Polycrystalline silicon column cutting jig
By designing a polycrystalline silicon pillar cutting fixture, the problems of simultaneously cutting multiple polycrystalline silicon pillars and controlling the cutting length during the cutting process were solved, thus achieving stable and accurate cutting of polycrystalline silicon pillars.
Patent Information
- Application Number
- CN202520283465.6
- Authority / Receiving Office
- CN · China
- Patent Type
- Utility models(China)
- Current Assignee / Owner
- Filing Date
- 2025-02-21
- Publication Date
- 2026-01-16
- Estimated Expiration
- 2035-02-21
AI Technical Summary
Existing fixtures have difficulty cutting multiple polysilicon pillars simultaneously and controlling the cutting length during the polysilicon pillar cutting process.
A polycrystalline silicon pillar cutting fixture was designed, including a base, a positioning block, a limiting plate, and a guide rod. Through the cooperation of the positioning groove and the limiting groove, multiple polycrystalline silicon pillars can be cut simultaneously and the cutting length can be controlled.
It enables simultaneous cutting of multiple polysilicon pillars and precise control of cutting length, improving the stability and accuracy of cutting.
Smart Images
Figure CN223802818U_ABST
Abstract
Description
TECHNICAL FIELD
[0001] The utility model relates to a jig, especially a polycrystal silicon column cutting jig. BACKGROUND
[0002] The jig is a tool for assisting production, processing, detection or assembly, and is mainly used for fixing, positioning or guiding workpieces.
[0003] In the preparation process of semiconductor devices, polycrystal silicon columns are generally cut, the polycrystal silicon columns are first fixed by relevant jigs, and then cut by cutters, but the fixing performance of the relevant jigs is poor, which not only makes it difficult for the cutters to simultaneously cut multiple polycrystal silicon columns, but also makes it difficult to control the cutting length of the polycrystal silicon columns. UTILITY MODEL CONTENT
[0004] The utility model aims at providing a polycrystal silicon column cutting jig, which is convenient for cutters to simultaneously cut multiple polycrystal silicon columns and is convenient for controlling the cutting length of the polycrystal silicon columns.
[0005] TECHNICAL SCHEME
[0006] A polycrystal silicon column cutting jig comprises:
[0007] a base;
[0008] two positioning blocks connected to the two ends of the base respectively, and a plurality of positioning grooves are arranged on the positioning blocks;
[0009] a plurality of limiting plates in sliding connection with the base, an avoiding groove and a plurality of limiting grooves are arranged on the limiting plates, and the plurality of limiting grooves and the plurality of positioning grooves are in corresponding communication.
[0010] Optionally, the polycrystal silicon column cutting jig further comprises a locking block in detachable connection with at least one of the positioning blocks, and the locking block covers a plurality of the positioning grooves.
[0011] Optionally, the polycrystal silicon column cutting jig further comprises a plurality of bolts, and the positioning blocks and the locking block are in detachable connection through the plurality of bolts.
[0012] Optionally, the polycrystal silicon column cutting jig further comprises two guide rods located on the two sides of the base respectively, the guide rods are connected between the two positioning blocks, and the limiting plates and the guide rods are in sliding connection.
[0013] Optionally, a rough part is arranged on the guide rod, and the rough part is in sliding connection with the limiting plate.
[0014] Optionally, the two guide rods are arranged in axial symmetry about the base.
[0015] Optionally, the positioning grooves and the limiting grooves are in the same shape.
[0016] Optionally, the two positioning blocks are arranged in axial symmetry with respect to the base.
[0017] Optionally, further comprising a plurality of buffer rings corresponding to the plurality of positioning grooves.
[0018] Advantages:
[0019] (1) The cutter is started, so that the cutter moves towards the direction close to the plurality of polysilicon columns, until the cutter and the avoiding groove are completely matched, so as to complete the cutting, and the cutter is convenient for simultaneously cutting the plurality of polysilicon columns;
[0020] (2) The limiting plate is slid along the base, so as to control the cutting length of the polysilicon column. BRIEF DESCRIPTION OF DRAWINGS
[0021] Fig. 1 It is a structure schematic view of a polysilicon column cutting jig and a plurality of polysilicon columns of the embodiment 1 of the utility model;
[0022] Fig. 2 It is a structure schematic view of a polysilicon column cutting jig of the embodiment 1 of the utility model;
[0023] In the drawing: 1, base; 2, positioning block; 21, positioning groove; 3, limiting plate; 31, limiting groove; 32, avoiding groove; 41, locking block; 42, bolt; 51, guide rod; 52, rough part; 6, polysilicon column. DETAILED DESCRIPTION
[0024] In order to make the utility model technical scheme more clearly, the utility model is further explained in detail in combination with the drawings and specific embodiments.
