Sputtering coating device capable of keeping vacuum degree

Abstract

The utility model discloses a sputter coating device capable of keeping vacuum degree, and relates to the technical field of sputter coating. Comprising a film coating shell, the outer edge of the film coating shell is fixedly connected with multiple sets of lifting sliding columns, a lifting cover plate is jointly and slidably connected between the sides, facing the film coating shell, of the lifting sliding columns, the bottom side of the lifting cover plate is tightly attached to the top side of the film coating shell, and the bottom side of the lifting cover plate is fixedly connected with a lifting connecting column; the bottom side of the lifting connecting column is fixedly connected with a base plate clamping frame. Through the arrangement of the lifting sliding column, a worker can conveniently drive the lifting cover plate to ascend and descend stably, meanwhile, the coating substrate connected with the lifting cover plate is made to ascend and descend synchronously and stably, a coating film is kept stable and does not flow in the taking process, meanwhile, the lifting cover plate is fixed through the arrangement of the rotating clamping block, and therefore the coating film can be taken conveniently. And the coated substrate is exposed, so that a worker can replace the substrate conveniently.

Description

Technical Field

[0001] This utility model relates to the field of sputtering coating technology, specifically to a sputtering coating device capable of maintaining vacuum. Background Technology

[0002] Magnetron sputtering is a type of physical vapor deposition. General sputtering methods can be used to prepare various materials such as metals, semiconductors, and insulators, and have advantages such as simple equipment, easy control, large coating area, and strong adhesion. Magnetron sputtering, in particular, achieves high speed, low temperature, and low damage. Because high-speed sputtering is performed under low pressure, it is essential to effectively increase the ionization rate of the gas. Magnetron sputtering increases plasma density and sputtering speed by introducing a magnetic field onto the target cathode surface and using the magnetic field to confine charged particles. An existing sputtering coating apparatus capable of maintaining vacuum (publication number: CN205529009U) exhibits at least the following defects during use:

[0003] The above scheme creates a vacuum environment for the coating process by setting up a vacuum pump and adjusts the position of the substrate by flipping the cover plate. However, in actual use, the position of the substrate will move in a circular motion due to the flipping of the cover plate, causing the incompletely solidified coating to flow and affecting the coating quality. Therefore, a sputtering coating device that can maintain the vacuum level needs to be developed. Summary of the Invention

[0004] The main objective of this invention is to provide a sputtering coating device that can maintain a vacuum level, which can effectively solve the problems in the background art.

[0005] To achieve the above objectives, the technical solution adopted by this utility model is as follows:

[0006] A sputtering coating apparatus capable of maintaining vacuum includes a coating housing. Multiple sets of lifting slide columns are fixedly connected to the outer edge of the coating housing. A lifting cover plate is slidably connected to the side of all the lifting slide columns facing the coating housing. The bottom side of the lifting cover plate is in close contact with the top side of the coating housing. A lifting connecting column is fixedly connected to the bottom side of the lifting cover plate. A substrate clamping frame is fixedly connected to the bottom side of the lifting connecting column. A coating substrate is mounted on the bottom side of the substrate clamping frame. A coating nozzle is fixedly connected to the inner wall of the bottom side of the coating housing.

[0007] Preferably, a limiting plate is fixedly connected to the top side of each set of lifting slide columns, and one side of each limiting plate extends to the side of the corresponding lifting slide column facing the coating shell. A rotating block is rotatably connected between the opposite sides of the top of each set of lifting slide columns.

[0008] Preferably, each of the rotating blocks has a pushing ramp on its bottom side, and each of the rotating blocks has a latch on the side facing the coating shell. Each latch engages with the outer edge of the lifting cover plate, and each of the rotating blocks contacts the corresponding limiting plate on the side facing the coating shell.

[0009] Preferably, each set of lifting slide columns has a locking turntable on the side facing away from the coating shell, and each rotating block has another locking turntable on the side facing away from the coating shell, with multiple pushing springs between the corresponding two locking turntables.

[0010] Preferably, a coating bottom frame is fixedly connected to the bottom side of the coating shell, and one end of the coating nozzle is connected to the outside of the coating bottom frame.

[0011] Preferably, a ring of No. 1 electromagnets is fixedly connected to the bottom side of the lifting cover plate, and a ring of No. 2 electromagnets is fixedly connected to the inner wall of the bottom side of the coated bottom frame.

