Double-grid-mesh mechanism

Abstract

The utility model relates to a double-grid mesh mechanism, which comprises a current-conducting plate, a mounting plate and a plurality of first fastening bolts, a first grid mesh is arranged on the current-conducting plate, a second grid mesh is arranged on the mounting plate, and the first grid mesh and the second grid mesh are oppositely arranged, so that the first grid mesh and the second grid mesh are assembled together in the form of two modules; an insulating via hole is formed in the matched conductive plate, a conductive interface is formed in the mounting plate, and an external conductive rod can penetrate through the insulating via hole and then is connected into the conductive interface to electrify the second grid mesh, so that the second grid mesh can take electricity without passing through a base of the ion source, or the wiring area of a circuit of the second grid mesh on the base of the ion source is reduced; according to the ion source base, the power taking mode of the second grid mesh is changed, the insulation requirement for the ion source base is reduced, the short circuit risk is reduced, the first fastening bolt penetrates through the first through hole of the mounting plate to be screwed into the first threaded hole of the conductive plate, assembly and disassembly are convenient, and checking, debugging, cleaning and maintenance can be rapidly conducted.

Description

Technical Field

[0001] This utility model relates to the field of ion source technology, and in particular to a dual-grid structure. Background Technology

[0002] An ion source is a device that ionizes neutral atoms or molecules and extracts an ion beam. It is widely used in fields such as optical vacuum coating, fine polishing and etching of material surfaces. The grid assembly is an important component of the ion extraction system of the ion source. After the grid assembly is assembled on the ion source, by applying a high voltage electric field, it can collect particles from the ion source and accelerate them, causing them to form a charged high-energy particle beam in a specific direction, thereby generating a continuous stream of ion beams for surface processing of various materials.

[0003] When existing integrated grid assemblies are fixed to the ion source base, one metal grid sheet is at the same potential as the base, while the other metal grid sheet achieves a different potential through the base's insulation. Since the circuits for the two metal grid sheets at different potentials all pass through the base, the insulation requirements for the base's channels are very high, making it prone to momentary discharges leading to instantaneous short circuits. Simultaneously, the grid assembly accommodates different charged parts, and balancing increasing the electric field strength of the metal grid sheets with ensuring the assembly's insulation can easily lead to a complex structure, making disassembly and assembly time-consuming and labor-intensive, and increasing the difficulty of inspection and maintenance. Utility Model Content

[0004] Therefore, it is necessary to provide a dual-grid mechanism.

[0005] The technical solution of this utility model to solve the above-mentioned technical problems is as follows: A double-grid mechanism, comprising:

[0006] A conductive plate, wherein a first grid is provided on the conductive plate and a plurality of first threaded holes are formed on the conductive plate;

[0007] The mounting plate is spaced apart from the conductive plate. A second grid is provided on the mounting plate, which is opposite to the first grid. A plurality of first through holes are provided on the mounting plate, and each first through hole corresponds to each first threaded hole.

[0008] Multiple first fastening bolts, each of which passes through a first through hole and is screwed into a first threaded hole;

[0009] The conductive plate has an insulating through hole, and the mounting plate has a conductive interface. The conductive interface is used to connect a conductive rod that passes through the insulating through hole to energize the second grid.

[0010] In one embodiment, the dual-grid mechanism further includes an insulating limiting member, wherein a limiting hole is formed on the conductive plate, a first end of the insulating limiting member is inserted into the limiting hole, and a second end of the insulating limiting member is movably abutted against the mounting plate.

[0011] In one embodiment, the dual-grid mechanism further includes: a plurality of second fastening bolts, a plurality of second threaded holes are provided on the conductive plate, a plurality of second through holes are provided on the first grid, each second through hole and each second threaded hole are provided in a one-to-one correspondence, and the first end of each second fastening bolt passes through a second through hole and is screwed into a second threaded hole.

[0012] In one embodiment, the dual-grid mechanism further includes: a plurality of third fastening bolts, a plurality of third threaded holes are provided on the mounting plate, a plurality of third through holes are provided on the second grid, each of the third through holes and each of the third threaded holes are provided in a one-to-one correspondence, and the first end of each of the third fastening bolts passes through a third through hole and is screwed into a third threaded hole.

