Material supporting mechanism for exposure machine

Abstract

The utility model discloses a material supporting mechanism for an exposure machine, which comprises a material supporting seat arranged on one side of an adsorption mechanism of the exposure machine; the material supporting wheel assembly can be hung on the material supporting seat and does not protrude out of the adsorption surface of the adsorption mechanism; the claw hook assembly is mounted on the transverse moving module; the transverse moving module is suitable for driving the grabbing hook assembly to move towards the material supporting wheel assembly so as to grab and lift the material supporting wheel assembly. By the adoption of the structure, collapse of the middle of a roll material can be effectively avoided, the roll material is not prone to deformation in the material pulling process, the exposure machine can be suitable for large-breadth roll materials, work efficiency is improved, and cost is saved.

Description

Technical Field

[0001] This utility model relates to an exposure machine, and more particularly to a material support mechanism for an exposure machine. Background Technology

[0002] Traditional exposure machines typically include a suction cup, an exposure mechanism, an unwinding mechanism, and a rewinding mechanism. The suction cup is used to hold the roll of material to be exposed and has an inlet and an outlet side. The exposure mechanism is located above the suction cup and can move along the inlet and outlet directions of the roll to fully expose the roll on the suction cup. The unwinding mechanism is used to unwind the roll of material to be exposed onto the suction cup, and the rewinding mechanism is used to rewind the exposed roll. However, the above structure is usually only suitable for narrower rolls. When the roll is large, the large span and width of the roll can easily lead to problems such as sagging in the middle and deformation during the unwinding and rewinding process. In order to meet the needs of rapid industrial development and market supply and demand, and to save costs and improve efficiency, the demand for large-format exposure machines is increasing.

[0003] Therefore, it is necessary to improve the existing technology to overcome the aforementioned defects. Utility Model Content

[0004] The purpose of this invention is to provide a material support mechanism for an exposure machine, so that the exposure machine can be used for large-format roll materials.

[0005] The purpose of this utility model is achieved through the following technical solution: a material support mechanism for an exposure machine, comprising:

[0006] The material support is located on one side of the adsorption mechanism of the exposure machine;

[0007] The material support roller assembly can be hung on the material support base and does not protrude relative to the adsorption surface of the adsorption mechanism;

[0008] The grab hook assembly is mounted on the transverse module;

[0009] The lateral movement module is adapted to move the hook assembly toward the material support roller assembly in order to grab and lift the material support roller assembly.

[0010] Furthermore, the exposure machine includes an exposure mechanism, and the transverse module is a module of the exposure machine used to drive the exposure mechanism to move horizontally.

[0011] Furthermore, the adsorption mechanism has a first side in the first horizontal direction, the material support seat is disposed on the first side, the axial direction of the material support wheel assembly is parallel to the second horizontal direction, the first horizontal direction and the second horizontal direction are perpendicular to each other, and the transverse module is adapted to drive the material support wheel assembly to move along the first horizontal direction.

[0012] Furthermore, the material support base has a first material support groove recessed inward from its top surface. The first material support groove has a through structure in the second horizontal direction, and the material support wheel assembly can be hung on the first material support groove.

[0013] Furthermore, there are two material support seats, which are respectively located at both ends of the first side in the second horizontal direction. The two material support seats are adapted to cooperate in supporting the material support wheel assembly. The adsorption mechanism has a central axis parallel to the first horizontal direction. The end of the material support wheel assembly protrudes from the first side of the material support seat away from the central axis. There are two sets of hook assemblies, which are adapted to respectively support the two ends of the material support wheel assembly.

[0014] Furthermore, the material support roller assembly includes:

[0015] The roller shaft can be supported on the first material support trough;

[0016] The material support roller is rotatably sleeved on the outside of the roller shaft to support the coiled material;

[0017] Two material support shafts are provided, and each is fixed to one end of the support roller shaft to form the end of the material support roller assembly.

[0018] The hook assembly is adapted to the material support shaft.

[0019] Furthermore, the material support roller assembly also includes a positioning component sleeved on the outside of the material support roller shaft and located between the material support roller and the material support clamp shaft. The positioning component is a bearing, which corresponds one-to-one with the first material support groove and is adapted to support the first material support groove. The material support clamp shaft has a positioning structure recessed inward on its circumference to cooperate with the hook assembly. There are two positioning structures, which are arranged opposite to each other. The bottom of the material support clamp shaft is provided with a counterweight. When the material support clamp shaft is placed in the first material support groove, the counterweight is adapted to drive the material support clamp shaft to rotate so that the positioning structure is in a preset position to cooperate with the hook assembly.

