Valve and vacuum equipment

Abstract

The utility model belongs to the technical field of semiconductor processing, and discloses a valve and a vacuum device.The valve comprises a valve plate, a valve rod, a longitudinal driving assembly and a transverse driving assembly, the valve plate has a closed state in which the valve plate is attached to the sealing surface and shields the outlet to seal the reaction chamber, a transition state in which the valve plate is far away from the sealing surface in the second direction and an open state in which the valve plate avoids the outlet in the first direction and is separated from the sealing surface; the valve rod is partially connected to the transverse driving assembly, the longitudinal driving assembly drives the transverse driving assembly and the valve rod to reciprocate in the first direction at the same time, and the transverse driving assembly drives the valve rod to reciprocate in the second direction. The second direction and the sealing face form an included angle, the first direction is parallel to the sealing face, and the transition state of the valve plate is between the closed state and the open state. According to the valve, friction between the valve plate and vacuum equipment in the moving process is avoided, the production cost and the assembly difficulty of the valve are reduced, and the processing performance of the vacuum equipment is improved.

Description

TECHNICAL FIELD

[0001] The utility model relates to the technical field of semiconductor processing, especially to valve and vacuum equipment. BACKGROUND

[0002] Wafer coating refers to a technology of covering one layer or multiple layers of thin film on wafer surface to improve its electrical, optical or mechanical performance. Wafer coating includes multiple process steps, each of which is completed in different cavities, and wafers need to be circulated among different cavities. Since each cavity has different functions, the environment in different cavities is not the same. In order to maintain a stable process environment, a vacuum transmission valve is needed to seal the transmission port of each cavity. The existing vacuum transmission valve generally closes or opens the transmission port by arc swing of the valve plate at the transmission port. The swing friction of the valve plate around the transmission port forms particulate matter, which on the one hand affects the cleanliness of the process environment when entering the cavity, and on the other hand, long-term friction can cause the sealing performance of the valve plate to decline, thereby affecting the process processing performance of the cavity. Some vacuum transmission valves change the motion trajectory of the valve plate to reduce swing friction. Two power sources are used to decompose the motion trajectory of the valve plate into translational motion and lifting motion performed in sequence, and the output ends of the two power sources are connected to the valve plate. Since the installation positions of the two power sources are fixed, the valve plate and the output end of one of the power sources are movably connected. When the other power source drives the valve plate to move, the valve plate can move relative to the output end. This movable connection structure of the valve plate and the output end requires high assembly precision and motion precision, which increases the processing cost and assembly difficulty. SUMMARY

[0003] One purpose of the utility model is to provide a valve that can solve the problem of the movable connection structure of the valve plate and the output end of one of the power sources of the existing vacuum transmission valve, which requires high assembly precision and motion precision, resulting in high processing cost and high assembly difficulty.

[0004] To achieve this purpose, the utility model adopts the following technical solutions:

[0005] A valve is provided, including a valve plate for closing an outlet of a reaction chamber, the reaction chamber having a sealing surface, the outlet being opened in the sealing surface, the valve including a valve rod, a longitudinal driving assembly and a transverse driving assembly, one end of the valve rod being connected to the valve plate to actuate the valve plate, the valve plate having a closed state abutting the sealing surface and shielding the outlet to close the reaction chamber, a transition state away from the sealing surface in a second direction, and an open state away from the outlet and away from the sealing surface in a first direction; a part of the valve rod away from the valve plate being connected to the transverse driving assembly, the longitudinal driving assembly being used to drive the transverse driving assembly and the valve rod to reciprocate in the first direction simultaneously, the transverse driving assembly being used to drive the valve rod to reciprocate in the second direction; wherein the second direction is arranged at an angle with the sealing surface, the first direction is parallel to the sealing surface, and the transition state of the valve plate is between the closed state and the open state.

[0006] In one of the embodiments, the transverse driving assembly includes a transverse cylinder having a transverse cylinder body and a transverse piston capable of reciprocating in the second direction relative to the transverse cylinder body, one of the transverse cylinder body and the transverse piston being connected to the valve rod, and the other being connected to an output end of the longitudinal driving assembly.