[0013] In one embodiment, the second grid is provided with a plurality of first receiving holes, and the mounting plate is provided with a plurality of first receiving grooves. Each first receiving hole communicates with a first receiving groove to form a first countersunk hole, and the second end of each second fastening bolt is at least partially located in the first countersunk hole.

[0014] In one embodiment, the first grid has a plurality of second receiving holes, and the conductive plate has a plurality of second receiving grooves. Each second receiving hole communicates with a second receiving groove to form a second countersunk hole, and the second end of each third fastening bolt is at least partially located in the second countersunk hole.

[0015] In one embodiment, the conductive plate is provided with a positioning post, and the mounting plate is provided with a positioning hole, and the positioning post is inserted into the positioning hole.

[0016] In one embodiment, the conductive plate has multiple countersunk through holes for mounting.

[0017] In one embodiment, a first passage cavity is formed on the conductive plate, and a plurality of first grid holes are formed on the first grid, each of the first grid holes being aligned with and communicating with the first passage cavity.

[0018] In one embodiment, the mounting plate has a second passage cavity, which is aligned with the first passage cavity. The second grid has a plurality of second grid holes, each of which is aligned with and communicates with the second passage cavity, and each of the second grid holes is aligned with a first grid hole.

[0019] The beneficial effects of this utility model are as follows: This utility model provides a dual-grid mechanism. By placing a first grid on a conductive plate and a second grid on a mounting plate, with the first and second grids positioned opposite each other, the first and second grids are assembled as two modules. The conductive plate has insulating through-holes, and the mounting plate has conductive interfaces. An external conductive rod can pass through the insulating through-holes and connect to the conductive interfaces to energize the second grid. This allows the second grid to draw power without passing through the ion source base, or significantly reduces the wiring area of ​​the second grid's circuitry within the ion source base. This changes the power extraction method of the second grid, reduces the insulation requirements of the ion source base, and lowers the risk of short circuits. Simultaneously, the first fastening bolt passes through the first through-hole of the mounting plate and is screwed into the first threaded hole of the conductive plate, facilitating assembly and disassembly, thereby enabling rapid inspection, troubleshooting, cleaning, and maintenance. Attached Figure Description

[0020] To more clearly illustrate the technical solutions of the embodiments of this application, the accompanying drawings used in the embodiments will be briefly introduced below. It should be understood that the following drawings only show some embodiments of this application and should not be regarded as a limitation of the scope. For those skilled in the art, other related drawings can be obtained based on these drawings without creative effort.

[0021] Figure 1 This is a schematic diagram of the structure of a dual-grid mechanism according to one embodiment;

[0022] Figure 2 This is a three-dimensional exploded view of a dual-grid mechanism according to one embodiment;

[0023] Figure 3 This is a three-dimensional exploded view of a dual-grid mechanism according to one embodiment;

[0024] Figure 4 This is a schematic diagram of the structure of a conductive plate and a first grid according to one embodiment;

[0025] Figure 5 This is a schematic diagram of the structure of the mounting plate and the second grid in one embodiment;

[0026] Figure 6 This is a three-dimensional exploded view of the conductive plate and the first grid according to one embodiment;

[0027] Figure 7 This is a three-dimensional exploded view of the mounting plate and the second grid in one embodiment.

[0028] In the attached diagram, 10 is a double-grid mechanism; 20 is a conductive rod; 100 is a conductive plate; 101 is a first through cavity; 110 is a first threaded hole; 120 is an insulating through hole; 130 is a second threaded hole; 140 is a second receiving groove; 150 is a mounting countersunk through hole; 200 is a mounting plate; 201 is a second through cavity; 210 is a first through hole; 220 is a conductive interface; 230 is a third threaded hole; 240 is a first receiving groove; and 300 is a first grid. Mesh; 301, First grid hole; 310, Second through hole; 320, Second receiving hole; 400, Second grid mesh; 401, Second grid hole; 410, Third through hole; 420, First receiving hole; 510, Insulating limiting component; 520, Limiting hole; 600, First fastening bolt; 610, Second fastening bolt; 620, Third fastening bolt; 710, First countersunk hole; 720, Second countersunk hole; 810, Positioning post; 820, Positioning hole. Detailed Implementation

[0029] It should be noted that, unless otherwise specified, the embodiments and features described in these embodiments of the present invention can be combined with each other. The technical solutions of the present invention will be further described below with reference to the accompanying drawings of the embodiments. The present invention is not limited to the specific embodiments described below.