[0012] Compared with the prior art, the present invention has the following beneficial effects:

[0013] The lifting slide column allows workers to smoothly raise and lower the lifting cover plate, while simultaneously allowing the coating substrate connected to the lifting cover plate to rise and fall smoothly in sync. This ensures that the coating remains stable during handling and does not flow along the substrate surface, thus guaranteeing a stable coating thickness. Additionally, the rotating locking block secures the lifting cover plate, exposing the coating substrate for easy substrate replacement by workers. Attached Figure Description

[0014] Figure 1 This is an isometric view of the present invention;

[0015] Figure 2 This is a schematic diagram of the coating device of this utility model;

[0016] Figure 3 This is a schematic diagram of the coating material supply structure of this utility model;

[0017] Figure 4 This is a schematic diagram of the lifting device structure of this utility model.

[0018] In the diagram: 101. Coating shell; 102. Evacuation pipe; 103. Coating substrate; 104. Electromagnet No. 1; 105. Lifting cover plate; 106. Electrical connector; 107. Lifting connecting column; 108. Substrate clamping frame; 109. Vent pipe; 201. Coating base frame; 202. Coating column; 203. Coating nozzle; 204. Electromagnet No. 2; 301. Lifting slide column; 302. Pushing ramp; 303. Bayonet; 304. Limiting plate; 305. Rotating block; 306. Locking turntable; 307. Pushing spring. Detailed Implementation

[0019] To make the technical means, creative features, objectives and effects of this utility model easier to understand, the present utility model will be further described below in conjunction with specific embodiments.

[0020] In the description of this utility model, it should be noted that the terms "upper," "lower," "inner," "outer," "front end," "rear end," "both ends," "one end," and "the other end," etc., indicate the orientation or positional relationship based on the orientation or positional relationship shown in the accompanying drawings. They are used only for the convenience of describing this utility model and simplifying the description, and do not indicate or imply that the device or element referred to must have a specific orientation, or be constructed and operated in a specific orientation. Therefore, they should not be construed as limitations on this utility model. In addition, the terms "first" and "second" are used for descriptive purposes only and should not be construed as indicating or implying relative importance.

[0021] In the description of this utility model, it should be noted that, unless otherwise explicitly specified and limited, the terms "installed," "equipped with," "connected," etc., should be interpreted broadly. For example, "connection" can be a fixed connection, a detachable connection, or an integral connection; it can be a mechanical connection or an electrical connection; it can be a direct connection or an indirect connection through an intermediate medium; it can be a connection within two components. Those skilled in the art can understand the specific meaning of the above terms in this utility model based on the specific circumstances.

[0022] Please see Figures 1-4 This utility model provides a technical solution:

[0023] A sputtering coating apparatus capable of maintaining vacuum includes a coating housing 101. Multiple sets of lifting slide columns 301 are fixedly connected to the outer edge of the coating housing 101. A lifting cover plate 105 is slidably connected between the sides of all the lifting slide columns 301 facing the coating housing 101. The bottom side of the lifting cover plate 105 is in close contact with the top side of the coating housing 101. A lifting connecting column 107 is fixedly connected to the bottom side of the lifting cover plate 105. A substrate clamping frame 108 is fixedly connected to the bottom side of the lifting connecting column 107. A coating substrate 103 is mounted on the bottom side of the substrate clamping frame 108. A coating bottom frame 201 is fixedly connected to the bottom side of the coating housing 101. One end of the coating nozzle 203 is connected to the outside of the coating bottom frame 201. The bottom side of the coating base frame 201 is provided with multiple coating columns 202. A ring of No. 1 electromagnets 104 is fixedly connected to the bottom side of the lifting cover plate 105. A ring of No. 2 electromagnets 204 is fixedly connected to the inner wall of the bottom side of the coating base frame 201. A coating nozzle 203 is fixedly connected to the inner wall of the bottom side of the coating shell 101. In this embodiment, electromagnet 104 and electromagnet 204 have opposite magnetic poles. A power connector 106 is fixedly connected to the top side of the lifting cover 105, and the power connector 106 is electrically connected to electromagnet 104. The input terminal of electromagnet 204 is connected to the outside of the coating base frame 201. Both electromagnets 104 and 204 are electrically connected to an external power supply circuit. After being energized, a magnetic field is formed from electromagnet 204 to electromagnet 104. The coating nozzle 203 is an electronic nozzle that directs the magnetic field towards the coating housing 101. Electrons are generated inside the coating shell 101, and a vacuum pipe 102 is fixedly connected to one side of the coating shell 101. A vacuum pump is fixedly connected to one end of the vacuum pipe 102 to create a vacuum environment inside the coating shell 101 before the coating process. A vent pipe 109 is fixedly connected to one side of the coating shell 101 to inject argon gas into the vacuum environment, forming an argon-rich sub-vacuum environment. The argon gas collides with the electrons emitted from the coating nozzle 203, causing them to ionize and generate argon positive ions and new electrons, which bombard the coating substrate 103 to produce a thin film and complete the coating process.