[0007] In one of the embodiments, the transverse driving assembly further includes a base, the output end of the longitudinal driving assembly being connected to the base, the transverse cylinder body being connected to the valve rod, and an end of the transverse piston being connected to the base to make the valve rod reciprocate in the second direction relative to the base.

[0008] In one of the embodiments, the valve further includes a support assembly for connecting the reaction chamber, the longitudinal driving assembly being a lifting cylinder, a lifting cylinder body of the lifting cylinder being arranged in the support assembly, and a lifting piston of the lifting cylinder being connected to the base.

[0009] In one of the embodiments, the valve further includes a support assembly for connecting the reaction chamber, the support assembly including a guide side plate, one of the guide side plate and the base being provided with a guide groove, and the other being provided with a guide roller, the guide groove extending in the first direction, and the guide roller being movably arranged in the guide groove.

[0010] In one of the embodiments, the transverse cylinder is arranged in two groups, the transverse driving assembly further including an intermediate connecting seat for connecting the two groups of the transverse cylinder bodies, and the valve rod being connected to the intermediate connecting seat.

[0011] In one of the embodiments, the transverse cylinder bodies of the two groups of the transverse cylinders are arranged on two sides of the valve rod respectively.

[0012] In one embodiment, the intermediate connector is provided with a mounting hole, the valve rod is arranged in the mounting hole, the intermediate connector is further provided with a connecting hole, the connecting hole is communicated with the mounting hole, the transverse driving assembly further comprises a cover plate, the cover plate is detachably connected to the intermediate connector, the cover plate covers the connecting hole and is connected to the valve rod.

[0013] In one embodiment, the mounting hole penetrates the intermediate connector along the first direction, the valve further comprises a support assembly for connecting the reaction chamber, the support assembly is provided with a transverse guide hole, the transverse guide hole extends along the second direction, the valve rod penetrates the mounting hole to extend into the transverse guide hole, and the valve rod slides along the transverse guide hole when the transverse cylinder operates.

[0014] Another purpose of the present application is to provide a vacuum equipment, which has a valve that can solve the problem that the movable connection structure of the valve plate of the existing vacuum transmission valve and the output end of one of the power sources requires high assembly precision and movement precision, resulting in high processing cost and difficult assembly, improve the process performance of the vacuum equipment, and reduce the production cost.

[0015] To achieve this purpose, the present application adopts the following technical solutions:

[0016] The present application provides a vacuum equipment, which comprises the valve as described above, and further comprises a reaction chamber, and the valve is used for closing the outlet of the reaction chamber.

[0017] The present application has the following beneficial effects:

[0018] The valve provided by the utility model, the longitudinal driving assembly is used for driving the transverse driving assembly and the valve rod to move reciprocatingly along the first direction simultaneously, and the transverse driving assembly is used for driving the valve rod to move reciprocatingly along the second direction. For the valve plate in the closed state, when it is needed to be converted into the open state, the transverse driving assembly and the longitudinal driving assembly act successively, the action of the transverse driving assembly makes the valve plate separate from the sealing surface along the second direction, a transition state is formed, and then the action of the longitudinal driving assembly makes the transverse driving assembly and the valve plate move away from the outlet along the first direction to avoid the outlet, so that the open state is formed. For the valve plate in the open state, when it is needed to be converted into the closed state, the longitudinal driving assembly and the transverse driving assembly act successively, the action of the longitudinal driving assembly makes the transverse driving assembly and the valve plate approach the outlet along the first direction until the outlet is aligned, so that the transition state is formed, and then the action of the transverse driving assembly makes the valve plate abut against the sealing surface along the second direction to block the outlet, so that the closed state is formed. In the process of opening the outlet by the valve plate, since the second direction and the sealing surface are arranged at an included angle, the action of the transverse driving assembly makes the valve plate separate from the sealing surface first, so that the dynamic friction between the longitudinal driving assembly and the sealing surface when the valve plate avoids the outlet is avoided. Correspondingly, in the process of closing the outlet by the valve plate, when the longitudinal driving assembly drives the valve plate to move to align the outlet, the friction between the longitudinal driving assembly and the sealing surface is avoided, so that the particles generated by the friction are avoided, the particles are further avoided to enter the reaction chamber to cause the pollution of the internal environment, and the valve always has good sealing performance. Moreover, the driving action of the longitudinal driving assembly simultaneously drives the transverse driving assembly and the valve rod to move along the first direction, so that the movable connection structure in the first direction between the transverse driving assembly and the valve rod is not needed, the assembly precision requirement between the transverse driving assembly and the valve rod is lowered, the motion precision requirement of the longitudinal driving assembly is reduced, and the production cost and the assembly difficulty of the valve are lowered.