[0030] It should be understood that the same or similar reference numerals in the accompanying drawings of the embodiments correspond to the same or similar components. In the description of this utility model, it should be understood that if terms such as "upper," "lower," "front," "rear," "left," "right," "top," and "bottom" indicate the orientation or positional relationship based on the orientation or positional relationship shown in the accompanying drawings, they are only for the convenience of describing this utility model and simplifying the description, and do not indicate or imply that the device or component referred to must have a specific orientation, or be constructed and operated in a specific orientation. Therefore, the terms describing positional relationships in the accompanying drawings are for illustrative purposes only and should not be construed as limiting this patent. Those skilled in the art can understand the specific meaning of the above terms according to the specific circumstances.

[0031] In one embodiment, such as Figure 1 , Figure 2 , Figure 3 , Figure 4 , Figure 5 , Figure 6 and Figure 7As shown, a double-grid mechanism 10 includes: a conductive plate 100, a mounting plate 200, and a plurality of first fastening bolts 600. A first grid 300 is disposed on the conductive plate 100, and a plurality of first threaded holes 110 are formed on the conductive plate 100. The mounting plate 200 is spaced apart from the conductive plate 100, and a second grid 400 is disposed on the mounting plate 200, opposite to the first grid 300. The mounting plate 200 also has a plurality of first threaded holes 600. Each first through hole 210 is provided in a one-to-one correspondence with each first threaded hole 110. Each first fastening bolt 600 passes through a first through hole 210 and is screwed into a first threaded hole 110. The conductive plate 100 is provided with an insulating through hole 120, and the mounting plate 200 is provided with a conductive interface 220. The conductive interface 220 is used to connect the conductive rod 20 passing through the insulating through hole 120 to energize the second grid 400.

[0032] In this embodiment, the conductive plate 100 and the mounting plate 200 are spaced apart. By setting the first grid 300 on the conductive plate 100 and the second grid 400 on the mounting plate 200, with the first grid 300 and the second grid 400 arranged opposite to each other, and cooperating with the first fastening bolt 600 passing through the first through hole 210 of the mounting plate 200 and screwed into the first threaded hole 110 of the conductive plate 100, the first grid 300 and the second grid 400 can be assembled together as two modules. This not only facilitates assembly and disassembly, but also enables quick inspection, troubleshooting, cleaning and maintenance, thereby improving the stability of the double grid mechanism 10.

[0033] In this embodiment, an insulating through-hole 120 is provided on the conductive plate 100, and a conductive interface 220 is provided on the mounting plate 200. The external conductive rod 20 can pass through the insulating through-hole 120 and connect to the conductive interface 220 to energize the second grid 400. This allows the second grid 400 to draw power without passing through the ion source base, or greatly reduces the wiring area of ​​the second grid circuit in the ion source base. This changes the power drawing method of the second grid 400. In this way, the first grid 300 draws power from the ion source base, and the second grid 400 draws power through the conductive rod 20. The two modules are electrically insulated from each other, eliminating the need for complex insulation design of the ion source base, reducing the insulation requirements of the ion source base, and thus reducing the risk of short circuit.

[0034] It is worth noting that when the external conductive rod is installed on the conductive interface of the mounting plate to energize the second grid, a circuit is arranged on the mounting plate to allow the conductive rod to be electrically connected to the second grid. This circuit structure can be a conductive structure such as a conductive wire and a conductive plate, which is not specifically limited in this embodiment. For example, a metal conductive plate is provided on the mounting plate, and the metal conductive plate is electrically connected to both the conductive rod and the second grid, thereby enabling the second grid to be energized through the external conductive rod.

[0035] In one embodiment, such as Figure 3 , Figure 4 , Figure 5 , Figure 6 and Figure 7 As shown, the double grid mechanism 10 further includes an insulating limiting member 510. A limiting hole 520 is provided on the conductive plate 100. The first end of the insulating limiting member 510 is inserted into the limiting hole 520, and the second end of the insulating limiting member 510 is movably abutted against the mounting plate 200. Specifically, multiple insulating limiting members 510 are provided, and the number of limiting holes 520 is equal to the number of insulating limiting members 510. Each limiting hole 520 is evenly distributed on both sides of the conductive plate 100. One end of the insulating limiting member 510 is inserted into the limiting hole 520, and the other end abuts against the mounting plate 200. This limits the distance between the conductive plate 100 and the mounting plate 200, ensuring a corresponding distance between the assembled conductive plate 100 and the mounting plate 200. This allows the opposing first grid 300 and second grid 400 to be spaced apart, ensuring that the first grid 300 and second grid 400 are electrically insulated from each other. It also facilitates the replacement of the insulating limiting members 510 to adjust the distance between the first grid 300 and the second grid 400. It is worth noting that the shape and size of the insulating limiting member 510 can be adjusted according to different distance requirements of the first grid 300 and the second grid 400; in this embodiment, no specific limitation is made.