[0025] The application will be described in further detail below with reference to the drawings and embodiments. It can be understood that the specific embodiments described herein are only used to explain the related utility model, and not to limit the utility model. In addition, it should be noted that, for the convenience of description, only the parts related to the utility model are shown in the drawings. The first, second, and the like in the utility model are set for the convenience of describing the technical solutions of the utility model, and have no specific limiting effect, and are all generic, and do not constitute a limiting effect on the technical solutions of the utility model. It should be noted that the embodiments in the present application and the features in the embodiments can be combined with each other without conflict. In the description of the utility model, it should be noted that the terms "center", "upper", "lower", "left", "right", "vertical", "horizontal", "inner", "outer" and the like indicate the orientation or positional relationship based on the orientation or positional relationship shown in the drawings, and are only for the convenience of describing the utility model and simplifying the description, and do not indicate or imply that the devices or elements referred to must have a particular orientation, be constructed and operated in a particular orientation, and therefore cannot be understood as limiting the utility model. In addition, the terms "first", "second", "third" are only for the purpose of description, and cannot be understood as indicating or implying relative importance. Unless otherwise specified and limited, the terms "mounting", "connection", "connection" should be understood broadly, for example, it can be fixedly connected, or it can be detachably connected, or integrally connected; it can be mechanically connected, or it can be electrically connected; it can be directly connected, or it can be indirectly connected through an intermediate medium, or it can be the communication between two elements inside. For those skilled in the art, the specific meaning of the above terms in the utility model can be understood according to the specific circumstances. The multiple technical solutions in the same embodiment, and the multiple technical solutions of different embodiments can be arranged and combined to form new technical solutions without contradiction or conflict, which are within the scope of the utility model.
[0026] Embodiment 1
[0027] As Figs. 1-2 , the embodiment provides a polysilicon column cutting jig, comprising: a base 1; two positioning blocks 2 connected to the two ends of the base 1 respectively, the positioning block 2 is provided with a plurality of positioning grooves 21; a plurality of limiting plates 3 are in sliding connection with the base 1, the limiting plate 3 is provided with a plurality of limiting grooves 31 and a plurality of avoiding grooves 32 which are in communication with each other, and the plurality of limiting grooves 31 and the plurality of positioning grooves 21 are in corresponding communication.
[0028] Specifically, in operation, first, the plurality of polysilicon columns 6 are placed in the plurality of positioning grooves 21 and the plurality of limiting grooves 31, then the limiting plate 3 is slid along the base 1 to facilitate control of the cutting length of the polysilicon columns 6, and finally the cutter is started to move towards the polysilicon columns 6 until the cutter and the avoiding groove 32 are completely matched, thereby completing the cutting and facilitating simultaneous cutting of the plurality of polysilicon columns 6 by the cutter.
[0029] The base 1 is used to carry the positioning block 2, the limiting plate 3, etc.; the plurality of positioning grooves 21 of the positioning block 2 are used to position the plurality of polysilicon columns 6 in the width direction to facilitate guaranteeing the cutting stability of the plurality of polysilicon columns 6 to a certain extent, wherein the specific number of the positioning grooves 21 is not limited and can be three, four, etc.; the plurality of limiting grooves 31 of the limiting plate 3 are used to further limit the plurality of polysilicon columns 6 in the width direction to facilitate guaranteeing the cutting stability of the plurality of polysilicon columns 6 to a certain extent; the avoiding groove 32 of the limiting plate 3 is used to accommodate the cutter to facilitate preventing interference between the cutter and the limiting plate 3 during cutting, and it should be noted that the depth of the avoiding groove 32 should be greater than the depth of the limiting groove 31, which facilitates complete cutting of the polysilicon columns 6 by the cutter and prevents mutual interference between the cutter and the bottom of the limiting groove 31.
[0030] Further, as shown in FIG. 4, the base 1 further comprises a plurality of positioning blocks 2 and a plurality of limiting plates 3. Figs. 1-2 Further, the base 1 further comprises a locking block 41 detachably connected with at least one positioning block 2, and the locking block 41 covers the plurality of positioning grooves 21.
[0031] Specifically, the locking block 41 is used to abut against the plurality of polysilicon columns 6 to facilitate positioning of the plurality of polysilicon columns 6 in the height and length directions (since the locking block 41 exerts a pressing action on the plurality of polysilicon columns 6, the plurality of polysilicon columns 6 are also positioned in the length direction to a certain extent), thereby effectively guaranteeing the cutting stability of the plurality of polysilicon columns 6, and the locking block 41 also indirectly exerts a pressing action on the plurality of limiting plates 3 to prevent the plurality of limiting plates 3 and the base 1 from relatively sliding during cutting, thereby effectively guaranteeing the cutting accuracy of the plurality of polysilicon columns 6; the number of the locking block 41 can be one, in which case the locking block 41 needs to be detachably connected with one of the positioning blocks 2, or the number of the locking block 41 can be two, in which case the two locking blocks 41 are detachably connected with the two positioning blocks 2.