[0019] The vacuum equipment provided by the utility model, which comprises the valve, in the process that the valve plate of the valve opens and closes the outlet, the motion track is approximately L-shaped, the valve plate will not produce friction with the sealing surface, the cleanliness of the reaction chamber is maintained, and the valve always has good sealing performance; the driving action of the longitudinal driving assembly simultaneously drives the transverse driving assembly and the valve rod to move along the first direction, the production cost and the assembly difficulty of the valve are lowered, the overall structure of the valve is simplified, the process performance of the vacuum equipment is improved, and the production cost is lowered. BRIEF DESCRIPTION OF DRAWINGS

[0020] Figure 1 is the structure main view of the valve in the closed state provided by the utility model embodiment;

[0021] Figure 2 is the structure main view of the valve in the open state provided by the utility model embodiment;

[0022] Figure 3 is the internal structure schematic of the valve provided by the utility model embodimentFigure 1 ;

[0023] Figure 4 is the internal structure schematic of the valve provided by the embodiment of the utility model Figure 2 ;

[0024] Figure 5 is the internal structure schematic of the valve provided by the embodiment of the utility model Figure 3 ;

[0025] Figure 6 is the internal structure schematic of the valve provided by the embodiment of the utility model Figure 4 .

[0026] In the figure:

[0027] 11, valve plate; 12, valve rod; 2, longitudinal driving assembly; 21, lifting cylinder body; 22, lifting piston; 3, transverse driving assembly; 31, transverse cylinder; 311, transverse cylinder body; 312, transverse piston; 32, base; 33, guide roller; 34, intermediate connecting seat; 341, mounting hole; 35, cover plate; 4, support assembly; 41, guide side plate; 411, guide groove; 42, transverse guide hole;

[0028] 100, sealing surface; 200, outlet. DETAILED DESCRIPTION

[0029] The technical scheme of the utility model will be described clearly and completely below in conjunction with the drawings. Obviously, the described embodiments are part of the embodiments of the utility model, rather than all the embodiments. Based on the embodiments in the utility model, all other embodiments obtained by those skilled in the art without creative labor fall within the protection scope of the utility model.

[0030] In the description of the utility model, it needs to explain, the term "center", "upper", "lower", "left", "right", "vertical", "horizontal", "internal", "external" and so on indicate the orientation or position relation based on the orientation or position relation shown in the drawing, only for the convenience of describing the utility model and simplifying the description, and not indicate or imply that the device or element indicated must have a particular orientation, construct and operate in a particular orientation, therefore, it cannot be understood as the limitation of the utility model. In addition, the term "first", "second", is only for the purpose of description, and cannot be understood as indicating or implying relative importance. Among them, the term "first position" and "second position" are two different positions, and, the first feature is "above", "above" and "above" of the second feature, which includes the first feature above and obliquely above the second feature, or only indicates that the horizontal height of the first feature is higher than that of the second feature. The first feature is "below", "below" and "below" of the second feature, which includes the first feature below and obliquely below the second feature, or only indicates that the horizontal height of the first feature is less than that of the second feature.

[0031] In the description of the utility model, it needs to explain, unless otherwise specified and limited, the term "installation", "connection", "connection" should be understood broadly, for example, it can be fixed connection, or detachable connection, or integrally connected; it can be mechanical connection, or electrical connection; it can be directly connected, or indirectly connected through intermediate medium, it can be the communication between two elements. For ordinary skilled in the art, the specific meaning of the above-mentioned terms in the utility model can be understood according to the specific circumstances.