[0036] In one embodiment, such as Figure 2 , Figure 3 , Figure 4 , Figure 5 , Figure 6 and Figure 7As shown, the conductive plate 100 is provided with positioning posts 810, and the mounting plate 200 is provided with positioning holes 820, in which the positioning posts 810 are inserted. Specifically, the number of positioning posts 810 is set to multiple, and each positioning post 810 is evenly distributed on both ends of the conductive plate 100. The number of positioning holes 820 is equal to the number of positioning posts 810. By inserting the positioning posts 810 into the positioning holes 820, a positioning function can be achieved, which facilitates the alignment of the first threaded hole 110 on the conductive plate 100 with the first through hole 210 on the mounting plate 200, thereby enabling better assembly of the conductive plate 100 and the mounting plate 200.

[0037] In one embodiment, such as Figure 2 , Figure 4 and Figure 6 As shown, the dual-grid mechanism 10 further includes: a plurality of second fastening bolts 610; a plurality of second threaded holes 130 are provided on the conductive plate 100; a plurality of second through holes 310 are provided on the first grid 300; each second through hole 310 is provided in a one-to-one correspondence with each second threaded hole 130; and the first end of each second fastening bolt 610 passes through a second through hole 310 and is screwed into a second threaded hole 130. Specifically, the number of second threaded holes 130 is the same as the number of second through holes 310. Each second threaded hole 130 is evenly distributed on both sides of the conductive plate 100, and each second through hole 310 is correspondingly distributed on both sides of the first grid 300. Each second through hole 310 is aligned with and connected to a second threaded hole 130. The first end of the second fastening bolt 610 passes through the second through hole 310 and is screwed into the second threaded hole 130. The first grid 300 can be stably assembled on the conductive plate 100 by means of threaded connection, while facilitating disassembly for inspection, troubleshooting, cleaning and maintenance.

[0038] In one embodiment, a first directional hole is provided on the conductive plate, and a second directional hole is provided on the first grid. The first directional hole and the second directional hole are movably aligned. When the first grid is assembled on the conductive plate, the alignment of the first directional hole and the second directional hole can play an auxiliary positioning role, ensuring that the first grid can be accurately assembled on the conductive plate.

[0039] In one embodiment, such as Figure 2 , Figure 3 , Figure 5 and Figure 7As shown, the double grid mechanism 10 further includes: a plurality of third fastening bolts 620; a plurality of third threaded holes 230 are provided on the mounting plate 200; a plurality of third through holes 410 are provided on the second grid 400; each of the third through holes 410 and each of the third threaded holes 230 are provided in a one-to-one correspondence; and the first end of each of the third fastening bolts 620 passes through a third through hole 410 and is screwed into a third threaded hole 230. Specifically, the number of third threaded holes 230 is the same as the number of third through holes 410. Each third threaded hole 230 is evenly distributed on both sides of the mounting plate 200, and each third through hole 410 is correspondingly distributed on both sides of the second grid 400. Each third through hole 410 is aligned with and connected to a third threaded hole 230. The first end of the third fastening bolt 620 passes through the third through hole 410 and is screwed into the third threaded hole 230. The second grid 400 can be stably assembled on the mounting plate 200 by means of threaded connection, while facilitating disassembly for inspection, troubleshooting, cleaning and maintenance.

[0040] In another implementation of the mounting plate, the mounting plate includes an insulating plate and an auxiliary plate. The auxiliary plate is disposed on the insulating plate, and the insulating plate is positioned opposite to the conductive plate. The insulating plate has multiple mounting holes, and the auxiliary plate has a third threaded hole. Each third threaded hole corresponds one-to-one with a mounting hole and a third through hole, meaning each third threaded hole is aligned and connected to both. The first end of a third fastening bolt passes through the third through hole and the mounting hole sequentially and is screwed into the third threaded hole. This combination of the insulating plate and the auxiliary plate allows for the assembly of the second grid, avoiding the failure of the threaded holes on the mounting plate due to the mounting plate material, thus preventing the third fastening bolt from effectively screwing in. In this embodiment, the conductive interface is located on the insulating plate, and the circuit structure is also located on the insulating plate. The insulating plate has lower thermal conductivity and a smaller circuit area compared to the conductive plate, allowing the external conductive rod to energize the second grid through the conductive structure.

