Exposure machine cover opening Pad replacing device

Abstract

The utility model discloses an exposure machine cover opening Pad replacing device which comprises a handheld part, the top end of the handheld part is closed and expands downwards and outwards to form a containing space, and the lower end of the containing space is separated to form two handles convenient to grasp; the annular clamping part is fixedly arranged in the containing space, the lower end of the annular clamping part is open, the size of the annular clamping part is matched with that of the cover opening Pad, and a bolt and a nut which are used for fixing the cover opening Pad are arranged below the annular clamping part. Compared with a device which is not used, the device can greatly shorten the replacement time and improve the utilization rate of equipment, so that the productivity is improved.

Description

Technical Field

[0001] This utility model relates to the field of semiconductor equipment technology, and in particular to a device for replacing the pad on an exposure machine cover. Background Technology

[0002] When switching between different products in production, Canon exposure machines in Japan require switching the corresponding photomask. To ensure the cleanliness of the photomask, it is usually placed inside a corresponding photomask cassette, which consists of a top cover and a base. For example... Figure 1 As shown, when the exposure machine switches the cassette, the robotic arm first moves the cassette to the opening position, and then the upper cover suction cup holds the cassette cover by vacuum suction. The robotic arm then descends and retracts, thereby achieving the purpose of opening the cover.

[0003] The cover pad (similar to a suction cup, hereinafter the same) generally consists of three parts: the cover pad base, which is fixed to the inner annular groove of the rubber cover pad; the cover top cover, which is fixed to the cover pad; and the cover top cover, whose diameter is slightly smaller than the cover pad by 0.5mm. This is to hold the cover pad in place and increase the seal between the two, ensuring a firm grip on the Cassette cover. The cover pad is slightly larger than the cover top cover. The cover pad is generally made of rubber and has a lifespan of approximately six months. To extend its lifespan, its rigidity is usually increased. However, due to the compact design of the machine, replacing the cover pad is not convenient for maintenance personnel and often takes a considerable amount of time, leading to increased equipment downtime and affecting overall uptime. Summary of the Invention

[0004] The technical problem to be solved by this utility model is to provide a device for changing the Pad on the cover of an exposure machine.

[0005] This utility model is implemented as follows:

[0006] An exposure machine cover opening Pad replacement device includes: a handheld part, the top of which is closed and expands downward to form an accommodating space, the lower end of which is separated to form two handles for easy gripping; an annular clamp part, which is fixedly installed in the accommodating space, the lower end of which has an opening and size that matches the cover opening Pad, and bolts and nuts for fixing the cover opening Pad are provided below the annular clamp part.

[0007] Furthermore, the handheld part is made of stainless steel.

[0008] Furthermore, the handheld part and the annular clamp part are connected by welding.

[0009] The advantages of this invention are: compared to the unused device, this invention can greatly shorten the replacement time, improve equipment uptime, and thus increase production capacity. It is estimated that a single replacement can be reduced by about 0.5 hours, and a single machine can save 2 hours of replacement time. No experienced personnel are required; engineers can successfully replace the cover-opening Pad after simple training. Attached Figure Description

[0010] The present invention will be further described below with reference to the accompanying drawings and embodiments.

[0011] Figure 1 This is a schematic diagram of the mechanism for opening the cover of the exposure machine;

[0012] Figure 2 This is a schematic diagram of the device of this utility model.

[0013] in:

[0014] 1. Pad cover; 2. Vacuum tubing; 3. Cassette cover; 4. Handhold; 5. Storage space; 6. Annular clamp; 7. Handle; 8. Bolt; 9. Nut; 10. Mask. Detailed Implementation

[0015] In the description of this utility model, it should be noted that, unless otherwise explicitly specified and limited, the terms "installation," "connection," and "joining" should be interpreted broadly. For example, they can refer to a fixed connection, a detachable connection, or an integral connection; they can refer to a mechanical connection or an electrical connection; they can refer to a direct connection or an indirect connection through an intermediate medium; and they can refer to the internal connection of two components. Those skilled in the art can understand the specific meaning of the above terms in this invention based on the specific circumstances.

[0016] Please see Figure 2 As shown, an exposure machine cover opening Pad replacement device 100 includes: a handheld part 4, which is made of stainless steel or other materials, and the top of the handheld part 4 is closed and expands downward to form an accommodating space 5. The lower end of the accommodating space 5 is separated to form two handles 7 for easy gripping; an annular clamp part 6, which is fixedly installed in the accommodating space 5. The opening and size of its lower end match the cover opening Pad 1. The handheld part 4 and the annular clamp part 6 are connected by welding. Bolts 8 and nuts 9 for fixing the cover opening Pad 1 are provided below the annular clamp part 6.

[0017] It is worth noting that the height of this utility model device is 10-20mm, which matches the height of the Pad1 when the cover is opened.

[0018] The working principle of this utility model is as follows: During use, first place the Pad1 cover into the annular clamp 6, then press the handle 7 tightly, and lock the bolt 8 and nut 9 in place. After completing the above steps, it can be easily installed on the machine. After installation, loosen the bolt 8 and nut 9, and finally remove the handle 4 to complete the process. After completing the above process, as follows... Figure 1 As shown, when the exposure machine needs to change the photomask, the Pad1 is placed on the Cassette cover 3 of the photomask, and then the air between the Pad1 and the Cassette cover 3 is extracted through the vacuum line 2 to ensure that the Pad1 can firmly hold the Cassette cover 3, thereby separating the Cassette cover 3 from the mask 10.

[0019] The advantages of this invention are: compared to the unused device, this invention can greatly shorten the replacement time, improve equipment uptime, and thus increase production capacity. It is estimated that a single replacement can be reduced by about 0.5 hours, and a single machine can save 2 hours of replacement time. No experienced personnel are required; engineers can successfully replace the cover-opening Pad after simple training.

[0020] While specific embodiments of the present invention have been described above, those skilled in the art should understand that the specific embodiments described are merely illustrative and not intended to limit the scope of the present invention. Equivalent modifications and variations made by those skilled in the art in accordance with the spirit of the present invention should be covered within the scope of protection of the claims of the present invention.

Claims

1. A device for changing the pad on an exposure machine cover, characterized in that: The utility model relates to a portable computer, including: A hand-held part, the top end of the hand-held part is closed, and a containing space is formed by outward expansion downward, the lower end of the containing space is separated to form two handles convenient for holding; A ring-shaped clamp part is fixedly arranged in the containing space, the lower end of the ring-shaped clamp part is open, and the size is matched with a cover open pad, and the lower part of the ring-shaped clamp part is provided with a bolt and a nut for fixing the cover open pad.

2. The cover opening and pad replacing device of the exposure machine according to claim 1, characterized in that: The hand-held part is made of stainless steel.

3. The cover opening and pad replacing device of claim 1, wherein: The hand-held part and the ring-shaped clamp part are connected through welding.

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