[0020] Furthermore, the material support roller assembly also includes a positioning member sleeved on the outside of the material support roller shaft and located between the material support roller and the material support clamp shaft. The positioning member corresponds one-to-one with the first material support groove. When the material support roller assembly is placed into the first material support groove, the first material support groove is adapted to guide the positioning member to move and limit it to a preset position.

[0021] Furthermore, the first material support trough includes:

[0022] The clearance portion is recessed inward from the first side of the material support and extends upward to the top of the material support. The clearance portion is used to avoid the material support pin.

[0023] The positioning part is recessed inward from the second side of the material support seat away from the first side side and extends upward to the top of the material support seat. The positioning part is adapted to the positioning member.

[0024] The guide portion is recessed inward from the second side and extends vertically to the top of the material support.

[0025] When the positioning member moves from the top of the material support into the first material support groove, the guide portion is adapted to guide the positioning member into the positioning portion.

[0026] Furthermore, the gripper assembly includes:

[0027] A lifting drive component is installed on the transverse module and located above the adsorption mechanism;

[0028] The grab hook is connected to the lifting drive component via a transmission connection.

[0029] The hook is adapted to lift the material support wheel assembly or place the material support wheel assembly back into the first material support groove in cooperation with the lateral movement module and the lifting drive component.

[0030] Compared with the prior art, the present invention has the following beneficial effects: By adopting the above structure, when the exposure machine is performing normal exposure operations, the material support roller assembly is hung on the material support seat and does not protrude relative to the adsorption surface of the adsorption mechanism to avoid obstructing the conveying of the roll material; after the roll material is exposed, the adsorption mechanism cancels the adsorption of the roll material, and the hook assembly can cooperate with the transverse module to grab the material support roller assembly and lift the material support roller assembly, thereby supporting the roll material. When the hook assembly moves to the middle position of the adsorption mechanism under the drive of the transverse module, it can effectively prevent the middle of the roll material from collapsing, and the roll material is not easily deformed during the pulling process, so that the exposure machine can be used for large-format roll materials, improving work efficiency and saving costs. Attached Figure Description

[0031] Figure 1 This is an installation diagram of the material support mechanism of this utility model.

[0032] Figure 2 This is an exploded structural diagram of the material support mechanism of this utility model.

[0033] Figure 3 This is a schematic diagram of the material support base in this utility model.

[0034] Figure 4 This is a partial schematic diagram of the material support roller assembly in this utility model.

[0035] Figure 5 This is a schematic diagram of the hook assembly in this utility model.

[0036] Explanation of reference numerals in the attached figures:

[0037] 110. Adsorption mechanism; 111. First side; 112. Second side; 120. Lateral movement module; 200. Material support seat; 210. First material support groove; 211. Clearance part; 212. Positioning part; 213. Guide part; 214. Step surface; 215. Guide slope; 220. First side surface; 230. Second side surface; 300. Material support wheel assembly; 310. Material support wheel shaft; 320. Material support wheel; 330. Material support clamp shaft; 331. Positioning structure; 3311. First positioning plane; 3312. Second positioning plane; 340. Positioning component; 350. Counterweight component; 400. Hook assembly; 410. Lifting drive component; 420. Hook; 421. Connecting seat; 422. Hook part; 4221. Longitudinal section; 4222. Lateral section; 4223. Second material support groove. Detailed Implementation

[0038] To make the above-mentioned objectives, features, and advantages of this application more apparent and understandable, the specific embodiments of this application will be described in detail below with reference to the accompanying drawings. It should be understood that the specific embodiments described herein are for illustrative purposes only and are not intended to limit the scope of this application. Furthermore, it should be noted that, for ease of description, only the parts relevant to this application are shown in the accompanying drawings, not the entire structure. Based on the embodiments in this application, all other embodiments obtained by those skilled in the art without inventive effort are within the scope of protection of this application.

[0039] The terms “comprising” and “having”, and any variations thereof, used in this application are intended to cover non-exclusive inclusion. For example, a process, method, system, product, or apparatus that includes a series of steps or units is not limited to the steps or units listed, but may optionally include steps or units not listed, or may optionally include other steps or units inherent to such process, method, product, or apparatus.