[0032] The embodiments of the utility model are described in detail below, the examples of the embodiments are shown in the drawings, wherein the same or similar reference signs represent the same or similar elements or elements with the same or similar function throughout. The embodiments described below by referring to the drawings are exemplary, only for explaining the utility model, and cannot be understood as the limitation of the utility model.

[0033] As Figures 1 to 6 As shown in the utility model, a valve is provided first, the valve includes valve plate 11, valve plate 11 is used for closing the outlet 200 of reaction chamber, the reaction chamber has sealing surface 100, the outlet 200 is opened in sealing surface 100. The reaction chamber is used for carrying out process processing, and the process type is not limited in the embodiment.

[0034] The valve comprises a valve stem 12, a longitudinal driving assembly 2 and a transverse driving assembly 3, one end of the valve stem 12 is connected to the valve plate 11 to actuate the valve plate 11, the valve plate 11 has a closed state of abutting against a sealing surface 100 and shielding an outlet 200 to close a reaction chamber, a transition state of moving away from the sealing surface 100 in a second direction, and an open state of avoiding the outlet 200 and moving away from the sealing surface 100 in a first direction; the part of the valve stem 12 away from the valve plate 11 is connected to the transverse driving assembly 3, the longitudinal driving assembly 2 is used to drive the transverse driving assembly 3 and the valve stem 12 to move reciprocally in the first direction at the same time, and the transverse driving assembly 3 is used to drive the valve stem 12 to move reciprocally in the second direction; wherein the second direction is arranged at an angle with the sealing surface 100, the first direction is parallel to the sealing surface 100, and the transition state of the valve plate 11 is between the closed state and the open state. For the valve plate 11 in the closed state, when it is needed to be converted into the open state, the transverse driving assembly 3 and the longitudinal driving assembly 2 act in sequence, the action of the transverse driving assembly 3 makes the valve plate 11 move away from the sealing surface 100 in the second direction to form the transition state, and then the action of the longitudinal driving assembly 2 makes the transverse driving assembly 3 and the valve stem 12 move away from the outlet 200 in the first direction to avoid the outlet 200 (see Figure 2 ), so as to form the open state; for the valve plate 11 in the open state, when it is needed to be converted into the closed state, the longitudinal driving assembly 2 and the transverse driving assembly 3 act in sequence, the action of the longitudinal driving assembly 2 makes the transverse driving assembly 3 and the valve stem 12 move close to the outlet 200 in the first direction until aligning with the outlet 200 to form the transition state, and then the action of the transverse driving assembly 3 makes the valve plate 11 abut against the sealing surface 100 in the second direction to block the outlet 200 (see Figure 1 ), so as to form the closed state. In the process of the above-mentioned valve plate 11 opening the outlet 200, due to the second direction being arranged at an angle with the sealing surface 100, the action of the transverse driving assembly 3 makes the valve plate 11 move away from the sealing surface 100 first, which avoids the dynamic friction between the valve plate 11 and the sealing surface 100 when the longitudinal driving assembly 2 drives the valve plate 11 to avoid the outlet 200; correspondingly, in the process of the valve plate 11 closing the outlet 200, the longitudinal driving assembly 2 drives the valve plate 11 to move to align with the outlet 200, which does not generate friction with the sealing surface 100, avoids the generation of particulate matter by friction, and further avoids the particulate matter from entering the reaction chamber to cause pollution to the internal environment, so that the valve always has good sealing performance. Moreover, the driving action of the longitudinal driving assembly 2 simultaneously drives the transverse driving assembly 3 and the valve stem 12 to move in the first direction, and there is no need to form a movable connection structure in the first direction between the transverse driving assembly 3 and the valve stem 12, so as to reduce the assembly precision requirement between the transverse driving assembly 3 and the valve stem 12, and also reduce the movement precision requirement of the longitudinal driving assembly 2, thereby reducing the production cost and assembly difficulty of the valve.

