Faraday cup for measuring current of ion beam

Abstract

The utility model relates to the technical field of Faraday cylinders, in particular to a Faraday cylinder for measuring ion beam current. According to the technical scheme, the magnet module comprises a base flange, a magnet module and a copper plate, a screw rod is fixedly connected between the copper plate and the base flange, the copper plate is located below the base flange, and the magnet module is arranged at the top of the copper plate. According to the utility model, ion beams are effectively prevented from hitting the inner wall of the cavity and secondary electrons are effectively prevented from being sputtered to the periphery of the copper plate, the measurement accuracy of beam intensity is remarkably improved, and meanwhile, the device has the advantages of convenience in disassembly, firmness, stability, high flexibility and high universality; and the influence of external electromagnetic interference on the beam measurement precision is reduced, the anti-interference capability of the device is improved, and the stability and the precision of the magnet module are improved while the structural strength of the magnet module is optimized.

Description

TECHNICAL FIELD

[0001] The utility model relates to faraday cylinder technical field especially relates to a kind of faraday cylinder of ion beam current measurement. BACKGROUND

[0002] In ion source device, the current of the extracted ion beam is a very important parameter. Since the faraday cylinder cannot be placed in the vacuum chamber when measuring the beam, a copper plate is placed inside, and then the data acquisition device and the copper plate are connected through wires. The voltage signal is recorded by the data acquisition device, and the beam intensity is calculated. Moreover, part of the extracted beam may hit the copper plate, causing secondary electron sputtering to the periphery of the copper plate, resulting in inaccurate data reading, which affects the optimization and adjustment of the ion source. Therefore, we propose a faraday cylinder for measuring ion beam current. SUMMARY

[0003] The utility model aims at the problem of the background art that part of the extracted beam may hit the copper plate, causing secondary electron sputtering to the periphery of the copper plate, resulting in inaccurate data reading, which affects the optimization and adjustment of the ion source, and proposes a faraday cylinder for measuring ion beam current.

[0004] The technical scheme of the utility model is a faraday cylinder for measuring ion beam current, comprising a base flange, a magnet module and a copper plate.

[0005] A screw is fixedly connected between the copper plate and the base flange, and the copper plate is located below the base flange.

[0006] The magnet module is located on the top of the copper plate.

[0007] Optionally, the outer diameter of the base flange is 250-255mm, a circular through hole is formed in the center of the base flange, and 12 first M6 screw holes for fixing the faraday cylinder assembly are uniformly formed in the diameter of 145-155mm of the base flange.

[0008] Optionally, 24 M10 screw holes for connecting different vacuum cavities are formed in the base flange, the M10 screw holes are located on the outer side of the first M6 screw holes, the screw is made of PEEK material, and the length of the screw is 145-155mm.

[0009] Optionally, the copper plate is a circular plate with a diameter of 190-210mm, a water cooling channel is provided on the copper plate, and the copper plate is electrically connected to the external data acquisition device through wires.

[0010] Optionally, 24 M4 screw holes for fixing the magnet module are formed on the copper plate, and 12 second M6 screw holes for connecting the screw rod are formed on the circumference of the copper plate.

[0011] Optionally, grooves for fixing the magnet are formed on the two sides of the magnet module, the interval of the grooves is 18-22mm, the grooves are made of stainless steel, and M4 screw hole mounting seats for connecting the copper plate are arranged at the four corners of the magnet module.

[0012] In summary, the present application includes at least one of the following beneficial technical effects:

[0013] 1. The magnet module cooperates with the copper plate to effectively prevent the ion beam from hitting the inner wall of the cavity and the secondary electron from sputtering to the periphery of the copper plate, and ensures that the ion beam is concentrated on the copper plate, thereby significantly improving the measurement accuracy of the beam intensity.

[0014] 2. The device is firmly stable and convenient to install and disassemble, and the reliability and operation convenience of the device are improved, and at the same time, the base flange can be compatible with non-national standard vacuum devices, thereby further improving the application range of the device, and in addition, the size and position of the magnet module can be adjusted according to experimental requirements through the M4 screw holes on the copper plate, thereby improving the flexibility and universality of the device.

[0015] 3. The magnet module made of stainless steel fixes the magnet through the groove, reduces the influence of external electromagnetic interference on the beam measurement accuracy, improves the anti-interference ability of the device, and the square designed magnet module improves the stability and accuracy of the magnet module while optimizing the structural strength of the magnet module.