[0040] In this document, the term "embodiment" means that a particular feature, structure, or characteristic described in connection with an embodiment may be included in at least one embodiment of this application. The appearance of this phrase in various places throughout the specification does not necessarily refer to the same embodiment, nor is it a separate or alternative embodiment mutually exclusive with other embodiments. It will be explicitly and implicitly understood by those skilled in the art that the embodiments described herein can be combined with other embodiments.

[0041] Please see Figure 1As shown, a preferred embodiment of the material support mechanism for an exposure machine includes: a material support base 200, disposed on one side of the adsorption mechanism 110 of the exposure machine; a material support wheel assembly 300, which can be hung on the material support base 200 and does not protrude relative to the adsorption surface of the adsorption mechanism 110; and a hook assembly 400, mounted on a transverse module 120. The transverse module 120 is adapted to drive the hook assembly 400 to move toward the material support wheel assembly 300 to grab and lift the material support wheel assembly 300.

[0042] By adopting the above-described structure, when the exposure machine is performing normal exposure operations, the material support roller assembly 300 is hung on the material support base 200 and does not protrude relative to the adsorption surface of the adsorption mechanism 110 to avoid obstructing the conveying of the roll material. After the roll material is exposed, the adsorption mechanism 110 releases its adsorption of the roll material, and the hook assembly 400 can cooperate with the transverse module 120 to grab the material support roller assembly 300 and lift it, thereby supporting the roll material. When the hook assembly 400 moves to the middle position of the adsorption mechanism 110 under the drive of the transverse module 120, it can effectively prevent the middle of the roll material from collapsing, and the roll material is not easily deformed during the pulling process. This allows the exposure machine to be used for large-format roll materials, improving work efficiency and saving costs.

[0043] Furthermore, the exposure machine includes an exposure mechanism. In this embodiment, the transverse module 120 is a module used by the exposure machine to drive the exposure mechanism to move horizontally, and it is located above the adsorption mechanism 110. The material support mechanism and the exposure mechanism share a single moving module, which effectively simplifies the structure, reduces space occupation, and lowers costs. Admittedly, additional modules may be added in other embodiments, and this utility model is not limited thereto.

[0044] Further, the adsorption mechanism 110 is specifically a suction cup platform, which has a first side 111 and a second side 112 in the first horizontal direction. The first horizontal direction is the inlet and outlet direction of the adsorption mechanism 110. One of the first side 111 and the second side 112 is the inlet side of the adsorption mechanism 110, and the other is the outlet side of the adsorption mechanism 110. The transverse module 120 is adapted to drive the material support roller assembly 300 to move along the first horizontal direction. The material support seat 200 is provided on the first side 111, and the axial direction of the material support roller assembly 300 is parallel to the second horizontal direction. The first horizontal direction and the second horizontal direction are perpendicular to each other.

[0045] Furthermore, referring to Figure 1 and Figure 2As shown, the material support 200 has a first material support groove 210 recessed inward from its top surface. The first material support groove 210 has a through structure in the second horizontal direction, and the material support wheel assembly 300 can be hung on the first material support groove 210. The number of material support 200 can be set as needed, one or more. For example, one material support 200 can be set in the middle of the first side 111, or multiple material support 200 can be evenly arranged along the second horizontal direction. In this embodiment, there are two material support 200s, which are respectively set at both ends of the first side 111 in the second horizontal direction, so as to simplify the structure and improve the stability of the support. The adsorption mechanism 110 has a central axis parallel to the first horizontal direction. The end of the material support wheel assembly 300 protrudes from the side of the material support 200 away from the central axis. There are two sets of hook assemblies 400, which are suitable for supporting the two ends of the material support wheel assembly 300 respectively.

[0046] Furthermore, referring to Figure 2 and Figure 4 As shown, the material support roller assembly 300 includes a material support roller shaft 310, a material support roller 320, and a material support clamping shaft 330. The material support roller shaft 310 can be supported on the first material support groove 210, and the material support roller 320 is rotatably sleeved on the material support roller shaft 310 to support the rolled material. In this embodiment, a bearing is connected between the material support roller 320 and the material support roller shaft 310. The inner ring of the bearing is fixed to the material support roller shaft 310, and the outer ring of the bearing is fixed to the material support roller 320, so that the material support roller 320 can rotate relative to the material support roller shaft 310. By using a rotatable material support roller 320, when the material support roller 320 moves along the first horizontal direction, it experiences rolling friction with the rolled material, thus reducing the risk of damage to the rolled material, and making the movement of the material support roller 320 smoother. There are two material support shafts 330, which are coaxially fixed to both ends of the support roller shaft 310 to form the end of the material support roller assembly 300. The hook assembly 400 is adapted to the material support shaft 330 to lift or lower the material support shaft 330.