[0035] In one embodiment, for example, the sealing surface 100 is vertically arranged, the second direction is perpendicular to the sealing surface 100 (i.e., the second direction is in the horizontal plane), and the first direction is vertical. Thus, during the opening or closing of the outlet 200, the movement trajectory of the valve plate 11 is L-shaped. When the longitudinal drive assembly 2 is above the outlet 200, the movement trajectory of the valve plate 11 is L; when the longitudinal drive assembly 2 is below the outlet 200, the movement trajectory of the valve plate 11 is an inverted L. Regarding the valve plate 11 in the open state, it can be located below the outlet 200, as shown in the attached figure. Figure 2 As shown in the figure; in other embodiments, the valve plate 11 in the open state may also be located above the outlet 200, not limited to the figures of this embodiment.

[0036] Regarding the installation method of the lateral drive assembly 3, in order to achieve synchronous lifting and lowering of the lateral drive assembly 3 and the valve stem 12, the lateral drive assembly 3 includes a lateral cylinder 31. The lateral cylinder 31 has a lateral cylinder body 311 and a lateral piston 312 that can reciprocate relative to the lateral cylinder body 311 in a second direction. One of the lateral cylinder body 311 and the lateral piston 312 is connected to the valve stem 12, and the other is connected to the output end of the longitudinal drive assembly 2. In this way, the longitudinal drive assembly 2 can drive the valve stem 12 to reciprocate in a first direction through the lateral cylinder 31, and the lateral cylinder 31 causes the valve stem 12 to reciprocate in the second direction through the piston movement between the lateral cylinder body 311 and the lateral piston 312.

[0037] Exemplarily, in one embodiment, the lateral drive assembly 3 further includes a base 32, the output end of the longitudinal drive assembly 2 is connected to the base 32, the lateral cylinder 311 is connected to the valve stem 12, and the end of the lateral piston 312 is connected to the base 32, so that the valve stem 12 reciprocates relative to the base 32 in a second direction, such as... Figure 6 As shown. Compared to the transverse piston 312, the transverse cylinder 311 provides more stable support for the valve stem 12. Furthermore, the base 32 increases the reliability of the connection between the transverse piston 312 and the output end of the longitudinal drive assembly 2.

[0038] The valve also includes a support assembly 4 for connecting to the reaction chamber. The longitudinal drive assembly 2 is a lifting cylinder, with the lifting cylinder body 21 mounted on the support assembly 4 and the lifting piston 22 connected to the base 32. The synchronous lifting and lowering of the transverse drive assembly 3 and the valve stem 12 is achieved through the extension and retraction of the lifting piston 22 in the first direction. When the lifting cylinder is activated, the lifting piston 22 drives the valve stem 12 and the transverse cylinder 31 to rise and fall simultaneously.

[0039] Support assembly 4 includes guide side plate 41, such as Figure 4As shown, one of the guide side plates 41 and the base 32 is provided with a guide groove 411 extending along the first direction, and the other is provided with a guide roller 33 movably arranged in the guide groove 411. For example, in an embodiment, the support assembly 4 includes two guide side plates 41 arranged on both sides of the base 32, the inner side of the guide side plate 41 is provided with a guide groove 411, and the base 32 is provided with a guide roller 33 on each side. When the lifting piston 22 drives the valve rod 12 and the horizontal cylinder 31 to lift at the same time, the guide roller 33 slides in the guide groove 411, thereby guiding the movement of the valve rod 12 and the horizontal cylinder 31, ensuring that the valve rod 12 and the horizontal cylinder 31 always lift along the first direction, avoiding deflection.

[0040] In order to improve the stability of the movement of the valve rod 12, the horizontal cylinder 31 is provided with two groups, and the horizontal driving assembly 3 further includes an intermediate connecting seat 34 for connecting the two groups of horizontal cylinder bodies 311, and the valve rod 12 is arranged in the intermediate connecting seat 34. The two groups of horizontal cylinders 31 act at the same time, so that the two groups of horizontal cylinder bodies 311 drive the intermediate connecting seat 34 to act at the same time, realizing the movement of the valve plate 11 along the horizontal direction to abut or separate from the sealing surface 100.

