Combined air inlet device of silicon carbide coating furnace

Abstract

The utility model discloses a combined air inlet device of a silicon carbide coating furnace. The combined air inlet device comprises an air inlet box, an outer air inlet pipe, an inner air inlet pipe, an air inlet plate, an air inlet distribution pore plate and a partition plate, the outer air inlet pipe is mounted on the air inlet box and is used for introducing air into the air inlet box; the inner air inlet pipe, the air inlet plate, the air inlet distribution pore plate and the partition plate are all mounted in the air inlet box, a plurality of air inlet holes with different pore diameters are formed in the air inlet plate, and a plurality of distribution holes with different pore diameters are formed in the air inlet distribution pore plate; the inner air inlet pipes are arranged in rows, the partition plates are used for separating the inner air inlet pipes in different rows, and the partition plates are detachably installed in the air inlet box; gas enters the furnace body through the outer gas inlet pipe, the gas inlet plate, the gas inlet distribution pore plate and the inner gas inlet pipe in sequence. By changing the positions of the sub-distribution plates and mounting the partition plates, the air inlet quantity and the air inlet flow of each inner air inlet pipe are adjusted, so that different air inlet requirements in the furnace are met.

Description

Technical Field

[0001] This utility model relates to the field of crystal growth equipment technology, and in particular to a combined air inlet device for a silicon carbide coating furnace. Background Technology

[0002] Silicon carbide is an excellent coating material with superior properties such as wear resistance, corrosion resistance, and oxidation resistance, providing effective protection for the coating substrate and finding wide application in various fields. Existing silicon carbide coating furnace air intake devices connect external and internal air intake pipes, allowing multiple internal intake pipes to simultaneously intake air to improve efficiency. However, the air intake volume is evenly distributed across all intake pipes, making it impossible to adjust the intake volume according to the air intake needs of different locations within the furnace. Utility Model Content

[0003] Purpose of the invention: To address the above-mentioned shortcomings, this utility model provides a combined air intake device for a silicon carbide coating furnace.

[0004] Technical Solution: To solve the above problems, this utility model adopts a combined air intake device for a silicon carbide coating furnace, including an air intake box, an outer air intake pipe, an inner air intake pipe, an air intake plate, an air intake distribution plate, and a partition. The outer air intake pipe is installed on the air intake box and is used to introduce gas into the air intake box. The inner air intake pipe, air intake plate, air intake distribution plate, and partition are all installed inside the air intake box. The air intake plate has multiple air intake holes with different diameters, and the air intake distribution plate has multiple distribution holes with different diameters. The inner air intake pipes are arranged in rows, and the partition is used to separate the inner air intake pipes of different rows. The partition is detachably installed inside the air intake box. The gas enters the furnace body sequentially through the outer air intake pipe, the air intake plate, the air intake distribution plate, and the inner air intake pipe.

[0005] Furthermore, the intake distribution plate includes several sub-distribution plates, which are installed inside the intake box, and the intake holes on each sub-distribution plate have different diameters.

[0006] Furthermore, the air intake plate is provided with an air distribution device with an umbrella-shaped top, and the air distribution device is coaxially arranged with the external air intake pipe.

[0007] Furthermore, the air inlet box includes a surrounding plate, an air inlet box seat mounted on the surrounding plate, and an air inlet box cover mounted on the air inlet box seat; the surrounding plate is used to connect with the furnace body, the outer air inlet pipe is mounted on the air inlet box cover, and the inner air inlet pipe is mounted on the furnace body wall.

[0008] Furthermore, the air intake plate is installed on the side of the air intake box cover near the air intake box seat, and the air intake distribution plate is installed on the side of the air intake box seat near the air intake box cover.

[0009] Furthermore, multiple air intake boxes are installed on the enclosure, and adjacent air intake boxes are separated by fixed partitions.

[0010] Furthermore, the inner wall of the enclosure is provided with a track, and the partition is slidably installed on the track.

[0011] Beneficial effects: Compared with the prior art, the significant advantage of this utility model is that by changing the position of the sub-distribution plate and the installation of the partition, the air intake volume and flow rate of each inner air intake pipe can be adjusted to meet the different air intake requirements in the furnace. Attached Figure Description

[0012] Figure 1 This is a schematic diagram of the overall structure of the air intake device of this utility model;

[0013] Figure 2 A schematic diagram of the overall structure of the air intake device of this utility model without the air intake box cover;

[0014] Figure 3 This is a front view of the air intake device of this utility model;

[0015] Figure 4 This is a side view of the air intake device of this utility model;

[0016] Figure 5 This is a schematic diagram of the upper air intake box structure of the air intake device of this utility model;

[0017] Figure 6 This is a schematic diagram of the internal structure of the air intake box cover of the air intake device of this utility model;

[0018] Figure 7 This is a cross-sectional view of the gas distribution device of this utility model. Detailed Implementation

[0019] like Figures 1 to 5 As shown, this embodiment of a silicon carbide coating furnace combined air intake device includes an air intake box 1, an outer air intake pipe 9, an inner air intake pipe 3, an air intake plate 8, an air intake distribution plate, and a partition. The air intake box 1 includes a surrounding plate 12 fixedly connected to the furnace body 14, an air intake box seat 10 installed on the surrounding plate 12, and an air intake box cover 13 installed on the air intake box seat 10. In this embodiment, there are three air intake box seats 10 (upper, middle, and lower) and air intake box covers 13, and adjacent air intake box seats are separated by a fixed partition 11. The upper, middle, and lower air intake box seats 10 are respectively provided with three rows, two rows, and three rows of inner air intake pipes, with three inner air intake pipes in each row.