[0047] Preferably, when the material support roller assembly 300 is supported by the material support seat 200, in the second horizontal direction, the two ends of the material support roller 320 are not recessed relative to the two sides of the adsorption mechanism 110, that is, the axial length of the material support roller 320 is not less than the width of the roll, so that the material support roller 320 can adapt to more sizes of rolls and reliably support the roll.

[0048] Preferably, the material support roller assembly 300 further includes a positioning member 340 sleeved on the outside of the material support roller shaft 310 and located between the material support roller 320 and the material support clamp shaft 330. The positioning member 340 corresponds one-to-one with the first material support groove 210. When the material support roller assembly 300 is placed into the first material support groove 210, the first material support groove 210 is adapted to guide the positioning member 340 to move and limit it to a preset position, so as to ensure the positional accuracy of the material support roller assembly 300 in the axial and radial directions.

[0049] Specifically, refer to Figure 3 and Figure 4 As shown, the material support 200 has a first side 220 facing away from the central axis of the adsorption mechanism 110 and a second side 230 facing away from the first side 220. The first material support groove 210 includes a clearance portion 211, a positioning portion 212, and a guide portion 213. The clearance portion 211 is used to avoid the material support shaft 330. The clearance portion 211 has a U-shaped structure, which is recessed inward from the first side 220 along the second horizontal direction and extends upward in the vertical direction to the top of the material support 200. The end of the support shaft 310 can be inserted into the clearance portion 211 from the top of the material support 200. The positioning portion 212 is adapted to the positioning member 340. The positioning portion 212 is recessed inward from the second side 230 along the second horizontal direction and specifically extends to the side of the clearance portion 211 facing the second side 230. The positioning part 212 also has a U-shaped structure and extends vertically upward to the top of the material support 200. The positioning member 340 can be inserted into the positioning part 212 from the top of the material support 200. A stepped surface 214 perpendicular to the second horizontal direction is formed between the positioning part 212 and the clearance part 211 to limit the positioning member 340 in the axial direction.

[0050] The guide portion 213 is recessed inward from the second side surface 230 and extends vertically to the top of the material support 200. A guide ramp 215 is formed at the recessed end of the guide portion 213. The guide ramp 215 is inclined vertically, with its bottom side near the second side surface 230 and its top side near the first side surface 220. When the material support roller assembly 300 is inserted from the top of the material support 200 into the first material support groove 210, the guide ramp 215 is adapted to guide the positioning member 340 towards the positioning portion 212, ensuring that the positioning member 340 is accurately embedded in the positioning portion 212, achieving precise positioning in both the first and second horizontal directions.

[0051] Preferably, in this embodiment, the positioning element 340 is a bearing, and its outer diameter is larger than that of the material support shaft 330, so as to be suitable for supporting the first material support groove 210. After the material support wheel assembly 300 is supported in the first material support groove 210, under the action of the positioning element 340, the support wheel shaft 310 can drive the material support shaft 330 to rotate relative to the first material support groove 210. The circumferential side of the material support shaft 330 has a positioning structure 331 that cooperates with the hook assembly 400. There are two positioning structures 331, which are arranged opposite to each other. The bottom of the material support shaft 330 is provided with a counterweight 350. The counterweight 350 can be a bolt, screw, or other structure, which is threadedly connected to the material support shaft 330. When the material support shaft 330 is placed in the first material support groove 210, the counterweight 350 is adapted to rotate the material support shaft 330 so that the positioning structure 331 is in a preset position that cooperates with the hook assembly 400. When the hook assembly 400 lifts the material support shaft 330, it is adapted to cooperate with the positioning structure 331 to ensure the reliability of the material support shaft 330 in the axial, radial and circumferential directions.

[0052] Specifically, refer to Figure 1 , Figure 4 and Figure 5 As shown, the gripper assembly 400 includes a lifting drive 410 and a gripper 420. The lifting drive 410 can be an electric cylinder or a pneumatic cylinder; in this embodiment, a pneumatic cylinder is preferred to simplify the structure. The lifting drive 410 is mounted on the transverse module 120 and located above the adsorption mechanism 110, with its telescopic end facing downwards. The gripper 420 is connected to the lifting drive 410 in a transmission manner. The gripper 420 is adapted to lift the material support wheel assembly 300 or return the material support wheel assembly 300 to the first material support groove 210 in cooperation with the transverse module 120 and the lifting drive 410.