[0041] The horizontal cylinder bodies 311 of the two groups of horizontal cylinders 31 are arranged on both sides of the valve rod 12, so that the movement balance of the intermediate connecting seat 34 is better.

[0042] The intermediate connecting seat 34 is provided with a mounting hole 341, and the valve rod 12 is arranged in the mounting hole 341. The intermediate connecting seat 34 is also provided with a connecting hole communicating with the mounting hole 341, and the horizontal driving assembly 3 further includes a cover plate 35 detachably connected to the intermediate connecting seat 34, the cover plate 35 covers the connecting hole and is connected to the valve rod 12. The cover plate 35 is screwed to the intermediate connecting seat 34, the cover plate 35 extrudes the valve rod 12 through the connecting hole, and the valve rod 12 is installed on the intermediate connecting seat 34 through interference fit. In order to avoid the valve rod 12 sliding in the mounting hole 341, a limiting boss is further arranged on the outer wall of the valve rod 12.

[0043] As shown in the drawings, Figure 5 The mounting hole 341 penetrates the intermediate connecting seat 34 along the first direction, the support assembly 4 is provided with a horizontal guide hole 42 extending along the second direction, and the valve rod 12 extends through the mounting hole 341 to penetrate into the horizontal guide hole 42. When the horizontal cylinder 31 acts, the valve rod 12 slides along the horizontal guide hole 42, thereby limiting the movement of the valve plate 11 along the second direction, ensuring that the valve plate 11 always moves along the predetermined route in the second direction, avoiding deflection.

[0044] In order to support the horizontal driving assembly 3 and ensure the stability of the valve plate 11, the vertical driving assembly 2 is provided with two groups, as Figure 1As shown, the two sets of longitudinal driving assemblies 2 have lifting pistons 22 respectively located on both sides of the valve rod 12, and the two sets of longitudinal driving assemblies 2 can act simultaneously, and the two lifting pistons 22 correspond to the two sets of transverse cylinders 31 respectively and provide support from below of the two sets of transverse cylinders 31 and drive the base 32 simultaneously.

[0045] The utility model embodiment provides a kind of vacuum equipment, vacuum equipment includes the valve in any embodiment above, vacuum equipment further includes reaction chamber, valve is used to close the export 200 of reaction chamber.Valve plate 11's movement locus is approximately L type, in the process that valve plate 11 opens export 200, the action of transverse driving assembly 3 makes valve plate 11 first separate from sealing surface 100, avoid the dynamic friction between longitudinal driving assembly 2 and sealing surface 100 when driving valve plate 11 to avoid export 200;Correspondingly, in the process that valve plate 11 closes export 200, when longitudinal driving assembly 2 drives valve plate 11 to move to align export 200, no friction is generated between valve plate 11 and sealing surface 100, avoid the particulate matter generated by friction, to avoid particulate matter to enter reaction chamber and cause internal environment pollution, keep the cleanliness of reaction chamber, and valve always has good sealing performance.Moreover, the driving action of longitudinal driving assembly 2 simultaneously drives transverse driving assembly 3 and valve rod 12 to move along the first direction, and the movable connection structure in the first direction does not need to be formed between transverse driving assembly 3 and valve rod 12, to further reduce the assembly precision requirement between transverse driving assembly 3 and valve rod 12, also reduce the motion precision requirement of longitudinal driving assembly 2, reduce the production cost and assembly difficulty of valve, simplify the overall structure of valve, improve the process performance of vacuum equipment, reduce production cost.

[0046] Obviously, the above embodiments of the utility model are only for clear illustration of the utility model, and not the limitation of the implementation mode of the utility model. For ordinary skilled person in the art, can make various obvious changes, re-adjustment and replacement without departing from the protection scope of the utility model. Here, it is not necessary and impossible to enumerate all implementation modes. Any modification, equivalent replacement and improvement, etc. within the spirit and principle of the utility model should be included in the protection scope of the utility model claims.