[0032] Further, as shown in FIG. 4, the base 1 further comprises a plurality of positioning blocks 2 and a plurality of limiting plates 3. Figs. 1-2 Further, the base 1 further comprises a plurality of positioning blocks 2 and a plurality of limiting plates 3.
[0033] Further, as shown in FIG. 4, the base 1 further comprises a plurality of positioning blocks 2 and a plurality of limiting plates 3. Figs. 1-2Further, two guide rods 51 are arranged on two sides of the base 1 respectively, the guide rod 51 is connected between the two positioning blocks 2, and the limiting plate 3 and the guide rod 51 are slidingly connected. Specifically, the guide rod 51 facilitates the guiding effect on the limiting plate 3, and facilitates to ensure that the sliding stability of the limiting plate 3 along the base 1 is good.
[0034] Further, as shown in Fig. 1, Figs. 1-2 A rough part 52 is arranged on the guide rod 51, and the rough part 52 and the limiting plate 3 are slidingly connected. Specifically, the rough part 52 facilitates to increase the friction between the limiting plate 3 and the guide rod 51, so that the limiting plate 3 is not easy to slide accidentally after being placed at the target position due to external force, thereby facilitating to ensure the cutting accuracy of the plurality of polysilicon columns 6.
[0035] Further, as shown in Fig. 1, Figs. 1-2 The two guide rods 51 are arranged in axial symmetry with respect to the base 1. Specifically, the axial symmetry facilitates the force symmetry of the plurality of limiting plates 3 to be good.
[0036] Further, as shown in Fig. 1, Figs. 1-2 The shapes of the positioning groove 21 and the limiting groove 31 are the same. Specifically, the same shape facilitates the consistency of the constraint of the plurality of polysilicon columns 6 by the positioning groove 21 and the limiting groove 31 to be good, and the specific shape of the positioning groove 21 and the limiting groove 31 is not limited, and can be determined according to the cross-sectional shape of the polysilicon column 6, which can be rectangular, circular, etc.
[0037] Further, as shown in Fig. 1, Figs. 1-2 The two positioning blocks 2 are arranged in axial symmetry with respect to the base 1. Specifically, the axial symmetry facilitates the force symmetry of the plurality of polysilicon columns 6 to be good.
[0038] Further, as shown in Fig. 1, Figs. 1-2 Further, a plurality of buffer rings corresponding to the plurality of positioning grooves 21 are arranged. Specifically, the buffer ring is used to contact the polysilicon column 6, reduce the knocking of the polysilicon column 6, and has a certain protection effect on the polysilicon column 6, and the material of the buffer ring can be polyurethane, etc.
[0039] The above embodiments only express several implementation manners of the present application, and the description is more specific and detailed, but it cannot be understood as the limitation of the patent scope of the present application. It should be pointed out that for ordinary skilled persons in the art, without departing from the concept of the present application, a plurality of modifications and improvements can be made, which all belong to the protection scope of the present application. Therefore, the protection scope of the present application patent should be subject to the appended claims.
Claims
1. A polysilicon pillar dicing jig, characterized by, The base (1) is provided with two positioning blocks (2) connected to the two ends of the base (1) respectively, and a plurality of positioning grooves (21) are arranged on the positioning blocks (2). A plurality of limiting plates (3) are slidably connected with the base (1), and the limiting plates (3) are provided with a plurality of limiting grooves (31) and an avoiding groove (32) in communication with each other. The plurality of limiting grooves (31) and the plurality of positioning grooves (21) are in communication. A locking block (41) is detachably connected with at least one of the positioning blocks (2), and the locking block (41) covers a plurality of the positioning grooves (21).
2. The polysilicon pillar cutting jig of claim 1, wherein, A plurality of bolts (42) are arranged between the positioning blocks (2) and the locking block (41) for detachable connection.
3. The polysilicon pillar cutting jig of claim 2, wherein, Two guide rods (51) are arranged on the two sides of the base (1) respectively, and the guide rods (51) are connected between the two positioning blocks (2), and the limiting plates (3) and the guide rods (51) are slidably connected.
4. The polysilicon pillar dicing gauge of any one of claims 1-3, wherein, A rough part (52) is arranged on the guide rod (51), and the rough part (52) and the limiting plate (3) are slidably connected.
5. The polysilicon pillar cutting jig of claim 4, wherein, The two guide rods (51) are arranged in axial symmetry with respect to the base (1).
6. The polysilicon pillar cutting jig of claim 4, wherein, The shapes of the positioning grooves (21) and the limiting grooves (31) are the same.
7. The polysilicon pillar dicing gauge of any one of claims 1-3, wherein, The two positioning blocks (2) are arranged in axial symmetry with respect to the base (1).
8. The polysilicon pillar dicing gauge of any one of claims 1-3, wherein, A plurality of buffer rings are arranged in the plurality of positioning grooves (21) correspondingly.
9. The polysilicon pillar dicing gauge of any one of claims 1-3, wherein,