[0020] An external air inlet pipe 9 is installed on the air inlet box cover 13, an air inlet plate 8 is installed on the side of the air inlet box cover 13 near the air inlet box seat 10, and an air inlet distribution plate is installed on the side of the air inlet box seat 10 near the air inlet box cover 13. According to the air inlet requirements at different locations inside the furnace, the air inlet plate 8 is provided with multiple air inlet holes of different diameters (the differences in diameter are small and not obvious in the attached diagram). Figure 6 and Figure 7As shown, the air intake plate 8 is also equipped with an umbrella-shaped air distribution device 6. The air distribution device 6 is coaxially arranged with the outer air intake pipe 9, and the air distribution device 6 allows the gas to diffuse evenly in all directions after entering the air intake box. The air intake distribution plate includes sub-distribution plates in the same number as the number of rows of inner air intake pipes. The sub-distribution plates are bolted to the air intake box seat 10, and the diameter of the air intake holes on each sub-distribution plate is different. The air intake volume of the inner air intake pipe is related to the diameter of the air intake plate 8 and the air intake distribution plate. The air intake volume and airflow rate of each row of inner air intake pipes can be adjusted by changing the position of the sub-distribution plates with different diameters or by removing the corresponding sub-distribution plates.

[0021] The inner wall of the enclosure 12 is equipped with a track, on which a partition slides and can be removed. The partition is used to separate the different rows of internal air intake pipes. Taking the upper air intake box as an example, the air intake box contains three sub-distribution plates (2, 4, 7) and two partitions 5. The partitions are detachable, so their installation can be adjusted according to air intake requirements. When all three partitions are installed in the air intake box, the three rows of internal air intake pipes 9 each intake air independently; removing the partition between the first and second rows of internal air intake pipes allows the first and second rows of internal air intake pipes to intake air together; removing both partitions allows all three rows of internal air intake pipes 9 to intake air together. Through the flexible installation of the partitions, each row of internal air intake pipes can form different air intake chambers according to air intake requirements.

[0022] The operating principle of this device is as follows: Gas is introduced into the air inlet box 1 through the external air inlet pipe 9. The gas diffuses to the surroundings through the gas distribution device 6, and then passes through the air inlet plate 8 and the air inlet distribution orifice plate in sequence, finally entering the furnace body through the internal air inlet pipe 9. By changing the position of the sub-distribution plate and the installation of the partition, the air intake volume and air flow rate of each internal air inlet pipe can be adjusted to meet the different air intake requirements in the furnace.

Claims

1. A combined air inlet device for a silicon carbide coating furnace, characterized in that, The system includes an air inlet box, an outer air inlet pipe, an inner air inlet pipe, an air inlet plate, an air inlet distribution plate, and a partition. The outer air inlet pipe is installed on the air inlet box and is used to introduce gas into the air inlet box. The inner air inlet pipe, air inlet plate, air inlet distribution plate, and partition are all installed inside the air inlet box. The air inlet plate has multiple air inlets with different diameters, and the air inlet distribution plate has multiple distribution holes with different diameters. The inner air inlets are arranged in rows, and the partition is used to separate the inner air inlets in different rows. The partition is detachably installed inside the air inlet box. Gas enters the furnace body sequentially through the outer air inlet pipe, air inlet plate, air inlet distribution plate, and inner air inlet pipe.

2. The combined air inlet device for silicon carbide coating furnace as described in claim 1, characterized in that, The intake distribution plate includes several sub-distribution plates, which are installed inside the intake box. The intake holes on each sub-distribution plate have different diameters.

3. The combined air intake device for the silicon carbide coating furnace as described in claim 1, characterized in that, The air intake plate is equipped with an air distribution device with an umbrella-shaped top, which is coaxially arranged with the external air intake pipe.

4. The combined air inlet device for silicon carbide coating furnace as described in claim 1, characterized in that, The air inlet box includes a surrounding plate, an air inlet box seat mounted on the surrounding plate, and an air inlet box cover mounted on the air inlet box seat; the surrounding plate is used to connect with the furnace body, the outer air inlet pipe is mounted on the air inlet box cover, and the inner air inlet pipe is mounted on the furnace body wall.

5. The combined air inlet device for silicon carbide coating furnace as described in claim 4, characterized in that, The air intake plate is installed on the side of the air intake box cover near the air intake box seat, and the air intake distribution plate is installed on the side of the air intake box seat near the air intake box cover.

6. The combined air inlet device for silicon carbide coating furnace as described in claim 4, characterized in that, Multiple air intake boxes are installed on the enclosure, and adjacent air intake boxes are separated by fixed partitions.

7. The combined air inlet device for silicon carbide coating furnace as described in claim 4, characterized in that, The inner wall of the enclosure is provided with a track, and the partition is slidably installed on the track.

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