Claims

1. Valve comprising a valve plate (11) for closing an outlet (200) of a reaction chamber having a sealing face (100) in which the outlet (200) is opened, characterized in that, The valve comprises a valve rod (12), a longitudinal driving assembly (2) and a transverse driving assembly (3), one end of the valve rod (12) is connected to the valve plate (11) to actuate the valve plate (11), the valve plate (11) has a closed state of abutting the sealing surface (100) and shielding the outlet (200) to close the reaction chamber, a transition state of moving away from the sealing surface (100) in a second direction, and an open state of avoiding the outlet (200) and separating from the sealing surface (100) in a first direction; the part of the valve rod (12) away from the valve plate (11) is connected to the transverse driving assembly (3), the longitudinal driving assembly (2) is used to drive the transverse driving assembly (3) and the valve rod (12) to move reciprocally in the first direction at the same time, and the transverse driving assembly (3) is used to drive the valve rod (12) to move reciprocally in the second direction; wherein the second direction is arranged at an angle with the sealing surface (100), the first direction is parallel to the sealing surface (100), and the transition state of the valve plate (11) is between the closed state and the open state.

2. The valve of claim 1, wherein The transverse driving assembly (3) comprises a transverse cylinder (31), the transverse cylinder (31) has a transverse cylinder body (311) and a transverse piston (312) capable of reciprocating in the second direction relative to the transverse cylinder body (311), one of the transverse cylinder body (311) and the transverse piston (312) is connected to the valve rod (12), and the other is connected to the output end of the longitudinal driving assembly (2).

3. The valve of claim 2, wherein The transverse driving assembly (3) further comprises a base (32), the output end of the longitudinal driving assembly (2) is connected to the base (32), the transverse cylinder body (311) is connected to the valve rod (12), and the end of the transverse piston (312) is connected to the base (32) to make the valve rod (12) reciprocate in the second direction relative to the base (32).

4. The valve of claim 3, wherein The valve further comprises a support assembly (4) for connecting the reaction chamber, the longitudinal driving assembly (2) is a lifting cylinder, the lifting cylinder body (21) of the lifting cylinder is arranged on the support assembly (4), and the lifting piston (22) of the lifting cylinder is connected to the base (32).

5. The valve of claim 3, wherein The valve further comprises a support assembly (4) for connecting the reaction chamber, the support assembly (4) comprises a guide side plate (41), one of the guide side plate (41) and the base (32) is provided with a guide groove (411), and the other is provided with a guide roller (33), the guide groove (411) extends in the first direction, and the guide roller (33) is movably arranged in the guide groove (411).

6. The valve of claim 3, wherein The transverse cylinder (31) is arranged in two groups, the transverse driving assembly (3) further comprises an intermediate connecting seat (34) for connecting two groups of the transverse cylinder body (311), and the valve rod (12) is connected to the intermediate connecting seat (34).

7. The valve of claim 6, wherein The transverse cylinder bodies (311) of the two groups of transverse cylinders (31) are respectively arranged on two sides of the valve rod (12).

8. The valve of claim 7, wherein The intermediate connecting seat (34) is provided with a mounting hole (341), and the valve rod (12) is arranged in the mounting hole (341). The intermediate connecting seat (34) is also provided with a connecting hole, and the connecting hole is communicated with the mounting hole (341). The transverse driving assembly (3) further comprises a cover plate (35), and the cover plate (35) is detachably connected to the intermediate connecting seat (34). The cover plate (35) covers the connecting hole and is connected to the valve rod (12).

9. The valve of claim 8, wherein, The mounting hole (341) penetrates the intermediate connecting seat (34) along the first direction. The valve further comprises a support assembly (4) for connecting the reaction chamber. The support assembly (4) is provided with a transverse guide hole (42) extending along the second direction. The valve rod (12) extends through the mounting hole (341) to penetrate the transverse guide hole (42). When the transverse cylinder (31) operates, the valve rod (12) slides along the transverse guide hole (42).

10. Vacuum apparatus characterized in that, The valve comprises the valve according to any one of claims 1-9, and further comprises a reaction chamber. The valve is used for closing an outlet (200) of the reaction chamber.

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