[0016] The present application effectively prevents the ion beam from hitting the inner wall of the cavity and the secondary electron from sputtering to the periphery of the copper plate, significantly improves the measurement accuracy of the beam intensity, and has the advantages of convenient disassembly, firmness and stability, high flexibility and universality, and in addition, reduces the influence of external electromagnetic interference on the beam measurement accuracy, improves the anti-interference ability of the device, and improves the stability and accuracy of the magnet module while optimizing the structural strength of the magnet module. BRIEF DESCRIPTION OF DRAWINGS

[0017] Fig. 1 The overall structure schematic diagram of the present application is given;

[0018] Fig. 2 The structure schematic diagram of the magnet module in the present application is given;

[0019] Fig. 3 The structure schematic diagram of the base flange in the present application is given;

[0020] Fig. 4 A top view structural schematic diagram of the copper plate in the utility model is given.

[0021] Reference signs: 1, base flange; 101, first M6 screw hole; 102, M10 screw hole; 103, circular through hole;

[0022] 2, magnet module; 201, M4 screw hole mounting seat; 202, groove;

[0023] 3, copper plate; 301, M4 screw hole; 302, second M6 screw hole; 303, water cooling channel; 4, screw rod. DETAILED DESCRIPTION

[0024] The technical solutions of the utility model will be described clearly and completely below in combination with the drawings. Obviously, the described embodiments are part of the embodiments of the utility model, rather than all the embodiments.

[0025] The components of the embodiments of the utility model generally described and shown in the drawings can be arranged and designed in various different configurations. Therefore, the following detailed description of the embodiments of the utility model provided in the drawings is not intended to limit the scope of the claimed utility model, but only represents selected embodiments of the utility model.

[0026] Based on the embodiments in the utility model, all other embodiments obtained by those skilled in the art without creative labor belong to the scope of protection of the utility model.

[0027] In the description of the utility model, it should be explained that the orientations or position relationships indicated by the terms "center", "upper", "lower", "left", "right", "vertical", "horizontal", "inner", "outer" and the like are based on the orientations or position relationships shown in the drawings, and are only for the convenience of describing the utility model and simplifying the description, and are not intended to indicate or imply that the indicated devices or elements must have a particular orientation, be constructed and operated in a particular orientation, and therefore cannot be understood as limiting the utility model. In addition, the terms "first", "second", "third" are only for the purpose of description, and cannot be understood as indicating or implying relative importance.

[0028] It is to be understood that the terms "including", "comprising", or any other variation thereof, are intended to cover a non-exclusive inclusion, such that a process, method, article, or apparatus that comprises a list of elements does not include only those elements but can also include other elements not expressly listed or inherent to such process, method, article, or apparatus. In this specification, illustrative expressions of the above terms do not necessarily refer to the same embodiment or example. Moreover, specific features, structures, materials, or characteristics described can be combined in any suitable manner in one or more embodiments or examples.

[0029] In the description of the utility model, it needs to explain, unless there is explicit stipulation and limitation, the term "installation", "connection", "connection" should be broad sense understanding, for example, can be fixed connection, also can be detachable connection, or integrally connected, can be mechanical connection, also can be electrical connection, can be directly connected, also can be indirectly connected through intermediate medium, can be two element internal communication. For ordinary skilled in the art, the specific meaning of the above terms in the utility model can be understood according to specific circumstances.

[0030] Embodiment

[0031] As Figs. 1 to 4 The utility model discloses a Faraday cylinder that measures ion beam current, including base flange 1, magnet module 2 and copper plate 3, the fixed connection of copper plate 3 and base flange 1 has screw rod 4, and copper plate 3 is located below base flange 1, and magnet module 2 is located at the top of copper plate 3.

[0032] The outer diameter of the base flange 1 is preferably 253 mm, a circular through hole 103 is formed at the center of the base flange 1, the ion beam directly hits the surface of the copper plate 3 through the circular through hole 103, effectively preventing the ion beam from hitting the inner wall of the cavity and secondary electrons from sputtering to the periphery of the copper plate 3, ensuring that the ion beam is concentrated on the copper plate 3, significantly improving the measurement accuracy of the beam intensity, 12 first M6 screw holes 101 for fixing the Faraday cylinder assembly are uniformly formed at the diameter of 150 mm of the base flange 1, 24 M10 screw holes 102 for connecting different vacuum cavities are formed on the base flange 1, the base flange 1 can be compatible with non-national standard vacuum devices, further improving the application range of the device, the base flange 1 is fixed on the vacuum cavity through the cooperation of the M10 screw hole 102 and the bolt, the M10 screw hole 102 is located outside the first M6 screw hole 101, the screw rod 4 is made of PEEK material, the length of the screw rod 4 is preferably 150 mm, the copper plate 3 is suspended and fixedly installed below the base flange 1 through the cooperation of the screw rod 4, the first M6 screw hole 101 and the second M6 screw hole 302, the suspended design of the copper plate 3 avoids heat accumulation and quickly dissipates heat through its heat conduction performance;