[0053] The grab hook 420 includes a connecting seat 421 and a hook portion 422. The connecting seat 421 is connected to the telescopic end of the lifting drive component 410. The hook portion 422 has an L-shaped structure, with a longitudinal section 4221 and a transverse section 4222. The upper end of the longitudinal section 4221 is connected to the connecting seat 421, and the lower end is connected to one end of the transverse section 4222. The other end of the transverse section 4222 faces the second side 112 of the adsorption mechanism 110 and extends along the first horizontal direction. The hook portion 422 is located outside the adsorption mechanism 110 in the second horizontal direction to prevent the adsorption mechanism 110 from obstructing the movement of the grab hook 420 in the first horizontal direction. The transverse section 4222 has a second material support groove 4223 recessed inward from its top surface. The second material support groove 4223 is a through structure in the second horizontal direction and is adapted to the material support clamp 330. The two sides of the second material support groove 4223 correspond to the positioning structure 331 in the first horizontal direction. The positioning structure 331 includes a first positioning plane 3311 and a second positioning plane 3312. There are two second positioning planes 3312, which are arranged opposite to each other on both sides of the first positioning plane 3311 in the second horizontal direction. When the positioning structure 331 is in a preset position, the first positioning plane 3311 is perpendicular to the first horizontal direction. When the second material support groove 4223 supports the material support shaft 330, the side of the second material support groove 4223 is adapted to fit against the first positioning plane 3311, while the transverse section 4222 and / or the longitudinal section 4221 are limited between the two second positioning planes 3312 on both sides of the second horizontal direction, ensuring that the second material support groove 4223 smoothly and reliably supports the material support shaft 330.

[0054] The working process of the material support mechanism for the exposure machine of this utility model is as follows: After the exposure machine finishes exposing the roll material, the adsorption mechanism 110 releases its adsorption on the roll material. The transverse module 120 drives the hook assembly 400 to move toward the first side 111 of the adsorption mechanism 110. The lifting drive 410 drives the hook 420 to descend so that the second material support groove 4223 is located below the material support shaft 330. Then, the transverse module 120 drives the hook assembly 400 to move along the second horizontal direction so that the second material support groove 4223 is located directly below the material support shaft 330, and rises under the drive of the lifting drive 410 to support the material support roller assembly 30. The material is lifted off the support seat 200 and positioned above the adsorption mechanism 110 to support the roll material. Then, the transverse module 120 moves the hook assembly 400 towards the second side 112 of the adsorption mechanism 110 to the desired position, which in this embodiment can be the middle position of the adsorption mechanism 110. Then, the exposure machine can rewind the roll material and avoid the roll material from collapsing and deforming in the middle. After the exposed roll material is rewound, the transverse module 120 moves the hook assembly 400 towards the support seat 200, and the lifting drive 410 drives the hook 420 to descend so as to put the support wheel assembly 300 back into the support seat 200.

[0055] The above description is merely an embodiment of this application and does not limit the patent scope of this application. Any equivalent structural or procedural transformations made using the content of this application's specification and drawings, or direct or indirect applications in other related technical fields, are similarly included within the patent protection scope of this application.

Claims

1. A material support mechanism for an exposure machine, characterized in that, The application relates to a material supporting device for an exposure machine. The material supporting device comprises a material supporting seat (200) arranged on one side of an adsorption mechanism (110) of the exposure machine; a material supporting wheel assembly (300) which can be hung on the material supporting seat (200) and does not protrude relative to an adsorption surface of the adsorption mechanism (110); and a grab hook assembly (400) installed on a horizontal moving module (120). The horizontal moving module (120) is suitable for driving the grab hook assembly (400) to move towards the material supporting wheel assembly (300) so as to grab and lift the material supporting wheel assembly (300). The exposure machine comprises an exposure mechanism, and the horizontal moving module (120) is a module for driving the exposure mechanism to move horizontally. The adsorption mechanism (110) has a first side (111) in a first horizontal direction, the material supporting seat (200) is arranged on the first side (111), the material supporting wheel assembly (300) has an axial direction parallel to a second horizontal direction, the first horizontal direction is perpendicular to the second horizontal direction, and the horizontal moving module (120) is suitable for driving the material supporting wheel assembly (300) to move along the first horizontal direction.

