivalents.

Claims

1. A fully automatic silicon wafer dicing machine with a protection assembly, characterized in that: Include: Base (1), the upper surface of base (1) is fixedly installed with fixed plate (2), the lower surface of both ends of fixed plate (2) is fixedly installed with connecting shaft (9), the side surface of fixed plate (2) is fixedly installed with drive assembly, drive assembly includes: motor (3), the output end of motor (3) is rotatably connected with lead screw (7), the inner side of fixed plate (2) is fixedly installed with guide rod (6), the outer surface of guide rod (6) is slidably connected with sliding seat (4), the side wall of sliding seat (4) is provided with slot (5); The outer surface of connecting shaft (9) is rotatably installed with protective plate (10), the upper surface of protective plate (10) is fixedly installed with two mounting pieces (11), the inner side of mounting piece (11) is fixedly installed with sliding rod (12), the outer surface of sliding rod (12) is sleeved with sliding block (13), the upper surface of sliding block (13) is rotatably installed with connecting rod (14), the end, away from sliding block (13), of connecting rod (14) is rotatably connected with sliding seat (4).

2. The fully automatic wafer sawing machine with a protection assembly according to claim 1, characterized in that: The sliding seat (4) is threadedly connected with the lead screw (7), and the end, away from the motor (3), of the guide rod (6) is fixedly installed with the first limiting plate (8).

3. The fully automatic wafer sawing machine with a protection assembly according to claim 1, characterized in that: The side wall of the protective plate (10) is provided with a sliding groove (15), and the inner surface of the sliding groove (15) is slidably installed with a connecting assembly, the connecting assembly comprising: a movable rod (17), the upper surface of the sliding groove (15) is fixedly connected with a tension spring (16) extending into the sliding groove (15), the inner side of the movable rod (17) is fixedly installed with a limiting column (18), one end of the limiting column (18) is fixedly installed with a second limiting plate (19).

4. The fully automatic wafer sawing machine with a protection assembly according to claim 3, characterized in that: The lower surface of the second limiting plate (19) is fixedly installed with a cleaning assembly, and the cleaning assembly comprises: a cleaning frame (20), two dovetail grooves (21) are formed in the inner surface of the cleaning frame (20).

5. The fully automatic wafer sawing machine with a protection assembly according to claim 4, characterized in that: The inner surface of the dovetail groove (21) is slidably installed with a cleaning cotton bar (22), and the cleaning cotton bar (22) is in contact with the side wall of the protective plate (10).

6. The fully automatic wafer sawing machine with a protection assembly according to claim 1, characterized in that: The bottom end of the protective plate (10) is provided with a collecting groove (23), and the movable rod (17) slides in the sliding groove (15) through the limiting column (18).

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