[0024] Each set of lifting slide columns 301 has a limiting plate 304 fixedly connected to its top side. One side of each limiting plate 304 extends to the side of the corresponding lifting slide column 301 facing the coating shell 101. A rotating block 305 is rotatably connected between opposite sides of the top of each set of lifting slide columns 301. Each rotating block 305 has a pushing ramp 302 on its bottom side and a latch 303 on the side of each rotating block 305 facing the coating shell 101. Each latch 303 engages with the outer edge of the lifting cover plate 105, and the side of each rotating block 305 facing the coating shell 101 is in contact with the corresponding limiting plate 304. Each set of lifting slide columns 301 has a locking turntable 306 rotatably connected to the side facing away from the coating housing 101 at its top end. Each rotating block 305 has another locking turntable 306 rotatably connected to the side facing away from the coating housing 101. Multiple push springs 307 are provided between the corresponding two locking turntables 306. In this embodiment, by pushing the lifting cover plate 105 into contact with the pushing ramp 302, the corresponding rotating block 305 is pushed outward, and under the action of the push springs 307, the lifting cover plate 105 is locked into the slot 303, which facilitates the placement and removal of the coating substrate 103.

[0025] The foregoing has shown and described the basic principles, main features, and advantages of this utility model. Those skilled in the art should understand that this utility model is not limited to the above embodiments. The embodiments and descriptions in the specification are merely illustrative of the principles of this utility model. Various changes and modifications can be made to this utility model without departing from its spirit and scope, and all such changes and modifications fall within the scope of the claimed utility model. The scope of protection of this utility model is defined by the appended embodiments and their equivalents.

Claims

1. A sputtering coating apparatus capable of maintaining vacuum, comprising a coating housing (101), characterized in that: Multiple sets of lifting slide columns (301) are fixedly connected to the outer edge of the coating shell (101). A lifting cover plate (105) is slidably connected to the side of all the lifting slide columns (301) facing the coating shell (101). The bottom side of the lifting cover plate (105) and the top side of the coating shell (101) are in close contact. A lifting connecting column (107) is fixedly connected to the bottom side of the lifting cover plate (105). A substrate clamping frame (108) is fixedly connected to the bottom side of the lifting connecting column (107). A coating substrate (103) is installed on the bottom side of the substrate clamping frame (108). A coating nozzle (203) is fixedly connected to the inner wall of the bottom side of the coating shell (101).

2. The sputtering coating apparatus capable of maintaining vacuum according to claim 1, characterized in that: Each set of lifting slide columns (301) has a limiting plate (304) fixedly connected to its top side. One side of each limiting plate (304) extends to the side of the corresponding lifting slide column (301) facing the coated shell (101). A rotating block (305) is rotatably connected between the opposite sides of the top of each set of lifting slide columns (301).

3. The sputtering coating apparatus capable of maintaining vacuum according to claim 2, characterized in that: Each of the rotating blocks (305) has a pushing ramp (302) on its bottom side. Each of the rotating blocks (305) has a slot (303) on the side facing the coating shell (101). Each slot (303) is engaged with the outer edge of the lifting cover plate (105). Each of the rotating blocks (305) is in contact with the corresponding limiting plate (304) on the side facing the coating shell (101).

4. The sputtering coating apparatus capable of maintaining vacuum according to claim 2, characterized in that: Each set of lifting slide columns (301) has a locking turntable (306) on the side facing away from the coating shell (101) at its top. Each rotating block (305) has another locking turntable (306) on the side facing away from the coating shell (101). Multiple push springs (307) are provided between the two corresponding locking turntables (306).

5. A sputtering coating apparatus capable of maintaining vacuum according to claim 1, characterized in that: A coating base frame (201) is fixedly connected to the bottom side of the coating shell (101), and one end of the coating nozzle (203) is connected to the outside of the coating base frame (201).

6. The sputtering coating apparatus capable of maintaining vacuum according to claim 5, characterized in that: A ring of No. 1 electromagnets (104) is fixedly connected to the bottom side of the lifting cover plate (105), and a ring of No. 2 electromagnets (204) is fixedly connected to the inner wall of the bottom side of the coated bottom frame (201).

Images