[0041] In one embodiment, the mounting plate has a third positioning hole, and the second grid has a fourth positioning hole. The third positioning hole and the fourth positioning hole are movably aligned. When the second grid is assembled on the mounting plate, the alignment of the third positioning hole and the fourth positioning hole can play an auxiliary positioning role, ensuring that the second grid can be accurately assembled on the mounting plate.

[0042] In one embodiment, such as Figure 3 , Figure 5 and Figure 7As shown, the second grid 400 has a plurality of first receiving holes 420, and the mounting plate 200 has a plurality of first receiving grooves 240. Each first receiving hole 420 communicates with a first receiving groove 240 to form a first countersunk hole 710, and the second end of each second fastening bolt 610 is at least partially located in the first countersunk hole 710. Specifically, the number of first receiving holes 420 is equal to the number of first receiving grooves 240. Each first receiving hole 420 is evenly distributed on both sides of the second grid 400, and each first receiving groove 240 is correspondingly distributed on both sides of the mounting plate 200. Each first receiving hole 420 is aligned with and connected to a first receiving groove 240 to form a first countersunk hole 710. The position of the first countersunk hole 710 corresponds to the position of the second fastening bolt 610 on the conductive plate 100. In this way, when the conductive plate 100 and the mounting plate 200 are assembled together, the second end of the second fastening bolt 610 protruding from the outer surface of the conductive plate 100 can be accommodated in the first countersunk hole 710, thereby better ensuring that there is a suitable distance between the assembled conductive plate 100 and the mounting plate 200.

[0043] In one embodiment, such as Figure 2 , Figure 4 and Figure 6 As shown, the first grid 300 has a plurality of second receiving holes 320, and the conductive plate 100 has a plurality of second receiving grooves 140. Each second receiving hole 320 communicates with a second receiving groove 140 to form a second countersunk hole 720, and the second end of each third fastening bolt 620 is at least partially located in the second countersunk hole 720. Specifically, the number of second receiving holes 320 is equal to the number of second receiving grooves 140. Each second receiving hole 320 is evenly distributed on both sides of the first grid 300, and each second receiving groove 140 is correspondingly distributed on both sides of the conductive plate 100. Each second receiving hole 320 is aligned with and connected to a second receiving groove 140 to form a second countersunk hole 720. The position of the second countersunk hole 720 corresponds to the position of the third fastening bolt 620 on the mounting plate 200. In this way, when the conductive plate 100 and the mounting plate 200 are assembled together, the second end of the third fastening bolt 620 protruding from the outer surface of the mounting plate 200 can be accommodated in the second countersunk hole 720, thereby better ensuring that there is a suitable distance between the assembled conductive plate 100 and the mounting plate 200.

[0044] In one embodiment, such as Figure 6 As shown, the conductive plate 100 has multiple countersunk holes 150. Specifically, each countersunk hole 150 is evenly distributed on both ends of the conductive plate 100. After external bolts pass through the countersunk holes 150, they are screwed onto the base of the ion source, enabling the conductive plate 100 to be installed on the base of the ion source, thereby enabling the dual-grid mechanism 10 to be installed on the base of the ion source.

[0045] In one embodiment, such as Figure 6 and Figure 7 As shown, the conductive plate 100 has a first passage cavity 101, the first grid 300 has a plurality of first grid holes 301, each of the first grid holes 301 being aligned with and communicating with the first passage cavity 101, the mounting plate 200 has a second passage cavity 201, the second passage cavity 201 being aligned with the first passage cavity 101, and the second grid 400 has a plurality of second grid holes 401, each of the second grid holes 401 being aligned with and communicating with the second passage cavity 201, and each of the second grid holes 401 being aligned with a first grid hole 301. Specifically, the first passage cavity 101, each of the first grid holes 301, each of the second grid holes 401 and the second passage cavity 201 are sequentially connected, enabling the particles collected and accelerated from the ion source to be emitted outward, forming an ion beam stream in a specific direction, which is used for sputtering, etching or surface impacting of various materials.