2. The wafer boat of claim 1, wherein The material supporting seat (200) is recessed inward from a top surface to form a first material supporting groove (210), the first material supporting groove (210) is a through structure in the second horizontal direction, and the material supporting wheel assembly (300) can be hung on the first material supporting groove (210).

3. The wafer boat of claim 1, wherein the wafer boat is configured to be rotated about the central axis. The material supporting seat (200) is arranged on two ends of the first side (111) in the second horizontal direction, the two material supporting seats (200) are suitable for supporting the material supporting wheel assembly (300), the adsorption mechanism (110) has a central axis parallel to the first horizontal direction, end portions of the material supporting wheel assembly (300) protrude from a first side surface (220) of the material supporting seat (200) away from the central axis, and the grab hook assembly (400) is arranged in two groups and is suitable for supporting two ends of the material supporting wheel assembly (300) respectively.

4. The wafer boat of claim 3, wherein the wafer boat is configured to be rotated about the central axis. The material supporting wheel assembly (300) comprises a supporting wheel shaft (310) which can be supported on the first material supporting groove (210), a material supporting wheel (320) which is rotatably sleeved on the supporting wheel shaft (310) and is used for supporting a material roll, and two material supporting clamping shafts (330) which are fixed on two ends of the supporting wheel shaft (310) to form end portions of the material supporting wheel assembly (300).

5. The wafer boat of claim 4, wherein the wafer boat is configured to be rotated about the central axis. The grab hook assembly (400) is matched with the material supporting clamping shaft (330).

6. The wafer boat of claim 5, wherein the wafer boat is configured to be rotated about the central axis. ​ ​ ​ ​ ​ 7. The wafer boat of claim 6 wherein: The material supporting wheel assembly (300) further comprises a positioning member (340) sleeved outside the supporting wheel shaft (310) and located between the material supporting wheel (320) and the material supporting clamping shaft (330), the positioning member (340) is a bearing corresponding to the first material supporting groove (210) and adapted to be supported on the first material supporting groove (210), the material supporting clamping shaft (330) is inwardly recessed on the periphery with two positioning structures (331) corresponding to the hook assembly (400), the positioning structures (331) are oppositely arranged, and the bottom of the material supporting clamping shaft (330) is provided with a counterweight (350), when the material supporting clamping shaft (330) is placed in the first material supporting groove (210), the counterweight (350) is adapted to drive the material supporting clamping shaft (330) to rotate so that the positioning structures (331) are in the preset position corresponding to the hook assembly (400).

8. The wafer boat of claim 6, wherein the wafer boat is configured to be rotated about the central axis. The material supporting wheel assembly (300) further comprises a positioning member (340) sleeved outside the supporting wheel shaft (310) and located between the material supporting wheel (320) and the material supporting clamping shaft (330), the positioning member (340) is corresponding to the first material supporting groove (210), when the material supporting wheel assembly (300) is placed in the first material supporting groove (210), the first material supporting groove (210) is adapted to guide the positioning member (340) to move and be positioned in the preset position.

9. The wafer boat of claim 8 wherein: The first material supporting groove (210) comprises: an avoiding part (211) inwardly recessed from the first side (220) of the material supporting base (200) and extending upward to the top of the material supporting base (200), the avoiding part (211) is used for avoiding the material supporting clamping shaft (330); a positioning part (212) inwardly recessed from the second side (230) of the material supporting base (200) away from the first side (220) and extending upward to the top of the material supporting base (200), the positioning part (212) is adapted to the positioning member (340); a guiding part (213) inwardly recessed from the second side (230) and extending in the vertical direction and penetrating through to the top of the material supporting base (200); wherein, when the positioning member (340) moves into the first material supporting groove (210) from the top of the material supporting base (200), the guiding part (213) is adapted to guide the positioning member (340) to move into the positioning part (212).

10. The wafer boat of claim 4, wherein the wafer boat is configured to be used in a stepper or a scanner. The hook assembly (400) comprises: a lifting driving member (410) installed on the horizontal moving module (120) and located above the adsorption mechanism (110); a hook (420) in transmission connection with the lifting driving member (410); wherein, the hook (420) is adapted to lift the material supporting wheel assembly (300) or put the material supporting wheel assembly (300) back into the first material supporting groove (210) under the cooperation of the horizontal moving module (120) and the lifting driving member (410).

Images