[0033] In addition, the copper plate 3 is a circular plate body with a diameter of 200mm, the copper plate 3 is provided with a water cooling channel 303, the copper plate 3 is electrically connected with an external data acquisition device through wires, 24 M4 screw holes 301 for fixing the magnet module 2 are arranged on the copper plate 3, the magnet module 2 is fixedly connected to the top of the copper plate 3 through the M4 screw holes 301, M4 screw hole mounting seats 201 and bolts, the size and position of the magnet module 2 can be adjusted according to experimental requirements through the M4 screw holes, the magnet module 2 can also be rotated by 90 degrees to adjust the direction of the traditional module 2, and the flexibility and versatility of the device are improved, 12 second M6 screw holes 302 for connecting the screw rod 4 are arranged on the circumference of the copper plate 3, after the copper plate 3 receives the beam, the generated current is transmitted to the external data acquisition device through wires, the wires are fixed through the remaining M4 screw holes and cooperate with the screws and nuts, so that the measurement of the beam intensity is realized.

[0034] Finally, grooves 202 for fixing magnets are arranged on both sides of the magnet module 2, the inner wall of the groove is 80mm*80mm, the outer wall is 100mm*100mm, the interval of the groove 202 is preferably 20mm, the groove 202 is made of stainless steel, the magnet module 2 made of stainless steel fixes the magnets through the groove 202, reduces the influence of external electromagnetic interference on the beam measurement accuracy, improves the anti-interference ability of the device, and the square design of the magnet module 2 improves the stability and accuracy of the magnet module 2 while optimizing the structural strength of the magnet module 2, M4 screw hole mounting seats 201 for connecting with the copper plate 3 are arranged at the four corners of the magnet module 2, so as to ensure the stability and detachability of the magnet module 2.

[0035] Working principle: in the use process of the utility model, the base flange 1 is fixed on the vacuum cavity through the cooperation of the M10 screw hole 102 and the bolt, the copper plate 3 is suspended and fixedly installed below the base flange 1 through the cooperation of the screw rod 4, the first M6 screw hole 101 and the second M6 screw hole 302, after installation is completed, the ion beam directly hits the surface of the copper plate 3 through the circular through hole 103 arranged at the center of the base flange 1, effectively preventing the ion beam from hitting the inner wall of the cavity and the secondary electron from sputtering to the periphery of the copper plate 3, ensuring that the ion beam is concentrated on the copper plate 3, and significantly improving the measurement accuracy of the beam intensity, after the copper plate 3 receives the beam, the generated current is transmitted to the external data acquisition device through wires, so as to realize the measurement of the beam intensity, and the magnet module 2 is fixedly connected to the top of the copper plate 3 through the M4 screw hole 301, the M4 screw hole mounting seat 201 and the bolt.

[0036] The above specific embodiments are only several optional embodiments of the utility model, based on the technical scheme of the utility model and the related inspiration of the above embodiments, those skilled in the art can make various alternative improvements and combinations on the above specific embodiments.

Claims

1. A Faraday cup for measuring ion beam current, characterized in that Base flange (1), magnet module (2) and copper plate (3) are included. Screw rod (4) is fixedly connected between copper plate (3) and base flange (1), and copper plate (3) is located below base flange (1). Magnet module (2) is arranged on the top of copper plate (3).

2. A Faraday cup for measuring ion beam current according to claim 1, wherein, The outer diameter of base flange (1) is 250-255mm, a circular through hole (103) is arranged at the center of base flange (1), and 12 first M6 screw holes (101) for fixing Faraday cylinder assembly are uniformly arranged at the diameter of 145-155mm of base flange (1).

3. A Faraday cup for measuring ion beam current according to claim 2, wherein, 24 M10 screw holes (102) for connecting different vacuum cavities are arranged on base flange (1), and M10 screw holes (102) are located outside first M6 screw holes (101), screw rod (4) is made of PEEK material, and the length of screw rod (4) is 145-155mm.

4. A Faraday cup for measuring ion beam current according to claim 1, wherein Copper plate (3) is a circular plate body with a diameter of 190-210mm, water cooling channel (303) is arranged on copper plate (3), and copper plate (3) is electrically connected with external data acquisition equipment through wires.

5. A Faraday cup for measuring ion beam current according to claim 4, wherein, 24 M4 screw holes (301) for fixing magnet module (2) are arranged on copper plate (3), and 12 second M6 screw holes (302) for connecting screw rod (4) are arranged on the circumference of copper plate (3).

6. A Faraday cup for measuring ion beam current as defined in claim 1, wherein, Grooves (202) for fixing magnets are arranged on both sides of magnet module (2), the interval of grooves (202) is 18-22mm, grooves (202) are made of stainless steel, and M4 screw hole mounting seats (201) for connecting copper plate (3) are arranged at the four corners of magnet module (2).

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