[0046] Compared with the prior art, the present invention has at least the following advantages:

[0047] This utility model provides a dual-grid mechanism. A first grid is mounted on a conductive plate, and a second grid is mounted on a mounting plate, with the first and second grids positioned opposite each other. This allows the first and second grids to be assembled as two modules. The conductive plate has insulating through-holes, and the mounting plate has conductive interfaces. An external conductive rod can pass through the insulating through-holes and connect to the conductive interfaces to energize the second grid. This allows the second grid to draw power without passing through the ion source base, changing the power extraction method of the second grid, reducing the insulation requirements on the ion source base, and lowering the risk of short circuits. Simultaneously, a first fastening bolt passes through the first through-hole of the mounting plate and is screwed into the first threaded hole of the conductive plate, facilitating assembly and disassembly, thereby enabling rapid inspection, troubleshooting, cleaning, and maintenance.

[0048] Obviously, the above embodiments of this utility model are merely examples for clearly illustrating this utility model, and are not intended to limit the implementation of this utility model. Those skilled in the art can make other variations or modifications based on the above description. It is neither necessary nor possible to exhaustively describe all embodiments here. Any modifications, equivalent substitutions, and improvements made within the spirit and principles of this utility model should be included within the protection scope of the claims of this utility model.

Claims

1. A dual grid mesh mechanism, characterized by, include: A conductive plate, wherein a first grid is provided on the conductive plate and a plurality of first threaded holes are formed on the conductive plate; The mounting plate is spaced apart from the conductive plate. A second grid is provided on the mounting plate, which is opposite to the first grid. A plurality of first through holes are provided on the mounting plate, and each first through hole corresponds to each first threaded hole. Multiple first fastening bolts, each of which passes through a first through hole and is screwed into a first threaded hole; The conductive plate has an insulating through hole, and the mounting plate has a conductive interface. The conductive interface is used to connect a conductive rod that passes through the insulating through hole to energize the second grid.

2. The dual grid mechanism of claim 1, wherein, Also includes: An insulating limiting member is provided, wherein a limiting hole is formed on the conductive plate, the first end of the insulating limiting member is inserted into the limiting hole, and the second end of the insulating limiting member is movably abutted against the mounting plate.

3. The dual grid mechanism of claim 1, wherein, Also includes: Multiple second fastening bolts are provided. Multiple second threaded holes are provided on the conductive plate. Multiple second through holes are provided on the first grid. Each second through hole corresponds to each second threaded hole. The first end of each second fastening bolt passes through a second through hole and is screwed into a second threaded hole.

4. The dual grid mechanism of claim 3, wherein, Also includes: Multiple third fastening bolts are provided. Multiple third threaded holes are provided on the mounting plate. Multiple third through holes are provided on the second grid. Each third through hole corresponds to each third threaded hole. The first end of each third fastening bolt passes through a third through hole and is screwed into a third threaded hole.

5. The dual grid mechanism of claim 4, wherein, The second grid has a plurality of first receiving holes, and the mounting plate has a plurality of first receiving grooves. Each first receiving hole and a first receiving groove are connected to form a first countersunk hole, and the second end of each second fastening bolt is at least partially located in the first countersunk hole.

6. The dual grid mechanism of claim 5, wherein, The first grid has a plurality of second receiving holes, and the conductive plate has a plurality of second receiving grooves. Each second receiving hole is connected to a second receiving groove to form a second countersunk hole, and the second end of each third fastening bolt is at least partially located in the second countersunk hole.

7. The dual grid mechanism of claim 1, wherein, The conductive plate is provided with a positioning post, and the mounting plate is provided with a positioning hole, and the positioning post is inserted into the positioning hole.

8. The dual grid mechanism of claim 1, wherein, The conductive plate has multiple countersunk holes for mounting.

9. The dual grid mechanism of claim 1, wherein, The conductive plate has a first passage cavity, and the first grid has a plurality of first grid holes, each of which is aligned with and connected to the first passage cavity.

10. The dual grid mechanism of claim 9, wherein, The mounting plate has a second passage cavity, which is aligned with the first passage cavity. The second grid has a plurality of second grid holes, each of which is aligned with and connected to the second passage cavity, and each of the second grid holes is aligned with a first grid hole.

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